JP2007067777A - Support structure for crystal resonator - Google Patents

Support structure for crystal resonator Download PDF

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JP2007067777A
JP2007067777A JP2005250641A JP2005250641A JP2007067777A JP 2007067777 A JP2007067777 A JP 2007067777A JP 2005250641 A JP2005250641 A JP 2005250641A JP 2005250641 A JP2005250641 A JP 2005250641A JP 2007067777 A JP2007067777 A JP 2007067777A
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crystal
support plate
plate
support
base plate
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Koji Sato
光司 佐藤
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Kyocera Crystal Device Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a support structure for a crystal blank plate which reduces stress that the crystal blank plate receives by improving joining property of a jointing material for the crystal blank plate. <P>SOLUTION: This support structure for the crystal resonatot is characterized in that: exciting electrodes are formed on the top and reverse surfaces of the crystal blank plate; lead-out electrodes led around from the exciting electrodes are held and fixed by a support plate and the jointing material connecting with two metal terminals extending from a metal base; one of the lead-out electrodes led around from the exciting electrodes is held by the metal terminals and support plate; and the other lead-out electrode has a narrow part partially at the metal terminal and support plate along the width of the support plate. Further, disclosed is a support structure of a crystal resonatot characterized in that a through hole is bored in a portion of a support plate instead of the narrow part. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、一例としてAuGe(金―ゲルマニウム)を用いて水晶素板をハーメチィック構造のベースから延びる2本の金属端子とつながるサポート板と接合材で保持した場合に、水晶素板に加わる応力歪みを軽減した水晶素板の支持構造に関するものである。   The present invention, as an example, uses AuGe (gold-germanium) as an example, when the crystal element plate is held by a support plate connected to two metal terminals extending from the base of the hermetic structure and a bonding material, stress distortion applied to the crystal element plate The present invention relates to a support structure for a quartz base plate that reduces the above-mentioned problem.

近年の急速な移動体通信市場の成長に伴い、通信機器の需要が飛躍的に増大してきている現在、通信機器においてその基準となる周波数の発生クロック源として用いられる水晶振動子は、周囲の使用環境がより過酷な条件下においても、所望の基準となる周波数信号を安定して出力することを確保することも求められている。   With the rapid growth of the mobile communication market in recent years, the demand for communication equipment has increased dramatically. At present, crystal oscillators that are used as a clock source for generating a reference frequency in communication equipment are used in the surroundings. There is also a demand for ensuring that a frequency signal serving as a desired reference is stably output even under a severer environment.

水晶素版を保持する構造の代表例として、図4に示す丸板形状を有した水晶振動子を示す。前述する水晶振動子の保持構造は水晶素板の表裏に励振電極を形成し、前記励振電極から引き回された引出電極と金属ベースから延びる2本の金属端子とつながるサポート板と接合材で接続し保持するものである。保持部はいわゆるクリップ式の構造となっていて、水晶素板の表裏を挟む格好で保持するものや、1対の平板状のサポート板で直接水晶素板を挟み込んで保持するものや、金属端子とサポート板に水晶素板を保持する箇所にスリットを形成して水晶素板を保持する格好など様々な形態がある。   As a typical example of a structure for holding a quartz plate, a quartz resonator having a round plate shape shown in FIG. 4 is shown. The above-described quartz crystal holding structure is formed by forming excitation electrodes on the front and back sides of the quartz base plate, and connecting with a support plate connected to the extraction electrode routed from the excitation electrode and the two metal terminals extending from the metal base with a bonding material And hold it. The holding part has a so-called clip-type structure, and holds the crystal element plate in a fashionable manner, holds the crystal element plate directly between a pair of flat support plates, or a metal terminal In addition, there are various forms such as a shape in which a slit is formed at a place where the crystal base plate is held on the support plate to hold the crystal base plate.

また、励振電極から引き回された引出電極を接続する手法としては、はんだなどの比較的融点の低い金属を用いる場合と、導電性接着剤が用いられる場合とがある。   In addition, as a method of connecting the extraction electrode routed from the excitation electrode, there are a case where a metal having a relatively low melting point such as solder is used and a case where a conductive adhesive is used.

