JP2007071775A - Visual examination device - Google Patents

Visual examination device Download PDF

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JP2007071775A
JP2007071775A JP2005260928A JP2005260928A JP2007071775A JP 2007071775 A JP2007071775 A JP 2007071775A JP 2005260928 A JP2005260928 A JP 2005260928A JP 2005260928 A JP2005260928 A JP 2005260928A JP 2007071775 A JP2007071775 A JP 2007071775A
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Prior art keywords
workpiece
turntable
inspection apparatus
appearance inspection
work
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JP2005260928A
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JP4848160B2 (en
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Hirobumi Mizukami
博文 水上
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Tokyo Weld Co Ltd
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Tokyo Weld Co Ltd
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Priority to JP2005260928A priority Critical patent/JP4848160B2/en
Priority to TW095129455A priority patent/TWI414781B/en
Priority to KR1020060082729A priority patent/KR101114076B1/en
Priority to CN2006101514578A priority patent/CN1929087B/en
Publication of JP2007071775A publication Critical patent/JP2007071775A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/02Devices for feeding articles or materials to conveyors
    • B65G47/04Devices for feeding articles or materials to conveyors for feeding articles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G01N2021/8893Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mechanical Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Specific Conveyance Elements (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Adornments (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a visual examination device capable of inspecting the appearance of a workpiece by a simple mechanism in a process for feeding the workpiece housed in the workpiece housing part of a turntable. <P>SOLUTION: The visual examination device is constituted of the turntable 31, which has a plurality of the workpiece housing part 31a for housing workpieces one by one to feed them, provided to its outer peripheral part, a sending-out means for sucking and holding the workpieces (w) housed in the workpiece housing parts 31a to send out them to the external space of the turntable 31 and an inspection means for inspecting the appearance of each of the workpieces (w) sent out of the turntable 31. After the workpiece housing parts 31a of the turntable 31 are positioned at predetermined positions, the workpieces (w) of the workpiece housing parts 31a are sent out by suction nozzles 28 being sending means and the workpieces (w) in the external space of the turntable 31 are inspected by an imaging means 37 being an inspection means. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、例えばチップ状電子部品などのワークの外観を検査する外観検査装置に関する。   The present invention relates to an appearance inspection apparatus that inspects the appearance of a workpiece such as a chip-shaped electronic component.

例えば、チップ状電子部品などの6面体からなる外観を検査する外観検査装置50として、従来、図6に示すものが知られている。図6は外観検査装置50の斜視図であり、6面体からなるチップ状電子部品(以下ワークという)は、リニアフィーダ51から水平ターンテーブル52に供給される。水平ターンテーブル52の周縁部にはワークが収納される凹部からなるワーク収納部52aが複数設けられ、これらワーク収納部52aにワークが1個ごとに分離収納される。そして、水平ターンテーブル52の回転に伴ってワークが搬送される過程で、水平ターンテーブル52の周縁部外方に設けられた撮像手段54aによりワーク収納部52a内のワークの側面が撮像される。さらに、水平ターンテーブル52の上下方向にそれぞれ設けられた撮像手段54b及び54cにより、ワーク収納部52a内のワークの上下2面が撮像される。   For example, as an appearance inspection apparatus 50 for inspecting the appearance of a hexahedron such as a chip-shaped electronic component, the one shown in FIG. 6 is conventionally known. FIG. 6 is a perspective view of the appearance inspection apparatus 50, and a chip-shaped electronic component (hereinafter referred to as a workpiece) having a hexahedron is supplied from the linear feeder 51 to the horizontal turntable 52. A plurality of workpiece storage portions 52a each having a concave portion in which a workpiece is stored are provided at the peripheral edge of the horizontal turntable 52, and the workpieces are separately stored in the workpiece storage portions 52a one by one. Then, in the process in which the workpiece is conveyed along with the rotation of the horizontal turntable 52, the side surface of the workpiece in the workpiece storage portion 52a is imaged by the imaging means 54a provided outside the peripheral edge of the horizontal turntable 52. Further, the upper and lower surfaces of the workpiece in the workpiece storage portion 52a are imaged by the imaging means 54b and 54c provided in the vertical direction of the horizontal turntable 52, respectively.

撮像手段54a,54b,54cからの撮像データは、図示しない画像処理装置へ送られて画像処理され、良否判定される。不良品と判定されたワークはワーク受箱55から排出され、正常なワークは水平ターンテーブル52のワーク収納部52aからワーク移載位置57を経て直交ターンテーブル53の周縁部に複数設けられたワーク収納部53aに移載される。直交ターンテーブル53側へ移載されたワークは、直交ターンテーブル53の周縁部外方に設けられた撮像手段54dによりワークの側面が撮像され、さらに直交ターンテーブル53の左右側にそれぞれ設けられた撮像手段54e及び54fにより、ワーク収納部53a内のワークの左右2面が撮像される。   The imaging data from the imaging means 54a, 54b, 54c is sent to an image processing apparatus (not shown), subjected to image processing, and quality is determined. The workpieces determined as defective are discharged from the workpiece receiving box 55, and a plurality of normal workpieces are provided on the peripheral edge of the orthogonal turntable 53 through the workpiece transfer position 57 from the workpiece storage portion 52a of the horizontal turntable 52. It is transferred to the storage part 53a. The workpiece transferred to the orthogonal turntable 53 side is imaged on the side surface of the workpiece by the imaging means 54d provided outside the peripheral edge of the orthogonal turntable 53, and further provided on the left and right sides of the orthogonal turntable 53, respectively. The left and right surfaces of the workpiece in the workpiece storage unit 53a are imaged by the imaging means 54e and 54f.

撮像手段54d,54e,54fからの撮像データは、図示しない画像処理装置へ送られて画像処理され、良否判定される。不良品と判定されたワークはワーク受箱56から排出され、正常なワークは図示しないワーク取り出し部を経て次工程に受渡しされるようになっている。   The imaging data from the imaging means 54d, 54e, 54f is sent to an image processing device (not shown), subjected to image processing, and quality is determined. The work determined to be defective is discharged from the work receiving box 56, and a normal work is delivered to the next process through a work take-out section (not shown).

