JP2007053860A5 - - Google Patents

Claims (8)

A stator in which a substantially U-shaped magnetic circuit is formed along the Z-axis by a permanent magnet and a yoke; a magnetic gap formed along the magnetic circuit; and the stator via the magnetic gap. A movable coil type Z-axis linear motor having a multiphase coil opposed to a magnetic pole and configured to move freely in the Z-axis direction within the magnetic gap;
A moving coil type Z-axis linear motor, wherein a Z-axis traveling rail is laid on the outer surface of the yoke, and the mover travels along the rail. In the moving-coil Z-axis linear motor according to claim 1, that the moving-coil you wherein said permanent magnet on the back side of the yoke traveling rail in the Z-axis is laid is disposed Z Axis linear motor. The movable coil type Z-axis linear motor according to claim 1 or 2, wherein when the multiphase coil is not energized, the movable element is mechanically locked to prevent the movable element from dropping in the Z-axis direction. moving-coil Z-axis linear motors further comprising a locking mechanism. In the moving-coil Z-axis linear motor according to any one of claims 1 to 3, wherein the movable member is moving-coil Z-axis linear motors characterized in that it is supported by a spring. A linear motor drive stage having a lower-axis linear motor drive stage having at least a single-axis linear motor and an upper-axis linear motor drive stage having at least a movable coil type Z-axis linear motor,
The moving coil type Z-axis linear motor includes a stator in which a substantially U-shaped magnetic circuit is formed along the Z-axis by a permanent magnet and a yoke, a magnetic air gap formed along the magnetic circuit, A mover having a multiphase coil opposed to the magnetic pole of the stator via a magnetic gap and configured to run freely in the Z-axis direction in the magnetic gap, on the outer surface of the yoke the laid traveling rails of the Z-axis, the linear motor drive stage the mover along the rail characterized that you travel. 6. The linear motor drive stage according to claim 5, wherein a Y-axis linear motor and a movable coil type Z-axis linear motor are mounted on the upper-axis linear motor drive stage, and a plurality of movers are provided on the same travel path of the Y-axis linear motor. linear motor drive stage characterized in that it is arranged. A lower-axis linear motor drive stage comprising a lower base and at least a single-axis linear motor mounted on the lower base;
A support column erected on the lower base, an upper base placed on the support column, a movable coil type Z-axis linear motor disposed on the upper base, and a mover of the movable coil type Z-axis linear motor An upper shaft linear motor drive stage comprising an inkjet unit disposed in
The moving coil type Z-axis linear motor includes a stator in which a substantially U-shaped magnetic circuit is formed along the Z-axis by a permanent magnet and a yoke, a magnetic air gap formed along the magnetic circuit, A mover having a multiphase coil opposed to the magnetic pole of the stator via a magnetic gap and configured to run freely in the Z-axis direction in the magnetic gap, on the outer surface of the yoke Z-axis traveling rail is laid in the functional thin film manufacturing apparatus the mover along the rail, characterized that you run on. 8. The functional thin film manufacturing apparatus according to claim 7, wherein a Y-axis linear motor and a movable coil type Z-axis linear motor are mounted on the upper-axis linear motor drive stage, and a plurality of movable members are mounted on the same travel path of the Y-axis linear motor. child manufacturing equipment functional thin characterized in that it is arranged.