JPH0919914A - Green sheet laminating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To transfer and laminate a green sheet on a laminating jig as a guide piercing punch is protrusively held after cutting the green sheet. SOLUTION: A top force (composed of a guide piercing punch 10, an upper edge 11, a stripper plate, etc.,) of a laminated mold part 28 together with a bottom force (composed of a lower edge or the like) simultaneously cuts an outer periphery part of a green sheet on a positioning table and its guide hole, and thereafter holds the green sheet as a plurality of punches 10 are protruded. Then, a laminating jig 1 on a laminating jig table 21 transferred into the laminated mold part 28, rises. Then, after a tip of each guide pin 2 comes in contact with a tip of each punch 10, the green sheet 4 held with a plurality of punches 10 is lowered, and placed by transfer on the laminating jig 1 along a plurality of punches 10. A tapered part is provided at the tip of the guide pin 2, and the punch 10 and the guide pin 2 each changes alternately its length.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-layer ceramic substrate manufacturing apparatus using a green sheet laminating method, and more particularly, in a green sheet laminating apparatus laminated on a frame-like frame. The green sheet where the processing strain and deformation over time received between the previous steps remained as the internal stress of the sheet,
The present invention relates to a green sheet laminating apparatus which suppresses deformation caused when the sheet is separated from the frame, and precisely laminates while maintaining the dimensions.

[0002]

2. Description of the Related Art Conventionally, as a method of manufacturing a multi-layer ceramic substrate, a via hole is filled with a conductor and a plurality of green sheets printed with wiring patterns are laminated and heated and pressed. There is a sheet laminating method for manufacturing, and as a laminating apparatus in this manufacturing method, there is one described in JP-A-3-97560. In this conventional device, as described in the publication, the grease
At the same time as forming a guide hole in the sheet, cutting the outer peripheral portion, and inserting the guide hole into the guide pin erected on the bonding lower jig plate, the green sheets are sequentially laminated. It is a green sheet laminating device.

[0003]

However, in the above-mentioned laminating apparatus, the guide hole punch is pulled into the mold immediately after the guide hole and the outer peripheral portion of the green sheet are simultaneously cut by the mold. , The green surface on the mold surface
However, there is a problem that the stacking accuracy is lowered when the stack is stuck in this state because deformation occurs when it is separated from the frame described above, because the stack is only adsorbed and has an extremely small binding force in the plane direction. there were. The object of the present invention is to cut the green sheet in order to solve the above problems,
(EN) A green sheet laminating apparatus in which the guide hole punching punch is not drawn into the mold but is held by projecting, and the green sheet is transferred and laminated to the laminating jig in that state without deteriorating the laminating accuracy. It is in.

[0004]

In order to achieve the above-mentioned object, the present invention provides an upper mold having a plurality of guide hole punches, a laminated mold part having a lower mold, and a movable mold part in the laminated mold part. Thus, at least the positioning table of the green sheet which can be finely moved in the X, Y and θ directions and the stacking jig which is movable in the stacking die part and in which a plurality of guide pins are erected are provided. Equipped with a stacking jig table that can move in any direction, filling conductors in via holes and wiring patterns
Green seal attached to a frame-shaped frame that has been printed.
In a green sheet laminating apparatus for laminating sheets, the upper die of the laminating die section is cut with the lower die at the same time after cutting the outer periphery of the green sheet and the guide hole on the positioning table. , A mechanism for holding the green sheet while the plurality of guide hole punching punches are in a protruding state, and the stacking jig table is raised so that the tips of the guide pins are of the guide hole punching punches. After contacting the tip end, a mechanism for lowering the green sheet held by the plurality of guide hole punches and transferring the green sheet onto the stacking jig along the plurality of guide pins is provided. Further, a taper portion is provided at the tip of a guide pin erected on the stacking jig, and the plurality of guide hole punching punches are used as the guide hole punching punch of the first length and the taper portion from the guide hole punching punch. The guide hole punching punches of the second length shorter than the length of 2 are scattered in the upper die, and the guide pin lengths of the guide pins that come into contact with the guide hole punching punches of the first length are The length is the second length, and the length of the guide pin that comes into contact with the guide punch having the second length is the first length.

