JP2009107231A - Lamination apparatus for ceramic green sheet and its method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent the displacement of lamination in bonding each ceramic green sheet by heat and pressure to form a ceramic laminate. <P>SOLUTION: The lamination apparatus 1 for ceramic green sheets has a plank-like lower mold 6 and a heating press apparatus 8 installed in the upper face side of the lower mold 6; the lower mold 6 is equipped with through-holes 7 that penetrate the thickness portion and first heating mechanisms 15 that are internally installed in the thickness portion of the lower mold 6 and heat the lower mold 6; the heating press apparatus 8 is equipped with an upper mold 9, at least two piercing pins 10 that are erected at the positions that are in the undersurface 9a of the upper mold 9 and correspond to the through-holes 7 and a flat plate 12 that is arranged on the undersurface side 9a of the upper mold 9 and installed slidably to the axis direction of the piercing pins 10 with the piercing pins 10 inserted in the thickness portion; the upper mold 9 is furnished with second heating mechanisms 16 that are internally installed in the thickness portion and heat the upper mold 9; and the through-holes 7 are formed at least each by a pair in the opposite sides of the mounting part for the ceramic green sheets 5. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a ceramic green sheet laminating device used for the purpose of creating a ceramic package or the like for housing an electronic component such as a semiconductor element or a crystal resonator in order to function as an electronic device.

Conventionally, when laminating and joining a plurality of ceramic green sheets without misalignment, the roll-shaped ceramic green sheets are cut into a desired rectangular shape, and a dummy portion is provided on the outer peripheral portion thereof. A method of previously providing a reference through hole for positioning in the dummy part is often used.
Such a through-hole can be used for setting the ceramic green sheet at a predetermined position on the printing stand when screen-printing a conductive paste or the like that becomes a wiring pattern after firing on the ceramic green sheet.
That is, a guide pin can be set up on a printing stand for screen printing, and the guide pin can be inserted into a through-hole formed in the ceramic green sheet to serve as a reference for printing positioning.
Furthermore, when laminating while aligning ceramic green sheets that have been screen-printed in this way, positioning guide pins are erected on the laminating jig plate of the laminating apparatus, and through holes in the ceramic green sheet The guide pins are inserted into the ceramic green sheets while preventing the positional deviation between the ceramic green sheets.

However, when a roll-shaped ceramic green sheet is cut into a rectangular shape of a desired size and used, repeated heating and drying at the time of screen printing or pressurization for the purpose of smoothing the printing surface will repeatedly act on the ceramic green sheet. As a result of repeated expansion and contraction of the ceramic green sheet due to heat and pressure, the dimensional variation of the ceramic green sheet has increased.
For this reason, when laminating the ceramic green sheets, there are cases where the guide pins standing on the laminating jig plate of the laminating apparatus cannot be inserted into the through holes of the ceramic green sheets.

Therefore, in order to suppress deformation when screen printing is repeated on the ceramic green sheet, the ceramic green sheet cut into a rectangular shape is arranged inside a metal window frame-shaped frame, and the ceramic green sheet With the edge and the inner surface of the frame facing each other, for example, a technique of fixing the outer edge of the ceramic green sheet to the frame using an adhesive tape or the like has come to be used.
For example, as a positioning method when screen printing is performed on the ceramic green sheet, for example, a through hole is formed in advance in a dummy portion formed near the outer edge of the ceramic green sheet, and the through hole is used as an image recognition device. It was made to recognize and position.
Furthermore, as a positioning method when laminating the ceramic green sheets, guide pins that are erected on the jig plate in the through holes formed in the dummy portions of the ceramic green sheets while holding the ceramic green sheets on the frame Was laminated while fixing the position of the ceramic green sheet.

Patent Document 1 discloses an invention relating to a laminating apparatus for laminating ceramic green sheets when manufacturing a multilayer ceramic substrate by a sheet laminating method under the name “laminating apparatus”.
The “laminating apparatus” according to Patent Document 1 adsorbs a ceramic green sheet and performs outline punching to separate the frame body, and then confirms a reference through-hole with an imaging device, and accurately identifies the through-hole. A plurality of ceramic green sheets are stacked by inserting a guide pin for alignment standing on the jig plate.
According to the “lamination device” according to Patent Document 1, it is possible to increase the positioning accuracy when laminating ceramic green sheets.

Further, Patent Document 2 has the name “lamination method of green sheets”, and ceramic green sheets can be accurately laminated without forming guide holes or using guide pins when the ceramic green sheets are laminated. An invention relating to a method for laminating green sheets is disclosed.
The “green sheet laminating method” according to Patent Document 2 removes internal residual stress in advance by inserting slit-like notches in the outer periphery of a green sheet having at least two reference holes. The removed green sheet is placed on a positioning table, the reference hole of the placed green sheet is recognized, and the horizontal position correction of at least the X and Y axes is performed based on the recognition result. This is a method in which a predetermined position on the outer peripheral portion of the green sheet after correction is cut, and the green sheets are sequentially stacked with reference to the cut end face of the cut green sheet.
According to the “green sheet laminating method” according to Patent Document 2, it is possible to increase the positioning accuracy when laminating ceramic green sheets, and at the same time, to print a wiring pattern in an area where a guide hole has been conventionally provided. Thus, the yield of the ceramic substrate as a product can be improved.
In addition, since it is not necessary to provide a step of cutting the position where the guide hole is formed after pressure-bonding the laminated body of the ceramic green sheets, the production efficiency of the ceramic substrate can be increased.

