JP5038627B2 - Method for laminating ceramic green sheets - Google Patents

Description

  The present invention relates to a method for laminating ceramic green sheets for producing a ceramic package or the like that houses electronic components such as semiconductor elements and crystal resonators in order to function as an electronic device.

  Conventionally, a ceramic green sheet is used for alignment at the same position of the dummy portion that is the outer peripheral portion of a plurality of ceramic green sheets cut into a rectangular shape of a desired size from a roll shape. A reference through hole is formed. This through hole is used as a reference for printing positioning by inserting it through a guide pin erected on the printing stand for alignment during screen printing of each ceramic green sheet, or a plurality of ceramic green sheets It is used as a reference for superposing a plurality of sheets by sequentially inserting them through guide pins that are erected on the jig plate of the laminating apparatus when laminating sheets.

  However, when the ceramic green sheet is cut into a rectangular shape of a desired size from a roll shape, the ceramic green sheet is subjected to repeated heating and drying during screen printing or pressurization for smoothing the printing surface. Since heat and pressure are applied to the ceramic green sheet, the ceramic green sheet expands and contracts, resulting in a large dimensional variation of the ceramic green sheet. In such a ceramic green sheet, it is impossible to insert a through hole into a guide pin that is erected.

  Therefore, on the ceramic green sheet, the outer peripheral part of the ceramic green sheet is attached to the inner peripheral part of the window frame shape made of a metal plate or the like to restrain the outer peripheral part of the ceramic green sheet. A through-hole is formed in the dummy portion on the outer peripheral portion of the green sheet, and this through-hole is recognized by an image recognition device of a screen printing machine and used as a reference for positioning during printing. Furthermore, this through-hole is used to overlap a plurality of sheets by sequentially inserting them through alignment guide pins erected on a jig plate of a laminating apparatus when laminating a plurality of ceramic green sheets. Yes. The laminated ceramic green sheets are laminated by applying temperature and pressure with a hot press.

The conventional method for laminating ceramic green sheets is to align the ceramic green sheets by adhering them to the punching plate of the laminating equipment after punching the outer shape and adhering the ceramic green sheets. A method of laminating using a laminating apparatus for laminating a plurality of ceramic green sheets by inserting them into the guide pins is disclosed (for example, see Patent Document 1).
In addition, the conventional method of laminating ceramic green sheets does not require through holes and guide pins, and as a method of accurately laminating a plurality of ceramic green sheets, at least two reference through holes are provided. A slit-like cutout is made in the outer peripheral portion of the ceramic green sheet to remove internal residual stress in advance. Further, the ceramic green sheet is placed on the positioning table to recognize the through hole, and based on the result, horizontal position correction is performed to cut a predetermined position on the outer peripheral portion. And the laminated | stacked method of the ceramic green sheet which laminates | stacks the cut | disconnected ceramic green sheet sequentially on the basis of a cut end surface is proposed (for example, refer patent document 1).

Japanese Patent Laid-Open No. 62-124947 JP-A-7-308911

However, the conventional method for laminating ceramic green sheets as described above has the following problems.
(1) A ceramic green sheet whose outer periphery is constrained by a frame is sequentially inserted into alignment guide pins erected on the jig plate of the laminating apparatus, so that a plurality of sheets are superposed and the temperature is obtained by hot pressing. With the method of laminating ceramic green sheets that are laminated under pressure, the thermal expansion coefficients of the frame, ceramic green sheet, and jig plate are different. Thus, the gap between the ceramic green sheets is increased and the respective layers are overlapped, and it is difficult to produce a highly accurate laminate with little stacking deviation.
(2) A lamination method for laminating using a ceramic green sheet laminating apparatus as disclosed in Japanese Patent Application Laid-Open No. 62-124947 is similar to the above, in each of the frame, ceramic green sheet, and jig plate. Because the thermal expansion coefficients are different, there is a difference in expansion and contraction due to the heat of the hot press, and the gap between the ceramic green sheets is increased to overlap each other. It is difficult to make.
(3) The method of laminating ceramic green sheets as disclosed in Japanese Patent Laid-Open No. 7-308911 does not use a through hole and a guide pin at the time of laminating, but is laminated on the basis of the cut end surface of the ceramic green sheet. Therefore, the gap between the ceramic green sheets is increased for the clearance of the apparatus and the respective layers are overlapped, and it is difficult to produce a highly accurate laminate with little stacking deviation.