このように構成された外観検査装置50においては、ワークの6面の外観検査まで可能であるが、4面以上の外観検査になると、ワークを搬送する水平ターンテーブル52及び垂直ターンテーブル53という2つのターンテーブルが必要となり、また、2つのターンテーブル52,53を同期して間欠回転させるよう制御する必要がある。さらに、ワークの保持手段、若しくは移載手段などの機構が精密且つ複雑となり、コストアップの要因となっていた。   In the appearance inspection apparatus 50 configured as described above, it is possible to inspect up to six faces of a workpiece. However, when an appearance inspection of four or more faces is performed, the horizontal turntable 52 and the vertical turntable 53 that convey a workpiece are referred to as two. Two turntables are required, and it is necessary to control the two turntables 52 and 53 to rotate intermittently in synchronization. Further, the mechanism such as the work holding means or the transfer means becomes precise and complicated, which increases the cost.

本発明は、前記事情に着目してなされたもので、その目的とするところは、ターンテーブルのワーク収納部に収納してワークを搬送する過程で、ワークの多くとも5面の外観検査、特に一面がシルエット的検査でも良い場合において、簡単な機構により検査ができ、コストダウンを図ることができる外観検査装置を提供することにある。   The present invention has been made paying attention to the above circumstances, and the object of the present invention is to inspect the appearance of at most five surfaces of the workpiece, particularly in the process of storing the workpiece in the workpiece storage portion of the turntable and transporting the workpiece. An object of the present invention is to provide an appearance inspection apparatus that can be inspected by a simple mechanism and can reduce costs when one surface may be a silhouette inspection.

本発明は、前記目的を達成するために、外周部にワークを1個ずつ収納して搬送する複数のワーク収納部を有したターンテーブルと、前記ワーク収納部に収納されたワークを吸着保持して前記ターンテーブルの外部空間に送出する送出手段と、前記ターンテーブルから送出された前記ワークの外観を検査する検査手段とからなり、前記ターンテーブルを回転して前記ワーク収納部を所定位置に位置決めした後、前記送出手段により前記ワーク収納部の前記ワークを前記ターンテーブルの外部空間に送出し、前記ワークの外観を検査手段により検査することを特徴とする。   In order to achieve the above-mentioned object, the present invention sucks and holds a turntable having a plurality of work storage portions for storing and transporting workpieces one by one on the outer peripheral portion, and the work stored in the work storage portion. And an inspection means for inspecting the appearance of the work sent from the turntable, and the work storage unit is positioned at a predetermined position by rotating the turntable. Then, the work in the work storage unit is sent out to the external space of the turntable by the sending means, and the appearance of the work is inspected by the inspection means.

前記ターンテーブルのワーク収納部に収納して搬送されたワークを、送出手段により吸着保持してターンテーブルの外部空間に送出することにより、ワーク収納部の壁面が障壁となって検査ができなかったワークの面を検査手段により、外観検査できるようにしたことを特徴とする。   The work stored and transported in the work storage part of the turntable is sucked and held by the sending means and sent to the external space of the turntable, so that the wall of the work storage part becomes a barrier and the inspection cannot be performed. It is characterized in that the appearance of the work surface can be inspected by the inspection means.

本発明によれば、複数のターンテーブルを用いなくても、簡単な機構によりワーク収納部の壁面が障壁となって検査できなかったワークの面の検査ができるようになり、コストダウンを図ることができるという効果がある。   According to the present invention, it is possible to inspect the surface of a workpiece that could not be inspected because the wall surface of the workpiece storage portion becomes a barrier by a simple mechanism without using a plurality of turntables, thereby reducing costs. There is an effect that can be.

以下、本発明の実施の形態を図面に基づいて説明する。
図1〜図4は第1の実施形態を示し、図1(a)は外観検査装置の一部を断面した正面図、(b)は図1(a)のA−Aに沿う矢視図、図2はワーク収納凹部を示す斜視図、図3は図1の要部拡大図で、(a)は平面図、(b)は側面図、(c)は正面図、(d)は光路形成の斜視図、図4は照明手段の説明図である。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 4 show the first embodiment, FIG. 1A is a front view of a part of the appearance inspection apparatus, and FIG. 1B is a view taken along the line A-A in FIG. FIG. 2 is a perspective view showing a workpiece storing recess, FIG. 3 is an enlarged view of a main part of FIG. 1, (a) is a plan view, (b) is a side view, (c) is a front view, and (d) is an optical path. FIG. 4 is an explanatory view of the illumination means.

図1(a)(b)において、外観検査装置1のベース板2の表面上(以下、表面側を上、裏面側を下とする)にはスライドベースホルダ3が固定して設けられ、該スライドベースホルダ3には、スライドベース4が枢支軸4aを中心にして回動自在に設けられている。スライドベース4には垂直方向に複数のガイド孔4bが設けられ、これらガイド孔4bには補助スライダ5の下端側が垂直方向にスライド自在に設けられている。これら補助スライダ5の上端側はノズルホルダ6に嵌合され、スライドベース4に対してノズルホルダ6が上下動するようになっている。   1 (a) and 1 (b), a slide base holder 3 is fixedly provided on the surface of the base plate 2 of the appearance inspection apparatus 1 (hereinafter, the front side is the upper side and the back side is the lower side). The slide base holder 3 is provided with a slide base 4 that is pivotable about a pivot shaft 4a. The slide base 4 is provided with a plurality of guide holes 4b in the vertical direction, and the lower ends of the auxiliary sliders 5 are slidably provided in the guide holes 4b in the vertical direction. The upper end sides of these auxiliary sliders 5 are fitted into the nozzle holder 6 so that the nozzle holder 6 moves up and down with respect to the slide base 4.

ノズルホルダ6の上面にはブラケット7がストッパボルト8により固定されている。ブラケット7はスライドベース4に固定して設けられたストッパブラケット9との間に配設されたスプリング10により付勢されて下方に押し下げられている。また、ストッパブラケット9には調整ネジ11が螺合され、調整ネジ11の下端がストッパボルト8の上面に当接している。   A bracket 7 is fixed to the upper surface of the nozzle holder 6 by stopper bolts 8. The bracket 7 is urged downward by a spring 10 disposed between the bracket 7 and a stopper bracket 9 fixed to the slide base 4. An adjustment screw 11 is screwed into the stopper bracket 9, and the lower end of the adjustment screw 11 is in contact with the upper surface of the stopper bolt 8.

