JP2006186839A - Support structure for crystal vibrator - Google Patents

Support structure for crystal vibrator Download PDF

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JP2006186839A
JP2006186839A JP2004380181A JP2004380181A JP2006186839A JP 2006186839 A JP2006186839 A JP 2006186839A JP 2004380181 A JP2004380181 A JP 2004380181A JP 2004380181 A JP2004380181 A JP 2004380181A JP 2006186839 A JP2006186839 A JP 2006186839A
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plate
crystal
base plate
support
support plate
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Koji Sato
光司 佐藤
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Kyocera Crystal Device Corp
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Kyocera Crystal Device Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a support structure for a crystal raw plate of a crystal vibrator which has excellent joining property between a joining material and the crystal raw plate, reduces a twisting force applied to the crystal raw plate, and has two metal terminals. <P>SOLUTION: In the present invention to solve the problem, the support structure for the crystal vibrator such that the crystal raw plate is supported by a support plate fixed to the two metal terminals airtightly penetrating a metal base is characterized in that a joining material is held in a recessed portion on a plate-thickness inside surface of the tip portion of the support plate on the side of the crystal raw plate and the recessed portion has a corner portion abutting against the crystal raw material plate. Further, the support structure is characterized in that a joining material is held in a recessed portion on the plate thickness inside surface of the tip portion of the support portion on the side of the crystal raw plate, a first recessed portion abuts against the crystal raw plate at two points of the corner portion, and a second recessed portion connects with the first recessed portion perpendicularly across a wall and is recessed from the plate thickness inside surface side of the support plate to a plate-thickness outside surface side on the plate thickness inside surface side of the support plate. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、AuGeといった接合材の水晶素板との接合性を良好にし、水晶素板に加わるひねりの力を軽減する、二本の金属端子を有する水晶振動子における水晶素板の支持構造に関するものである。           The present invention relates to a support structure for a crystal base plate in a crystal unit having two metal terminals, which improves the bondability of a bonding material such as AuGe with the crystal base plate and reduces the twisting force applied to the crystal base plate. Is.

近年の急速な移動体通信市場の成長に伴い、通信機器の需要が飛躍的に増大してきた結果として、通信機器においてその基準となる周波数の発生源として用いられる水晶振動子は、周囲の使用環境がより過酷な条件下においても、規定された周波数出力の更なる安定な動作の確保が求められているのが現状である。           With the rapid growth of mobile communication market in recent years, the demand for communication equipment has increased dramatically. As a result, quartz resonators used as a source of frequency as a reference in communication equipment are used in the surrounding environment. However, even under more severe conditions, it is currently required to secure a more stable operation with a specified frequency output.

水晶素版の支持構造には、大別して二つの種類がある。図4に示されるような水晶素板と支持構造であるサポート板との接合材として、はんだなどの金属が用いられたサポート板支持構造の型と、図5に示されるような水晶素板とサポート板との接合材に導電性接着剤が用いられるサポート板にスリット状の孔をもったスリットサポート板支持構造の型の二つである。水晶振動子のなかでも恒温槽型水晶発振器で、OCXO(Oven Controlled Crystal Oscillator)と呼ばれる水晶発振器の内部に搭載されて使用される高安定な特性をもつ水晶振動子では、金属薄膜から成る電極がふたつの主面に形成された水晶素板が金属支持構造によって支持され、水晶素板と金属支持構造とが接合材により固定されることで、物理的な水晶素板の支持と電気的導通が先の図4に示されるような状態でとられる。           There are roughly two types of support structures for quartz plates. A support plate support structure mold using a metal such as solder as a bonding material between the crystal element plate as shown in FIG. 4 and the support plate as a support structure, and a crystal element plate as shown in FIG. There are two types of support structures for the slit support plate having a slit-like hole in the support plate in which a conductive adhesive is used as a bonding material with the support plate. Among crystal resonators, a thermostat crystal oscillator, which is mounted inside a crystal oscillator called OCXO (Oven Controlled Crystal Oscillator) and has high stability characteristics, an electrode made of a metal thin film The crystal base plate formed on the two main surfaces is supported by the metal support structure, and the crystal base plate and the metal support structure are fixed by the bonding material, so that the physical support of the crystal base plate and electrical conduction are achieved. The state shown in FIG. 4 is taken.