上述する丸板形状の水晶素板は、昨今では短冊形状が主流の水晶素板形態にあって、希少な存在に位置している。その背景には丸板形状の水晶素板は高安定の周波数出力を得るために特別に製造される水晶素板であるからである。昨今の水晶素板である短冊形状は大凡長辺寸法が2〜6mm、短辺が2mm以下の長方形の外形にあるのに対して、丸板形状は直径で10mm前後と短冊形状に比べて非常に大きな外形寸法を有している。また、水晶素板の板厚に関しても、高次オーバトーン発振を利用する場合が多く短冊形状の水晶素板に対して丸板形状の水晶素板は遙かに厚みを持っている。   The above-described round plate-shaped quartz base plate is in a rare presence in the shape of a mainstream quartz base plate having a strip shape in recent years. This is because the round plate-shaped quartz base plate is a quartz base plate specially manufactured to obtain a highly stable frequency output. The rectangular shape of the recent quartz base plate has a rectangular outer shape with a long side dimension of 2 to 6 mm and a short side of 2 mm or less, whereas the round plate shape has a diameter of around 10 mm compared to the rectangular shape. Have large external dimensions. As for the thickness of the quartz base plate, high-order overtone oscillation is often used, and the round-plate-shaped quartz base plate is much thicker than the strip-shaped quartz base plate.

さて、図4に示す水晶振動子の使用目的の代表例として、恒温槽型水晶発振器(OCXO:Oven Controlled Crystal Oscillator)と呼ばれる水晶発振器の内部に恒温槽を搭載して使用することで周波数出力特性を安定に保ことができる発振器の形態がある。   Now, as a typical example of the purpose of use of the crystal unit shown in FIG. 4, the frequency output characteristics are obtained by using a thermostat inside a crystal oscillator called an oven controlled crystal oscillator (OCXO). There is a form of an oscillator that can maintain a stable state.

上述するOCXOと呼ばれる恒温槽型水晶発振器の内部に搭載され使用される高安定な特性をもつ水晶振動子は、大まかに言って70℃〜90℃間のある1点(温度偏差±0.3℃)に保持された温度環境下で使用され、経年変化による出力周波数の変動が抑えられ、安定した周波数特性(エージング特性)を得るために、水晶振動子の水晶素板とサポート板との接合材として内部ガスの発生が少なく、かつ熱膨張変化に安定し、経時変化による影響を水晶素板に与えることが少ないAuGe(金―ゲルマニウム合金)または、耐熱性の高いポリイミド系導電ペーストなどが使用される場合が多い。   A crystal resonator having a high stability characteristic that is mounted and used in a thermostat crystal oscillator called OCXO is roughly one point between 70 ° C. and 90 ° C. (temperature deviation ± 0.3). In order to obtain stable frequency characteristics (aging characteristics), it is used in a temperature environment maintained at a temperature of (° C) and the output frequency fluctuation due to secular change is suppressed. The material used is AuGe (gold-germanium alloy) or a highly heat-resistant polyimide conductive paste that generates less internal gas, is stable against changes in thermal expansion, and has little effect on the quartz base plate. Often done.

特開平7−240656号公報Japanese Patent Laid-Open No. 7-240656 特開平11−214949号公報Japanese Patent Laid-Open No. 11-214949 特開昭49−122685号公報 なお、出願人は前記した先行技術文献情報で特定される先行技術文献以外には、本発明に関連する先行技術文献を、本件出願時までに発見するに至らなかった。In addition, the applicant has not found any prior art documents related to the present invention by the time of the filing of the application other than the prior art documents specified by the prior art document information described above. It was.