Japanese Patent Laid-Open No. 62-124947 JP-A-7-308911

However, as in the case of the prior art as described above, when adopting a technique of sequentially inserting and overlapping the guide pins for alignment standing on the jig plate while holding the ceramic green sheet on the frame, In order to ensure that the guide pins are inserted through the through holes formed in advance in the ceramic green sheets, a clearance must be provided between the ceramic green sheets and the guide pins. There was a problem that the deviation could not be reduced beyond a certain level.
Also, if the guide pins that are erected on the jig plate are not erected vertically on the jig plate or if there is a problem such as warpage of the jig plate itself, Even if it was used, it was difficult to prevent displacement when the ceramic green sheets were laminated.
For this reason, it is necessary to carefully maintain the jig plate and the guide pin every time it is used, and the work is extremely complicated.

In the case of the invention described in Patent Document 1, the patterns printed on the stacked green sheets are different.
For this reason, when the frame is removed from the green sheet, there is a high possibility that the individual green sheets will shrink at different shrinkage rates, and in the unlikely event that the guide pins stand vertically on the bonded jig plate. If it is not installed, or there is a problem such as warping or bending in the bonded jig plate itself, even if an imaging device is used, it is possible to prevent the occurrence of misalignment when laminating green sheets It was difficult.
For this reason, it is necessary to carefully maintain the jig plate and the guide pin every time it is used, and the work is still complicated.
Furthermore, the “laminating apparatus” disclosed in Patent Document 1 does not include a hot press facility for heating and pressurizing a green sheet laminated on the bonded jig plate.
For this reason, it is necessary to transport the green sheet laminated together with the bonded jig plate to the hot press facility, and during the transfer, the guide pin and the bonded jig plate are tilted due to vibrations, etc. Could occur.

Also, the invention described in Patent Document 2 is a method of stacking after removing the sheet frame from the ceramic green sheet. As in the case of the invention described in Patent Document 1, the ceramic green sheet is provided with a notch once. Even if the internal stress is removed, each ceramic green sheet shrinks with a different shrinkage rate as the sheet frame is removed, so even if the ceramic green sheets are sequentially laminated based on the cut ends, There was a problem that it was difficult to align with high accuracy over the entire surface of the ceramic green sheet.
Furthermore, the green sheet laminating apparatus used in the “green sheet laminating method” disclosed in Patent Document 2 is also not provided with a facility for heating and pressurizing the laminated green sheets accommodated in the laminating jig. Absent.
For this reason, in order to pressure-bond the laminated green sheets accommodated in the laminating jig, the laminating jig must be transported to the hot press facility. There was a possibility that the green sheet was displaced.
Moreover, in order to laminate | stack a green sheet, it is still necessary to use a lamination jig, and there also existed the subject that the maintenance of a lamination jig was complicated.

  The present invention has been made in response to such a conventional situation, and when a plurality of ceramic green sheets are stacked, a perforated pin is inserted and restrained through the stacked ceramic green sheets while being held by the frame. An object of the present invention is to provide a ceramic green sheet laminating apparatus and a laminating method for joining ceramic green sheets by heat and pressure to form a ceramic laminate while preventing deformation in the plane direction. .

In order to achieve the above object, a ceramic green sheet laminating apparatus according to claim 1 is a laminate for forming a ceramic laminate by superposing a plurality of ceramic green sheets and applying temperature and pressure thereto. This ceramic laminating apparatus supports a ceramic green sheet laminated while being held by a frame, and simultaneously heats the laminated ceramic green sheet from the lower surface side, and a lower mold And a heating press facility for heating and pressurizing from the upper surface side of the laminated ceramic green sheets, and the lower mold has a through-hole penetrating the thickness portion and the thickness of the lower mold A first heating mechanism that is installed in the part and heats the lower mold, and the heating press facility includes an upper mold disposed substantially parallel to the upper surface of the lower mold, and the upper mold At least two perforated pins standing on the lower surface and coincident with the through-holes, and disposed on the lower surface side of the upper mold, and in the axial direction of the perforated pins while inserting the perforated pins through the thickness portion A flat plate body slidably provided, and the upper mold is provided with a second heating mechanism that is provided in a thickness portion of the upper mold to heat the upper mold, and the through hole is a mounting portion for the ceramic green sheet It is characterized in that at least one pair is formed on the opposite side of each other.
In the invention of the above configuration, the lower mold supports the ceramic green sheets stacked while being held by the frame, and at the same time, the lowermost layer is heated by the first heating mechanism provided in the thickness portion thereof. It has the effect | action that it heats from the lower surface side of the ceramic green sheet arrange | positioned.
In addition, the upper die in the heating press facility heats the laminated ceramic green sheets from the upper surface side with the heat generated by the second heating mechanism provided in the thickness portion, and at the same time, It has the effect of indirectly pressing from the top layer side.
Further, the perforating pin has an action of penetrating and restraining the laminated ceramic green sheets when the upper die is brought close to the lower die.
The flat plate body has an action of contacting the upper surface of the ceramic green sheet disposed on the uppermost layer of the laminated ceramic green sheets and temporarily fixing the laminated ceramic green sheets.
Therefore, the hot press facility has an effect of forming the ceramic laminate by joining the individual ceramic green sheets by heat and pressure on the spot while restraining the laminated ceramic green sheets with the perforated pins.
Further, the through hole formed in the lower mold frame accommodates a punch pin that penetrates the laminated ceramic green sheets when the ceramic green sheets are joined by heating and pressurizing with the lower mold frame and a heating press facility. It has the action.
At this time, in particular, the end portion of the perforated pin that is not fixed to the upper die is arranged on the same plane as the surface facing the upper surface of the lower die of the flat plate or at a position retreated from this surface. Thus, when the laminated ceramic green sheets are heated and pressed, the perforated pins are brought into contact with the ceramic green sheets after contacting the upper surface of the laminated ceramic green sheets.
Further, at this time, by providing a cutting edge portion particularly at the tip of the perforated pin, the perforated pin is smoothly penetrated through the laminated ceramic green sheets.