先述のOCXOと呼ばれる恒温槽型水晶発振器の内部に搭載され使用される高安定な特性をもつ水晶振動子は、大まかにいって70℃〜90℃の温度環境下で使用され、かつ経年変化による周波数出力の変動が抑えられた良好なエージング特性を得るために、水晶振動子の水晶素板と金属支持構造との接合材として熱的、及び経時変化による影響を水晶素板に与えることが少ないAuGe(金―ゲルマニウム)が使用される場合が多い。しかしながらAuGeは融点が約380℃と高く、接合時の溶解時間が長いと接合部分の水晶素板の電極を形成する金(Au)が捲られる現象(金喰われと呼ばれる)を引き起こして、その結果、水晶素板とサポート板との導通不良を起こすおそれが有り、その為に接合の作業ではAuGeを急速に加熱し、かつ短時間にその接合を終える必要がある。           A crystal resonator having a high stability characteristic, which is mounted and used in the above-mentioned constant temperature chamber type crystal oscillator called OCXO, is generally used in a temperature environment of 70 ° C. to 90 ° C. and depends on aging. In order to obtain good aging characteristics with reduced fluctuations in frequency output, the quartz base plate is less likely to be affected by thermal and temporal changes as a bonding material between the quartz base plate of the crystal unit and the metal support structure. AuGe (gold-germanium) is often used. However, AuGe has a high melting point of about 380 ° C., and if the melting time at the time of bonding is long, it causes a phenomenon (called gold erosion) that gold (Au) forming the electrode of the crystal base plate of the bonded portion is struck. As a result, there is a risk of poor conduction between the quartz base plate and the support plate. Therefore, in the joining operation, it is necessary to rapidly heat AuGe and finish the joining in a short time.

また、先述のエージング特性を左右する要因のひとつに、水晶素板の支持具でありサポート板とも呼ばれる金属支持構造からの水晶素板への応力があり、例えば図4に示されるタイプの金属支持構造を使用する水晶振動子の製造時において、ウェルドの際にウェルド圧力が水晶振動子の金属ベースを変形し、その変形に伴う応力が金属端子と金属の支持構造を経て水晶素板へと伝わる応力がある。このような応力のなかで、特に左右非対称なひねりやねじりの力が金属の支持構造から水晶素板に加わった場合、その水晶振動子の特性に大きな影響を及ぼし、場合によっては高安定な必要のある水晶振動子のエージング特性を著しく悪いものとするおそれがある。そのため、サポート板と水晶素板とを電気的かつ機械的に接合する接合材の接合長さや接合面積は、接合に使われる接合材の量とともに水晶素板に加わる力が水晶素板の左右の接合箇所において対称と成ることが必要である。           Further, one of the factors that influence the aging characteristics described above is the stress on the crystal base plate from the metal support structure, which is also a support for the crystal base plate and is also called a support plate. For example, the metal support of the type shown in FIG. When manufacturing a crystal unit that uses a structure, the weld pressure deforms the metal base of the crystal unit during welding, and the stress accompanying the deformation is transmitted to the crystal base plate through the metal terminal and metal support structure. There is stress. Among these stresses, especially when asymmetrical twisting or twisting force is applied to the quartz base plate from the metal support structure, it has a significant effect on the characteristics of the quartz crystal unit, and in some cases, it must be highly stable. There is a risk that the aging characteristics of a quartz crystal having a certain level will be remarkably deteriorated. Therefore, the bonding length and bonding area of the bonding material for electrically and mechanically bonding the support plate and the crystal base plate are determined by the amount of the bonding material used for bonding and the force applied to the crystal base plate on the left and right sides of the crystal base plate. It is necessary to be symmetric at the joint.

しかしながら、前述のように急速に加熱し、かつ短時間にその接合の作業を終える必要のあるAuGeのような接合材を使用する場合、従来の水晶振動子の支持構造では、水晶素板の左右の接合箇所において水晶素板とサポート板との接合状態である先述の接合長さや接合面積が対称とは成らず、その結果、水晶振動子のエージング特性を非常に悪化させるおそれがあるといった問題があった。           However, when using a bonding material such as AuGe that requires rapid heating and finishes the bonding operation in a short period of time as described above, the conventional quartz crystal support structure has the right and left sides of the quartz base plate. The bonding length and the bonding area described above, which is the bonding state of the crystal base plate and the support plate, are not symmetric at the bonding portion, and as a result, there is a problem that the aging characteristics of the crystal unit may be greatly deteriorated. there were.