スライドベース4には垂直方向に貫通孔13が設けられ、貫通孔13には駆動スライダ14がスライド自在に設けられている。駆動スライダ14は、その頭頂部にブラケット7の板厚より稍広い括れ部14aが形成され、この括れ部14aがブラケット7のU字溝7aにルーズに挿入されている。また、駆動スライダ14の括れ部14aより稍下方には鍔14bが設けられている。鍔14bとブラケット7の間にはスプリング15が介在され、ブラケット7の上面が括れ部14aの上端に押圧されるように付勢されている。   A through hole 13 is provided in the slide base 4 in the vertical direction, and a drive slider 14 is slidably provided in the through hole 13. The drive slider 14 has a constricted portion 14 a that is wider than the thickness of the bracket 7 at the top of the drive slider 14, and the constricted portion 14 a is loosely inserted into the U-shaped groove 7 a of the bracket 7. Further, a flange 14b is provided below the constricted portion 14a of the drive slider 14 on the flange. A spring 15 is interposed between the flange 14b and the bracket 7, and the upper surface of the bracket 7 is urged so as to be pressed against the upper end of the constricted portion 14a.

前記ベース板2の裏面側にはカムベース16が固定されている。カムベース16にはモータ17が設けられている。カムベース16にはモータ17と離間して長径と短径とからなる楕円形に形成されたカム18が回転自在に設けられ、モータ17のプーリ19とカム18のプーリ20との間にはベルト21が掛け渡されている。カム18にはカムフォロア22が転接され、このカムフォロア22はカムフォロアベース23に回動自在に設けられている。   A cam base 16 is fixed to the back side of the base plate 2. A motor 17 is provided on the cam base 16. The cam base 16 is provided with an elliptical cam 18 having a major axis and a minor axis apart from the motor 17, and is rotatably provided between a pulley 19 of the motor 17 and a pulley 20 of the cam 18. Is over. A cam follower 22 is brought into rolling contact with the cam 18, and the cam follower 22 is rotatably provided on a cam follower base 23.

カムフォロアベース23には駆動ロッド24の一端部が嵌合されている。駆動ロッド24はカムベース16に固定して設けられたブラケット25及びベース板2を貫通して垂直方向にスライド自在に設けられ、駆動ロッド24の他端は駆動スライダ14の下面と当接部14cで当接している。また、カムフォロアベース23には駆動ロッド24と平行に補助ロッド26の一端がスライド自在に嵌合され、補助ロッド26の他端はブラケット25を貫通してスライド自在に設けられている。   One end of a drive rod 24 is fitted to the cam follower base 23. The drive rod 24 passes through a bracket 25 and a base plate 2 fixed to the cam base 16 and is slidable in the vertical direction. The other end of the drive rod 24 is at the lower surface of the drive slider 14 and a contact portion 14c. It is in contact. One end of an auxiliary rod 26 is slidably fitted to the cam follower base 23 in parallel with the drive rod 24, and the other end of the auxiliary rod 26 is slidably provided through the bracket 25.

駆動ロッド24及び補助ロッド26にはスプリング27が嵌合され、これらスプリング27はブラケット25とカムフォロアベース23との間に圧縮状態で介在され、カムフォロア22がカム18に常に密着するようになっている。   A spring 27 is fitted to the drive rod 24 and the auxiliary rod 26, and these springs 27 are interposed in a compressed state between the bracket 25 and the cam follower base 23 so that the cam follower 22 is always in close contact with the cam 18. .

前記ノズルホルダ6にはワーク送出手段である吸着ノズル28が設けられ、この吸着ノズル28の下方先端部にはワークwを吸着するノズルヘッド28aが設けられている。前記ベース板2には切欠き部2aが設けられ、この切欠き部2aにはノズルヘッド28aに対向する外観検査部29が設置されている。さらに、外観検査部29をカバーして受台30が設けられている。受台30の上面とベース板2の上面とは面一となっており、受台30とベース板2の上面に近接してターンテーブル31が回転自在に設けられている。   The nozzle holder 6 is provided with a suction nozzle 28 serving as a workpiece feeding means, and a nozzle head 28a for sucking the workpiece w is provided at the lower end of the suction nozzle 28. The base plate 2 is provided with a notch 2a, and an appearance inspection unit 29 facing the nozzle head 28a is provided in the notch 2a. Further, a cradle 30 is provided to cover the appearance inspection unit 29. The upper surface of the cradle 30 and the upper surface of the base plate 2 are flush with each other, and a turntable 31 is rotatably provided adjacent to the upper surface of the cradle 30 and the base plate 2.

ターンテーブル31の外周部には等間隔にワークwが収納される凹部からなるワーク収納部31aが設けられている。ターンテーブル31は、図示しない駆動手段によりベース板2及び受台30上を間欠回転し、間欠停止位置においてノズルヘッド28aに対向し、図2に示すワーク収納部31aがワークwと共に位置決めされるようになっている。さらに、ターンテーブル31の間欠停止位置においては、受台30に設けられたワーク通過孔30aとワーク収納部31a及びノズルヘッド28aとは同一垂線上に位置決めされるようになっている。   On the outer peripheral portion of the turntable 31, there is provided a work storage portion 31a including a concave portion in which the work w is stored at equal intervals. The turntable 31 is intermittently rotated on the base plate 2 and the cradle 30 by a driving means (not shown) so as to face the nozzle head 28a at the intermittent stop position so that the work storage portion 31a shown in FIG. It has become. Furthermore, at the intermittent stop position of the turntable 31, the workpiece passage hole 30a provided in the receiving base 30, the workpiece storage portion 31a, and the nozzle head 28a are positioned on the same vertical line.

図3(a)〜(c)に示すように、外観検査部29は、光路ケース32に設けられた複数の光反射手段33,34,35及び概平行光線を照射する照明手段36により構成されており、外観検査部29により形成された光路Lの延長線上には図1に示すように撮像手段37が設けられている。   As shown in FIGS. 3A to 3C, the appearance inspection unit 29 includes a plurality of light reflecting means 33, 34, 35 provided in the optical path case 32 and an illuminating means 36 that irradiates substantially parallel rays. An imaging means 37 is provided on the extended line of the optical path L formed by the appearance inspection unit 29 as shown in FIG.

なお、スライドベース4の枢支軸4aは、外観検査部29などで不具合が発生した場合、スライドベース4を回動開閉するための支点で、通常はスライドベース4はベース板2に固定されている。   Note that the pivot shaft 4a of the slide base 4 is a fulcrum for rotating the slide base 4 in the event of a malfunction in the appearance inspection unit 29 or the like. Normally, the slide base 4 is fixed to the base plate 2. Yes.

次に、前述のように構成された外観検査装置1の作用について説明する。   Next, the operation of the appearance inspection apparatus 1 configured as described above will be described.

