JP2007074832A5 - - Google Patents
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- Publication number
- JP2007074832A5 JP2007074832A5 JP2005259989A JP2005259989A JP2007074832A5 JP 2007074832 A5 JP2007074832 A5 JP 2007074832A5 JP 2005259989 A JP2005259989 A JP 2005259989A JP 2005259989 A JP2005259989 A JP 2005259989A JP 2007074832 A5 JP2007074832 A5 JP 2007074832A5
- Authority
- JP
- Japan
- Prior art keywords
- linear motor
- axis
- axis linear
- magnet type
- movable magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 230000001105 regulatory effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005259989A JP2007074832A (ja) | 2005-09-08 | 2005-09-08 | 可動磁石型ｚ軸リニアモータ及び機能性薄膜用製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005259989A JP2007074832A (ja) | 2005-09-08 | 2005-09-08 | 可動磁石型ｚ軸リニアモータ及び機能性薄膜用製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007074832A JP2007074832A (ja) | 2007-03-22 |
| JP2007074832A5 true JP2007074832A5 (enrdf_load_stackoverflow) | 2008-09-25 |
Family
ID=37935788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005259989A Pending JP2007074832A (ja) | 2005-09-08 | 2005-09-08 | 可動磁石型ｚ軸リニアモータ及び機能性薄膜用製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007074832A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2048556B1 (de) * | 2007-10-08 | 2010-11-24 | Siemens Aktiengesellschaft | Verfahren zur Ermittlung von Kenngrössen einer angetriebenen nicht horizontal ausgerichteten Achse, insbesondere einer Werkzeugmaschine, sowie geeignete Anwendungen, korrespondierende Vorrichtungen und deren Verwendung |
| US11557954B2 (en) | 2017-10-27 | 2023-01-17 | Canon Kabushiki Kaisha | Transport system, processing system, and article manufacturing method |
| JP2019103225A (ja) * | 2017-11-30 | 2019-06-24 | キヤノン株式会社 | 搬送装置、加工システム、および物品の製造方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3719543B2 (ja) * | 1996-02-19 | 2005-11-24 | 株式会社安川電機 | リニアモータ |
| JPH11248926A (ja) * | 1998-03-03 | 1999-09-17 | Seiko Epson Corp | フィルター製造装置とフィルター製造方法およびカラーフィルター |
| JP3701882B2 (ja) * | 2001-05-25 | 2005-10-05 | 株式会社 日立インダストリイズ | ペースト塗布機 |
| JP2002359961A (ja) * | 2001-06-01 | 2002-12-13 | Hitachi Metals Ltd | リニアモータおよびステージ装置 |
| JP2004337769A (ja) * | 2003-05-16 | 2004-12-02 | Seiko Epson Corp | 液滴吐出装置、電気光学装置の製造方法、電気光学装置、および電子機器 |
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2005
- 2005-09-08 JP JP2005259989A patent/JP2007074832A/ja active Pending