JP2007074832A5 - - Google Patents

Claims (6)

A mover configured to have a magnetic circuit having a substantially U-shaped cross-section along the Z-axis by a permanent magnet and a yoke, and to move freely in the Z-axis direction, and the magnetic circuit in the Z-axis direction A movable magnet type Z-axis linear motor comprising: a magnetic gap formed along a magnetic pole; and a stator having a multiphase coil facing the magnetic pole of the magnetic circuit of the mover via the magnetic gap;
A Z-axis traveling rail is laid on the outer surface of the yoke, and the movable element travels in the Z-axis direction while a support sliding member provided on the stator is regulated by the rail. Magnet type Z-axis linear motor. The movable magnet type Z-axis linear motor according to claim 1, that the movable magnet type you wherein said permanent magnet on the back side of the yoke traveling rail in the Z-axis is laid is disposed Z Axis linear motor. 3. The movable magnet type Z-axis linear motor according to claim 1, wherein when the multiphase coil is not energized, the mover is mechanically locked to prevent the mover from dropping in the Z-axis direction. moving magnet type Z-axis linear motors you further comprising a locking mechanism. The movable magnet type Z-axis linear motor according to any one of claims 1 to 3, wherein the movable element is movable magnet type Z-axis linear motors you characterized in that it is supported by a spring. A lower-axis linear motor drive stage comprising a lower base and at least a single-axis linear motor mounted on the lower base;
A support column erected on the lower base, an upper base placed on the support column, a movable magnet type Z-axis linear motor disposed on the upper base, and a mover of the movable magnet type Z-axis linear motor An upper shaft linear motor drive stage comprising an inkjet unit disposed in
The movable magnet type Z-axis linear motor has a magnetic circuit having a substantially U-shaped cross section along the Z-axis by a permanent magnet and a yoke, and is configured to travel freely in the Z-axis direction. And a magnetic gap formed along the Z-axis direction by the magnetic circuit, and a stator having a multiphase coil facing the magnetic pole of the magnetic circuit of the mover via the magnetic gap, and the yoke outer running rail in the Z-axis is laid on the surface, functional the mover while supporting the sliding member provided on the stator is restricted by the rail you characterized that you travel in the Z-axis direction Equipment for conductive thin films . 6. The functional thin film manufacturing apparatus according to claim 5, wherein a Y-axis linear motor and a movable magnet type Z-axis linear motor are mounted on the upper-axis linear motor drive stage, and a plurality of movable members are mounted on the same travel path of the Y-axis linear motor. A manufacturing apparatus for a functional thin film , wherein a child is disposed .