JP2007149883A - Method and device for manufacturing sheet laminated body - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sheet laminated body manufacturing method for efficiently manufacturing a sheet laminated body in a short period of time while highly precisely positioning each sheet, and a sheet laminated body manufacturing device that achieves such efficient manufacturing of a sheet laminated body. <P>SOLUTION: The sheet laminated body manufacturing device 41 is composed by arranging a carrying-in station 2 for carrying in sheets one by one, a temporary bonding station 3 for temporarily bonding a transferred sheet to a preceding sheet by lamination, a lamination station 4, which executes thermocompression bonding to a temporarily-bonded laminated sheet while heating and pressurizing it, and a carrying-out station 5 for carrying out a thermocompression-bonded sheet laminated body in a row and in turn. A camera for recognizing alignment marks and a heating iron for temporarily bonding a positioned sheet are built in a suction plate below an alignment device 12 installed in the temporary bonding station 3. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a manufacturing method for manufacturing a multilayer electronic component formed by stacking ceramic green sheets such as a multilayer chip capacitor and a multilayer chip inductor, and a manufacturing apparatus used in the manufacturing method.

  A multilayer ceramic capacitor, which is the most typical example of a multilayer electronic component, is a sheet laminate obtained by laminating green sheets on which an internal electrode pattern is printed, with the internal electrodes exposed on the end faces. It is manufactured by firing after cutting into chips. In the production of such a multilayer ceramic capacitor, when the green sheets on which the internal electrodes are printed are laminated, if the position of the printed internal electrodes is shifted, the capacitance obtained in the multilayer ceramic capacitor will vary. End up. Therefore, as a method to prevent misalignment when laminating green sheets, conventionally, a positioning hole was drilled in the green sheet drilling process, printing was performed based on the positioning hole, and a pin was inserted into the positioning hole. However, the method of laminating each green sheet, or the position of the alignment mark previously attached to the green sheet by the alignment mark recognition device as in Patent Document 1, and operating the alignment device based on the position information A method of positioning each green sheet has been adopted.

Japanese Patent Laid-Open No. 03-142910

  However, the method of laminating each sheet while inserting a pin into the positioning hole drilled in the green sheet causes a displacement between the positioning hole and the printing position, or the positioning hole must be made somewhat larger than the pin. Positioning with high accuracy cannot be performed. On the other hand, in the method of positioning each sheet using the alignment mark recognition device and the alignment device, it is necessary to perform a plurality of operations such as alignment mark recognition, alignment operation, and green sheet stacking in the same stacking device. Therefore, the sheet laminate cannot be formed within a short time, and the laminating apparatus becomes complicated, so that there is a problem that maintenance becomes difficult.

  An object of the present invention is to solve the problems of the conventional sheet laminate manufacturing method, position each sheet with high accuracy, and efficiently form a sheet laminate in a short time. An object of the present invention is to provide a method for producing a possible sheet laminate. Moreover, it is providing the manufacturing apparatus of a sheet laminated body which enables manufacture of such an efficient sheet laminated body.

  Among the present inventions, the structure of the invention described in claim 1 is a method of manufacturing a sheet laminate formed by laminating a plurality of ceramic sheets, the sheet being transported to a temporary joining station, and the temporary joining station The position of the alignment mark of the sheet is recognized and the sheet is positioned based on the position information. After that, the next sheet is conveyed to the temporary joining station, and the sheet is positioned at the temporary joining station. And then temporarily heating the partially bonded sheet to the laminating station, heating and pressing the temporarily bonded sheet at the laminating station, and thermocompression bonding at the laminating station. While the sheet is thermocompression bonded, the next sheet is positioned at the temporary bonding station, and then the positioned sheet is moved first. Lamination and partial heating are applied to the laminated sheets and then temporarily bonded, then the temporarily bonded sheets are transported to the laminating station and thermocompression bonded. Thereafter, these operations are repeated, and a plurality of sheets are thermocompression bonded. Thus, a sheet laminate that is integrally laminated is manufactured.

  According to a second aspect of the present invention, there is provided a method for manufacturing a sheet laminate formed by laminating a plurality of ceramic sheets, wherein the sheet is conveyed to a temporary joining station, and the alignment mark position of the sheet is obtained at the temporary joining station. Is recognized, and the sheet is positioned based on the positional information. After that, the next sheet is conveyed to the temporary bonding station, and after the sheet is positioned at the temporary bonding station, the sheet is stacked and partially laminated on the previously positioned sheet. And then temporarily bonding these sheets, temporarily bonding a plurality of sheets, then transporting the temporarily bonded sheets to the laminating station, and then temporarily bonding the plurality of sheets in the laminating station While the sheet is heated and pressed, it is thermocompression-bonded. A laminated sheet in which the positioned sheet is laminated on a plurality of previously heat-pressed sheets and partially heated and temporarily joined, and this operation is repeated to heat-press the plurality of sheets. Is to manufacture.

  The configuration of the invention described in claim 3 is a manufacturing method of a sheet laminate formed by laminating a plurality of ceramic sheets, sequentially transporting a plurality of sheets to a temporary joining station, After positioning the sheet based on the alignment mark position information of the sheet, the positioned sheet is laminated on the previously positioned and temporarily bonded sheet and partially heated to temporarily bond, and thereafter these operations are performed. Repeatedly temporarily joining a plurality of sheets, then transporting the plurality of temporarily joined sheets to the laminating station, heating and pressurizing and pressing the plurality of temporarily joined sheets in the laminating station, The object is to produce a sheet laminate in which a plurality of sheets are laminated by thermocompression bonding.