  The present invention has been made in view of such circumstances, and a ceramic green sheet laminating method for producing a highly accurate laminate with less misalignment by reducing misalignment between a plurality of ceramic green sheets. The purpose is to provide.

A method for laminating ceramic green sheets according to the present invention that meets the above-described object is a method for laminating ceramic green sheets, in which a plurality of ceramic green sheets are joined together by applying temperature and pressure to form a laminate. The first ceramic green sheet which is the lowermost layer holding the outer peripheral part of the frame with the frame, and only one or more sheets of the outer peripheral part of the ceramic green sheet to be superimposed on the lowermost layer held by the frame The first step of preparing the second ceramic green sheet, and the frame is removed by cutting the outer periphery with the second ceramic green sheet held by the adsorbent, and then the upper surface of the first ceramic green sheet In the state where it is held by the adsorbent, it is positioned and placed by the image recognition device, and the second is obtained by hot bar or ultrasonic waves. A second step of temporarily fixing the dummy part of the first and second ceramic green sheets by a bonding apparatus capable of partial heating by locally heating from the upper side of the ceramic green sheet, and a second step of temporarily fixing in the second step In the same manner as in the second step, after the other second ceramic green sheet is held by the adsorbent, the outer peripheral portion is cut and the frame body is removed on the ceramic green sheet. And the third step of temporarily fixing the dummy part of the second and other second ceramic green sheets by the bonding apparatus, the first ceramic green sheet, and the second ceramic green It has the 4th process of joining all the sheets under temperature and pressure, and the 5th process of removing the frame of the 1st ceramic green sheet, and forming a layered product.

  The method for laminating ceramic green sheets according to claim 1, wherein a plurality of ceramic green sheets are laminated and bonded by applying temperature and pressure to form a laminated body. The first ceramic green sheet that is the lowermost layer held by the frame and the outer peripheral part of the ceramic green sheet to be overlaid on the lowermost layer is held by the frame, or a plurality of second ceramic green sheets The first step of preparing the ceramic green sheet, and the frame is removed by cutting the outer periphery while the second ceramic green sheet is held by the adsorbent, and then the adsorbent on the upper surface of the first ceramic green sheet In this state, the image is recognized and placed by the image recognition apparatus, and the second ceramic group is heated by a hot bar or ultrasonic waves. A second step of temporarily fixing the dummy portion of the first and second ceramic green sheets by a bonding apparatus capable of partial heating by locally heating from the upper side of the green sheet, and a second ceramic temporarily fixed in the second step In the same manner as in the second step, on the green sheet, the outer peripheral portion is cut and the frame body is removed while the other second ceramic green sheet is held by the adsorbent, and then the image recognition apparatus is used to position the green sheet. And a third step of temporarily fixing the dummy ceramic portions of the second and other second ceramic green sheets by a bonding device, a first ceramic green sheet, and a second ceramic green sheet. Since there is a fourth step in which everything is joined by applying temperature and pressure, and a fifth step in which the frame of the first ceramic green sheet is removed to form a laminate, the second step The outer peripheral portion is cut and removed while the Mic green sheet is held by the adsorbent, and in this state, the first ceramic green sheet and / or the second is accurately aligned by using the image recognition device without using the guide pin. It can be placed on the ceramic green sheet and can be partially bonded to the first ceramic green sheet and / or the second ceramic green sheet at room temperature and temporarily fixed. The gap between the plurality of ceramic green sheets due to the difference in thermal expansion coefficient as in the case of forming a laminate can be reduced, and a highly accurate laminate with little stacking deviation can be produced.

Next, embodiments of the present invention will be described with reference to the accompanying drawings to provide an understanding of the present invention.
1A to 1E are partial explanatory views of a method for laminating ceramic green sheets according to an embodiment of the present invention. FIGS. 2A to 2D are ceramic green sheets, respectively. It is a partial explanatory view of the laminating method.

