JP2006286670A - Apparatus and method of temporary lamination of ceramic green sheet - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent the deviation of a laminated sheet when a ceramic green sheet is laminated. <P>SOLUTION: A new sheet 10a is laid on the ceramic green sheet (hereinafter, described as a sheet) 10b already laid. The top surface of the sheet 10a is pushed with temporary stopping heads 28 which are arranged so as to correspond to the four courners of the sheet, and is deformed along with the lower sheet 10b. The irregularity formed by the deformation is engaged, the deviation between the sheets is prevented, and temporarily stopped. Whenever the sheet is laminated, the above temporary stopping is performed. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to the manufacture of a laminate in which a ceramic and a conductor formed in a predetermined circuit pattern are laminated, and more particularly, to a process of stacking ceramic green sheets having a circuit pattern formed on the surface.

  A multilayer circuit element, for example, a multilayer capacitor, in which a ceramic and a conductor formed in a predetermined circuit pattern are laminated is known. Such a laminated circuit element is obtained by laminating ceramic green sheets having a circuit pattern formed on the surface by printing or the like, pressurizing in the laminating direction, and simultaneously heating to cure the binder between layers, and further firing the ceramic. Manufactured. In the multilayer capacitor, the conductor serves as an electrode, and the fired ceramic layer serves as an insulator. The laminate is cut into a predetermined shape and used as a circuit element.

  In the manufacturing process of such a laminated body, when the ceramic green sheets on which the circuit pattern is printed are laminated, the alignment is important. This is because if the positions of the stacked sheets are shifted, the circuits printed on the sheets are also shifted and the desired performance cannot be obtained. In Patent Document 1 below, a plurality of holes are drilled at predetermined positions of a ceramic green sheet, and a pin is erected on a mounting plate on which the sheets are stacked and placed. There has been disclosed a technique for preventing misalignment of a sheet by a pin even when the sheets are sequentially laminated by aligning with the pins and after the sheets are laminated.

Japanese Patent No. 2816955

  According to the apparatus described in the publication, a mounting plate in which pins are erected corresponding to the laminated body is required. If the position of the hole for alignment differs for each type of laminate, it is necessary to prepare a mounting plate corresponding to the type. In addition, according to the apparatus, the ceramic green sheets are sent to the pressurizing / heating process in a state of being placed on the mounting plate even after being laminated. In order to sequentially produce the same product, A plurality of mounting plates are required. Since the relative position of the laminated ceramic green sheets is required to have an accuracy of several μm, a very high accuracy is also required in the production of the mounting plate, which causes an increase in cost. In particular, in the above-described apparatus that requires a plurality of mounting plates, the manufacturing cost of the mounting plates may affect the cost of the product.

  An object of the present invention is to prevent displacement of a placed ceramic green sheet without using pins erected on the placing plate.

  Temporary fixing performed when the ceramic green sheets are laminated according to the present invention is performed by locally acting on the ceramic green sheets placed thereon, and combining with the ceramic green sheets therebelow at the portions.

  Specifically, for example, the placed ceramic green sheet is locally pressed and deformed together with the underlying ceramic green sheet to perform temporary fixing. Moreover, it can also be temporarily fixed by heating and pressing locally and locally pressing the ceramic green sheet thereunder.

  The temporary fixing device can be provided with a transport head for holding, transporting, and laminating ceramic green sheets one by one. It is desirable to perform the temporary fixing at the same time when the transport head places the next sheet on the already stacked sheets. By temporarily fixing the sheet while the transport head holds the sheet, it is possible to suppress the sheet from being displaced due to the pressing force at the time of temporary fixing.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 and FIG. 2 are diagrams showing an outline of a manufacturing process of a ceramic laminate including operations of laminating and temporarily fixing the ceramic green sheet according to the present embodiment. After the entire work flow is schematically described, details of the apparatus will be described.