図1に示すように、カム18は長径と短径とからなる楕円形に形成されている。カムフォロアベース23はスプリング27により付勢されてカム18とカムフォロア22とが弾性的に転接している。この状態で、モータ17が間欠回転すると、プーリ19、ベルト21及びプーリ20を介してカム18が矢印方向に90°毎間欠回転し、カム18の長径部分と短径部分にそれぞれ間欠停止する。カム18の長径部分と短径部分の径差により、カムフォロア22は上下方向に往復動し、これに伴ってカムフォロアベース23、駆動ロッド24及び補助ロッド26が上下方向に往復動する。   As shown in FIG. 1, the cam 18 is formed in an elliptical shape having a major axis and a minor axis. The cam follower base 23 is urged by a spring 27 so that the cam 18 and the cam follower 22 are in elastic contact with each other. In this state, when the motor 17 rotates intermittently, the cam 18 rotates intermittently in the direction of the arrow through the pulley 19, the belt 21, and the pulley 20 every 90 °, and intermittently stops at the long diameter portion and the short diameter portion of the cam 18. Due to the difference in diameter between the long diameter portion and the short diameter portion of the cam 18, the cam follower 22 reciprocates in the vertical direction, and accordingly, the cam follower base 23, the drive rod 24 and the auxiliary rod 26 reciprocate in the vertical direction.

カムフォロア22がカム18の長径側から短径側に転接するに従い、駆動ロッド24はスプリング27に付勢されて下方にスライドする。駆動ロッド24の下方へのスライドに伴いスプリング10に付勢されたブラケット7及びスプリング15に付勢された駆動スライダ14が下方にスライドして駆動スライダ14の下面と駆動ロッド24の上面との当接部14cが常に密着されてスライドする。   As the cam follower 22 makes rolling contact from the longer diameter side to the shorter diameter side of the cam 18, the drive rod 24 is urged by the spring 27 and slides downward. As the drive rod 24 slides downward, the bracket 7 urged by the spring 10 and the drive slider 14 urged by the spring 15 slide downward to make contact between the lower surface of the drive slider 14 and the upper surface of the drive rod 24. The contact portion 14c always comes into close contact and slides.

カムフォロア22がカム18の短径側から長径側に移動すると、駆動ロッド24は上方にスライドして駆動スライダ14を押上げ、これに伴いブラケット7が押上げられる。ブラケット7の上限は、ノズルヘッド28aの先端がスライドベース4のノズルヘッド近傍下面と同一面となるように調整ネジ11とストッパボルト8とが当接するように設定されている。これによりターンテーブルの回転で図2のようにワークwが搬送されてきた時、段差が無いため安定して通過でき、またノズルヘッド28aの先端が最もワークwの近くにあるため効果的に吸着できる。
さらに、駆動スライダ14の括れ部14aはブラケット7の厚さより稍広く設けられているため、ブラケット7が調整ネジ11により規制されて上限位置に停止しても、駆動スライダ14はスプリング15の付勢力に抗して前記ストローク差分だけ更にスライドすることができるようになっている。
When the cam follower 22 moves from the short diameter side to the long diameter side of the cam 18, the drive rod 24 slides upward to push up the drive slider 14, and the bracket 7 is pushed up accordingly. The upper limit of the bracket 7 is set so that the adjustment screw 11 and the stopper bolt 8 abut so that the tip of the nozzle head 28 a is flush with the lower surface of the slide base 4 near the nozzle head. As a result, when the work w is conveyed as shown in FIG. 2 due to the rotation of the turntable, it can pass stably because there is no step, and the tip of the nozzle head 28a is closest to the work w, so that it can be effectively attracted. it can.
Furthermore, since the constricted portion 14a of the drive slider 14 is provided so as to be wider than the thickness of the bracket 7, even if the bracket 7 is regulated by the adjustment screw 11 and stops at the upper limit position, the drive slider 14 is biased by the spring 15. Against this, it is possible to slide further by the stroke difference.

ブラケット7に固定して設けられたノズルホルダ6は、複数の補助スライダ5によりスライドベース4に対して垂直にスライドして上下動する。スライドベース4とベース板2とは平行に設定されているため、ノズルホルダ6がベース板2に対しても垂直に上下動することとなる。ノズルホルダ6の上下動によりベース板2に対して垂直に上下動する吸着ノズル28は、図示しない負圧発生源に接続されてノズルヘッド28aが常時負圧化されている。   The nozzle holder 6 fixed to the bracket 7 slides vertically with respect to the slide base 4 by a plurality of auxiliary sliders 5 and moves up and down. Since the slide base 4 and the base plate 2 are set in parallel, the nozzle holder 6 moves vertically up and down also with respect to the base plate 2. The suction nozzle 28 that moves vertically up and down with respect to the base plate 2 by the vertical movement of the nozzle holder 6 is connected to a negative pressure generating source (not shown), and the nozzle head 28a is always at negative pressure.

図2に示すように、ベース板2上を間欠回転するターンテーブル31のワーク収納部31aにワークwを収納して、ノズルヘッド28aに対向して設けられた外観検査部29にワークwが搬送されると、ワークwは常時負圧化されたノズルヘッド28aに吸着保持される。ワークwがノズルヘッド28aに吸着保持されると、カム18が90°回転して短径位置で停止し、ワークwを吸着したノズルヘッド28aが下降して受台30に設けられたワーク通過孔30aからベース板2内に設けられた外観検査部29にワークwを移動させる。   As shown in FIG. 2, the workpiece w is stored in the workpiece storage portion 31a of the turntable 31 that intermittently rotates on the base plate 2, and the workpiece w is conveyed to the appearance inspection portion 29 provided facing the nozzle head 28a. As a result, the workpiece w is attracted and held by the nozzle head 28a, which is always negative pressure. When the workpiece w is sucked and held by the nozzle head 28a, the cam 18 rotates 90 ° and stops at the short diameter position, the nozzle head 28a sucking the workpiece w descends and the workpiece passage hole provided in the cradle 30 is provided. The workpiece w is moved from 30 a to the appearance inspection unit 29 provided in the base plate 2.