The ceramic green sheet laminating apparatus according to claim 2 is the ceramic green sheet laminating apparatus according to claim 1, wherein the lower mold is a thickness portion of the ceramic green sheet laminating apparatus. A heat insulating structure is provided at the boundary between the mounting portion and the mounting portion of the frame.
In addition to the same operation as that of the first aspect of the invention, the heat insulating structure provided at the boundary between the ceramic green sheet placement portion and the frame placement portion in the lower mold is It has the effect | action of preventing that the heat which generate | occur | produces from 1 heating mechanism is transmitted to the mounting part of a frame.
As a result, it has an effect of preventing the frame body from being thermally expanded by the heat generated from the first heating mechanism.

The ceramic green sheet laminating apparatus according to claim 3 is the ceramic green sheet laminating apparatus according to claim 1 or 2, wherein the lower mold is a thickness portion thereof, and The frame mounting portion includes a cooling mechanism.
In the invention of the above configuration, in addition to the same operation as that of the invention described in claim 1 or claim 2, the cooling mechanism provided in the mounting portion of the frame body in the lower mold indirectly cools the frame body. Has an effect.
In other words, the heat generated from the first heating mechanism is prevented from being transmitted to the mounting portion of the frame body, and the frame body has an effect of suppressing thermal expansion and deformation.
As a result, the ceramic green sheet held by the frame has an effect of preventing the ceramic green sheet from being bent along with the deformation of the frame.

A ceramic green sheet laminating apparatus according to a fourth aspect of the present invention is the ceramic green sheet laminating apparatus according to any one of the first to third aspects, wherein the ceramic green sheet is a frame body. Adhesive tape is straddled between the surface of one side of the frame body and the one side surface of the ceramic green sheet disposed on the same side as this surface. The green sheet is characterized in that it is laminated while the surface on the side where the adhesive tape is stretched and the upper surface of the lower mold are opposed to each other.
In the invention with the above structure, the ceramic green sheet is flattened by arranging the outer edge of the ceramic green sheet and the inner side surface of the frame in a non-contact manner in addition to the same actions as the inventions of the first to third aspects. It has the effect | action of making it hold | maintain to a frame, maintaining property. Further, the adhesive tape has an effect of fixing the ceramic green sheet to the frame.
Furthermore, the thickness of the frame is usually set larger than the thickness of the ceramic green sheet. For this reason, by laminating the surface of the ceramic green sheet held by the frame on the side where the adhesive tape is straddled and the upper surface of the lower mold are opposed to each other, the ceramic green sheets are put together by applying temperature and pressure. When joining, it has the effect | action which minimizes the bending | flexion and distortion of the laminated | stacked ceramic green sheet.
As a result, the ceramic green sheet has an effect of reducing the possibility of positional deviation due to the bending of the ceramic green sheet.

The method for laminating ceramic green sheets according to claim 5 is a method of supporting a ceramic green sheet laminated in a state of being held by a frame, and simultaneously heating the laminated ceramic green sheet from the lower surface side. In a method for laminating ceramic green sheets, a ceramic green sheet laminating apparatus using a die and a heating press facility for heating and pressurizing from the upper surface side of the laminated ceramic green sheets is provided on the upper surface side of the lower mold. The press facility is provided with an upper mold disposed substantially parallel to the upper surface of the lower mold, a perforation pin standing on the lower surface of the upper mold, and a lower surface side of the upper mold. A flat plate that is slidable in the axial direction of the perforated pin while inserting the pin through its thickness portion. A first step of contacting the upper surface of the laminated ceramic green sheet, and a second step of inserting the perforated pins through the ceramic green sheet while fixing the ceramic green sheet laminated by the flat plate after the first step. And after the second step, a ceramic laminate is formed by applying heat and pressure to the ceramic green sheet with the upper die and the lower die while the perforated pins are inserted into the ceramic green sheet. The method includes a step and a fourth step of separating the hot press facility from the ceramic laminate after the third step.
The invention described in claim 5 having the above-described configuration is based on the invention described in claim 1 as a method invention, and the first step is to temporarily fix the ceramic green sheets laminated by the flat plate. Has the effect of The subsequent second step has the effect of suppressing the deformation (shrinkage) of the individual ceramic green sheets in the planar direction by restraining the ceramic green sheets in a stacked state.
In addition, the third step has an effect that a ceramic laminate is produced by joining the individual ceramic green sheets with heat and pressure while suppressing the deformation (shrinkage) of the individual ceramic green sheets in the planar direction.
The final fourth step has the effect of separating the hot press facility from the finished ceramic laminate.