  FIG. 1 shows a process in which a ceramic green sheet (hereinafter, referred to as a sheet) 10 is sucked and held by a transport head 14 at a suction station 12 and transported toward a laminated pre-bonding station shown in FIG. FIG. 1A is a side view of a state in which the sheet 10 is placed on the alignment table 16. Above the alignment table 16, the transport head 14 is located. FIG. 1B shows a state in which the alignment table 16 is looked up from below in the cross section taken along line AA in FIG. The upper surface of the sheet 10 is covered with a protective sheet 18 made of resin such as PET, and a circuit pattern is printed on the lower surface. In addition, alignment marks 20 are also printed at the four corners of the lower surface of the sheet 10, and observation holes 22 are provided at the four corners of the alignment table 16 so as to match the positions of the alignment marks 20. Through this observation hole 22, the alignment mark 20 is detected by the camera 23, and the alignment table 16 is translated and rotated within the plane on which the sheet 10 is placed so as to be in a predetermined position. After the positioning is completed, the transport head 14 is lowered, and the sheet 10 is sucked and held on the suction surface on the lower surface in the drawing. FIG. 1C shows a state in which the transport head 14 holds the sheet 10, and in this state, the transport head 14 moves to the next lamination pre-bonding station.

  FIGS. 2A to 2C are diagrams showing an outline of the steps in the lamination pre-bonding station 24. FIG. 2A shows a state where the transport head 14 has moved onto the stacking table 26 on which the sheet 10 being transported in advance is placed. When it is necessary to distinguish between the sheet already placed on the stacking table and the sheet carried this time, the new sheet carried this time is indicated by reference numeral 10a and is already placed. The sheet is indicated by reference numeral 10b. The transport head 14 is lowered from the state of FIG. 2A, and the transported sheet 10a is lowered onto the already placed sheet 10b, and placed and stacked. With the transport head 14 lowered, the temporary fixing heads 28 arranged corresponding to the four corners of the sheet 10 are lowered to temporarily fix the sheets 10a and 10b so as not to be displaced. This state is shown in FIG. Details of the temporary fixing head will be described later.

  After temporary fixing, as shown in FIG. 2C, the conveying head 14 is raised and separated from the sheet 10a, and then the temporary fixing head 28 is also raised. Subsequently, the transport head 14 is retracted from the stacked sheets 10, the upper temporary press-bonding head 32 is lowered, and the stacked sheets 10 are sandwiched by the stacking table 26. The temporary press-bonding head 32 and the stacking table 26 have heaters 34 and 36, respectively, and heat and press the stacked sheets to perform temporary press-bonding. In this temporary press-bonding step, gaps between the sheets are filled, and the binder is cured to integrate the laminate.

  The laminated table 26 on which the temporarily bonded sheet 10 is placed is taken out and moved to the peeling station 30 shown in FIG. 2D, where the protective sheet 18 is peeled off. After the protective sheet 18 is peeled off, the protective sheet 18 is returned to the lamination pre-bonding station 24 again and waits for the next sheet 10 to be carried. The above-described lamination, temporary fixing, and temporary pressure bonding operations are repeated to stack a predetermined number of sheets 10. And this is moved to a firing station (not shown), and the ceramic is fired to produce a laminate.

  FIG. 3 is a diagram showing details of FIG. The transport head 14 and the temporary fixing head 28 are supported by a common transport frame 38. The transport head 14 is driven in the vertical direction in the figure by a transport head drive cylinder 40 fixed to the transport frame 38. The temporary fixing head 28 is driven in the vertical direction by a temporary fixing head drive cylinder 42 that is also fixed to the transport frame 38. A porous plate 44 is disposed on the lower surface of the transport head 14, that is, the surface facing the sheet 10. The region where the porous plate 44 is disposed is connected to the head-side pump 46 by piping. By operating the head-side pump 46, air can be sucked from the lower surface of the porous plate 44, and the sheet 10 can be adsorbed by this suction force.