[0005]

With the above-mentioned means, the mold has the green seal.
A mechanism for simultaneously cutting the outer peripheral portion of the mold and a plurality of guide holes, and holding the green sheet with the guide hole punch of the mold protruding until it is transferred to the stacking jig on the stacking table. After the tip of each guide pin comes into contact with the tip of each punch for punching the guide holes, the green sheet held by the punches for punching the guide holes is lowered to be placed on the stacking jig along the guide pins. By providing a mechanism for transferring to, the green sheet where the processing strain and temporal deformation received between the respective steps before lamination remain as the internal stress of the sheet,
It is possible to suppress the deformation that occurs when separated from the frame and maintain the dimensions. Further, a taper portion is provided at the tip of the guide pin erected on the stacking jig, and a plurality of guide hole punching punches are provided, and the guide hole punching punch of the first length and the length of the taper portion from the guide hole punching punch are provided. The guide hole punches having a second length shorter than the second length are scattered on the upper die, and the length of the guide pin that contacts the guide hole punches having the first length among the guide pins is set to the second length. And the length of the guide pin that comes into contact with the punch for punching the second length of the guide hole is set to the first length. Therefore, while pressing down the green sheet, the stacking cure is performed from the mold. In the process of transferring and stacking to the tool, since the plurality of guide holes do not pass through all the taper portions at the same time, the transfer is performed while always holding the restraining force against the planar deformation of the green sheet. Can be stacked.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be specifically described below with reference to the drawings. FIG. 1 is a diagram showing a front view of a laminating section of a laminating apparatus according to an embodiment of the present invention. The structure of the laminating apparatus shown in FIG. 1 is such that the green sheet 4 is cut from the frame 3 shown in FIG. 4 to the cut line 4'on the outer peripheral portion of the wiring pattern section 5.
Laminating die part 28 for cutting with and laminating on the laminating jig 1
And a stacking jig table 21 having a mechanism for positioning and fixing the stacking jig 1 and putting the stacking jig 1 in and out of the stacking die 28, and a height fine adjustment mechanism for stacking. The laminated die unit 28 includes an upper die lift cylinder 17 and a cylinder rod 18 for raising and lowering the upper die lift plate 15, and a lower die lift cylinder 19 and a cylinder rod 20 for raising and lowering the lower die lift plate 14.
A guide post 16 for guiding it and a green sheet 4
A guide hole punching punch 10 for punching a positioning fixing hole in the outer peripheral portion, a contour cutting upper blade 11 and a contour cutting lower blade 13 for punching from the frame 3, and a punched green sheet 4 are laminated jig 1 Stripper press to transfer and stack
The upper die includes a stripper plate 9, a guide hole punching punch 10, a contour cutting upper blade 11, and a stripper plate elevating cylinder 12. The lower mold has a contour cutting lower blade 13 and a lower mold lifting plate 14. The laminating jig table 21 includes a jig table plate 25 on which the laminating jig 1 is mounted, a motor 22 for raising and lowering the plate 22, and a belt 2.
3, ball screw 29 (shown in FIG. 6), guide rail 24
And the like, and is configured by a guide rail 26 that takes the entire stacking jig table 21 into and out of the stacking mold 28. 27 is a device base.

FIG. 2 is a perspective view showing the entire stacking jig 1.
FIG. 3 is a sectional view showing the guide pin standing portion of the stacking jig 1. The structure of the laminating jig 1 shown in FIGS. 2 and 3 is such that the guide pins (long) 2a and the guide pins (short) 2b are alternately inserted and erected on the outer peripheral portion of the laminating jig plate 1a from the back surface side, The guide pin fixing plate 1b is installed in the.

FIG. 4 is a perspective view of a green sheet with a frame. The frame-shaped frame 3 and the outer peripheral portion of the green sheet 4 are adhered and fixed, and a positioning V groove 6 is provided on one side of the frame 3. Have
Reference numeral 5 indicates a wiring pattern portion of the green sheet 4, 3'dotted line indicates the inner wall portion of the frame 3, and 4'dotted line indicates a cut sheet of the green sheet.

FIG. 5 shows an overall perspective view of the green sheet laminating apparatus. The configuration of the green sheet laminating apparatus shown in FIG. 5 is such that the laminating jig table 21 having the laminating die 28 and the laminating jig 1 shown in FIG. 1 and the position correction of the green sheet 4 are corrected. A camera table 30 equipped with a camera 31 for confirming the position after stacking, a position correction table 43 for correcting the position of the green sheet 4, and a position correction table 4
As a function for transferring the green sheet 4 to the top of the sheet 3, a transfer robot 44 for taking out the green sheets 4 one by one from the sheet magazine 7 and the surface of the green sheet 4 are cleaned. And a dust removing box 42, a reversing transfer robot 40 having a reversing mechanism 41 at the tip for transferring onto the position correction table 43, and an image processing device 50 processing a signal from the camera 31. There is.