According to the first aspect of the present invention, by holding the ceramic green sheet on the frame, the outer dimensions of the ceramic green sheet are caused by expansion and contraction accompanying heating and cooling when printing the conductive paste. Can be prevented from changing significantly or the flatness being impaired.
Furthermore, when forming a ceramic laminate, the punching pin is inserted and restrained while forming through holes in the laminated ceramic green sheets, so that temperature and pressure are applied to the laminated ceramic green sheets by a hot press facility. It is possible to prevent deformation (shrinkage) in the plane direction of the ceramic green sheet at the time of adding, and as a result, it is possible to suppress the occurrence of stacking deviation in the ceramic laminate.
Therefore, when the invention described in claim 1 is used, the above two effects can be exhibited simultaneously, thereby producing an effect of manufacturing a ceramic laminate having very little stacking deviation.
Accordingly, it is possible to improve the product yield and to provide a high-quality ceramic laminate at a low cost.
In particular, the end of the perforated pin that is not fixed to the upper die is arranged on the same plane as the surface facing the upper surface of the lower die of the flat plate or at a position that is recessed from this surface. By doing so, it has an effect that the perforated pin can be brought into contact after the flat plate is brought into contact with the surface of the laminated ceramic green sheets. In other words, when the perforated pins come into contact with the surface of the laminated ceramic green sheets, the laminated ceramic green sheets are already temporarily fixed by the flat plate. This has the effect of minimizing the risk of bending or deformation of the sheet.
As a result, it has the effect that generation | occurrence | production of lamination | stacking deviation can further be suppressed in a ceramic laminated body.
Further, particularly when the cutting edge portion is provided at the tip of the perforated pin, there is an effect that the perforated pin can be smoothly inserted while forming the through hole in the laminated ceramic green sheets.
As a result, it is possible to further prevent the ceramic green sheet from being bent or deformed when a perforated pin is pushed into the upper surface of the laminated ceramic green sheet, and to further prevent the stacking deviation from occurring in the ceramic laminate. It has the effect that it can reduce.

The invention described in claim 2 of the present invention has the same effect as that of the invention described in claim 1, and a heat insulating structure at the boundary between the ceramic green sheet mounting portion and the frame mounting portion in the lower mold. It has the effect that it can prevent that the heat which generate | occur | produced in the 1st heating mechanism is transmitted to the mounting part of a frame.
Therefore, when heat and pressure are applied to the ceramic green sheet, it is possible to prevent the frame body from being thermally expanded and deformed.
As a result, there is an effect that the ceramic green sheet fixed to the frame body via the adhesive tape can be prevented from being bent or deformed with the deformation of the frame body.
Therefore, there is an effect that it is possible to further reduce the risk of stacking misalignment in the ceramic laminate.

According to the third aspect of the present invention, in addition to the same effects as the first and second aspects of the present invention, the frame mounting portion of the lower mold is provided with a cooling mechanism, There is an effect that the frame body can be prevented from being thermally expanded and deformed by the heat generated by the first heating mechanism at the body mounting portion.
As a result, it is possible to prevent the ceramic green sheet fixed to the frame body via the adhesive tape from being bent or deformed along with the deformation of the frame body, and there is a risk that stacking misalignment may occur in the ceramic laminate body. It has the effect that it can reduce.

The invention described in claim 4 of the present invention has the same effect as that of each of the inventions described in claims 1 to 3, in addition to the ceramic green sheet, the surface on the side where the adhesive tape is straddled, and the lower mold By laminating while facing the upper surface of the substrate, there is an effect that bending and distortion generated in the laminated ceramic green sheets can be minimized.
As a result, when joining the ceramic green sheet by applying temperature and pressure, there is an effect that it is possible to reduce the possibility of stacking misalignment due to bending or distortion generated in the ceramic green sheet.

  The invention described in claim 5 of the present invention is obtained by capturing the invention described in claim 1 as a method invention, and has the same effect as the invention described in claim 1.

  A ceramic green sheet laminating apparatus according to the preferred embodiment of the present invention will be described in detail with reference to FIGS.

