JP2007088819A - 圧電薄膜振動子 - Google Patents

圧電薄膜振動子 Download PDF

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Publication number
JP2007088819A
JP2007088819A JP2005275190A JP2005275190A JP2007088819A JP 2007088819 A JP2007088819 A JP 2007088819A JP 2005275190 A JP2005275190 A JP 2005275190A JP 2005275190 A JP2005275190 A JP 2005275190A JP 2007088819 A JP2007088819 A JP 2007088819A
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JP
Japan
Prior art keywords
thin film
piezoelectric
layer
vibrator
diamond
Prior art date
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JP2005275190A
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English (en)
Japanese (ja)
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JP2007088819A5 (enExample
Inventor
Makoto Furuhata
誠 古畑
Satoru Fujii
知 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2005275190A priority Critical patent/JP2007088819A/ja
Publication of JP2007088819A publication Critical patent/JP2007088819A/ja
Publication of JP2007088819A5 publication Critical patent/JP2007088819A5/ja
Withdrawn legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2005275190A 2005-09-22 2005-09-22 圧電薄膜振動子 Withdrawn JP2007088819A (ja)

Priority Applications (1)

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JP2005275190A JP2007088819A (ja) 2005-09-22 2005-09-22 圧電薄膜振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005275190A JP2007088819A (ja) 2005-09-22 2005-09-22 圧電薄膜振動子

Publications (2)

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JP2007088819A true JP2007088819A (ja) 2007-04-05
JP2007088819A5 JP2007088819A5 (enExample) 2008-10-16

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JP2005275190A Withdrawn JP2007088819A (ja) 2005-09-22 2005-09-22 圧電薄膜振動子

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JP (1) JP2007088819A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012199934A (ja) * 2007-05-14 2012-10-18 Cree Inc バルク音響デバイスおよびその作製方法
JP2013026250A (ja) * 2011-07-15 2013-02-04 Murata Mfg Co Ltd 圧電薄膜素子の製造方法
US20200021270A1 (en) * 2018-07-11 2020-01-16 Gregory Walker Johnson Diamond nano resonator semi conductor
JP7600973B2 (ja) 2021-12-08 2024-12-17 株式会社Sumco 積層ウェーハ及びその製造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10209794A (ja) * 1997-01-21 1998-08-07 Mitsubishi Materials Corp 圧電薄膜共振子
JP2001102902A (ja) * 1999-09-29 2001-04-13 Kyocera Corp 圧電共振子
JP2001185985A (ja) * 1999-12-27 2001-07-06 Kyocera Corp 圧電共振子
JP2001326553A (ja) * 2000-05-17 2001-11-22 Murata Mfg Co Ltd 圧電フィルタ、通信装置および圧電フィルタの製造方法
JP2004101390A (ja) * 2002-09-10 2004-04-02 Nippon Platec Co Ltd ダイヤモンドｑｃｍの作製方法及びそのダイヤモンドｑｃｍ
WO2004104272A1 (ja) * 2003-05-26 2004-12-02 Sumitomo Electric Industries, Ltd. ダイヤモンド被覆電極及びその製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10209794A (ja) * 1997-01-21 1998-08-07 Mitsubishi Materials Corp 圧電薄膜共振子
JP2001102902A (ja) * 1999-09-29 2001-04-13 Kyocera Corp 圧電共振子
JP2001185985A (ja) * 1999-12-27 2001-07-06 Kyocera Corp 圧電共振子
JP2001326553A (ja) * 2000-05-17 2001-11-22 Murata Mfg Co Ltd 圧電フィルタ、通信装置および圧電フィルタの製造方法
JP2004101390A (ja) * 2002-09-10 2004-04-02 Nippon Platec Co Ltd ダイヤモンドｑｃｍの作製方法及びそのダイヤモンドｑｃｍ
WO2004104272A1 (ja) * 2003-05-26 2004-12-02 Sumitomo Electric Industries, Ltd. ダイヤモンド被覆電極及びその製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012199934A (ja) * 2007-05-14 2012-10-18 Cree Inc バルク音響デバイスおよびその作製方法
JP2013026250A (ja) * 2011-07-15 2013-02-04 Murata Mfg Co Ltd 圧電薄膜素子の製造方法
US20200021270A1 (en) * 2018-07-11 2020-01-16 Gregory Walker Johnson Diamond nano resonator semi conductor
JP7600973B2 (ja) 2021-12-08 2024-12-17 株式会社Sumco 積層ウェーハ及びその製造方法

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