JP2004140888A - Actuator unit mounted with linear motor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an actuator unit mounted with a linear motor which is easy of manufacture and where the drop of efficiency of a linear motor caused by an error in manufacture is little. <P>SOLUTION: This actuator unit has a supporting arm 4 which supports a moving member 1 driven by stators 2 and 2 in cantilever state to a slider 5 slidable on a fixed track rail 6. The assembly and tuning of the actuator unit can be simplified, and the yield in manufacture and the throughput can be enhanced. Then, for parts which constitute the actuator unit excluding the linear motor, the ones lower in accuracy than conventional ones can be used. Therefore, the manufacture cost can be reduced. Furthermore, as compared with conventional ones, the efficiency of the linear motor can be enhanced since there is no factor referring to the increase of sliding resistance caused by the error of parallelism of track rails, vertical level, etc. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an actuator unit equipped with a linear motor, and more particularly to an actuator unit equipped with a linear motor in which a track rail on which a slider slides and a stator are easily assembled.
[0002]
[Prior art]
2. Description of the Related Art In recent years, an actuator unit equipped with a linear motor has been increasingly used in a semiconductor manufacturing apparatus, an electronic component mounting machine, an in-machine transfer device, and the like. Such an actuator unit generally has a mover driven by a centrally disposed stator, which is slidably mounted on two track rails disposed on both sides of the stator in parallel with the stator. The structure is supported from both sides (for example, see Patent Documents 1 and 2).
[0003]
FIG. 2 is a sectional view of an actuator unit equipped with a conventional suction force canceling linear motor.
[0004]
2, a pair of stators 2 and 2 are arranged on a base 7 in parallel with each other, and permanent magnets 3 and 3 are attached to opposing side surfaces of the two stators 2 and 2, respectively. A mover 1 driven by the interaction between the magnetic fields of the stators 2 and 2 and the magnetic field generated by itself is arranged between the stators 2 and 2.
[0005]
A pair of track rails 6, 6 are arranged on the base 7 on both sides of the stators 2, 2 in parallel with the stators 2, 2. Sliders 5 and 5 are slidably attached to the track rails 6 and 6, respectively. A movable table 4 'is provided over the sliders 5 and 5, and the sliders 5 and 5 are fixed to each other. Further, a movable element 1 is fixed to the lower center of the movable table 4 ', and the movable element 1 is moved between the stators 2 and 2 by the sliders 5 and 5 via the movable table 4'. It is configured to be supported by.
[0006]
In such a configuration, when a current flows through an electromagnet (not shown) in the mover 1, a magnetic field is generated around the mover 1, and this magnetic field interacts with the magnetic fields of the permanent magnets 3 to move. The driving force acts on the child 1. As a result, the sliders 5, 5 slide on the track rails 6, 6, and power is generated on the movable table 4 '.
[0007]
[Patent Document 1]
JP-A-2002-64968
[Patent Document 2]
JP-A-9-140118 [0009]
[Problems to be solved by the invention]
However, in the actuator unit equipped with the above-described conventional linear motor, it is necessary to arrange two track rails 6 and 6 on the base 7 in parallel with the stators 2 and 2. Therefore, if the accuracy of the arrangement of the track rails 6, 6, that is, the error in the degree of parallelism or the vertical level, is large, the sliding resistance of the sliders 5, 5 increases. As a result, the efficiency of the linear motor decreases.
[0010]
Further, if the parallelism between the stators 2 and 2 and the track rails 6 and 6 and the parallelism between the mover 1 and the track rails 6 and 6 are large, the distance between the mover 1 and the permanent magnet 3 is large. Cannot be kept constant, and the efficiency of the linear motor decreases.
[0011]
Then, it is extremely difficult to manufacture the actuator unit with high accuracy so that there is no error in each part, and it is necessary to precisely machine the base 7.
[0012]
Therefore, an object of the present invention is to provide an actuator unit equipped with a linear motor, which is easy to manufacture and in which the efficiency of the linear motor is hardly reduced due to a manufacturing error.
[0013]
[Means for Solving the Problems]
An actuator unit equipped with a linear motor according to the present invention includes a slider slidably on one fixed track rail and a support arm for supporting a movable element driven by a stator in a cantilever state. Features.
[0014]