The ceramic green sheet laminating apparatus according to the present embodiment is an apparatus for producing a ceramic laminated body in which two or three ceramic green sheets held in a mold are laminated by heat and pressure. is there.
Conventionally, when manufacturing a ceramic laminate, two types of apparatuses are used: a laminating apparatus for laminating ceramic green sheets and a hot press facility for joining individual laminated ceramic green sheets. The ceramic green sheet laminating apparatus according to the embodiment is configured so that hot pressing can also be performed at a place where the ceramic green sheets are laminated.
The configuration of the ceramic green sheet laminating apparatus according to the present embodiment will be described in detail with reference to FIG.
FIG. 1 is a cross-sectional view showing an outline of a ceramic green sheet laminating apparatus according to the present embodiment.
As shown in FIG. 1, the ceramic green sheet laminating apparatus 1 according to the present embodiment mainly has a stacking target 2 on which a stacking target 2 is placed and also applies heat from the lower surface side of the stacking target 2. The mold 6 and a hot press facility 8 for applying heat and pressure from the upper surface side of the object to be laminated 2 are configured.
The heating press facility 8 according to the present embodiment includes an upper mold 9 for heating and pressing the object 2 to be stacked placed on the lower mold 6 from the upper surface side, and a lower surface 9 a of the upper mold 9. At least two perforated pins 10 are provided, and a flat plate 12 parallel to the upper mold 9 is slidable in the axial direction of the perforated pins 10 while inserting the perforated pins 10 into the through holes 13. Is provided.
And in the thickness part of the upper mold | type 9, the heat generating body 16 for heating the upper mold | type 9 is installed internally, and the to-be-laminated object 2 is heated via the flat plate body 12 which has thermal conductivity. It is configured as follows.
In addition, in FIG. 1, although the case where the upper metal mold | die 9 is pressed with the press apparatus 14 provided in the upper surface 9b side and the to-be-laminated object 2 is pressurized is demonstrated as an example, the upper metal mold | die 9 and The press device 14 may be configured integrally to form the upper die 9.
In addition, the upper surface 6a of the lower mold 6 according to the present embodiment is configured to be substantially flat, and the thickness portion thereof generates heat for heating the object 2 to be stacked placed on the upper surface 6a from the lower surface side. A body 15 is provided.
Further, when the hot press facility 8 is lowered to heat and pressurize the object 2 to be stacked, the through hole 7 that enables insertion of the punching pin 10 into the thickness portion of the lower mold 6 is provided in the lower mold. 6 is formed at a position facing the lower end of the punching pin 10.
The heating method of the heating elements 15 and 16 is not particularly limited, but there is, for example, a method using a conductive heating coil.

Furthermore, in the ceramic green sheet laminating apparatus 1 according to the present embodiment, the boundary between the placement portion of the ceramic green sheet 5 in the lower mold 6 and the placement portion of the frame 3 that holds the ceramic green sheet 5. The heat insulating structure 18 may be formed.
Usually, the frame 3 that holds the ceramic green sheet 5 is made of metal such as stainless steel. However, such a metal frame 3 is thermally expanded as the temperature rises.
And when thermal expansion arises in the frame 3, the frame 3 will deform | transform and the bending and distortion will arise in the ceramic green sheet 5 hold | maintained at the frame 3 via the adhesive sheet 4. FIG.
Then, if the ceramic green sheets 5 are joined together by applying temperature and pressure while the ceramic green sheets 5 are bent or distorted, there is a high possibility that the resulting ceramic laminate will be misaligned and become defective. .
Therefore, in the ceramic green sheet laminating apparatus 1 according to the present embodiment, the heat insulating structure 18 having, for example, a heat insulating material provided at the boundary between the mounting portion of the frame 3 and the mounting portion of the ceramic green sheet 5 is provided. By providing, it has the effect that it can prevent that the heat which arises in the heat generating body 15 is transmitted to the mounting part of the frame 3. FIG.
As a result, there is an effect that it is possible to prevent the frame 3 placed on the upper surface 6a of the lower mold 6 from being thermally expanded and deformed.

Further, the ceramic green sheet laminating apparatus 1 according to the present embodiment may be provided with a vent hole 17 for cooling the frame body 3 in the mounting portion of the frame body 3 in the lower mold 6.
In this case, by flowing a fluid such as air or water through the vent hole 17, there is an effect that heat transmitted to the placement portion of the frame 3 in the lower mold 6 can be removed.
As a result, it has the effect that the deformation | transformation by the heating of the frame 3 can be prevented.

Therefore, when the lower mold 6 is provided with the heat insulating structure 18 or the cooling hole 17 as a cooling structure, a sufficient heating effect of the ceramic green sheet 5 is exhibited at the placement portion of the ceramic green sheet 5, The mounting portion of the frame 3 of the lower mold 6 has an effect that the deformation of the frame 3 due to heating can be prevented.
As a result, when the ceramic laminated body is produced using the ceramic green sheet laminating apparatus 1 according to the present embodiment, there is an effect that it is possible to reduce the possibility of occurrence of lamination deviation.
In the ceramic green sheet laminating apparatus 1 according to the present embodiment, as shown in FIG. 1, the lower mold 6 may be provided with both a heat insulating structure 18 and a ventilation hole 17 as a cooling structure.
In this case, the frame 3 has a high deformation preventing effect.

Next, the stacking target 2 placed on the upper surface 6a of the lower mold 6 according to the present embodiment will be described in detail with reference to FIG.
2A is a plan view showing the appearance of ceramic green sheets stacked in a state of being held by a frame, and FIG. 2B is an enlarged cross-sectional view of a portion indicated by reference numeral A in FIG. It is. In addition, the same code | symbol is attached | subjected about the part same as what was described in FIG. 1, and the description about the structure is abbreviate | omitted.
As shown in FIG. 2 (a), the object to be laminated 2 used in the ceramic green sheet laminating apparatus 1 according to the present embodiment has a substantially rectangular shape, for example, the inside of a frame 3 made of metal such as stainless steel. The ceramic green sheet 5 is disposed while forming a clearance (gap) N by making the inner surface 24 of the frame 3 and the outer edge 25 of the ceramic green sheet 5 face each other. The adhesive sheet 4 is attached to the lower surface and the lower surface of the ceramic green sheet 5, and the ceramic green sheet 5 is fixed to the frame 3.