As shown in FIG. 1A, each of the plurality of ceramic green sheets for producing the laminate 10 (see FIG. 2D) is made of alumina (Al ₂ O ₃ ), aluminum nitride (AlN), or the like. High temperature fired ceramics, low temperature fired ceramics such as glass ceramics, and the like can be used. For example, when the ceramic green sheet is made of alumina, a powder obtained by adding an appropriate amount of a sintering aid such as magnesia, silica, and calcia to alumina powder, a plasticizer such as dioxyl phthalate, a binder such as acrylic resin, and the like Then, after adding a solvent such as toluene, xylene, alcohols, etc., sufficiently mixed, defoamed to prepare a slurry having a viscosity of 2000 to 40000 cps. A sheet is prepared and cut into an appropriate size as desired to produce a plurality of ceramic green sheets. Although not shown, the laminate 10 has via conductors and through holes for image recognition formed in each of the plurality of ceramic green sheets, and a conductor wiring pattern is formed on each ceramic green sheet. After screen printing, all ceramic green sheets are overlapped and joined by applying temperature and pressure.

  The first ceramic green sheet 11 which is the lowermost layer of the laminated body 10 among the plurality of ceramic green sheets has a window frame-shaped frame body 12 made of a metal plate such as stainless steel bonded to the outer peripheral portion with an adhesive tape or the like. The first ceramic green sheet 11 is held on the frame body 12. In addition, one or a plurality of, for example, two layers of the second ceramic green sheets 13 and 13a to be overlaid on the lowermost layer are made of stainless steel at the outer periphery as in the case of the first ceramic green sheet 11. It prepares in the state hold | maintained by the window frame-shaped frame 12 which consists of metal plates, such as. The first and second ceramic green sheets 11, 13, 13 a and the frame 12 are joined together by, for example, the outer peripheral end surfaces of the first and second ceramic green sheets 11, 13, 13 a and the respective frames. A gap of about 1 mm is provided between the inner peripheral end face of the body 12 and the end faces are placed on the base so as to face each other, and the first and second ceramic green sheets 11, 13, It is pasted from above so as to straddle the outer peripheral part of 13a and the inner peripheral part of the frame 12. The first and second ceramic green sheets 11, 13, and 13 a are attached to the outer periphery of the frame 12 and the inner periphery of the frame 12 with an adhesive tape, so that the frame 12 and the first Since steps in the thickness direction can be reduced between the second ceramic green sheets 11, 13, and 13a, workability when processing on a processing table such as screen printing can be improved.

  Next, as shown in FIGS. 1B and 1C, the second ceramic green sheet 13 is cut by the outer peripheral portion while being adsorbed and held by the adsorbent body 14 to remove the frame body 12. ing. The suction force of the adsorption body 14 requires a strong suction force that does not cause a dimensional change in the ceramic green sheet after the frame body 12 is cut off.

  Next, as shown in FIGS. 1D and 1E, the second ceramic green sheet 13 from which the frame body 12 has been removed is the first ceramic green sheet 11 held by the frame body 12. On the upper surface, the image is recognized and held by the image recognition apparatus while being adsorbed and held by the adsorbing body 14. And with this placement, the first ceramic green sheet 11 and the second ceramic green sheet 13 are inserted with a hot bar 16 in a through hole 15 previously drilled in the adsorbent body 14, or ultrasonic The first ceramic green sheet 11 and the second ceramic green can be obtained by leaching out the binder of the ceramic green sheet by an adhesive device (not shown) that can be heated and bonded locally by inserting a transmitter or the like. A temporary fixing portion 17 is provided by bonding and temporarily fixing at a plurality of positions of the dummy portion which is the outer peripheral portion of the sheet 13.

  Next, as shown in FIGS. 2A and 2B, the frame 12 is removed by being temporarily fixed to the upper surface of the first ceramic green sheet 11 held by the frame 12 by the temporary fixing portion 17. On the second ceramic green sheet 13, after removing the frame body 12 by cutting the outer peripheral portion with the other second ceramic green sheet 13 a held by the adsorbent body 14 in the same manner as described above. The image recognition device is positioned and placed in a state where it is sucked and held by the suction body 14. And with this mounting, the second ceramic green sheet 13 and the other second ceramic green sheet 13a are inserted with the hot bar 16 in the through hole 15 previously drilled in the adsorbent body 14, or The second ceramic green sheet 13 and the other second ceramic green sheet 13 are leached out by leaching out the binder of the ceramic green sheet by an adhesive device (not shown) that can be heated and bonded locally by inserting an ultrasonic transmitter. The two ceramic green sheets 13a are bonded and temporarily fixed at a plurality of dummy portions, which are the outer peripheral portions, to provide temporary fixing portions 17a. In addition, when other 2nd ceramic green sheet (not shown) is temporarily fixed as needed, temporary fixing is performed sequentially like the above.

