JP2007123449A - 光学部品の製造方法及び発光素子 - Google Patents
光学部品の製造方法及び発光素子 Download PDFInfo
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- JP2007123449A JP2007123449A JP2005311999A JP2005311999A JP2007123449A JP 2007123449 A JP2007123449 A JP 2007123449A JP 2005311999 A JP2005311999 A JP 2005311999A JP 2005311999 A JP2005311999 A JP 2005311999A JP 2007123449 A JP2007123449 A JP 2007123449A
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- light
- alkali metal
- roughening
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
- C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/006—Other surface treatment of glass not in the form of fibres or filaments by irradiation by plasma or corona discharge
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/40—Coatings comprising at least one inhomogeneous layer
- C03C2217/42—Coatings comprising at least one inhomogeneous layer consisting of particles only
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/77—Coatings having a rough surface
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/34—Masking
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/355—Temporary coating
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Plasma & Fusion (AREA)
- Dispersion Chemistry (AREA)
- Composite Materials (AREA)
- Led Device Packages (AREA)
- Led Devices (AREA)
Abstract
【解決手段】 光学部品を構成する被処理体1において光が入射又は出射する面を、アルカリ金属を含むハロゲンプラズマ3を用いた反応性イオンエッチングにより粗面化する。アルカリ金属による粒子状のマスクの形成と、ハロゲンプラズマ3によるエッチングとが同時に行われるから、マスクを形成する工程を別途必要とせず容易である。また、研磨による粗面化と違い、残留応力やクラックが発生しない。
【選択図】図1
Description
2 ガラス板
3 ハロゲンプラズマ
6 蛍光体
10 LEDチップ
11 結晶成長用基板
Claims (6)
- 光が入射又は出射する被処理面を、アルカリ金属を含むハロゲンプラズマを用いた反応性イオンエッチングにより粗面化する工程を備えることを特徴とする光学部品の製造方法。
- SiCで構成された被処理面を、アルカリ金属を含むハロゲンプラズマとしてのCF4プラズマを用いた反応性イオンエッチングにより粗面化する工程を備えることを特徴とする請求項1記載の光学部品の製造方法。
- ハロゲンプラズマと被処理面とが存在する環境下に、アルカリ金属を含むガラスを配置することによりハロゲンプラズマにアルカリ金属を含ませることを特徴とする請求項1又は請求項2記載の光学部品の製造方法。
- 被処理面を粗面化する工程の後に、被処理面に残存するアルカリ金属やハロゲン化合物をアッシングにより除去する工程を備えることを特徴とする請求項1〜3のいずれか記載の光学部品の製造方法。
- 請求項1〜4のいずれかの製造方法によって光の出射面が粗面化されていることを特徴とする発光素子。
- 発生する光の波長を変換する物質を含む蛍光体が、請求項1〜4のいずれかの製造方法によって粗面化された被処理面に含浸されていることを特徴とする請求項5記載の発光素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005311999A JP4852972B2 (ja) | 2005-10-26 | 2005-10-26 | 光学部品の製造方法及び発光素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005311999A JP4852972B2 (ja) | 2005-10-26 | 2005-10-26 | 光学部品の製造方法及び発光素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007123449A true JP2007123449A (ja) | 2007-05-17 |
JP4852972B2 JP4852972B2 (ja) | 2012-01-11 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005311999A Expired - Fee Related JP4852972B2 (ja) | 2005-10-26 | 2005-10-26 | 光学部品の製造方法及び発光素子 |
Country Status (1)
Country | Link |
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JP (1) | JP4852972B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20150104637A (ko) * | 2007-09-28 | 2015-09-15 | 오스람 옵토 세미컨덕터스 게엠베하 | 복사 방출 반도체칩 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH053079A (ja) * | 1991-06-24 | 1993-01-08 | Pioneer Electron Corp | 有機el素子 |
JPH10270754A (ja) * | 1997-03-24 | 1998-10-09 | Sanyo Electric Co Ltd | 半導体発光素子および発光ランプ |
JP2003046124A (ja) * | 2001-07-26 | 2003-02-14 | Matsushita Electric Works Ltd | 発光素子及びその製造方法 |
JP2003086787A (ja) * | 2001-09-13 | 2003-03-20 | Hitachi Ltd | 半導体装置とその製造方法 |
WO2003067293A1 (fr) * | 2002-02-06 | 2003-08-14 | Matsushita Electric Industrial Co., Ltd. | Procede de fabrication de guide d'onde optique |
JP2004506330A (ja) * | 2000-08-09 | 2004-02-26 | サンディア コーポレーション | シリコン太陽電池を粗面状化するための金属触媒技術 |
-
2005
- 2005-10-26 JP JP2005311999A patent/JP4852972B2/ja not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH053079A (ja) * | 1991-06-24 | 1993-01-08 | Pioneer Electron Corp | 有機el素子 |
JPH10270754A (ja) * | 1997-03-24 | 1998-10-09 | Sanyo Electric Co Ltd | 半導体発光素子および発光ランプ |
JP2004506330A (ja) * | 2000-08-09 | 2004-02-26 | サンディア コーポレーション | シリコン太陽電池を粗面状化するための金属触媒技術 |
JP2003046124A (ja) * | 2001-07-26 | 2003-02-14 | Matsushita Electric Works Ltd | 発光素子及びその製造方法 |
JP2003086787A (ja) * | 2001-09-13 | 2003-03-20 | Hitachi Ltd | 半導体装置とその製造方法 |
WO2003067293A1 (fr) * | 2002-02-06 | 2003-08-14 | Matsushita Electric Industrial Co., Ltd. | Procede de fabrication de guide d'onde optique |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20150104637A (ko) * | 2007-09-28 | 2015-09-15 | 오스람 옵토 세미컨덕터스 게엠베하 | 복사 방출 반도체칩 |
KR101718271B1 (ko) * | 2007-09-28 | 2017-03-20 | 오스람 옵토 세미컨덕터스 게엠베하 | 복사 방출 반도체칩 |
Also Published As
Publication number | Publication date |
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JP4852972B2 (ja) | 2012-01-11 |
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