  According to a fourth aspect of the present invention, there is provided the invention according to any one of the first to third aspects, wherein the lower surface of the sheet is conveyed to the temporary bonding station while being sucked and held, and the upper surface of the sheet is transferred at the temporary bonding station. After the sheet is positioned in a state where the sheet is held by suction, the positioned sheet is first positioned and the lower surface is laminated on the upper side of the sheet held by suction and partially heated, and then temporarily bonded. The sheet is conveyed to the laminating station while the lower surface of the sheet is sucked and held, and the temporarily bonded sheet is heated and pressed from the upper and lower sides at the laminating station.

  According to a fifth aspect of the present invention, in the invention according to any one of the first to fourth aspects, the sheet is a sheet with a film, and the sheet with the film is transferred from the sheet to the temporary joining station before being transported to the temporary joining station. Is to position the sheet in a state where the film is peeled off at a temporary joining station.

  According to a sixth aspect of the present invention, there is provided a sheet laminate manufacturing apparatus configured by laminating a plurality of ceramic sheets, wherein a carry-in station for carrying sheets one by one and a conveyed sheet are laminated. A temporary joining station that temporarily joins the preceding sheet, a lamination station that heats and presses and temporarily presses the temporarily joined laminated sheet, and a carry-out station that carries out the thermo-compressed sheet laminate, A first conveying device that can move back and forth between the carry-in station and the temporary joining station with a first lifting table that can hold the suction, and a second lifting table that can hold the lower surface of the sheet by sucking and holding the temporary joining station and the stacking station. The stacking station and unloading station can be moved back and forth with a second transfer device that can move back and forth and holding means that can hold the sheet. A third conveying device capable of positioning the sheet on the basis of the alignment mark position information of the sheet while the upper surface of the sheet is sucked and held at the temporary joining station and the position of the positioned sheet on the second lifting table A temporary joining device that can be temporarily joined with an electric heating iron is provided on the upper surface of the sheet, and a heating device that can heat the laminated sheet on the second lifting table temporarily joined to the laminating station is provided, and the laminated sheet is placed on the upper side. A press device capable of pressurization is provided.

  According to a seventh aspect of the present invention, in the sixth aspect of the present invention, the carry-in station, the temporary joining station, and the stacking station are sequentially arranged in a line, and the first lifting table is placed in the first transport device. The first guide rail capable of reciprocating guidance is provided at the temporary joining station, the second lifting table is provided at the second transport device, and the second guide rail capable of reciprocating guidance is provided between the temporary joining station and the laminating station. The two guide rails consist of a common linear guide rail.

  According to an eighth aspect of the present invention, in the sixth aspect of the present invention, a support member fixedly supported by the temporary joining station is provided, and the alignment device has an X in a horizontal plane with respect to the support member. Alignment table provided so as to be movable in the direction, Y direction and turning direction, suction plate provided on the alignment table so that the upper surface of the sheet can be sucked and held, and alignment mark of the sheet through the alignment table and the suction plate through-hole A camera provided so that the position can be adjusted so as to recognize the position, and a control device provided on the support member so as to move the alignment table in the X direction, the Y direction, and the turning direction based on the alignment mark position information from the camera. In the temporary joining device, the support member is raised toward the hole opening through the alignment table and the through hole of the suction plate. Capable in by comprising a heating iron provided.

  According to a ninth aspect of the present invention, in the invention of the sixth aspect, a support member fixedly supported by the laminating station is provided, and the piston rod faces the support member downward with respect to the support member. A fixed hydraulic cylinder, a lifting body supported by a support member so as to be movable up and down and connected to a piston rod, an upper mold fixed to the lifting body and incorporating a heater, and a lifting body A suction case that can be raised and lowered to surround the entire circumference of the side of the upper die and the upper die, and a vacuum device that can suck air from the internal space of the suction case. The suction case comes into contact with the second lifting table to stop the lowering and closes the inside of the suction case in an airtight manner.

  The invention of claim 1 conveys a sheet to a temporary joining station, recognizes the alignment mark position of the sheet at the temporary joining station, positions the sheet based on the positional information, and then puts the next sheet into the temporary joining station. After transporting and positioning the sheet at the temporary bonding station, the sheet is stacked on the previously positioned sheet and partially heated to temporarily bond, and then the temporarily bonded sheet is transported to the stacking station. Since it is characterized by heating and pressurizing and press-bonding the temporarily bonded sheet, the sheet can be accurately positioned and laminated and can be laminated integrally while maintaining its positional relationship. The lamination accuracy can be made high, and the quality of the sheet laminate can be increased. In addition, while the sheet is thermocompression bonded at the laminating station, the next sheet is positioned at the temporary joining station, and the positioned sheet is laminated on the previously thermocompressed sheet and partially heated to be temporarily joined. Then, the temporarily bonded sheet is transported to the laminating station and subjected to thermocompression bonding. Therefore, the sheet is positioned (aligned) and temporarily bonded, and the sheet is pressed and thermocompression bonded. Can be processed simultaneously in parallel, and the tact time for manufacturing the sheet laminate can be shortened to increase productivity.

  The invention according to claim 2 conveys the sheet to the temporary joining station, recognizes the alignment mark position of the sheet at the temporary joining station, positions the sheet based on the positional information, and then moves the next sheet to the temporary joining station. After transporting and positioning the sheet at the temporary bonding station, the sheet is laminated on the previously positioned sheet and partially heated to temporarily bond, and thereafter, these operations are repeated to temporarily bond a plurality of sheets. In addition, a plurality of temporarily bonded sheets are transported to a laminating station, and the plurality of temporarily bonded sheets are heated and pressurized in the laminating station, and are thermocompression-bonded. Can be positioned and stacked together, and can be integrally joined while maintaining the positional relationship, and the stacking accuracy of the sheet stack can be increased. In addition, while the sheet is thermocompression bonded at the laminating station, the next sheet is positioned at the temporary joining station, and the positioned sheet is laminated on the plurality of previously thermocompressed sheets and partially heated. Temporarily bonding, repeating this operation, temporarily bonding a plurality of sheets to the thermocompression-bonded sheet, and thereafter repeating these operations to thermally laminate the plurality of sheets and integrally stacking the sheet laminate Since it is characterized by manufacturing, the alignment operation and provisional joining of multiple sheets and the pressing and thermocompression pressing operations of multiple sheets can be processed simultaneously in parallel, reducing the tact time of sheet laminate manufacturing. It can be shortened and productivity can be increased.