  Next, as shown in FIG. 2C, the first ceramic green sheet 11 held by the frame body 12 in the temporarily fixed state and the second ceramic green sheet 13 from which the frame body 12 has been removed. , 13a are joined by being pressed between pressure presses that can be heated from the upper and lower surfaces and pressed by applying temperature and pressure.

  Next, as shown in FIG. 2D, all of the first ceramic green sheet 11 held by the frame 12 and the second ceramic green sheets 13 and 13a from which the frame 12 has been removed are joined. The joined body forms the laminated body 10 by cutting the outer peripheral portion of the first ceramic green sheet 11 and removing the frame body 12. Since this laminated body 10 can be firmly and accurately fixed at room temperature when the first ceramic green sheet 11 and the second ceramic green sheets 13 and 13a are temporarily fixed, there is little misalignment between the plurality of ceramic green sheets. Thus, a highly accurate laminate 10 with less misalignment can be obtained.

  Although not shown in the figure, the laminated body 10 is formed with, for example, a V-shaped or U-shaped dividing groove for forming a large number of individual ceramic packages. Furthermore, when the ceramic is made of alumina, the laminated body 10 is also an aggregate of a plurality of ceramic packages obtained by simultaneous firing with a conductor metal forming a conductor wiring pattern at a high temperature of about 1600 ° C. in a reducing atmosphere. A fired body made of is formed. In the fired body, a Ni plating film is formed on the conductive metal as necessary, and then KV (Fe—Ni—Co alloy, trade name “Kovar”) or 42 alloy (Fe—Ni system). A metal ring made of an alloy or the like is joined with a high-temperature brazing material such as Ag-Cu brazing, and a Ni plating film and an Au plating film are formed on the metal surface exposed to the outside.

  The present invention is small in size and requires high reliability, for example, a semiconductor element used for incorporation into an electronic device such as a mobile phone or a notebook personal computer, an electronic device such as a crystal resonator or a piezoelectric element. It can be used in a method for laminating ceramic green sheets for producing a ceramic package or the like on which components are mounted.

(A)-(E) are some explanatory drawings of the lamination | stacking method of the ceramic green sheet which concerns on one embodiment of this invention, respectively. (A)-(D) are some explanatory drawings of the lamination | stacking method of the same ceramic green sheet, respectively.

Explanation of symbols

  10: Laminated body, 11: First ceramic green sheet, 12: Frame body, 13, 13a: Second ceramic green sheet, 14: Adsorbent, 15: Through hole, 16: Hot bar, 17, 17a: Temporary Fixed part

Claims (1)

In the method of laminating ceramic green sheets in which a plurality of ceramic green sheets are laminated and bonded by applying temperature and pressure to form a laminate,
The first ceramic green sheet as the lowermost layer in which the outer peripheral part of the ceramic green sheet is held by a frame, and only one sheet in which the outer peripheral part of the ceramic green sheet to be superimposed on the lowermost layer is held by the frame Or a first step of preparing a plurality of second ceramic green sheets;
An image recognition apparatus in a state where the outer peripheral portion is cut and the frame body is removed while the second ceramic green sheet is held by an adsorbent, and is then held on the upper surface of the first ceramic green sheet by the adsorbent. And a dummy part of the first and second ceramic green sheets by a bonding device that can be partially bonded by being heated locally from the upper side of the second ceramic green sheet by a hot bar or ultrasonic waves. A second step of temporarily fixing with,
On the second ceramic green sheet temporarily fixed in the second step, the other second ceramic green sheets are sequentially held in the adsorbent in the same manner as in the second step. After the outer peripheral portion is cut and the frame body is removed, the frame is aligned and placed by the image recognition device, and temporarily fixed by the dummy portion of the second and other second ceramic green sheets by the bonding device. A third step of
A fourth step of joining all of the first ceramic green sheet and the second ceramic green sheet by applying temperature and pressure;
A method for laminating ceramic green sheets, comprising a fifth step of forming the laminated body by removing the frame body of the first ceramic green sheet.

Images