図3(a)〜(d)に示すように、外観検査部29は、光路ケース32に設けられた複数の光反射手段33,34,35により照明手段36から照射された概平行光線を反射させて光路Lを形成する。すなわち、ノズルヘッド28aにより吸着保持されて外観検査部29に移動されたワークwは光路L中に投入されて背面から平行光線を照射されると、ワークwのシルエットを含んだ光路Lが形成され、図1(a)に示すように、光路Lの後方に設けられた撮像手段37によりワークwのシルエットが撮像されて、図示しない制御部に送信されて解析される。   As shown in FIGS. 3 (a) to 3 (d), the appearance inspection unit 29 reflects the substantially parallel light rays emitted from the illumination unit 36 by the plurality of light reflection units 33, 34, and 35 provided in the optical path case 32. To form an optical path L. That is, when the workpiece w attracted and held by the nozzle head 28a and moved to the appearance inspection unit 29 is put into the optical path L and irradiated with parallel rays from the back, an optical path L including the silhouette of the workpiece w is formed. As shown in FIG. 1A, the silhouette of the workpiece w is imaged by the imaging means 37 provided behind the optical path L, and transmitted to a control unit (not shown) for analysis.

図3に示すワークwの平行光線を照射される面は、図2に示すワーク収納部31aの壁面が障壁となって検査ができなかったD面方向であり、D面方向からの光線の照射によって図2に示すワークwのD面方向のシルエット像が撮像手段37に得られるが、このシルエット像から例えばワークwの両端に設けられた電極waの曲がりなどの異常を検査できる。すなわち、シルエット像方式は、図2のワークwのようにワーク表面と電極waとが同一面上に無い場合でも、検査に用いることができる。
以上により、ターンテーブル31のワーク収納部31aに収納された状態で検査が可能なA〜C面と併せて4面からの外観検査ができる。
The surface irradiated with the parallel rays of the workpiece w shown in FIG. 3 is the D-plane direction that cannot be inspected due to the wall surface of the workpiece storage portion 31a shown in FIG. As a result, a silhouette image of the workpiece w in the D plane direction shown in FIG. 2 is obtained in the imaging means 37. From this silhouette image, for example, abnormality such as bending of electrodes wa provided at both ends of the workpiece w can be inspected. That is, the silhouette image method can be used for inspection even when the workpiece surface and the electrode wa are not on the same plane as the workpiece w in FIG.
By the above, the external appearance inspection from four surfaces can be performed together with the A to C surfaces that can be inspected in the state of being stored in the work storage portion 31a of the turntable 31.

D面の外観検査が終了すると、再びカム18が90°回転して長径側で停止し、これによりノズルヘッド28aが上昇してワークwがターンテーブル31のワーク収納部31aに戻ると同時に、ターンテーブル31が間欠回転してノズルヘッド28aからワークwを擦取し、次工程に搬送されるようになっている。   When the appearance inspection of the D surface is completed, the cam 18 rotates 90 ° again and stops on the longer diameter side, whereby the nozzle head 28a rises and the workpiece w returns to the workpiece storage portion 31a of the turntable 31, and at the same time, The table 31 rotates intermittently, scrapes the workpiece w from the nozzle head 28a, and is conveyed to the next process.

この検査に用いる平行光線を従来のレンズ系で製作すると非常に高価になる。そこで、対象ワークwが長さ1mm前後と小さい場合、LEDを用いることを検討した。   If the parallel light beam used for this inspection is manufactured by a conventional lens system, it becomes very expensive. Then, when the object workpiece | work w was as small as about 1 mm in length, it examined using LED.

図4(a)は光の屈折の基本形で、媒質Aから媒質Bに光が入射したとき、法線Cに対する角度をそれぞれθA B とすると、相対屈折率nABはスネルの法則から
AB=nB /nA=sin θA /sin θB (nA ,nB :媒質の屈折率)
ここでAが空気とするとnA ≒1、また、nB >1から
sinθA /sinθB >1、すなわちθA >θB
この結果を投光面41がほぼ球面状、かつ樹脂で満たされたLED40に適応したものが図4(b)である。すなわち、スネルの法則の結果を適用すると、発光部42が投光面41の球心oの後部に有った場合、発光部42を出た投光Xは、投光面41で屈折しLEDの光軸Y側に曲がることになるが、理論的には投光Xは光軸Yと交差することはない。したがって、光軸Y近傍の投光は、限りなく平行光線に近づくといえる。
FIG. 4A shows a basic form of light refraction. When light is incident on the medium B from the medium A , if the angles with respect to the normal C are θ A and θ B , the relative refractive index n AB is obtained from Snell's law. n AB = n B / n A = sin θ A / sin θ B (n A , n B : refractive index of the medium)
If A is air, n A ≈1 and n B > 1
sinθ A / sinθ B > 1, ie, θ A > θ B
FIG. 4B shows a result of applying this result to the LED 40 in which the light projecting surface 41 is substantially spherical and filled with resin. That is, when the result of Snell's law is applied, when the light emitting unit 42 is located at the rear part of the sphere center o of the light projecting surface 41, the light projection X exiting the light emitting unit 42 is refracted by the light projecting surface 41 and LED However, the projection X does not intersect the optical axis Y in theory. Therefore, it can be said that the light projection in the vicinity of the optical axis Y is close to parallel rays.

また、発光部42の大きさにより平行光に若干のズレが生じるので、発光部42は小さい方が好ましい。照明手段36として、LEDで説明したが、それ以外でも図4(b)の構成を満たすものであれば適用可能である。なお、この照明手段36の光源の特徴を纏めると、
(1)発光部は極力小さいことが好ましい。
In addition, since the parallel light is slightly shifted depending on the size of the light emitting portion 42, the light emitting portion 42 is preferably smaller. Although the LED has been described as the illuminating means 36, any other means can be applied as long as it satisfies the configuration shown in FIG. The characteristics of the light source of the illumination means 36 are summarized as follows:
(1) The light emitting part is preferably as small as possible.

(2)投光面は凸状が好ましく、凸状の中心oより投光面の反対側に発光部があることが好ましい。   (2) The light projecting surface is preferably convex, and it is preferable that the light emitting portion is on the opposite side of the light projecting surface from the convex center o.

(3)投光面近傍は同じ媒質で満たされていることが好ましい。   (3) It is preferable that the vicinity of the light projection surface is filled with the same medium.

(4)光軸Yに近づくほど投光は平行度を増すので、検査対象ワークwは小さいほど検査精度が向上する。   (4) Since the light projection increases in parallel as it approaches the optical axis Y, the inspection accuracy improves as the inspection target workpiece w decreases.