  The invention according to claim 3 sequentially conveys a plurality of sheets to the temporary joining station, and after positioning the sheet based on the alignment mark position information of the sheet at the temporary joining station, the positioned sheet is first positioned. Laminate and temporarily heat and partially bond to the temporarily bonded sheets, then repeat these operations to temporarily bond multiple sheets, and then transport the temporarily bonded sheets to the stacking station And heating and pressurizing and press-bonding a plurality of temporarily joined sheets at a laminating station to produce a sheet-laminated laminate integrally laminated by thermo-compressing the plurality of sheets. Therefore, it is possible to accurately position and stack a plurality of sheets and to integrally bond them while maintaining the positional relationship, thereby increasing the stacking accuracy of the sheet stack. In addition, a plurality of temporarily bonded sheets are transported to a laminating station, and at the laminating station, a plurality of temporarily bonded sheets are heated and pressed to produce a sheet laminate by thermocompression bonding. Therefore, it is possible to simultaneously perform the temporary joining operation of a plurality of sheets and the pressing operation of a plurality of sheets, and it is possible to shorten the tact time of manufacturing the sheet laminate and increase the productivity. .

  According to invention of Claim 4, the sheet | seat positioned on the upper surface of the sheet | seat of a position holding state can be laminated | stacked efficiently, can be temporarily joined correctly, and a sheet | seat laminated body can be manufactured efficiently.

  According to invention of Claim 5, even if it is a sheet | seat with a film, the film can be peeled, a several sheet | seat can be correctly positioned and temporarily joined, and the lamination | stacking precision of a sheet laminated body can be made high.

  According to invention of Claim 6, after conveying and positioning a sheet | seat to a temporary joining station, it laminates | stacks on the sheet | seat positioned previously, and it heats partially, and temporarily joins, or laminates | stacks the temporarily joined sheet | seat. It can be conveyed to a station, heated and pressurized, and thermocompression bonded, and a sheet laminate in which a plurality of sheets are integrally laminated can be mechanically manufactured.

  According to the invention of claim 7, the sheet can be carried in and out with high efficiency by a simple mechanism to the temporary joining station and the laminating station.

  According to the invention of claim 8, after the upper surface of the sheet conveyed to the temporary bonding station is sucked and accurately positioned, the sheet can be easily temporarily bonded to another sheet conveyed downward, and a plurality of sheets Can be temporarily joined efficiently with a simple mechanism.

  According to the invention of claim 9, a plurality of laminated sheets conveyed to the laminating station can be thermocompression-bonded by heating and pressurizing in a vacuum region lower than the atmospheric pressure. Air bubbles can be prevented from remaining between the sheets of the sheets, and the manufacturing efficiency of the sheet laminate can be improved.

  Hereinafter, an embodiment of a sheet laminate manufacturing apparatus and a sheet laminate manufacturing method according to the present invention will be described in detail with reference to the drawings.

  1 and 2 show a sheet laminate manufacturing apparatus. A sheet laminate manufacturing apparatus (hereinafter simply referred to as a stacking apparatus) 41 includes a loading station 2 for loading sheets one by one. A temporary joining station 3 for laminating the transported sheets and temporarily joining them to the preceding sheet; a laminating station 4 for heating and pressurizing and temporarily pressing the temporarily joined laminated sheets; An unloading station 5 for unloading the sheet stack is arranged in a line in order.

  Further, on the support plate 42 of the laminating apparatus 41, the first transporting apparatus 6 capable of reciprocating between the carry-in station 2 and the temporary joining station 3 and the reciprocating movement between the temporary joining station 3 and the laminating station 4 are possible. A second transport device 7 and a third transport device 8 capable of reciprocating between the stacking station 4 and the unloading station 5 are provided. FIG. 3 shows the first transport device 6 and the second transport device 7, and the first transport device 6 has a first surface capable of adsorbing and holding the lower surface of a ceramic green sheet (hereinafter simply referred to as a sheet) 1. A lift table 9 is provided, and the second transport device 7 is similarly provided with a second lift table 10 that can hold the lower surface of the sheet by suction. On the other hand, the third conveying device 8 is provided with holding means 11 for holding the corners of the sheet and carrying out the sheet from the carry-out station 5 to the outside.