FIG. 6 is a stacking flow chart showing a series of steps from the position correction of the green sheet 4 to the confirmation of the stacking position. After cutting the guide holes and the outer shape, the stacking jig is cut from the die 28. FIG. 7 shows a stacking process diagram of transferring and stacking to No. 1.

FIG. 8 shows a sectional view of the internal structure of the upper die of the laminated die portion. The upper die internal structure of the laminated die portion shown in FIG. 8 includes a guide post 16 for elevating and lowering the entire upper die, an upper die elevating plate 15 guided by the guide post 16, and a guide hole punching punch 10. A punch fixing plate 60 for fixing it,
Punch fixing plate 60 A contour cutting upper blade 11 which is positioned and fixed with the outer peripheral side surface as a reference surface, and a stripper plate 9 which is located on the inner circumferential portion of the four side contour cutting upper blade 11 and has a vertical mechanism.
It is composed of The vertical mechanism of the stripper plate 9 includes a stripper plate suspending plate 61 for suspending and fixing the stripper plate 9, a stripper plate lifting cylinder 12 for vertical drive, and a cylinder rod 65 for moving the stripper plate. And a guide post 6 that guides the vertical direction
2 and guide bushes 63 are provided at the four corners. Furthermore, the green sheet 4 is provided on the surface of the stripper plate 9.
Is provided with a suction hole (not shown), and a vacuum suction mechanism (not shown) is connected to the suction hole.

Next, the operation of the green sheet laminating apparatus will be described with reference to FIGS. 1 to 8. First, as shown in FIG. 5, the green set in the green sheet laminating apparatus is used.
From the sheet magazine 7 in which the sheets 4 are arranged in the stacking order, the transfer robot 44 grabs the portion of the frame 3 and transfers and inserts the sheets one by one into the dust removing box 42. Dust box 4
After cleaning the surface of the green sheet 4 for a certain period of time in 2, it is further conveyed to the position of the reverse transfer robot 40,
Switch to the reverse transfer robot 40. After that, green
The sheet 4 is rotated by 90 degrees from the vertical posture to the horizontal posture by the reversing mechanism 41, and is mounted on the position correction table 43 while maintaining the posture.

Next, as shown in the green sheet position correcting process of FIG. 6, the position correcting table 43 on which the green sheet 4 is mounted and the camera table 30 are opened to form a laminated mold part. 28 between upper and lower molds. The position correction table
Abutting type stoppers (not shown) are provided at the forward ends of the table 43, the camera table 30, and the stacking jig table 21, respectively, to enable highly accurate repetitive positioning. In the above state, the positions of positioning holes (not shown) provided at the four corners of the green sheet 4 are recognized by the four cameras 31 on the camera table 30, and the hole position information is subjected to image processing. Processing is performed by the device 50, and the position correction table 43 is operated based on the processing data, and X.
Correct in the Y and θ directions.