Moreover, as shown in FIG.2 (b), since the thickness B of the frame 3 is comprised larger than the thickness C of the ceramic green sheet 5, the surface on the side by which the adhesive sheet 4 is affixed upwards, for example When the stacked object 2 is placed on the placement surface 19, the ceramic green sheet 5 comes into contact with the placement surface 19 while being suspended by its own weight. At this time, the vicinity of the outer edge 25 of the ceramic green sheet 5 is pulled by the adhesive sheet 4 and greatly bent.
Therefore, in the present embodiment, the layered object 2 is placed on the placement surface 19 while the surface of the layered object 2 on which the adhesive sheet 4 is pasted is opposed to the placement surface 19. The bending in the vicinity of the outer edge 25 of the ceramic green sheet 5a disposed in the lowermost layer is minimized.
Thus, the outer edge 25 of the laminated ceramic green sheets 5 of the laminated object 2 is laminated by laminating the laminated object 2b on the ceramic green sheet 5a arranged in the lowermost layer in a state where the bending is minimized. There is an effect that bending in the vicinity can be minimized.
As a result, when the laminated ceramic green sheets 5 are joined by applying heat and pressure, it is possible to suppress the occurrence of lamination deviation.

Next, a process for producing a ceramic laminate using the ceramic green sheet laminating apparatus 1 according to the present embodiment will be described in detail with reference to FIGS. 1 and 3 to 5.
FIGS. 3 to 5 are conceptual views showing steps of manufacturing a ceramic laminate using the ceramic green sheet laminating apparatus according to the present embodiment. The same parts as those described in FIGS. 1 and 2 are denoted by the same reference numerals, and description of the configuration is omitted.
Here, a case where two ceramic green sheets 5 held by the frame 3 are stacked will be described as an example. However, when three ceramic green sheets 5 are stacked, the upper surface 6a of the lower mold 6 is stacked. What is necessary is just to prepare the to-be-stacked object 2 which laminated | stacked three ceramic green sheets 5 hold | maintained at the frame 3. FIG.

As shown in FIG. 1, in order to manufacture a ceramic laminated body using the ceramic green sheet laminating apparatus 1 according to the present embodiment, as a preparatory step, an object to be laminated 2a is formed on the upper surface 6a of the lower mold 6. , 2b are stacked so as not to be misaligned while using an imaging means such as a CCD camera.
In this state, the pressing device 14 is operated to gently lower the heating press facility 8 toward the object 2 to be laminated, and as shown in FIG. The lower surface 12a is brought into contact with the upper surface of the ceramic green sheet 5b.
At this time, if the tip of the cutting edge portion 11 formed at the lower end of the perforated pin 10 comes in contact with the upper surface of the ceramic green sheet 5b before the lower surface 12a of the flat plate 12, the impact There is a possibility that the ceramic green sheet 5b is bent or misaligned, and there is a high possibility that the product will be defective due to the misalignment of the finished ceramic laminate.
Therefore, in the heating press facility 8 according to the present embodiment, the tip of the cutting edge portion 11 formed at the lower end of the punching pin 10 is on the same plane as the lower surface 12a of the flat plate 12 or from the lower surface 12a. Also, by disposing at a position retracted to the upper mold 9 side, the tip of the cutting edge portion 11 is placed on the upper surface of the ceramic green sheet 5b before the lower surface 12a of the flat plate 12 contacts the upper surface of the ceramic green sheet 5b. It prevents contact.
In this case, since the ceramic green sheet 5a and the ceramic green sheet 5b are once fixed by the flat plate 12, the cutting edge portion 11 of the perforated pin 10 can be brought into contact with the upper surface of the ceramic green sheet 5b. Further, there is an effect that it is possible to prevent positional deviation between the ceramic green sheets 5 and the bending of the ceramic green sheets 5.
As a result, there is an effect that it is possible to reduce the possibility of stacking deviations in the finished ceramic laminate.

Then, in this next step, a pressing force is applied to the pressing device 14 in the direction indicated by symbol E in FIG. 3 to lower the perforated pin 10 and, as shown in FIG. While forming the through hole 21 in the ceramic green sheet 5 laminated by the blade portion 11, the perforating pin 10 is inserted into the through hole 21.
In this way, the perforated pins 10 are inserted through the laminated ceramic green sheets 5 to restrain and restrain the deformation and deviation of the laminated ceramic green sheets 5 in the planar direction.
At this time, by providing the cutting edge portion 11 at the tip of the perforating pin 10, the through hole 21 can be easily formed in the laminated ceramic green sheets 5, and at the same time, the perforating hole 21 is perforated. The pin 10 can be inserted smoothly.
In addition, as compared with the case where the stacked ceramic green sheets 5 are restrained by, for example, inserting a plurality of fixing pins erected on the lower mold 6 into through holes previously formed in the ceramic green sheets 5a and 5b. Thus, there is an effect that the possibility that the individual laminated ceramic green sheets 5 are misaligned can be greatly reduced.