  The first transport device 6 and the second transport device 7 described above include a pair of guide rails 17 that are linearly arranged in parallel, and carts 6A and 7A that are slidably mounted on the guide rails 17; The first transfer device 6 and the second transfer device 7 are supported by a pair of support plates 18A and 19A fixed to the support plate 42 below the first transfer device 6 and arranged parallel to the guide rail 17, respectively. , Screw shafts 18 and 19 screwed to the carriages 6A and 7A of the second transfer device 7, and servo motors 18B and 19B fixedly arranged on the support plate 42 and connected to the ends of the screw shafts 18 and 19, respectively. And. A cart 6A of the first transport device 6 and a cart 7A of the second transport device 7 include a pair of front and rear lifting cylinders 9A, 10A and a first lifting table for lifting the first lifting table 9 and the second lifting table 10, respectively. 9 and a guide means (not shown) for guiding the raising and lowering of the second lifting table 10 are attached. Further, a pair of front and rear positioning cylinders 9B and 9C (described in FIG. 2) for positioning a sheet placed on the first lifting table 9 are attached to the first lifting table 9 of the first transport device 6. ing. One positioning cylinder 9B is for moving a stopper for positioning the sheet back and forth, and the other positioning cylinder 9C is for pushing the sheet so as to contact the stopper. In addition, when using a sheet attached to a frame such as a metal frame, the first elevating table 9 and the second elevating table 10 are provided with four frame elevating cylinders (not shown) for raising and lowering the four corners such as the metal frame. (Omitted) is built in, and when a sheet is transferred to a suction plate of an alignment table, which will be described later, a metal frame or the like is pushed up to be reliably transferred to the suction plate. On the support plate 42, a positioning sensor 60 for stopping the carriage 7A of the second transport device 7 at an accurate position at the temporary joining station 3 is provided. A portion of the guide rail 17 on the screw shaft 18 side functions as a first guide rail 20 for reciprocally guiding the first lifting table 9 to the carry-in station 2 and the temporary joining station 3, and a portion on the screw shaft 19 side. However, the second elevating table 10 functions as a second guide rail 21 for reciprocally guiding the temporary joining station 3 and the stacking station 4.

  Further, in the temporary joining station 3, four support columns 22, 22... Are erected on a support plate 42, and a support member 43 is fixed horizontally to the upper end portion of each support column 22. The support member (frame) 43 is provided with an alignment device 12 for positioning the sheet 1 based on information regarding the position of the alignment mark previously attached to the sheet 1. 4 and 5 show an installation site of the alignment device 12. The alignment device 12 includes a hollow mounting substrate 12A fixed to the lower surface of the support member 43, and a horizontal plane below the mounting substrate 12A. The alignment table 23 is mounted so as to be movable. As described in Japanese Patent Application Laid-Open No. 2000-98631, etc., the alignment table 23 is arranged in the X direction and Y direction within a horizontal plane based on a command from the control device 26 by a conventionally known mechanism provided on the mounting substrate 12A. It is possible to move in the turning direction (θ direction). Large openings 43 </ b> C and 12 </ b> C are provided in the central portion on the upper surfaces of the support member 43 and the mounting substrate 12 </ b> A.

  Further, the alignment table 23 includes a large opening 23A at the center portion, and a suction holding plate 24 for sucking and holding the upper surface of the sheet is provided on the lower surface of the alignment table 23 so as to close the opening 23A. A substantially rectangular suction plate 24A made of a porous material that can be sucked is fixed to the suction holding plate 24 so as to be flush with a position excluding a part of the edge of the region that sucks the sheet on the lower surface thereof, A suction chamber 24B is provided inside the suction plate 24A, and a plurality of suction tubes 24C for performing vacuum suction and vacuum breakage of the suction chamber 24B are connected to the upper surface of the suction holding plate 24. . In addition, in order to use a sheet attached to a plurality of metal frames, magnets 24 </ b> D capable of attracting the metal frames are embedded in the suction holding plate 24 at a plurality of locations on the side of the region where the sheets are sucked. In addition, a plurality of pin cylinders 24E for detaching the metal frame attracted by the magnets are disposed downward. Further, the suction holding plate 24 has four through holes 36, 36,... And four through holes 26, 26,. -And are drilled. In each through hole 36, cameras (CCD cameras) 25, 25... For recognizing alignment marks attached to the sheet 1 are respectively supported by a support bracket 25 A attached to the upper surface of the support member 43. By being supported, it is installed so that the position can be adjusted.

  In addition, a temporary joining device 13 capable of temporarily joining the positioned sheet 1 to the upper surface of the previously positioned sheet is provided above the alignment table 23. And in the temporary joining apparatus 13, the four electric heating irons 14, 14, ... as temporary joining means are provided in the support bracket 13A attached to the upper surface of the support member 43 so that raising / lowering is possible downward. The electric heating irons 14, 14... Can enter and exit from the hole openings 27 through the openings 23 A of the alignment table 23 and the through holes 26, 26.

  On the other hand, in the laminating station 4, four columns 28, 28... Are erected on the substrate 42, and a support member (frame) 28 </ b> A is fixed to the upper end portion of each column 28. The supporting member 28A is provided with a pressing device 16 that includes a heating device 15 that can heat the laminated sheet on the temporarily lifted second elevating table 9 and that can press the heated laminated sheet from above. ing.

  FIG. 6 shows an installation site of the heating device 15 and the press device 16. The press device 16 includes a hydraulic cylinder 29 fixed to the upper surface of the support member 28A with the piston rod 30 facing downward, and the support member 28A. A pair of guide rods 31A guided by a pair of guide bushes 28B, 28B fixed to the upper and lower ends of the guide rod 31A, and a lift body fixed to the lower end of the guide rod 31A and connected to the piston rod 30 of the hydraulic cylinder 29. 31 is provided. And the upper mold | type 33 incorporating the heater 32 is being fixed to the raising / lowering body 31 via the support body 33A.