以上は理論的な場合の好ましい条件であるが、実際にはLED40の構造により若干の乱光が発生する。この乱光はLED40の割合近くで拡散するので、問題になる場合には図4(b)のようにLED40の前面に絞り孔50aを有する絞り50を光軸を合わせて設けることで防止できる。
図5は本発明の外観検査装置の第2の実施形態を示し、(a)は斜視図、(b)は(a)の要部を拡大した斜視図である。図5において吸着ノズル28を垂直に上下させる構成は、第1の実施形態と共通であるため説明は割愛する。本実施形態においては、ノズルヘッド28aにより吸着保持されたワークwの外観検査部43において、前記吸着面を除く5面に対して、それぞれに設けられた撮像手段44a,44b,44c,44d,44eにより各面を撮像するようにしたものである。
The above is a preferable condition in the theoretical case, but in practice, some turbulence occurs due to the structure of the LED 40. Since this diffused light diffuses near the proportion of the LED 40, if there is a problem, it can be prevented by providing a diaphragm 50 having a diaphragm hole 50a in front of the LED 40 with the optical axis aligned as shown in FIG.
5A and 5B show a second embodiment of the appearance inspection apparatus of the present invention, in which FIG. 5A is a perspective view, and FIG. 5B is an enlarged perspective view of the main part of FIG. In FIG. 5, the configuration in which the suction nozzle 28 is vertically moved is the same as that of the first embodiment, and thus the description thereof is omitted. In the present embodiment, in the appearance inspection unit 43 of the workpiece w sucked and held by the nozzle head 28a, the imaging means 44a, 44b, 44c, 44d, and 44e provided on the five surfaces other than the suction surface, respectively. Thus, each surface is imaged.

なお、各撮像手段44a,44b,44c,44d,44eには、図示しない照明手段が含まれているものとする。   It is assumed that each imaging means 44a, 44b, 44c, 44d, 44e includes illumination means (not shown).

ワーク供給手段45により供給されたワークwは、間欠回転するターンテーブル31の周縁部に複数設けられたワーク収納部31aに収納され、ノズルヘッド28aに対向して設けられた外観検査部43に搬送されると、ワークwは常時負圧化されたノズルヘッド28aに吸着保持されるようになっている。   The workpieces w supplied by the workpiece supply means 45 are stored in a plurality of workpiece storage portions 31a provided on the peripheral portion of the turntable 31 that rotates intermittently, and conveyed to an appearance inspection portion 43 provided opposite to the nozzle head 28a. As a result, the workpiece w is attracted and held by the nozzle head 28a, which is always negative pressure.

ワークwが吸着保持されると、吸着ノズル28が下降してワーク収納部31aからターンテーブル31の下面側の空間に設けられた外観検査部43の概中心位置にワークwを移動させるようになっている。   When the workpiece w is sucked and held, the suction nozzle 28 is lowered to move the workpiece w from the workpiece storage portion 31a to the approximate center position of the appearance inspection portion 43 provided in the space on the lower surface side of the turntable 31. ing.

外観検査部43の概中心部に移動したワークwのノズルヘッド28aにより吸着された上面を除く各面に対向して設けられた撮像手段44a,44b,44c,44d,44eにより撮像されたデータが、図示しない制御部に送信されると同時に、吸着ノズル28が上昇してワークwを再びワーク収納部31a内に示すようになっている。   Data picked up by the image pickup means 44a, 44b, 44c, 44d, 44e provided to face each surface excluding the upper surface attracted by the nozzle head 28a of the work w moved to the approximate center of the appearance inspection unit 43. At the same time as being transmitted to a control unit (not shown), the suction nozzle 28 rises to show the workpiece w again in the workpiece storage unit 31a.

吸着ノズル28が上限位置に到達すると、ターンテーブル31が間欠回転してノズルヘッド28aからワークwを擦取し、次工程に搬送されるようになっている。   When the suction nozzle 28 reaches the upper limit position, the turntable 31 rotates intermittently, scrapes the workpiece w from the nozzle head 28a, and is transported to the next process.

なお、ノズルヘッド28aにより吸着されたワークwの上面については、図示しない撮像手段により、事前、若しくは事後に別途撮像することにより、6面全ての画像を得ることもできる。   In addition, about the upper surface of the workpiece | work w adsorb | sucked by the nozzle head 28a, the image of all 6 surfaces can also be obtained by image-capturing separately by the imaging means which is not shown in figure before or after that.

第1の実施形態では、複数の光反射手段33,34,35としてミラーを用いたが、プリズムによる反射でも良く、また、複数のミラーによる光の反射は設計上の手段であって、反射手段の数に拘るものではない。   In the first embodiment, mirrors are used as the plurality of light reflecting means 33, 34, and 35. However, reflection by a prism may be used, and reflection of light by the plurality of mirrors is a design means. It is not related to the number of people.

さらに、吸着ノズル28の上下動にカム18及びカムフォロア22を用いたが、吸着ノズル28の急激な動作を緩和するためであり、上下動が目的であれば、クランク機構あるいはネジ送り機構によるなど、アクチュエータの種類に限定されるものではない。   Furthermore, although the cam 18 and the cam follower 22 are used for the vertical movement of the suction nozzle 28, this is to alleviate the rapid movement of the suction nozzle 28. The type of actuator is not limited.

また、第2の実施形態においては、外観検査部43において5面を撮像するようになっているが、下面については図示しない撮像手段により上面の撮像を行う位置において同時に撮像しても構わない。   In the second embodiment, the appearance inspection unit 43 images five surfaces, but the lower surface may be imaged simultaneously at a position where the upper surface is imaged by an imaging unit (not shown).

なお、この発明は前記実施形態そのままに限定されるものではなく、実施段階ではその要旨を逸脱しない範囲で構成要素を変形して具体化できる。また、前記実施形態に開示されている複数の構成要素の適宜な組合せにより種々の発明を形成できる。例えば、実施形態に示される全構成要素から幾つかの構成要素を削除してもよい。さらに、異なる実施形態に亘る構成要素を組合わせてもよい。   The present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Moreover, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, the constituent elements over different embodiments may be combined.

本発明の外観検査装置の第1の実施形態を示し、(a)は一部断面した正面図、(b)は図1(a)のA−Aに沿う矢視図。BRIEF DESCRIPTION OF THE DRAWINGS The 1st Embodiment of the external appearance inspection apparatus of this invention is shown, (a) is the partially sectional front view, (b) is an arrow line view along AA of Fig.1 (a). 同実施形態を示し、ワーク収納部の拡大した斜視図。The perspective view which expanded the work storage part which shows the same embodiment. 同実施形態を示し、図1の要部拡大図で、(a)は平面図、(b)は側面図、(c)は正面図、(d)は光路形成の斜視図。FIG. 2 is an enlarged view of a main part of FIG. 1, showing (a) a plan view, (b) a side view, (c) a front view, and (d) a perspective view of optical path formation. 同実施形態を示し、(a)(b)照明手段の説明図。The same embodiment is shown, (a) (b) Explanatory drawing of an illumination means. 本発明の外観検査装置の第2の実施形態を示し、(a)は斜視図、(b)は(a)の要部を拡大した斜視図。The 2nd Embodiment of the external appearance inspection apparatus of this invention is shown, (a) is a perspective view, (b) is the perspective view which expanded the principal part of (a). 従来の外観検査装置の斜視図。The perspective view of the conventional external appearance inspection apparatus.