That is, when the ceramic green sheets 5 are stacked using the position fixing pins erected on the lower mold 6, the position fixing pins are inserted into the through holes previously formed in the ceramic green sheets 5 a and 5 b. In order to smoothly insert the pin, it is necessary to form a clearance (gap) between the position fixing pin and the side surface of the through hole.
For this reason, in the case where the ceramic green sheets 5 are stacked, it is impossible to avoid the possibility that a positional shift corresponding to this clearance (gap) occurs.
On the other hand, in the ceramic green sheet laminating apparatus 1 according to the present embodiment, in order to restrain the laminated ceramic green sheets 5, the through holes 21 are formed in the ceramic green sheets 5 laminated by the perforating pins 10. Since the perforation pin 10 is inserted into the through hole while forming the hole, the clearance between the perforation pin 10 and the side surface of the through hole 21 can be made almost zero.
As a result, the individual ceramic green sheets 5 can be maintained in a highly accurately positioned state.
Therefore, it is possible to produce a high-quality ceramic laminate with very little stacking deviation.

In this state, the pressing device 14 applies a pressing force in the direction indicated by symbol E in FIG. 4 and simultaneously heats the upper die 9 and the lower die 6 with the heating element 15 and the heating element 16 to thereby produce the ceramic green sheet. What is necessary is just to heat these 5 and to join these together.
Note that the chips 20 generated when the punching pin 10 is inserted are discharged from the through hole 7 formed in the lower mold 6 to the outside.
After this step, as shown in FIG. 5, the pressing device 14 and the heating press facility 8 are raised in the direction indicated by the symbol F in the drawing to separate the flat plate 12 from the upper surface of the ceramic green sheet 5b. .
At this time, as a preparation for the next heating and pressing step, the flat plate 12 is arranged in a state of being separated in parallel with the upper mold 9 and at the same time, the lower end of the punching pin 10 is the same as the lower surface 12 a of the flat plate 12. It is desirable to arrange it on a plane or at a position retracted to the upper mold 9 side from the lower surface 12a.

As described above, the ceramic laminate 22 manufactured through the steps shown in FIGS. 1 and 3 to 5 has two to three ceramic green sheets 5 held by the frame 3 as shown in FIG. It is laminated as it is and joined by temperature and pressure.
Such a ceramic laminated body 22 uses the object 2 to be laminated while holding the ceramic green sheet 5 on the frame 3, thereby causing variations in the external dimensions of the individual ceramic green sheets 5 or impairing their flatness. (P).
At this time, in the object to be laminated 2, the thickness of the ceramic green sheet 5 is obtained by laminating the object to be laminated 2 with the surface on the side where the adhesive sheet 4 is stuck and the upper surface 6a of the lower mold 6 facing each other. There is an effect that the bending of the ceramic green sheet 5 due to the difference in thickness between the frame 3 and the frame 3 can be minimized (Q).
Furthermore, when applying temperature and pressure to the laminated ceramic green sheets 5, by constraining the laminated ceramic green sheets 5 by inserting at least two perforated pins 10 through the laminated ceramic green sheets 5, There is an effect that the positional deviation of the ceramic green sheet 5 due to the operation of the heating press facility 8 can be prevented (R).
Therefore, according to the ceramic green sheet laminating apparatus 1 according to the present embodiment, the effects described in the above (P) to (R) are exhibited at the same time, so that the ceramic laminated body 22 with extremely little laminating deviation is produced. It has the effect that it can be done.
Further, since the jig plate and the position fixing pin are not used when joining the individual laminated ceramic green sheets, there is an effect that it is possible to reduce the time and effort required for the maintenance.

FIG. 6 is a plan view of the ceramic laminated body held by the frame. The same parts as those described in FIGS. 1 to 5 are denoted by the same reference numerals, and description of the configuration is omitted.
As shown in FIG. 6, the ceramic laminate 22 produced using the ceramic green sheet laminating apparatus 1 according to the present embodiment has a perforated pin 10 in the vicinity of the outer edge 25 of the heated and pressurized ceramic 26. A plurality of through holes 21 formed at the time of insertion are formed.
When the stacked ceramic green sheets 5 before the heating / pressurizing treatment are constrained by the perforated pins 10, it is desirable to insert at least one pair of perforated pins 10 on the opposite sides of the ceramic green sheet 5.
In this case, there is an effect that it is possible to more reliably prevent the deformation and misalignment when applying temperature and pressure to the laminated ceramic green sheets 5.
As a result, there is an effect that it is possible to manufacture a ceramic laminated body with very little lamination deviation.
Further, if the cutouts 23a and 23b and the through holes are formed in the frame 3, it is convenient because fixing and positioning when the ceramic green sheet 5 is screen-printed are easy.

  In the present invention, when a plurality of ceramic green sheets are stacked, a punching pin is inserted into and constrained by the ceramic green sheets stacked while being held by the frame body, thereby preventing deformation in the plane direction. Ceramic green sheet laminating apparatus and method for laminating individual ceramic green sheets by pressure and pressure to form a ceramic laminated body, and housing electronic components such as semiconductor elements and crystal resonators in order to function as an electronic apparatus It can be used in the field of manufacturing ceramic packages and the like.