  A pair of guide bushes 31B for guiding a pair of left and right lifting rods 34A is fixed to the lifting body 31, and a suction case 34 is provided at the lower end of the lifting rod 34A. The entire circumference of the side and the upper part of the upper mold 33 are surrounded. A fitting hole 34B provided in the upper wall of the suction case 34 is fitted to the support 33A of the upper die 33 so as to be airtightly slidable up and down, and the lowering of the suction case 34 is prevented by a stopper (not shown). Further, the suction case 34 is connected to a vacuum device 35 installed on the lower side of the substrate 42 by a tube 35A, so that air can be sucked from the inside to be evacuated or broken. ing. When the elevating body 31 is lowered, the suction case 34 comes into contact with the second elevating table 9 in the middle of the lowering, and the lowering of the suction case 34 is stopped and hermetically sealed, so that the inside of the suction case 34 is removed. It is designed to be kept in a state of concern. The third transfer device 8 includes a third guide rail 44 and a rodless cylinder 44A that are pneumatically arranged on the sides of the laminating station 4 and are guided by the third guide rail 44 to be rodless. A holding body 11 is provided on a moving body 44B horizontally moved by a cylinder 44A so as to protrude above the second transfer device 7 of the stacking station 4 while being moved to the stacking station 4. The holding unit 11 includes an adsorption unit that can adsorb the upper surface of the thermocompression-bonded sheet laminate by air suction. In addition, the holding means 11 is used for the left and right edge portions of the metal frame and the like slightly raised by the frame elevating cylinder provided on the second elevating table 10 in order to use a sheet attached to the metal frame or the like. A locking member that can be projected and lowered is provided, and the left and right edges of the metal frame and the like are lifted and conveyed.

  Hereinafter, an example of the manufacturing method of the sheet | seat laminated body using the lamination apparatus 41 comprised as mentioned above is demonstrated. In the following description, a sheet lamination in which a necessary number of sheets (for example, 40 sheets) are finally laminated by repeating a series of operations of sheet positioning → temporary bonding → thermocompression bonding for each sheet. It is about the method of manufacturing a body.

  The sheet 1 is cut into a rectangle having a predetermined size, and a material film (for example, an internal electrode) constituting an electrical element with a predetermined pattern is formed in advance by printing or the like. In addition, alignment marks for positioning are printed at the four corners of the sheet 1. The sheet 1 is transported to the carry-in station 2 and placed on the first lifting table 9 on the first transport device 6. When the seat 1 is placed on the first lifting table 9, the positioning cylinders 9B and 9C are actuated to position the seat 1, and then a suction hole (not shown) provided on the outer periphery of the first lifting table 9 is shown. The lower surface of the sheet 1 is fixed on the first lifting table 9 by suction. And after the sheet | seat 1 is mounted on the 1st raising / lowering table 9, the 1st conveying apparatus 6 is conveyed to the temporary joining station 3 along the 1st guide rail 20 (slides to the right side in FIG. 1). . Note that the movement position of the carriage 6 </ b> A of the first transport device 6 is regulated by the rotation of the screw shaft 18.

  As described above, when the first conveying device 6 holding the sheet 1 by suction is slid and conveyed to the temporary joining station 3, the elevating cylinder 9A is actuated to raise the first elevating table 9, and the lower end of the alignment device 12 is moved. The sheet 1 comes into contact with the suction plate 24A provided on the sheet 1 (that is, the sheet 1 is lightly pressed by the first lifting table 9 and the suction plate 24A). When the sheet 1 comes into contact with the suction plate 24A in this manner, suction is performed from the entire lower surface of the suction plate 24A, whereby the upper surface of the sheet 1 is fixed to the suction plate 24A. At the same time, the first lifting table 9 stops the suction of the sheet 1, whereby the sheet 1 is transferred from the first lifting table 9 to the suction plate 24 </ b> A. When the sheet 1 is delivered to the suction plate 24A, the first elevating table 9 starts to descend to the lowest position, and at the same time, the first transport device 6 moves along the first guide rail 20 to the carry-in station 2 (see FIG. Slide to the left in 1).

  When the sheet 1 is transferred to the suction plate 24A, the four cameras 25, 25,... Built in the suction plate 24 recognize the alignment marks attached to the sheet 1. Then, based on the position information of the alignment mark, the alignment table 23 is moved in the X direction, the Y direction, and the turning direction (θ direction) according to a command from the control device 26, whereby the sheet 1 together with the suction plate 24A has a predetermined value. Positioned.

  On the other hand, while the sheet 1 is positioned as described above, the second transport device 7 moves along the second guide rail 21 to the temporary joining station 3 and is stopped at an accurate position by the positioning sensor 60 (FIG. Slide to the left in 1). The movement of the second transport device 7 is restricted by the rotation of the screw shaft 19. When the second transport device 7 is transported to the temporary joining station 3, the second lifting table 10 is lifted and comes into contact with the suction plate 24 </ b> A at the lower end of the alignment device 12 via the sheet 1 (that is, the sheet). 1 is lightly pressed by the second lifting table 10 and the suction plate 24A). When the sheet 1 comes into contact with the second elevating table 10 in this way, suction is performed from a suction hole (not shown) provided at the outer periphery of the second elevating table 10, so that the lower surface of the sheet 1 is second. Fixed to the lifting table 10. At the same time, the suction plate 24 </ b> A stops the suction of the sheet 1, whereby the sheet 1 is transferred from the suction plate 24 </ b> A to the second lifting table 10. Since the sheet 1 is positioned on the suction plate 24A as described above, the sheet 1 is delivered to the second lifting table 10 while maintaining the positioned state. When the sheet 1 is transferred to the second elevating table 10, the second elevating table 10 is lowered toward the lowest position, and the second conveying device 7 is moved along the second guide rail 21 to the stacking station 4. .

  As described above, while the first sheet 1 is positioned and transferred to the second elevating table 10, the second sheet (sheet cut into a rectangle of a predetermined size) 1 is provided. , Transported to the carry-in station 2, placed on the first lifting table 9 on the first transport device 6, positioned and sucked and fixed in the same manner as the first sheet 1, and the second transport device 7 Is transferred to the temporary bonding station 3 after starting to move from the temporary bonding station 3 to the laminating station 4. Then, it is transferred to the suction plate 24A and positioned by the same method as that for the first sheet 1.

