JP2007119913A5 - - Google Patents

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Publication number
JP2007119913A5
JP2007119913A5 JP2006258902A JP2006258902A JP2007119913A5 JP 2007119913 A5 JP2007119913 A5 JP 2007119913A5 JP 2006258902 A JP2006258902 A JP 2006258902A JP 2006258902 A JP2006258902 A JP 2006258902A JP 2007119913 A5 JP2007119913 A5 JP 2007119913A5
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JP
Japan
Prior art keywords
raw material
material powder
substrate
polycrystalline
100ppm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006258902A
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English (en)
Japanese (ja)
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JP4921091B2 (ja
JP2007119913A (ja
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Priority to JP2006258902A priority Critical patent/JP4921091B2/ja
Priority claimed from JP2006258902A external-priority patent/JP4921091B2/ja
Publication of JP2007119913A publication Critical patent/JP2007119913A/ja
Publication of JP2007119913A5 publication Critical patent/JP2007119913A5/ja
Application granted granted Critical
Publication of JP4921091B2 publication Critical patent/JP4921091B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006258902A 2005-09-30 2006-09-25 複合構造物の製造方法、不純物除去処理装置、成膜装置、及び、複合構造物 Expired - Fee Related JP4921091B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006258902A JP4921091B2 (ja) 2005-09-30 2006-09-25 複合構造物の製造方法、不純物除去処理装置、成膜装置、及び、複合構造物

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005289261 2005-09-30
JP2005289261 2005-09-30
JP2006258902A JP4921091B2 (ja) 2005-09-30 2006-09-25 複合構造物の製造方法、不純物除去処理装置、成膜装置、及び、複合構造物

Publications (3)

Publication Number Publication Date
JP2007119913A JP2007119913A (ja) 2007-05-17
JP2007119913A5 true JP2007119913A5 (enExample) 2009-04-09
JP4921091B2 JP4921091B2 (ja) 2012-04-18

Family

ID=38144051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006258902A Expired - Fee Related JP4921091B2 (ja) 2005-09-30 2006-09-25 複合構造物の製造方法、不純物除去処理装置、成膜装置、及び、複合構造物

Country Status (1)

Country Link
JP (1) JP4921091B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4879002B2 (ja) * 2006-12-04 2012-02-15 コバレントマテリアル株式会社 半導体製造装置用部材
EP2187708B1 (en) * 2007-09-10 2013-01-23 Ulvac, Inc. Film deposition apparatus with organic-material vapor generator
JP5130991B2 (ja) * 2008-03-27 2013-01-30 株式会社Ｉｈｉ コールドスプレー方法、コールドスプレー装置
JP2014145103A (ja) * 2013-01-29 2014-08-14 Hitachi Ltd 構造物作製装置および構造物作製方法
JP6122730B2 (ja) * 2013-08-08 2017-04-26 積水化学工業株式会社 成膜方法、成膜装置、光電極の製造方法および色素増感太陽電池の製造方法
KR102382221B1 (ko) * 2020-07-30 2022-04-04 한국핵융합에너지연구원 코팅용 분체 에어로졸 증착용 마이크로웨이브 플라즈마 노즐 및 이를 이용하는 코팅용 분체 에어로졸에 의한 코팅 장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001015472A (ja) * 1999-06-28 2001-01-19 Hoya Schott Kk 紫外光照射方法及び装置
JP2002235181A (ja) * 1999-10-12 2002-08-23 National Institute Of Advanced Industrial & Technology 複合構造物及びその製造方法並びに作製装置
JP3897623B2 (ja) * 2001-10-11 2007-03-28 独立行政法人産業技術総合研究所 複合構造物作製方法
TWI330672B (en) * 2002-05-28 2010-09-21 Nat Inst Of Advanced Ind Scien Method for forming ultrafine particle brittle material at low temperature
JP4075716B2 (ja) * 2003-07-16 2008-04-16 Ｔｏｔｏ株式会社 複合構造物作製装置
JP4094521B2 (ja) * 2003-10-17 2008-06-04 富士フイルム株式会社 構造物の製造方法

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