It is sectional drawing which shows the outline | summary of the lamination apparatus of the ceramic green sheet which concerns on this Embodiment. (A) is a top view which shows the external appearance of the ceramic green sheet laminated | stacked in the state hold | maintained at the frame, (b) is an expanded sectional view of the part shown by the code | symbol A in FIG. 2 (a). It is a conceptual diagram which shows the process of manufacturing a ceramic laminated body using the lamination apparatus of the ceramic green sheet which concerns on this Embodiment. It is a conceptual diagram which shows the process of manufacturing a ceramic laminated body using the lamination apparatus of the ceramic green sheet which concerns on this Embodiment. It is a conceptual diagram which shows the process of manufacturing a ceramic laminated body using the ceramic green sheet laminating apparatus which concerns on this Embodiment. It is a top view of the ceramic laminated body of the state hold | maintained at the frame.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Ceramic green sheet laminating device 2, 2a, 2b ... Stack object 3 ... Frame 4 ... Adhesive sheet 5, 5a, 5b ... Ceramic green sheet 6 ... Lower mold 6a ... Upper surface 7 ... Through hole 8 ... Heat press Equipment 9 ... Upper mold 9a ... Lower surface 9b ... Upper surface 10 ... Hole drilling pin 11 ... Cutting blade portion 12 ... Flat plate 12a ... Lower surface 12b ... Upper surface 13 ... Through hole 14 ... Pressing devices 15, 16 ... Heat generating body (heating mechanism) DESCRIPTION OF SYMBOLS 17 ... Air vent (cooling mechanism) 18 ... Heat insulation structure 19 ... Mounting surface 20 ... Chip 21 ... Through-hole 22 ... Ceramic laminated body 23a, 23b ... Notch 24 ... Inner side surface 25 ... Outer edge 26 ... Heating and pressurization completed ceramic

Claims (5)

A laminating apparatus for superposing a plurality of ceramic green sheets and applying a temperature and pressure to form a ceramic laminate,
The ceramic laminating apparatus supports a ceramic green sheet laminated while being held by a frame, and simultaneously heats the laminated ceramic green sheet from the lower surface side, and an upper surface side of the lower mold And a heating press facility for heating and pressurizing from the upper surface side of the laminated ceramic green sheets,
The lower mold includes a through-hole penetrating the thickness portion thereof, and a first heating mechanism that is provided in the thickness portion of the lower mold and heats the lower mold,
The heating press facility includes an upper mold disposed substantially parallel to the upper surface of the lower mold, and at least two perforations provided on the lower surface of the upper mold at a position corresponding to the through hole. A pin and a flat plate disposed on the lower surface side of the upper mold and provided so as to be slidable in the axial direction of the perforation pin while inserting the perforation pin through its thickness portion;
The upper mold includes a second heating mechanism that is installed in a thickness portion thereof and heats the upper mold,
The ceramic green sheet laminating apparatus, wherein the through holes are formed at least one pair on opposite sides of the ceramic green sheet mounting portion.   2. The lower mold according to claim 1, wherein the lower mold includes a heat insulating structure at a thickness portion thereof and at a boundary between the placement portion of the ceramic green sheet and the placement portion of the frame body. Ceramic green sheet laminating equipment.   3. The ceramic green sheet laminating apparatus according to claim 1, wherein the lower mold is a thickness portion thereof, and a cooling mechanism is provided on a mounting portion of the frame body. The ceramic green sheet is arranged in non-contact with the frame on the inner surface side of the frame,
Adhesive tape is straddled across the surface of one side of the frame and the adjacent portion of the one side of the ceramic green sheet disposed on the same side as this surface,
4. The ceramic green sheet is laminated according to claim 1, wherein the ceramic green sheet is laminated while a surface on which the adhesive tape is straddled and an upper surface of the lower mold are opposed to each other. 5. The ceramic green sheet laminating apparatus described. At the same time as supporting the ceramic green sheets laminated while being held in the frame, the lower ceramic mold for heating the laminated ceramic green sheets from the lower surface side, and the upper surface side of the lower mold are provided and laminated In the method of laminating ceramic green sheets using a ceramic green sheet laminating apparatus having a heating press facility for heating and pressurizing from the upper surface side of the ceramic green sheet,
The heating press facility includes an upper mold disposed substantially parallel to the upper surface of the lower mold, a perforated pin standing on the lower surface of the upper mold, and a lower surface side of the upper mold. And a flat plate provided so as to be slidable in the axial direction of the perforation pin while inserting the perforation pin through its thickness portion,
A first step of lowering the heating press equipment and bringing the lower surface of the flat plate into contact with the upper surface of the laminated ceramic green sheets;
After this first step, a second step of inserting the perforated pins through the ceramic green sheet while fixing the ceramic green sheets laminated by the flat plate,
After this second step, a third ceramic laminate is formed by applying heat and pressure to the ceramic green sheet with the upper mold and the lower mold while the punch pin is inserted into the ceramic green sheet. And the process of
A ceramic green sheet laminating method comprising: a fourth step of separating the hot press facility from the ceramic laminate after the third step.