Next, as shown in the guide hole / outer shape cutting step of FIG. 6, only the camera table 30 is retracted and retracted to the outside of the laminated die 28. After that, the cylinder rod 20 of the lower mold lifting cylinder 19 in the laminated mold part 28 is projected, and the lower mold lifting plate 14 connected to the cylinder rod 20 is lifted by the guide of the guide post 16. The rising end at this time is the height at which the upper surface of the outer shape cutting lower blade 13 contacts the lower surface of the green sheet 4. After that, the cylinder rod 18 of the upper die lift cylinder 17 is projected and the upper die lift plate 15 connected to the cylinder rod 18 is lowered by the guide of the guide post 16. At this time, as shown in FIG. 8, the stripper plate 9 has the cylinder rod 65 projected by the stripper plate lifting cylinder 12 and is held in the lowered state. When it comes to the vicinity of the lower end, the stripper plate 9 first contacts the surface of the green sheet 4, and the green sheet 4 is sandwiched by the stripper plate 9 and the outer shape cutting lower blade 13. In this state, the green sheet 4 is further lowered while pressing the green sheet 4 with the pressure applied to the stripper plate lifting cylinder 12.
At this time, since the load of the stripper plate lifting cylinder 12 that lowers the stripper plate 9 is smaller than the load of the upper mold lifting cylinder 17 that lowers the entire upper mold, the stripper plate 9 is pushed up. The pressure applied to the stripper plate lifting cylinder 12 is the drive air pressure adjusting valve (not shown) for the entire green sheet laminating apparatus.
It is a unitary adjustable pressure in which another air pressure adjusting valve (not shown) is provided in the pipe branched from the above. The stripper plate 9 is further pushed up, and the punch 1 for punching out the guide hole is formed.
0 protrudes from the surface of the stripper plate 9 and is green
A guide hole is drilled in the grate 4. Further, as it advances, the outer shape cutting upper blade 11 projects and cuts the outer shape of the green sheet 4, and the upper mold as a whole reaches the descending end, and the stripper plate 9 reaches the ascending end. After that, the stripper plate elevating cylinder 12 sends air pressure in the direction in which the cylinder rod 65 is pulled in, and the stripper plate 9 is held at the position of the rising end, and then the cylinder rod 18 of the upper die elevating cylinder 17 and the lower die are held. The cylinder rods 20 of the lifting cylinders 19 are respectively pulled in, and the upper and lower molds are released. At this time, the cut green sheet 4 has a vacuum suction mechanism in which the punch 10 for punching out the guide hole is projected and is connected from a suction hole (not shown) provided on the surface of the stripper plate 9. It is sucked by (not shown) and held in a state of being sucked onto the surface of the stripper plate 9.

Next, as shown in the stacking process of FIG. 6, the stacking jig table 21 is moved by the guide rail 26 in the stacking mold part 28 which is opened in the vertical direction (driving source). Is a cylinder, not shown). Next, the cylinder rod 18 of the upper die lifting cylinder 17 is projected again to lower the upper die to the lower end. Thereafter, the motor 22 mounted on the laminating jig table 21 is rotated, and the ball screw 29 is rotated through the belt 23 connected to the motor 22 so that the guide rail 24 guides the jig table. The tip of the guide pin 2 erected on the stacking jig 1 having the bull plate 25 mounted thereon is raised to a position where it comes into contact with the tip of the punch 10 for punching out the guide hole. Thereafter, the cylinder rod 65 is projected by the stripper plate elevating cylinder 12 and the stripper plate 9 is lowered to transfer the green sheet 4 to the stacking jig 1.

At this time, as shown in FIG.
When the guide hole punched in the hole 4 passes through the taper portion at the tip of the guide pin (long) 2a from the guide hole punching (short) 10b, the adjacent guide hole punching (long)
It is located in the straight portion of 10a (upper green sheet 4 in FIG. 7), and when it passes from the guide hole punch (long) 10a to the taper portion of the tip of the guide pin (short) 2b, It is located in the straight portion of the adjacent guide pin (long) 2a (the lower green sheet 4 in FIG. 7), and the green sheet 4 is always held restrained by the guide hole punch 10 or the guide pin 2. Stacked, vacuum suction is cut off at the lower end,
Release the sheet 4. Then, the upper die lifting cylinder 17
Cylinder rod 18 is pulled in and the upper die is raised to the released state. Next, as shown in the stacking position confirmation step of FIG. 6, after raising the upper mold, the camera table 30 is again moved into the stacked mold part 28, and the four cameras 31 use the above-mentioned green grease. -The positions of the positioning holes (not shown) provided at the four corners of the grate 4 are recognized, the hole position information is processed by the image processing device 50, and the stacking position deviation check is performed, and then the camera table. 30 and stacking jig table 21
Is retracted from the inside of the laminated die unit 28 to return to the initial state. By repeating the above operation for a predetermined number of sheets, a laminated body is obtained.

According to the embodiment described above, the guide hole and the outer shape are cut at the same time. However, by providing the function of holding the guide hole punching punch 10 immediately after cutting,
The green sheet 4 in which internal stress such as processing strain and deformation with time received between the respective steps before stacking remains, suppresses the deformation caused when the green sheet 4 is separated from the frame 3 by the guide punch punch 10, and wiring. It is possible to maintain the pattern dimensions and the like with high accuracy. Further, when the cut green sheet 4 is laminated on the laminating jig 1, the lengths of the guide hole punch 10 and the guide pin 2 which are butted against each other are changed to change the taper portion at the tip of the guide pin 2. By providing a step on the guide hole punching tool 10, the green sheet 4 is always attached to the guide hole punching tool 10 or the guide pin 2 in the process of transferring from the guide hole punching tool 10 to the guide pin 2 standing on the stacking jig 1. As a result, a high-precision laminated body can be obtained in which the wiring pattern dimensions and the like are held, as in the above case.