本発明の目的は、耐熱性の高いAuGe、ポリイミド系といった硬い接合材を用いて水晶素板とサポートの少なくとも二箇所を強固に接合することから水晶素板に発生する応力を軽減する、サポート板と水晶素板との支持構造を提供することにある。
要するに、従来技術に示すエージング特性を左右する要因のひとつに、サポート板とも呼ばれる支持部からの水晶素板への応力がある。例えば、水晶素板の接合時の収縮および各材料の熱膨張率の差に伴う応力あるいは、封止工程におけるウェルドの際にウェルド圧力が水晶振動子の金属ベースを変形し、その変形に伴う応力が金属端子とサポート板を経て水晶素板へと伝わることによって、水晶素板と保持部とに左右非対称なひねりやねじりの力が支持(保持)部から水晶素板に応力が加わるなどで、水晶振動子の特性に大きな影響を及ぼし、水晶素板が本来持つ高安定な周波数出力特性が阻害され、水晶振動子のエージング特性を著しく悪くするおそれがある。
An object of the present invention is to reduce stress generated in a quartz base plate by firmly joining at least two places of the quartz base plate and the support using a hard joint material such as AuGe and polyimide having high heat resistance. It is in providing the support structure of a crystal base plate.
In short, one of the factors that influence the aging characteristics shown in the prior art is the stress on the quartz base plate from the support part, also called the support plate. For example, the stress due to the difference in thermal expansion coefficient of each material and the shrinkage at the time of joining the quartz base plates, or the weld pressure deforms the metal base of the crystal unit during the welding in the sealing process, and the stress accompanying the deformation Is transmitted to the crystal base plate through the metal terminal and the support plate, so that asymmetrical twist and torsional force is applied to the crystal base plate and the holding portion from the support (holding) portion to the crystal base plate, This greatly affects the characteristics of the crystal unit, impairs the highly stable frequency output characteristics inherent to the crystal base plate, and may significantly deteriorate the aging characteristics of the crystal unit.

そのため、支持部と水晶素板とを電気的かつ機械的に接合する保持部の構造によって、支持部から水晶素板に加わる応力、歪み成分を低減することが考えられるが、今日まで応力を緩和するための保持部の支持方法や接合材が提案されていたが有効な手段が見いだせないのが現状である。   Therefore, it is possible to reduce the stress and strain components applied from the support part to the crystal base plate by the structure of the holding part that electrically and mechanically joins the support part and the crystal base plate. However, the present situation is that no effective means can be found, although a supporting method and a bonding material for the holding portion for the purpose have been proposed.

その一方で、特許文献3に示すような金属細線で圧電素子を保持する発明がなされているが、保持が不完全であるために、軽微な振動に対しても周波数が変動し、長期的に安定したエージング特性を得ることが難しい。   On the other hand, an invention for holding a piezoelectric element with a thin metal wire as shown in Patent Document 3 has been made. It is difficult to obtain stable aging characteristics.

そこで上述する課題を解決するために本発明は、水晶素板の表裏に励振電極を形成し、前記励振電極から引き回された引出電極を金属ベースから延びる2本の金属端子とつながるサポート板と接合材で保持固定する水晶振動子の支持構造において、前記励振電極から引き回された引出電極の一方は前記金属端子とサポート板で保持され、引出電極の他方は前記金属端子とサポート板の、
前記サポート板の幅方向の少なくとも一部に狭部が存在する水晶振動子の支持構造である。また、狭部に代えて、前記サポート板の一部に貫通孔があいていることを特徴とする水晶振動子の支持構造である。
In order to solve the above-described problem, the present invention provides a support plate in which excitation electrodes are formed on the front and back surfaces of a quartz base plate, and the extraction electrode routed from the excitation electrode is connected to two metal terminals extending from a metal base. In the support structure of the crystal resonator that is held and fixed by the bonding material, one of the extraction electrodes routed from the excitation electrode is held by the metal terminal and the support plate, and the other of the extraction electrodes is the metal terminal and the support plate.
This is a support structure for a crystal resonator in which a narrow portion exists in at least a part in the width direction of the support plate. In addition, the support structure for a crystal resonator is characterized in that a through hole is formed in a part of the support plate instead of the narrow portion.