特開平7−240656号公報Japanese Patent Laid-Open No. 7-240656 特開平11−214949号公報Japanese Patent Laid-Open No. 11-214949

なお、出願人は前記した先行技術文献情報で特定される先行技術文献以外には、本発明に関連する先行技術文献を、本件出願時までに発見するに至らなかった。           The applicant has not found any prior art documents related to the present invention other than the prior art documents specified by the prior art document information described above by the time of filing of the present application.

本発明の目的は、AuGeといった接合材の水晶素板との接合性を良好にし、水晶素板に加わるひねりの力の発生を軽減する、二本の金属端子を有する水晶振動子における水晶素板の支持構造を提供することである。           An object of the present invention is to improve the bonding property of a bonding material such as AuGe with a crystal element plate, and reduce the generation of twisting force applied to the crystal element plate. It is to provide a support structure.

水晶素板が金属ベースを気密貫通する二本の金属端子に固定されたサポート板により支持される水晶振動子の支持構造において、サポート板の水晶素板側の先端部の板厚内側面に接合材を凹部に溜めて保持され、かつ水晶素板に角部が当接する凹部を有することを特徴とする。           In the support structure of a crystal unit supported by a support plate fixed to two metal terminals that penetrate the metal base in an airtight manner, the crystal base plate is bonded to the inner surface of the support plate at the tip of the crystal base plate side. The material is characterized by having a recess that is held in a recess and whose corners abut against the quartz base plate.

また、サポート板の水晶素板側の先端部の板厚内側面に、接合材が凹部に溜めて保持され、かつ水晶素板に角部の二点で当接する第1の凹形部を有し、この第1の凹形部に壁を隔てて鉛直方向に連なり、サポート板の板厚内側面に、板厚外側面側にサポート板の板厚内側面側から凹んだ第2の凹形部を有することを特徴とする。           In addition, a bonding material is accumulated and held in the concave portion on the inner surface of the tip of the support plate on the side of the crystal base plate, and has a first concave portion that contacts the crystal base plate at two corners. The second concave shape is connected to the first concave portion in the vertical direction across the wall, and is recessed on the inner thickness side surface of the support plate and on the outer thickness side surface side of the support plate from the inner thickness side surface side of the support plate. It has the part.

本発明による水晶振動子の支持構造を用いることにより、接合材の溶融時間や溶融温度にばらつきがあっても、サポート板の凹部に接合材を溜めることが出来、水晶素板とサポート板との接合部分の接合長さや接合面積を接合に使われる接合材の量とともに一定として、水晶素板の左右それぞれのサポート板から水晶素板に加わる応力に対称性を持たせ、その結果、水晶振動子のエージング特性を著しく安定なものとすることが出来る。           By using the quartz crystal support structure according to the present invention, the bonding material can be stored in the concave portion of the support plate even if the melting time or melting temperature of the bonding material varies, Assuming that the joining length and joining area of the joining part are constant along with the amount of joining material used for joining, the stress applied to the crystal base plate from the left and right support plates of the crystal base plate is made symmetrical, and as a result, the crystal resonator The aging characteristics can be made extremely stable.

また、本実施例の水晶振動子単体に限らず、本発明の水晶振動子を構成する水晶発振器においても、同様に周波数や、エージング特性などの特性の変化を著しく抑制する効果が得られ、その結果、水晶発振器の製造歩留まりを著しく高めることが出来る。           Further, not only in the crystal unit of the present embodiment alone, but also in the crystal oscillator constituting the crystal unit of the present invention, the effect of remarkably suppressing changes in characteristics such as frequency and aging characteristics can be obtained. As a result, the manufacturing yield of the crystal oscillator can be significantly increased.

以下、添付の図面に従がってこの発明の実施例を説明する。なお各図においての同一の符号は同じ対象を示すものとする。           Embodiments of the present invention will be described below with reference to the accompanying drawings. In addition, the same code | symbol in each figure shall show the same object.