符号の説明Explanation of symbols

28…吸着ノズル(送出手段)、31…ターンテーブル、31a…ワーク収納部、36…照明手段、37…撮像手段(検査手段) 28 ... Suction nozzle (delivery means), 31 ... Turntable, 31a ... Work storage part, 36 ... Illumination means, 37 ... Imaging means (inspection means)

Claims (12)

外周部にワークを1個ずつ収納して搬送する複数のワーク収納部を有したターンテーブルと、
前記ワーク収納部に収納されたワークを吸着保持して前記ターンテーブルの外部空間に送出する送出手段と、
前記ターンテーブルから送出された前記ワークの外観を検査する検査手段とからなり、
前記ターンテーブルを回転して前記ワーク収納部を所定位置に位置決めした後、前記送出手段により前記ワーク収納部の前記ワークを前記ターンテーブルの外部空間に送出し、前記ワークの外観を検査手段により検査することを特徴とする外観検査装置。
A turntable having a plurality of workpiece storage units for storing and transporting workpieces one by one on the outer periphery;
Sending means for sucking and holding the work stored in the work storage unit and sending it to the external space of the turntable;
Comprising inspection means for inspecting the appearance of the workpiece sent from the turntable,
After rotating the turntable and positioning the work storage part at a predetermined position, the work in the work storage part is sent out to the external space of the turntable by the sending means, and the appearance of the work is inspected by the inspection means. An appearance inspection apparatus characterized by:
前記送出手段は、前記ワークを吸着して前記ターンテーブル面に対して垂直方向に進退移動する吸着ノズルであることを特徴とする請求項1記載の外観検査装置。   The appearance inspection apparatus according to claim 1, wherein the delivery unit is a suction nozzle that sucks the workpiece and moves in a vertical direction with respect to the turntable surface. 前記吸着ノズルは、短径と長径とからなるカムと、このカムの回転に伴って上下動するカムフォロアとからなる上下動機構によって駆動されることを特徴とする請求項2記載の外観検査装置。   3. The appearance inspection apparatus according to claim 2, wherein the suction nozzle is driven by a vertical movement mechanism including a cam having a short diameter and a long diameter, and a cam follower that moves up and down as the cam rotates. 前記吸着ノズルは、クランク機構からなる上下動機構によって駆動されることを特徴とする請求項2記載の外観検査装置。   The appearance inspection apparatus according to claim 2, wherein the suction nozzle is driven by a vertical movement mechanism including a crank mechanism. 前記吸着ノズルは、ネジ送り機構からなる上下動機構によって駆動されることを特徴とする請求項2記載の外観検査装置。   The appearance inspection apparatus according to claim 2, wherein the suction nozzle is driven by a vertical movement mechanism including a screw feed mechanism. 前記検査手段は、前記ワークに対して概平行光線を照射する照明手段と、この概平行光線を反射させる複数の光反射手段と、撮像手段とからなり、前記ワークを前記平行光線中に位置することにより前記ワークのシルエット像を前記撮像手段で撮像することを特徴とする請求項1記載の外観検査装置。   The inspection means includes an illuminating means for irradiating the work with a substantially parallel light beam, a plurality of light reflecting means for reflecting the substantially parallel light beam, and an imaging means, and the work is located in the parallel light beam. The appearance inspection apparatus according to claim 1, wherein the silhouette image of the workpiece is captured by the imaging unit. 前記検査手段は、前記送出手段に吸着保持されて前記ターンテーブルの外部空間に送出された前記ワークの前記送出手段による吸着面以外の各面に対向して設けられた複数の撮像手段によることを特徴とする請求項1記載の外観検査装置。   The inspection means includes a plurality of imaging means provided to face each surface other than the suction surface by the sending means of the work that is sucked and held by the sending means and sent to the external space of the turntable. The appearance inspection apparatus according to claim 1, characterized in that: 前記照明手段は、概球面の凸形状を有する投光部を有し、発光部は前記投光部の球面の球心に対して前記球面の反対側で光軸上にあることを特徴とする請求項6記載の外観検査装置。   The illumination means includes a light projecting portion having a substantially spherical convex shape, and the light emitting portion is on the optical axis on the opposite side of the spherical surface with respect to the spherical center of the light projecting portion. The appearance inspection apparatus according to claim 6. 前記投光部の前面に、光軸を合せて絞りを設けたことを特徴とする請求項8記載の外観検査装置。   9. The appearance inspection apparatus according to claim 8, wherein an aperture is provided on the front surface of the light projecting unit so as to match an optical axis. 前記投光部は、請求項8の構成からなるLEDであることを特徴とする請求項8または9記載の外観検査装置。   The visual inspection apparatus according to claim 8, wherein the light projecting unit is an LED having the configuration according to claim 8. 前記光反射手段は、ミラーであることを特徴とする請求項6記載の外観検査装置。   The appearance inspection apparatus according to claim 6, wherein the light reflecting means is a mirror. 前記光反射手段は、プリズムであることを特徴とする請求項6記載の外観検査装置。   7. The appearance inspection apparatus according to claim 6, wherein the light reflecting means is a prism.
JP2005260928A 2005-09-08 2005-09-08 Appearance inspection device Active JP4848160B2 (en)

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TW095129455A TWI414781B (en) 2005-09-08 2006-08-10 Apparatus for inspecting outside appearances
KR1020060082729A KR101114076B1 (en) 2005-09-08 2006-08-30 Work Inspection Apparatus
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008198838A (en) * 2007-02-14 2008-08-28 Hitachi Aic Inc Appearance inspection method of capacitor
CN102122144A (en) * 2011-03-04 2011-07-13 常州工学院 Numerical control system for detecting cam contours
CN102175181A (en) * 2011-03-04 2011-09-07 常州工学院 Detection method of cam contour detection device
JP2012158401A (en) * 2011-01-31 2012-08-23 Akim Kk Part carrying device
JP5674060B2 (en) * 2011-02-09 2015-02-25 上野精機株式会社 Electronic component transfer device and taping unit