[0018]

According to the present invention, although the green sheet is separated from the frame-shaped frame, the green sheet is stacked while being restrained and held by the punch for punching guide holes or the guide pins. It is possible to obtain a high-precision laminated body in which the deformation caused when it is separated from the frame is suppressed and the wiring pattern dimensions and the like are held in the state where the internal stress such as the processing strain and the temporal deformation received during the operation remains. .

[Brief description of the drawings]

FIG. 1 is a diagram showing a front surface of a laminating section of a laminating apparatus according to an embodiment of the present invention.

FIG. 2 is a perspective view showing the outer appearance of a laminating jig according to an embodiment of the present invention.

FIG. 3 is a cross-sectional view of a stacking jig guide pin standing portion according to an embodiment of the present invention.

FIG. 4 is a perspective view showing the outer appearance of a framed green sheet according to one embodiment of the present invention.

FIG. 5 is an overall perspective view showing the external appearance of a green sheet laminating apparatus of one embodiment according to the present invention.

FIG. 6 is a laminated flow chart of a green sheet according to an embodiment of the present invention.

FIG. 7 is a side view showing a stacking process of a green sheet according to an embodiment of the present invention.

FIG. 8 is a cross-sectional view showing the internal structure of the upper die of the laminated die portion of one embodiment according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Laminating jig 1a Laminating jig plate 1b Die pin fixing plate 2 Guide pin 2a Guide pin (long) 2b Guide pin (short) 3 Frame 3'Frame inner wall part 4 Green sheet 4'Green sheet Cut line 5 Wiring pattern 6 Positioning V groove 7 Sheet magazine 9 Stripper plate 10 Guide punch punch 10a Guide punch punch (long) 10b Guide punch punch 11 External cutting upper blade 12 Stripper plate lifting cylinder 13 External cutting lower blade 14 Lower mold lifting plate 15 Upper mold lifting plate 16 Guide post 17 Upper mold lifting cylinder 18 Cylinder rod 19 Lower mold lifting cylinder 20 Cylinder rod 21 Stacking jig table 22 m 23 belt 24 guide rail 25 jig table plate 26 guide rail 27 machine base 28 laminated mold section 29 ball screw 30 camera table 31 camera 32 guide rail 40 reversing transfer robot 41 reversing mechanism 42 dust removing box 43 position correction table 44 transfer robot 50 image processing device 60 stripper plate hanging plate 62 guide post 63 Guide bush 64 Stopper 65 Cylinder rod

Claims (2)

[Claims] 1. An upper die having a plurality of punch holes for punching guide holes, a laminated die portion having a lower die, and a movable die in the laminated portion die, and at least fine movement in X, Y, and θ directions is possible. It has a positioning table for the green sheet and a stacking jig table that can move in the stacking die part and has a plurality of guide pins standing upright, and at least a stacking jig table that can move in the Z direction. , Filling conductor in via hole, wiring pattern
Green seal attached to a frame-shaped frame that has been printed.
In the green sheet laminating apparatus for laminating the sheets, the upper die of the laminating die section is cut simultaneously with the lower die together with the outer peripheral portion of the green sheet and the guide hole on the positioning table. , A mechanism for holding the green sheet while the plurality of guide hole punching punches are in a protruding state, and the stacking jig table is raised so that the tips of the guide pins are of the guide hole punching punches. After contacting the tip, a mechanism is provided for lowering the green sheet held by the plurality of guide hole punches and transferring the green sheet onto the stacking jig along the plurality of guide pins. Green
G stacking device. 2. The green sheet laminating apparatus according to claim 1, wherein a guide portion provided upright on the laminating jig is provided with a taper portion at a tip thereof, and the plurality of guide hole punching punches are provided. The guide hole punching punch having a length and the guide hole punching punches having a second length shorter than the guide hole punching by a length equal to or more than the length of the tapered portion are scattered on the upper die, and the first guide pin among the guide pins. The length of the guide pin that comes into contact with the guide punch having a length of the guide hole is the second length, and the length of the guide pin that comes into contact with the punch having a guide hole of the second length is the first length. A green sheet laminating apparatus characterized by the above.