  A porous plate 48 is disposed on the upper surface of the laminated table 26, that is, the surface on which the sheet 10 is placed, and the region where the porous plate 48 is disposed is connected to the table-side pump 50 by piping. By operating the table side pump 50, air can be sucked in from the upper surface of the porous plate 48, and the placed sheet 10 can be adsorbed. In the present embodiment, an adhesive sheet 52 is further placed so as to cover the porous plate 48, and the sheet 10 is placed thereon. The pressure-sensitive adhesive sheet 52 may be air permeable and allow air sucked by the table-side pump 50 to pass therethrough. The reason why the adhesive sheet 52 is disposed is to prevent the sheet 10 from being peeled off from the lamination table when the protective sheet 18 on the surface of the sheet 10 is peeled off. Therefore, if it is possible to prevent the sheet 10 from being peeled off together with the protective sheet 18 by adsorbing the sheet by other means, for example, at the peeling station 30, the adhesive sheet 52 should not be used. can do.

  The transport head 14 is lowered by the transport head drive cylinder 40, and the transported sheet 10a is placed on the already placed sheet 10b. This state is shown in FIG. The transport head 14 is provided with guide pins 54, and the placement table 26 is provided with guide holes 56, which are engaged with each other so that the placed sheet 10b and the newly placed sheet 10a are positioned. Matching is done.

  Returning to FIG. 1, the alignment of the sheet 10 when attracted to the transport head 14 will be described. As described above, the sheet 10 is placed on the alignment table 16. The alignment table 16 is movable with respect to the base 58, and the camera 23 is fixed to the base 58. When the alignment table 16 is moved and aligned based on the alignment mark 20 captured by the camera 23, the sheet 10 is aligned at a predetermined position with respect to the base 58. The base 58 is provided with guide holes 60 corresponding to the guide pins 54 of the transport head. When the transport head 14 descends and sucks the sheet 10, the guide pins 54 and the guide holes 60 are engaged to align the transport head 14 and the base 58. As a result, the sheet 10 is always sucked and held at the same position of the transport head 14. In the lamination pre-bonding station 24, as described above, the alignment is performed by the guide pins 54 and the guide holes 56 of the lamination table 26, so that the sheets 10 are always laminated at the same position.

  Next, the temporary fixing head drive cylinder 42 lowers the temporary fixing head 28 and abuts the front end thereof on the sheet 10a. Further, the temporary fixing head 28 is lowered to press the surface of the sheet 10a, so that the uppermost sheet 10a and the sheet 10b immediately below it are deformed together. In this way, by causing local deformation, it is possible to suppress the shift between the sheets. The shape of the tip of the temporary fixing head 28 for deforming the sheet 10 can be, for example, a needle shape or a wedge shape that leaves a linear indentation. The indentation may have a shape such as an L shape or a wavy shape in addition to a linear shape. Further, the front end surface may be formed with irregularities, and the deviation may be prevented by the individual irregularities.

  The temporary fixing head 28 can also be provided with a heater, and the binder of the sheet 10 can be locally cured by the heater to perform temporary fixing. Furthermore, the temporary fixing by the deformation | transformation of the above-mentioned sheet | seat and the temporary fixing by a heating can also be used in combination.

  After temporary fixing, the transport head 14 is raised. At this time, air can be sent from the head-side pump 46 between the lower surface of the transport head 14 and the sheet 10a via the porous plate 44 so that the transport head 14 and the sheet 10a can be easily separated. After the transport head 14 is separated from the sheet 10a, the temporary fixing head 28 is also raised, and the lamination and temporary fixing of one sheet is completed.

  FIG. 5 is a diagram showing a modification of the above-described embodiment. In this modification, the configuration related to the alignment of the transport head and the sheet is different from that of the above-described embodiment. The same components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is omitted. In the sheet 70, positioning holes 72 are formed at four corners, and positioning pins 76 are erected on the lower surface of the transport head 74 corresponding to the holes. The sheet 70 is provided with a positioning hole 72 instead of the alignment mark 20 of the sheet 10, and other configurations are not changed. Further, the transport head 74 has the same configuration as the transport head 14 except that positioning pins are provided upright.

  The sheet 70 is aligned by positioning holes 72 and positioning pins 76. Therefore, the camera 23, the alignment mark 20, the movable alignment table 16 and the like of the above-described embodiment are not necessary. The lamination table 78 on which the sheets 70 are laminated has the same configuration as that of the lamination table 26 except that a clearance hole 80 is provided in order to prevent interference with the positioning pins 76. The operations of stacking and temporary fixing are the same as in the above-described embodiment, and a description thereof will be omitted.