  As described above, while the second sheet 1 is being positioned, the second conveying device 7 that sucks and fixes the first sheet 1 again moves along the second guide rail 21 to the temporary joining station 3. Move (slide to the left in FIG. 1). Then, when the second transport device 7 moves to the temporary joining station and stops positioning, the second lifting table 10 is lifted and sucked through the second sheet 1 and the first sheet 1. The plate 24A comes into contact (that is, the two sheets 1 and 1 are lightly pressed by the second lifting table 10 and the suction plate 24A). Further, when the two sheets 1 and 1 are lightly pressed by the second elevating table 10 and the suction plate 24A, the four electric heating irons 14, 14,. Then, the two sheets 1 and 1 are temporarily joined (heat-sealed) at predetermined positions (at the four corners). Since the two sheets 1 and 1 are both positioned on the suction plate 24A as described above, they are temporarily joined while maintaining the positioned state.

  When the two sheets 1 and 1 are temporarily joined in this manner, suction is performed from a suction hole (not shown) of the second lifting table 10 so that the lower surface of the first sheet 1 is lifted and lowered by the second. At the same time as being fixed to the table 10, the suction plate 24 </ b> A stops sucking the second sheet 1, whereby the temporarily joined sheets 1, 1 are transferred from the suction plate 24 </ b> A to the second lifting table 10. . As described above, since the two sheets 1 and 1 are temporarily joined in a positioned state, they are delivered to the second lifting table 10 while maintaining the positioned state.

  Then, when the two sheets 1 and 1 are positioned and delivered to the second elevating table 10, the second elevating table 10 starts to descend to the lowest position, and at the same time the second transport device 7 It moves to the lamination station 4 along the guide rail 21 (slides to the right side in FIG. 1). When the second transport device 7 is transported to the stacking station 4, the operation of the hydraulic cylinder 29 of the press device 16 lowers the elevating body 31 provided with the upper mold 33 and the suction case 34 heated by the heater 32. Then, when the square peripheral edge at the lower end of the suction case 34 comes into contact with the upper surface of the second lifting table 10, the inside of the suction case 34 is shut off from the outside. In order to increase the airtightness in the suction case 34, it is preferable to attach a sealing material to the lower end of the suction case 34. Further, in this state, the air in the suction case 34 is sucked by the vacuum device 35. Further, when the elevating body 31 is lowered as described above, the elevating body 31 is further lowered even after the suction case 34 comes into contact with the second elevating table 10, so that the upper mold 33 heated by the heater 32 becomes. It descends and comes into contact with the second lift table 10 (contacts via the two sheets 1 and 1 after temporary joining that are suction-fixed on the second lift table 10). Thereafter, by applying a predetermined pressure, the two sheets (sheets after provisional bonding) 1 and 1 are thermocompression bonded (thermocompression bonding is performed while maintaining the positioned state). When the two sheets 1 and 1 are thermocompression-bonded, the suction case 34 and the upper mold 33 are raised to the uppermost position after the suction case 34 is filled with air and broken in vacuum.

  On the other hand, while the first sheet and the second sheet are thermocompression-bonded as described above, the third sheet (sheet cut into a rectangle of a predetermined size) 1 is loaded into the carry-in station 2. To the first elevating table 9 on the first conveying device 6 and sucked and fixed in the same manner as the first and second sheets, and then conveyed to the temporary joining station 3. Then, in the same manner as the first and second sheets 1 and 1, the sheet is transferred to the suction plate 24A, aligned, and positioned.

  In addition, while the third sheet 1 is positioned, the second conveying device 7 that sucks and fixes the first and second sheets 1 and 1 that are thermocompression bonded again follows the second guide rail 21. To the temporary joining station 3 (slide to the left in FIG. 1). And if the 2nd conveying apparatus 7 moves to the temporary joining station 3 and is positioned, the 2nd raising / lowering table 10 will raise, and the 1st, 2nd sheet | seat (thermocompression-bonded sheet | seat) 1,1,3 It contacts the suction plate 24A via the first sheet 1. Further, when the three sheets 1, 1, 1 are lightly pressed by the second lifting table 10 and the suction plate 24A, the four electric heating irons 14, 14,. Thus, the first and second sheets 1 and 1 and the third sheet 1 are temporarily joined (heat-sealed) at predetermined positions (at the four corners). Since the three sheets 1, 1, 1 are all positioned on the suction plate 24 as described above, they are temporarily joined while maintaining the positioned state.

  When the three sheets are temporarily joined in this manner, the three sheets 1, 1, 1 are transferred from the suction plate 24 </ b> A to the second lifting table 10, and the second lifting table 10 reaches the stacking station 4. Slide. Then, the three sheets (temporary bonding) are performed by the heated upper mold 33 in a state where the inside of the suction case 34 is degassed by the same process as when the first and second sheets 1 and 1 are thermocompression bonded. The three sheets 1, 1, 1 are thermocompression bonded.

  And by repeating the above-mentioned carrying-in-> positioning-> temporary joining-> thermocompression bonding a predetermined number of times, a sheet laminated body in which the necessary number of sheets 1, 1,. Thereafter, the formed sheet laminate is carried out from the lamination station 4 to the carry-out station 5 while being held by the holding means 11 provided in the third conveying device 8. In addition, the 3rd conveying apparatus 8 is guide | induced to the 3rd guide rail 44 similarly to the 1st conveying apparatus 6 and the 2nd conveying apparatus 7, and can move between the lamination station 4 and the unloading station 5. Yes.

  According to the method for manufacturing a sheet laminate as described above by the laminating apparatus 41, the sheets 1, 1... Can be accurately positioned and laminated and can be laminated integrally while maintaining the positional relationship. The sheet stacking body can be made highly accurate and the quality of the sheet laminate can be increased. Also, the operation of positioning (aligning) the sheets 1, 1... And temporarily joining them and the press operation of pressing and thermocompression of the sheets can be performed simultaneously and in parallel, thereby reducing the tact time of sheet laminate manufacturing. Is extremely productive.