要するに、水晶素板が金属ベースから延びる2本の金属端子に固定されたサポート板により支持される水晶振動子の支持構造で、一方の支持部は従来と同様に金属端子とつながるサポート板と水晶素板の表裏の励振電極から引き回された引出電極である水晶素板の一部を接合材(例えばAuGe、はんだや導電性接着剤)を用いて接合し水晶素板の強固な保持を行い、他方の引出電極からは前記金属端子とサポート板の、前記サポート板の幅方向の少なくとも一部に狭部あるいは、貫通孔があいたサポート板に水晶素板の表裏の励振電極から引き回された引出電極である水晶素板の一部を接合材で接合するものの、サポートが柔軟性を有することで水晶素板が固着されず、水晶素板が一箇所で支持される場合と同様な効果を生じることで、水晶素板に対して応力を加えない保持構造を実現することで課題を解決するものである。   In short, the crystal base plate is a support structure of a crystal resonator supported by a support plate fixed to two metal terminals extending from a metal base, and one support portion is a support plate and a crystal connected to the metal terminal as in the prior art. Part of the crystal base plate, which is the lead-out electrode routed from the excitation electrode on the front and back of the base plate, is bonded using a bonding material (for example, AuGe, solder or conductive adhesive) to firmly hold the crystal base plate From the other lead electrode, the metal terminal and the support plate were drawn from the excitation electrodes on the front and back of the quartz base plate to the support plate having a narrow part or a through hole in at least a part of the width direction of the support plate. Although a part of the crystal element plate, which is the extraction electrode, is bonded with a bonding material, the support is flexible so that the crystal element plate is not fixed and the same effect as when the crystal element plate is supported in one place. Produced by water It solves the problem by realizing a holding structure stress without added against workpieces.

本発明による強固なサポート板による支持部構造と、同種のサポート板に柔軟性を持たせた支持部構造との組合せによる保持方法を備えた水晶振動子の支持構造を用いることにより、2点以上の強固な支持部を持つ従来構造では成し得なかった水晶素板への応力緩和が実現でき、ハーメチィックベースに実装した水晶振動子の形態であっても良好で安定した周波数出力を得ることができる。その結果、製造工程の歩留まりを向上し、製造にかかるコストを低減することができる。   By using a support structure for a crystal unit having a holding method by a combination of a support structure with a strong support plate according to the present invention and a support structure with a flexible support plate of the same type, two or more points are used. The stress relief to the quartz base plate, which could not be achieved with the conventional structure with a strong support part, can be realized, and a stable and stable frequency output can be obtained even in the form of a crystal resonator mounted on a hermetic base be able to. As a result, the yield of the manufacturing process can be improved and the manufacturing cost can be reduced.

以下、添付の図面に従がってこの発明の実施例を説明する。なお各図においての同一の符号は同じ対象を示すものとする。なお、以下の記述に出てくるサポート板の幅方向とは図2中で場所を指定する。図1は本発明の水晶振動子5の支持構造の概念を示した部分断面図である。図1(a)は正面図、図1(b)は一方の部分側面図、図1(c)は他方の部分側面図である。水晶素板1の表裏に励振電極8を形成し、前記励振電極8から引き回された引出電極9を金属ベース2から延びる2本の金属端子3とつながるサポート板4とを接合材にて固着することで水晶素板1を保持し、電気的な導通を取る構造を有している。なお、図には密閉容器を構成するための蓋体やキャップは図示していない。   Embodiments of the present invention will be described below with reference to the accompanying drawings. In addition, the same code | symbol in each figure shall show the same object. Note that the place in FIG. 2 is designated as the width direction of the support plate that appears in the following description. FIG. 1 is a partial cross-sectional view showing the concept of the support structure of the crystal resonator 5 of the present invention. 1A is a front view, FIG. 1B is one partial side view, and FIG. 1C is the other partial side view. Excitation electrodes 8 are formed on the front and back of the quartz base plate 1, and an extraction electrode 9 routed from the excitation electrode 8 is fixed to a support plate 4 connected to two metal terminals 3 extending from the metal base 2 with a bonding material. By doing so, the quartz base plate 1 is held and the electrical conduction is obtained. In the figure, a lid and a cap for configuring the sealed container are not shown.