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102062584A (en) * 2010-12-18 2011-05-18 深圳市瑞摩特科技发展有限公司 Remote controller automatic detection production line
CN103029963B (en) * 2011-10-10 2015-07-15 东京威尔斯股份有限公司 Workpiece conveying device
CN103728302A (en) * 2013-11-22 2014-04-16 香港斯托克股份有限公司 Automatic detection equipment for object appearance
CN103995001B (en) * 2014-06-04 2017-01-11 昆山宝锦激光拼焊有限公司 Weld inspection device convenient for transferring plates
KR101693684B1 (en) 2015-04-06 2017-01-06 나승옥 Work appearance inspection apparatus and method by the same
CN109238141B (en) * 2018-09-21 2020-10-09 绵阳鼎飞益电子科技有限公司 Chip pin optical detection system
CN109932488B (en) * 2019-03-18 2021-11-05 广东荣旭智能技术有限公司 Capacitor appearance detection method
CN116142787A (en) * 2021-11-19 2023-05-23 芝浦机械电子装置株式会社 Supply device and film forming device

Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61279145A (en) * 1985-06-05 1986-12-09 Nhk Spring Co Ltd Defect detecting apparatus for pin piece of electronic part
JPH01311258A (en) * 1988-06-08 1989-12-15 Hitachi Ltd Outward shape inspecting device
JPH01314955A (en) * 1988-06-16 1989-12-20 Matsushita Electric Works Ltd Method for inspection of light previous container
JPH03136262A (en) * 1989-10-20 1991-06-11 Tokyo Koku Keiki Kk Lead terminal lift check device of ic package
JPH06164199A (en) * 1992-11-27 1994-06-10 Matsushita Electric Ind Co Ltd Electronic component observation device
JPH0821380A (en) * 1994-07-01 1996-01-23 Mitsubishi Electric Corp Scroll fluid machinery
JPH08136463A (en) * 1994-11-10 1996-05-31 Taiyo Yuden Co Ltd Appearance inspection device
JPH09275299A (en) * 1996-04-05 1997-10-21 Matsushita Electric Ind Co Ltd Electronic component mounting device
JPH1068614A (en) * 1996-08-27 1998-03-10 Copal Co Ltd Image pickup system
JPH10332432A (en) * 1997-05-30 1998-12-18 Yaskawa Electric Corp Optical encoder
JPH11295236A (en) * 1998-04-06 1999-10-29 Nitto Kogyo Co Ltd Six-face inspection apparatus for chip
JP2000074639A (en) * 1998-09-03 2000-03-14 Mitsubishi Materials Corp Automatic visual inspection machine
JP2001041902A (en) * 1999-08-02 2001-02-16 Yasunaga Corp Foreign matter inspecting apparatus
JP2001304831A (en) * 2000-04-21 2001-10-31 Keyence Corp Optical angle measuring apparatus
JP2002057500A (en) * 2000-08-15 2002-02-22 Nidec Copal Corp Method for recognizing electronic component
JP2004010301A (en) * 2002-06-10 2004-01-15 Tokyo Weld Co Ltd Work carrier device and work carrying method
JP2004018054A (en) * 2002-06-18 2004-01-22 Tokyo Weld Co Ltd Work transfer device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1065392A (en) * 1996-08-19 1998-03-06 Matsushita Electric Ind Co Ltd Electronic component supply equipment and electronic component mount method
JP3723070B2 (en) * 2000-11-10 2005-12-07 株式会社 東京ウエルズ Work transfer device
CN2603401Y (en) * 2003-01-29 2004-02-11 纬典股份有限公司 Automatic electronic component detection equipment

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61279145A (en) * 1985-06-05 1986-12-09 Nhk Spring Co Ltd Defect detecting apparatus for pin piece of electronic part
JPH01311258A (en) * 1988-06-08 1989-12-15 Hitachi Ltd Outward shape inspecting device
JPH01314955A (en) * 1988-06-16 1989-12-20 Matsushita Electric Works Ltd Method for inspection of light previous container
JPH03136262A (en) * 1989-10-20 1991-06-11 Tokyo Koku Keiki Kk Lead terminal lift check device of ic package
JPH06164199A (en) * 1992-11-27 1994-06-10 Matsushita Electric Ind Co Ltd Electronic component observation device
JPH0821380A (en) * 1994-07-01 1996-01-23 Mitsubishi Electric Corp Scroll fluid machinery
JPH08136463A (en) * 1994-11-10 1996-05-31 Taiyo Yuden Co Ltd Appearance inspection device
JPH09275299A (en) * 1996-04-05 1997-10-21 Matsushita Electric Ind Co Ltd Electronic component mounting device
JPH1068614A (en) * 1996-08-27 1998-03-10 Copal Co Ltd Image pickup system
JPH10332432A (en) * 1997-05-30 1998-12-18 Yaskawa Electric Corp Optical encoder
JPH11295236A (en) * 1998-04-06 1999-10-29 Nitto Kogyo Co Ltd Six-face inspection apparatus for chip
JP2000074639A (en) * 1998-09-03 2000-03-14 Mitsubishi Materials Corp Automatic visual inspection machine
JP2001041902A (en) * 1999-08-02 2001-02-16 Yasunaga Corp Foreign matter inspecting apparatus
JP2001304831A (en) * 2000-04-21 2001-10-31 Keyence Corp Optical angle measuring apparatus
JP2002057500A (en) * 2000-08-15 2002-02-22 Nidec Copal Corp Method for recognizing electronic component
JP2004010301A (en) * 2002-06-10 2004-01-15 Tokyo Weld Co Ltd Work carrier device and work carrying method
JP2004018054A (en) * 2002-06-18 2004-01-22 Tokyo Weld Co Ltd Work transfer device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008198838A (en) * 2007-02-14 2008-08-28 Hitachi Aic Inc Appearance inspection method of capacitor
JP2012158401A (en) * 2011-01-31 2012-08-23 Akim Kk Part carrying device
CN102673954A (en) * 2011-01-31 2012-09-19 亚企睦自动设备有限公司 Component conveying device
CN102673954B (en) * 2011-01-31 2016-11-09 亚企睦自动设备有限公司 Conveying device for a part
JP5674060B2 (en) * 2011-02-09 2015-02-25 上野精機株式会社 Electronic component transfer device and taping unit
CN102122144A (en) * 2011-03-04 2011-07-13 常州工学院 Numerical control system for detecting cam contours
CN102175181A (en) * 2011-03-04 2011-09-07 常州工学院 Detection method of cam contour detection device

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