  Further, the laminating apparatus 41 transports and positions the sheet 1 to the temporary bonding station 3, and then stacks the sheet 1 on the previously positioned sheet 1 and partially heats and temporarily bonds the sheet 1 or temporarily bonded sheet 1. Can be conveyed to the laminating station 4 and heated and pressed and thermocompression bonded, so that a sheet laminated body in which a plurality of sheets 1, 1.

  In addition, the manufacturing method of the sheet laminated body of this invention and the structure of the lamination apparatus of a sheet laminated body are not limited to the aspect of the said embodiment at all, A carrying-in station, a temporary joining station, a laminating station, a carrying-out station, Configurations such as shapes, structures, etc. of the first transport device, second transport device, third transport device, alignment device, temporary joining device, heating device, press device, first guide rail, second guide rail, third guide rail, etc. Can be appropriately changed as necessary without departing from the spirit of the present invention.

  For example, in the method for laminating sheets according to the present invention, as described above, a sheet laminate in which a necessary number of sheets are finally laminated is formed by repeating positioning → temporary bonding → thermocompression for each sheet. It is not limited to the method, and after forming a sheet laminated body (predetermined number of laminated bodies) by repeating positioning → temporary joining one by one until a predetermined number of sheets (for example, 10) is reached, the sheet laminated bodies It is also possible to change to a method of forming a sheet laminated body in which the necessary number of sheets are finally laminated by repeating the sheet pressing, temporary positioning and temporary bonding and thermocompression bonding. Even when such a laminating method is adopted, a plurality of sheets can be accurately positioned and laminated as well as the laminating method as in the above embodiment, and can be integrally joined while maintaining the positional relationship. The body stacking accuracy can be increased. In addition, the alignment operation and provisional bonding of multiple sheets and the press operation of pressurization and thermocompression bonding of multiple sheets can be processed simultaneously in parallel, and the tact time of sheet laminate manufacturing can be shortened. Productivity can be increased.

  In addition, the method for laminating sheets of the present invention is to repeat the positioning → temporary bonding one by one until finally reaching the required number of sheets, and finally form a sheet laminate in which the required number of sheets is laminated, It is also possible to change to a lamination method in which the sheet laminate is thermocompression bonded. Even when such a laminating method is adopted, a plurality of sheets can be accurately positioned and laminated as well as the laminating method as in the above embodiment, and can be integrally joined while maintaining the positional relationship. The stacking accuracy of can be increased. In addition, a plurality of sheets can be temporarily joined and a plurality of sheets can be pressed simultaneously in parallel, and the tact time for manufacturing the sheet laminate can be shortened to increase productivity. . Further, when the sheet is a sheet with a film, it is necessary to peel the film from the sheet by using a known film peeling means disclosed in Japanese Patent No. 2727739, Japanese Patent Laid-Open No. 8-244019, or the like. However, in the present invention, the film is peeled off from the sheet prior to transporting the film-attached sheet to the temporary joining station, and the sheet with the film peeled is positioned at the temporary joining station. Sheet misalignment can be prevented.

  Further, in the method for laminating sheets according to the present invention, until the sheet is carried into the temporary joining station, the sheet is covered with a protective film and left as a film-coated sheet, and the film is peeled from the sheet at the temporary joining station, It is also possible to configure the sheet in a state where the film is peeled off. When such a configuration is adopted, there is an advantage that it is possible to prevent a situation where dust adheres to the sheet and to manufacture a sheet laminate having excellent electrical characteristics.

  In addition, the stacking apparatus is not limited to the one in which four cameras for recognizing the alignment mark are installed, and it is possible to provide three or less cameras or five or more cameras. It is. Further, the means for temporary joining is not limited to the electric heating iron, and other means can be used. In addition, the number of installed electric heating irons is not limited to four, and may be three or less, or five or more.

It is explanatory drawing which shows the front of a sheet | seat laminated body manufacturing apparatus. It is explanatory drawing which shows the state which looked at the sheet | seat laminated body manufacturing apparatus from the top. It is a perspective view which shows a 1st conveying apparatus and a 2nd conveying apparatus. It is explanatory drawing which shows the state which looked at the alignment apparatus from the top. It is explanatory drawing which shows the vertical cross section of an alignment apparatus. It is explanatory drawing which shows the installation site | part of a heating apparatus and a press apparatus.

Explanation of symbols

1 .... sheet, 2 .... loading station, 3 .... temporary joining station, 4 .... stacking station, 5 .... unloading station, 6 .... first transfer device, 7 .... second transfer device, 8 .... Three conveying devices, 9 ... First lifting table, 10 ... Second lifting table, 11 ... Holding means, 12 ... Alignment device, 13 ... Temporary joining device, 14 ... Heating iron, 15 ... Heating device , 16..Pressing device, 20..First guide rail, 21..Second guide rail, 23..Alignment table, 24..Suction plate, 25..Camera, 26..Control device, 27..Hole Opening, 28A ... Frame (support member) 29 ... Hydraulic cylinder 30 ... Piston rod 31 ... Lifting body 32 ... Heater 33 ... Upper mold 34 ... Suction case 35 ... Vacuum equipment, 41 ... Lamination equipment 43 ... support member.