従って一例として金属ベース2はガラスとで構成するハーメチィック容器により気密構造でありながら金属ベース2を貫通する材料でできた金属端子3の先端部分に水晶素板1が固定されている。一般的には金属端子3の先端部分には水晶素板1が確実に実装できるようにサポート板4などを配置する場合がある。   Accordingly, as an example, the quartz base plate 1 is fixed to the tip portion of the metal terminal 3 made of a material that penetrates the metal base 2 while the metal base 2 is hermetically sealed by a hermetic container made of glass. In general, a support plate 4 or the like may be arranged at the tip portion of the metal terminal 3 so that the crystal base plate 1 can be reliably mounted.

図1に示す一例では、水晶素板1の一方の保持構造は、保持金属ベース2を貫通して延びる支持部(金属端子)の先端部にサポート板41を配置した格好で水晶素板1を支持した水晶振動子5の形態を示しており、この場合サポート板41と水晶素板1側の先端部をAuGe、はんだや導電性接着剤と言った接合材で接合し、水晶素板1の他方は例えば前記サポート板の幅方向の少なくとも一部に狭部6があったり、あるいはその一部に貫通孔7を形成するなどされたサポート板42で接合することで、水晶素板1から引き回される引出電極9と一方は強固に、他方は柔軟に接続されることで水晶素板1に加わる応力を低減するものである。ここで、サポート板42が水晶素板1を強固に支持しない柔軟性を持つ限り、狭部6の寸法の制約や、貫通孔7の寸法の制約は無い。   In one example shown in FIG. 1, one holding structure of the crystal base plate 1 is configured such that the support base 41 is disposed at the tip of a support portion (metal terminal) that extends through the holding metal base 2. The form of the supported crystal resonator 5 is shown. In this case, the support plate 41 and the tip of the crystal base plate 1 side are joined with a joint material such as AuGe, solder, or conductive adhesive, On the other hand, the support plate 42 has a narrow portion 6 at least in the width direction of the support plate, or is joined with a support plate 42 in which a through hole 7 is formed in a part thereof. The extracted electrode 9 and one to be rotated are firmly connected and the other is connected flexibly to reduce the stress applied to the quartz base plate 1. Here, as long as the support plate 42 has a flexibility that does not firmly support the crystal base plate 1, there is no restriction on the size of the narrow portion 6 or the size of the through hole 7.

図2は本発明の水晶振動子5のサポート板4部分に注目した部分拡大図で、図1の矢印の方向から見たもので、上述するサポート板の概念を描画した図である。サポート板4の形態としては、図2(a)、図2(b)では
前記サポート板の幅方向の少なくとも一部に狭部6がある場合を示し、図2(c)ではサポート板4の一部に貫通孔7を形成してある状態を示したものである。図2(a)、図2(b)の狭部6については、ここで図示するような形状が考えられるが、ここで示す以外の形状であっても同様に効果を奏するものであればその制約は無い。
FIG. 2 is a partially enlarged view focusing on the support plate 4 portion of the crystal resonator 5 of the present invention, as viewed from the direction of the arrow in FIG. 1 and depicting the concept of the support plate described above. As a form of the support plate 4, FIGS. 2A and 2B show a case where the narrow portion 6 is present in at least a part of the width direction of the support plate, and FIG. The state where the through-hole 7 is formed in a part is shown. 2 (a) and 2 (b) may have a shape as illustrated here, but a shape other than the one shown here may be effective as long as it has the same effect. There are no restrictions.

また、図2(b)に示すサポート板4に形成する貫通孔7についても、丸穴、角穴の形状を問うものでは無く、貫通穴の大きさについても制約は無い。   Further, the through hole 7 formed in the support plate 4 shown in FIG. 2B is not limited to the shape of the round hole or the square hole, and there is no restriction on the size of the through hole.

