JP2007124613A5 - - Google Patents
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- Publication number
- JP2007124613A5 JP2007124613A5 JP2006181649A JP2006181649A JP2007124613A5 JP 2007124613 A5 JP2007124613 A5 JP 2007124613A5 JP 2006181649 A JP2006181649 A JP 2006181649A JP 2006181649 A JP2006181649 A JP 2006181649A JP 2007124613 A5 JP2007124613 A5 JP 2007124613A5
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic transducer
- capacitive ultrasonic
- nickel
- support frame
- nimn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW094137938A TWI268183B (en) | 2005-10-28 | 2005-10-28 | Capacitive ultrasonic transducer and method of fabricating the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007124613A JP2007124613A (ja) | 2007-05-17 |
| JP2007124613A5 true JP2007124613A5 (enExample) | 2009-02-26 |
| JP4425245B2 JP4425245B2 (ja) | 2010-03-03 |
Family
ID=37996106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006181649A Expired - Fee Related JP4425245B2 (ja) | 2005-10-28 | 2006-06-30 | 容量性超音波振動子およびその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US20070097791A1 (enExample) |
| JP (1) | JP4425245B2 (enExample) |
| KR (1) | KR100791821B1 (enExample) |
| TW (1) | TWI268183B (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITRM20060238A1 (it) * | 2006-05-03 | 2007-11-04 | Esaote Spa | Trasduttore ultracustico capacitivo multipiano |
| US7721397B2 (en) * | 2007-02-07 | 2010-05-25 | Industrial Technology Research Institute | Method for fabricating capacitive ultrasonic transducers |
| JP5611830B2 (ja) | 2007-12-03 | 2014-10-22 | コロ テクノロジーズ インコーポレイテッド | 静電型変換器アレイのパッケージングおよび接続 |
| JP5269090B2 (ja) * | 2007-12-03 | 2013-08-21 | コロ テクノロジーズ インコーポレイテッド | 静電変換器およびアレイにおけるスルーウエハ相互接続部 |
| JP6023787B2 (ja) * | 2011-03-28 | 2016-11-09 | 東京エレクトロン株式会社 | イオンエネルギーアナライザ、イオンエネルギーアナライザを有する診断用ウエハ |
| JP5896665B2 (ja) * | 2011-09-20 | 2016-03-30 | キヤノン株式会社 | 電気機械変換装置の製造方法 |
| CN105122488B (zh) | 2013-03-14 | 2018-01-26 | 火山公司 | 晶片级换能器涂覆和方法 |
| US10058892B2 (en) | 2015-05-20 | 2018-08-28 | uBeam Inc. | Membrane bonding |
| US10065854B2 (en) * | 2015-05-20 | 2018-09-04 | uBeam Inc. | Membrane bonding with photoresist |
| US10315224B2 (en) | 2015-05-20 | 2019-06-11 | uBeam Inc. | Ultrasonic transducer |
| KR102244601B1 (ko) * | 2019-05-29 | 2021-04-26 | 인하대학교 산학협력단 | 정전용량형 미세가공 초음파 트랜스듀서 및 그 제조방법 |
| CN110510573B (zh) * | 2019-08-30 | 2023-01-10 | 中国科学院深圳先进技术研究院 | 一种电容式微机械超声换能器及其制备方法和应用 |
| TWI738290B (zh) * | 2020-04-10 | 2021-09-01 | 友達光電股份有限公司 | 換能裝置、換能結構及其製造方法 |
| TWI718073B (zh) * | 2020-06-19 | 2021-02-01 | 友達光電股份有限公司 | 電容式換能裝置及其製造方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1975801A (en) * | 1930-12-15 | 1934-10-09 | Sound Lab Corp Ltd | Microphone |
| US4262399A (en) * | 1978-11-08 | 1981-04-21 | General Electric Co. | Ultrasonic transducer fabricated as an integral park of a monolithic integrated circuit |
| US5894452A (en) * | 1994-10-21 | 1999-04-13 | The Board Of Trustees Of The Leland Stanford Junior University | Microfabricated ultrasonic immersion transducer |
| US5619476A (en) * | 1994-10-21 | 1997-04-08 | The Board Of Trustees Of The Leland Stanford Jr. Univ. | Electrostatic ultrasonic transducer |
| US6295247B1 (en) * | 1998-10-02 | 2001-09-25 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined rayleigh, lamb, and bulk wave capacitive ultrasonic transducers |
| JP3440037B2 (ja) | 1999-09-16 | 2003-08-25 | 三洋電機株式会社 | 半導体装置、半導体エレクトレットコンデンサマイクロホンおよび半導体エレクトレットコンデンサマイクロホンの製造方法。 |
| US6443901B1 (en) * | 2000-06-15 | 2002-09-03 | Koninklijke Philips Electronics N.V. | Capacitive micromachined ultrasonic transducers |
| ITRM20030318A1 (it) | 2003-06-25 | 2004-12-26 | Esaote Spa | Trasduttore ultracustico capacitivo microlavorato e |
| JP4193615B2 (ja) | 2003-07-04 | 2008-12-10 | セイコーエプソン株式会社 | 超音波変換装置 |
| JP2007528153A (ja) | 2004-02-06 | 2007-10-04 | ジョージア テック リサーチ コーポレイション | Ｃｍｕｔデバイス及び製造方法 |
| JP2007527285A (ja) | 2004-02-27 | 2007-09-27 | ジョージア テック リサーチ コーポレイション | 多要素電極ｃｍｕｔ素子及び製作方法 |
| US7646133B2 (en) * | 2004-02-27 | 2010-01-12 | Georgia Tech Research Corporation | Asymmetric membrane cMUT devices and fabrication methods |
| US7530952B2 (en) | 2004-04-01 | 2009-05-12 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive ultrasonic transducers with isolation posts |
| US7251884B2 (en) * | 2004-04-26 | 2007-08-07 | Formfactor, Inc. | Method to build robust mechanical structures on substrate surfaces |
| US7470232B2 (en) * | 2004-05-04 | 2008-12-30 | General Electric Company | Method and apparatus for non-invasive ultrasonic fetal heart rate monitoring |
| TWI260940B (en) | 2005-06-17 | 2006-08-21 | Ind Tech Res Inst | Method for producing polymeric capacitive ultrasonic transducer |
-
2005
- 2005-10-28 TW TW094137938A patent/TWI268183B/zh not_active IP Right Cessation
-
2006
- 2006-01-04 US US11/324,408 patent/US20070097791A1/en not_active Abandoned
- 2006-06-30 KR KR1020060060509A patent/KR100791821B1/ko not_active Expired - Fee Related
- 2006-06-30 JP JP2006181649A patent/JP4425245B2/ja not_active Expired - Fee Related
-
2008
- 2008-03-14 US US12/049,224 patent/US7937834B2/en not_active Expired - Fee Related