Claims (9)

A method for producing a sheet laminate formed by laminating a plurality of ceramic sheets,
The sheet is conveyed to the temporary bonding station, the position of the alignment mark of the sheet is recognized at the temporary bonding station, the sheet is positioned based on the position information, and then the next sheet is transferred to the temporary bonding station, where the temporary bonding station After positioning the sheet, the sheet is laminated on the previously positioned sheet and partially heated to temporarily bond, and then the temporarily bonded sheet is transported to the stacking station, and the temporarily bonded sheet is heated at the stacking station. While pressurizing and thermocompression bonding, the next sheet is positioned at the temporary joining station while the sheet is thermocompression bonded at the laminating station, and then the positioned sheet is laminated on the previously thermocompressed sheet. Partially heated and temporarily joined, then the temporarily joined sheet is transported to the laminating station and thermocompression bonded. Thereafter repeated these operations, the production method of the sheet stack, characterized in that to produce the sheet laminate that is laminated integrally with a plurality of sheets and thermo-compression bonding. A method for producing a sheet laminate formed by laminating a plurality of ceramic sheets,
The sheet is conveyed to the temporary bonding station, the position of the alignment mark of the sheet is recognized at the temporary bonding station, the sheet is positioned based on the position information, and then the next sheet is transferred to the temporary bonding station, where the temporary bonding station After positioning the sheet, it is laminated on the previously positioned sheet and partially heated to temporarily bond, and thereafter, these operations are repeated to temporarily bond a plurality of sheets, and then the temporarily bonded sheets The sheet is transported to the laminating station, and the plurality of temporarily bonded sheets are heated and pressed at the laminating station, and subjected to thermocompression bonding. The sheet is positioned, and the positioned sheet is laminated on a plurality of sheets that have been previously thermocompression bonded and partially heated to temporarily Combined method for producing a laminated sheet, characterized in that to produce the sheet stack a plurality of sheets are thermocompression Repeat this operation. A method for producing a sheet laminate formed by laminating a plurality of ceramic sheets,
A plurality of sheets are sequentially conveyed to the temporary joining station, and after the sheets are positioned based on the alignment mark position information of the sheets at the temporary joining station, the positioned sheets are first positioned and temporarily joined to the sheets. Laminate and partially heat and temporarily bond, and thereafter repeat these operations to temporarily bond a plurality of sheets, then transport the plurality of temporarily bonded sheets to the stacking station. A method for manufacturing a sheet laminate, comprising: heating a plurality of sheets in a bonded state and pressurizing and thermocompression bonding; and thermocompression bonding of the plurality of sheets to produce an integrally laminated sheet laminate . The sheet is transported to the temporary bonding station with the lower surface of the sheet held by suction, and after positioning the sheet with the upper surface of the sheet being sucked and held at the temporary bonding station, the positioned sheet is first positioned and the lower surface is sucked and held. Laminate on the upper side of the sheet, and partially heat and temporarily join, and then transport to the laminating station with the lower surface of the temporarily joined sheet sucked and held. The method for producing a sheet laminate according to any one of claims 1 to 3, wherein the sheet laminate is heated and pressed from above and below and thermocompression-bonded. The sheet is a sheet with a film, the film is peeled off from the sheet prior to transporting the film-attached sheet to the temporary joining station, and the sheet with the film peeled is positioned at the temporary joining station. The manufacturing method of the sheet | seat laminated body of any one of 1-4. An apparatus for manufacturing a sheet laminate formed by laminating a plurality of ceramic sheets,
A carry-in station for carrying the sheets one by one, a temporary joining station for laminating the transported sheets and temporarily joining them to a previous sheet, a laminating station for heating and pressurizing and temporarily pressing the temporarily joined laminated sheets, A first conveying device that includes a first elevating table that is capable of sucking and holding the lower surface of the sheet, and is capable of reciprocating between the loading station and the temporary joining station, and a lower surface of the sheet. A second transport device that can move back and forth between the temporary joining station and the stacking station with a second lifting table that can hold and hold the suction, and a third transport device that can move back and forth between the stacking station and the unloading station with holding means that can hold the sheet. With the transport device installed, the upper surface of the sheet is sucked and held at the temporary joining station. An alignment device that can position the sheet based on the position information and a temporary bonding device that can temporarily bond the positioned sheet to the upper surface of the previous sheet on the second lifting table with an electric heating iron are temporarily bonded to the stacking station. An apparatus for producing a sheet laminate, comprising a heating device capable of heating the laminated sheet on the second lifting table, and a press device capable of pressing the laminated sheet from above. The carry-in station, the temporary joining station, and the stacking station are sequentially arranged in a line, and the first transport device is provided with a first guide rail capable of reciprocating guidance between the carry-in station and the temporary joint station. The second guide rail is provided with a second guide rail capable of reciprocally guiding the second lifting table to the temporary joining station and the stacking station, and the first guide rail and the second guide rail are configured by a common linear guide rail. Sheet laminate manufacturing equipment. A support member fixedly supported at the temporary joining station is provided, and an alignment table provided on the alignment device so as to be movable in the X direction, the Y direction, and the swiveling direction in a horizontal plane with respect to the support member, and a sheet on the alignment table A suction plate provided so that the upper surface of the sheet can be sucked and held, a camera provided in a support member so that the alignment mark position of the sheet can be recognized through the alignment table and the through hole of the suction plate, and a support member from the camera. A control device is provided to move the alignment table in the X, Y, and swiveling directions based on the alignment mark position information, and the temporary joining device has a hole through the alignment table and the suction plate through-hole. The sheet laminated body according to claim 6, further comprising a heating iron provided so as to be movable up and down toward the opening. Apparatus. A support member fixedly supported by the laminating station is provided, and a hydraulic cylinder fixed to the press device with the piston rod facing downward to the support member, and a piston rod supported by the support member so as to be movable up and down. Elevating body that is connected, upper mold that is fixed to the elevating body and incorporating a heater, and can be moved up and down so as to surround the entire periphery of the upper mold and the upper mold. The suction case and a vacuum device capable of sucking air from the internal space of the suction case, and when the lifting body is lowered, the suction case comes into contact with the second lifting table halfway to stop the lowering and the inside of the suction case 7. The sheet laminate manufacturing apparatus according to claim 6, wherein the sheet laminate is closed in an airtight manner.

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