要するに、水晶素板1が金属金属ベース2から延びる2本の金属端子に固定されたサポート板4により支持される水晶振動子5の支持構造で、一方の支持部は従来構造を有するサポート板4の先端に水晶素板1の表裏の励振電極8から引き回された引出電極9である水晶素板1の一部を接合材(例えばAuGe、はんだや導電性接着剤)を用いて接合し、他方の引出電極9からは同種のサポート板4に柔軟性を持たせた加工を施し、電気的な接続を取ることにより、水晶素板1はその一端の引出電極9側で強固に固着して保持し、水晶素板1の他端は柔軟性のある保持手段を確保できることにより、水晶素板1に対して応力を加えない保持構造を実現することができる。   In short, the crystal base plate 1 is a support structure of the crystal resonator 5 supported by the support plate 4 fixed to the two metal terminals extending from the metal metal base 2, and one support portion has the support structure 4 having a conventional structure. A portion of the quartz base plate 1 that is the lead electrode 9 routed from the excitation electrode 8 on the front and back of the quartz base plate 1 is joined to the tip of the base plate 1 using a joining material (eg, AuGe, solder or conductive adhesive), From the other extraction electrode 9, the same kind of support plate 4 is processed to have flexibility, and by making an electrical connection, the crystal base plate 1 is firmly fixed on the extraction electrode 9 side at one end thereof. By holding and securing the flexible holding means at the other end of the quartz base plate 1, it is possible to realize a holding structure that does not apply stress to the quartz base plate 1.

本発明の水晶振動子の支持構造の概念を示す部分断面図である。It is a fragmentary sectional view which shows the concept of the support structure of the crystal oscillator of this invention. 本発明の水晶振動子の支持構造を説明する概念図である。It is a conceptual diagram explaining the support structure of the crystal oscillator of this invention. 従来例としてサポート板を用いて水晶素板を保持する形態を持った水晶振動子の部分断面図である。It is a fragmentary sectional view of a crystal oscillator with a form which holds a crystal blank using a support plate as a conventional example.

符号の説明Explanation of symbols

1・・・・・・・・水晶素板
2・・・・・・・・金属ベース
3・・・・・・・・金属端子
4(41,42)・・サポート板
5・・・・・・・・水晶振動子
6・・・・・・・・(幅方向の)狭部
7・・・・・・・・貫通孔
8・・・・・・・・励振電極
9・・・・・・・・引出電極
1 ... Crystal base plate 2 ... Metal base 3 ... Metal terminal 4 (41, 42) ... Support plate 5 ...・ ・ ・ Quartz crystal 6 ・ ・ ・ ・ ・ ・ ・ ・ Narrow part (in width direction) 7 ・ ・ ・ ・ ・ ・ ・ ・ Through hole 8 ・ ・ ・ Excitation electrode 9 ・ ・ ・... Extraction electrodes

Claims (2)

水晶素板の表裏に励振電極を形成し、前記励振電極から引き回された引出電極を金属ベースから延びる2本の金属端子とつながるサポート板と接合材で保持固定する水晶振動子の支持構造において、
前記励振電極から引き回された引出電極の一方は前記金属端子とサポート板で保持され、引出電極の他方は前記金属端子とサポート板の、前記サポート板の幅方向の少なくとも一部に狭部が存在することを特徴とする水晶振動子の支持構造。
In a support structure of a crystal resonator in which excitation electrodes are formed on the front and back surfaces of a quartz base plate, and a lead electrode routed from the excitation electrode is held and fixed with a support plate connected to two metal terminals extending from a metal base and a bonding material ,
One of the extraction electrodes routed from the excitation electrode is held by the metal terminal and the support plate, and the other of the extraction electrodes has a narrow portion in at least part of the width direction of the support plate of the metal terminal and the support plate. A quartz crystal support structure characterized by the existence.
請求項1記載の狭部に代えて、前記サポート板の一部に貫通孔があいていることを特徴とする水晶振動子の支持構造。 A support structure for a crystal resonator, wherein a through hole is formed in a part of the support plate instead of the narrow portion according to claim 1.
JP2005250641A 2005-08-31 2005-08-31 Support structure for crystal resonator Pending JP2007067777A (en)

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