As a result, since there is only one track rail, an increase in sliding resistance due to deviation of the track rails from parallelism, which occurs when there are two track rails, is eliminated. Further, since there is only one track rail, it is easy to adjust the parallelism between the track rail and the stator. Therefore, the gap between the mover and the stator can be made closer to a certain gap. Further, it is easy to adjust the parallelism between the track rail and the stator. For this reason, the manufacturing becomes easy, and the components constituting the actuator unit other than the linear motor can be lower in accuracy than the conventional one.
[0015]
Further, in the present invention, the stator and the track rail may be provided on surfaces orthogonal to each other.
[0016]
Thereby, the arrangement of the stator and the track rail becomes extremely easy.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a sectional view of an actuator unit equipped with a suction-force canceling linear motor according to the present invention.
[0018]
In FIG. 1, an actuator unit equipped with a linear motor according to the present embodiment is disposed on a base 7 having a right-angled surface including a horizontal surface 7a and a vertical surface 7b.
[0019]
A pair of stators 2, 2 are arranged on a vertical surface 7 b of the base 7 in parallel with each other, and permanent magnets 3, 3 are attached to opposing side surfaces of the two stators 2, 2. A mover 1 driven by the interaction between the magnetic fields of the stators 2 and 2 and the magnetic field generated by itself is arranged between the stators 2 and 2. Note that the linear motor in the present embodiment is a suction force canceling type linear motor.
[0020]
One track rail 6 is arranged on a horizontal plane 7 a of the base 7 in parallel with the stators 2 and 2. The slider 5 is slidably attached to the track rail 6. Further, a movable table 4 which is a support arm which is bent at a right angle and connects the slider 5 and the movable element 1 is provided. The movable element 1 is supported by the slider 5 by the movable table 4 in a cantilever state.
[0021]
In this configuration, when a current flows through an electromagnet (not shown) in the mover 1, a magnetic field is generated around the mover 1, and this magnetic field interacts with the magnetic fields of the permanent magnets 3 to move. The driving force acts on the child 1. As a result, the slider 5 slides on the track rail 6 to generate power on the movable table 4.
[0022]
As described above, in the present embodiment, since the number of the track rails 6 is one, there is no problem that the sliding resistance increases due to the mounting error of the two track rails as in the above-described conventional actuator unit. Can be greatly reduced. Further, the adjustment of the parallelism between the track rail 6 and the stators 2 and 2 is easier than before. Therefore, the parallelism between the track rail 6 and the stators 2, 2 can be improved, and it is easy to make the gap width between the mover 1 and the permanent magnets 3, 3 close to a constant value. Therefore, the efficiency of the linear motor can be improved.
[0023]
Further, assembling the actuator unit on the base 7 having a right-angled surface makes the assembly easier.
[0024]
【The invention's effect】
As described above, in the actuator unit equipped with the linear motor according to the present invention, since the actuator unit has one track rail, the assembly and adjustment of the actuator unit can be simplified, and the yield and throughput during manufacturing are improved. be able to. In addition, since the components constituting the actuator unit other than the linear motor can be lower in accuracy than the conventional one, the manufacturing cost can be reduced. Further, as compared with the conventional one, there is no cause of an increase in sliding resistance due to errors in the parallelism of the track rails and the vertical level, so that the efficiency of the linear motor can be improved.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of an actuator unit equipped with a suction-force canceling linear motor according to the present invention.
FIG. 2 is a cross-sectional view of an actuator unit equipped with a conventional suction force canceling linear motor.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Mover 2 Stator 3 Permanent magnet 4, 4 'Movable table 5 Slider 6 Track rail 7 Base 7a Horizontal plane 7b Vertical plane

Claims (2)

An actuator unit on which a linear motor is mounted, wherein a slider slidable on one fixed track rail has a support arm for supporting a mover driven by a stator in a cantilever state. 2. The actuator unit according to claim 1, wherein the stator and the track rail are provided on surfaces orthogonal to each other.

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