  In the above-described embodiments and modifications, the temporary fixing heads 28 are arranged at the four corners of the sheets 10 and 70, but the arrangement and number are not limited to this and can be changed as necessary.

  As described above, according to the present embodiment, ceramic green sheets can be laminated without using a laminated plate in which pins are erected as in the apparatus described in Patent Document 1 described above.

It is a figure explaining the outline of the manufacturing process of a ceramic laminated body. It is a figure explaining the outline of the manufacturing process of a ceramic laminated body. It is a figure which shows the structure of the apparatus which laminates | stacks and temporarily fixes a ceramic green sheet, and is a figure which shows the state just before laminating | stacking a sheet | seat especially. It is a figure which shows the state which has laminated | stacked the ceramic green sheet and is temporarily fixing. It is a figure which shows the structure of the modification of the apparatus which laminates | stacks and temporarily fixes a ceramic green sheet.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Ceramic green sheet, 12 adsorption | suction station, 14,74 conveyance head, 24 lamination | stacking temporary crimping station, 26,78 lamination | stacking table, 28 temporary fixing head, 30 peeling station.

Claims (8)

Stacked multiple ceramic green sheets with circuit patterns formed by conductors on the surface, heated under pressure, and then used in the manufacturing process to obtain a laminate by firing the ceramic. And a ceramic green sheet temporary laminating device for temporarily fixing so as not to shift each other,
A transport head that holds one ceramic green sheet, transports the ceramic green sheet to the stacking position, and places it there;
A temporary fixing head that acts locally on the ceramic green sheet placed and temporarily fixes the ceramic green sheet under the ceramic green sheet;
A ceramic green sheet provisional laminating apparatus.   The ceramic green sheet temporary laminating apparatus according to claim 1, wherein the temporary fixing head locally presses the placed ceramic green sheet and deforms it together with the underlying ceramic green sheet to temporarily fix the ceramic green sheet. Temporary laminating device to perform.   2. The ceramic green sheet temporary laminating apparatus according to claim 1, wherein the temporary fixing head locally pressurizes and heats the placed ceramic green sheet and temporarily presses the ceramic green sheet under the ceramic green sheet. Temporary laminating device for temporary fixing.   4. The ceramic green sheet temporary stacking apparatus according to claim 1, wherein the temporary fixing head is mounted on the transport head, and the transport head stacks the ceramic green sheets so far. 5. Temporary laminating apparatus that temporarily mounts while being placed and held.   It is a ceramic green sheet temporary lamination apparatus of any 1 paragraph of Claim 1 to 4, Comprising: Air is supplied between the ceramic green sheet mounted in the uppermost part, and the conveyance head stuck to this. A temporary laminating apparatus having air supply means. In the manufacturing process of laminating a plurality of ceramic green sheets with circuit patterns formed by conductors on the surface, pressurizing and heating, and firing the ceramic to obtain a laminate, the ceramic sheets are laminated before pressure and thermoforming, It is a ceramic green sheet temporary lamination method for temporarily fixing so as not to shift each other,
A process of carrying to one ceramic green sheet stacking position and placing it there;
A step of locally pressing the placed ceramic green sheet, deforming together with the ceramic green sheet underneath, and temporarily fixing;
A method for temporarily laminating ceramic green sheets. In the manufacturing process of laminating a plurality of ceramic green sheets with circuit patterns formed by conductors on the surface, pressurizing and heating, and firing the ceramic to obtain a laminate, the ceramic sheets are laminated before pressure and thermoforming, It is a ceramic green sheet temporary lamination method for temporarily fixing so as not to shift each other,
A process of carrying to one ceramic green sheet stacking position and placing it there;
A step of locally pressurizing and heating the placed ceramic green sheet, temporarily pressing the ceramic green sheet under the ceramic green sheet, and temporarily fixing;
A method for temporarily laminating ceramic green sheets. A method for temporarily laminating ceramic green sheets according to claim 6 or 7,
In the step of temporarily fixing, the temporary fixing is performed while holding the mounted ceramic green sheet in the state when it is mounted.
Temporary lamination method.

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