図1は本発明の水晶振動子5の支持構造の概略の正面図である。水晶素板1が金属ベース2を気密貫通する二本の金属端子3に固定されたサポート板4により支持される水晶振動子5の支持構造において、サポート板4の水晶素板1側の先端部6の板厚内側面7に接合材8が凹部に溜めて保持され、かつ水晶素板に角部が当接する凹部9を有する為に、例えばAuGeといった急速に加熱し、短時間に接合を終える必要のある使用条件が厳しい接合材8を使用する場合においても、水晶素板1に角部が当接しながら左右それぞれの同一の形状をしたサポート板4の凹部に同一量、接合材の接合部分の長さ、面積で接合材8を凹部に溜めて水晶素板1とサポート板4を接合することができる為に、水晶素板1との接合性を良好にし、水晶素板1の左右それぞれのサポート板4から水晶素板1に加わる応力に対称性を持たせることが出来、その結果、水晶素板1に水晶素板1の左右から加わるひねりの力を抑制して水晶振動子5のエージング特性の変動を抑えて、著しく安定なものとすることが出来る。なお、本実施例では、一方のサポート板4の凹部の角部が水晶素板1と当接するが、本実施例の構造のために水晶素板1がサポート板4と当接する位置を凹部角部に自然に定めることが出来、かつ実際に接合材8を使用した場合の水晶素板1とサポート板4との接合状態を水晶板1の左右で、対象性を持たせることが出来る。なお、ここで凹部、及び凹形部はL字状に凹んだ構造、及びコの字状に凹んだ構造の場合のいずれも示す。           FIG. 1 is a schematic front view of a support structure for a crystal resonator 5 according to the present invention. In the support structure of the crystal resonator 5 supported by the support plate 4 in which the crystal base plate 1 is fixed to the two metal terminals 3 hermetically penetrating the metal base 2, the tip of the support plate 4 on the crystal base plate 1 side. The bonding material 8 is accumulated and held in the concave portion on the inner surface 7 of the plate thickness 6 and has the concave portion 9 in which the corner portion comes into contact with the quartz base plate. Therefore, the bonding is completed in a short time by heating rapidly, for example, AuGe. Even in the case of using the bonding material 8 that is strict in the required use conditions, the bonding portion of the bonding material is the same amount in the recesses of the support plate 4 having the same shape on both the left and right sides while the corner portions are in contact with the crystal base plate 1. Since the bonding material 8 can be stored in the concave portion with the length and area of the crystal element plate 1 and the support plate 4 can be bonded to each other, the bondability between the crystal element plate 1 and the crystal element plate 1 is improved. Against the stress applied to the quartz base plate 1 from the support plate 4 As a result, the twisting force applied to the crystal base plate 1 from the left and right sides of the crystal base plate 1 is suppressed, and the fluctuation of the aging characteristics of the crystal resonator 5 is suppressed, so that the crystal base plate 1 is extremely stable. I can do it. In this embodiment, the corner portion of the recess of one support plate 4 abuts on the crystal base plate 1. However, because of the structure of this embodiment, the position where the crystal base plate 1 abuts on the support plate 4 is defined as the recess corner. The crystal plate 1 and the support plate 4 can be joined to the right and left sides of the crystal plate 1 when the bonding material 8 is actually used. Here, the concave portion and the concave portion indicate both the L-shaped structure and the U-shaped structure.

図2は本発明の水晶振動子5の支持構造の水晶素板に角部が当接する凹部9の在るサポート板4を用い、接合材8を介して水晶素板1を支持する様子を示す水晶素板1の主面方向からみた概略の図と、その側面方向からみた模式図である。点線の円内の図は、サポート板4の部分を拡大した概略の図である。接合材8の溶融時間や溶融温度にばらつきがあっても、先述の凹部9を有する為に、その凹部9に溶解した接合材8を、接合材8の自重で下方にたれた形状で固着すること無く、溜ることが出来るため、ここでも水晶素板1とサポート板4との接合部分の接合長さや接合面積を一定として、水晶素板1の左右から水晶素板1に加わる応力に対称性を持たせることが出来る。なお、図2の点線の円内は一方のサポート板4の凹部9周りの拡大図であり、水晶素板1の左右両方のサポート板4について同じ形状と成っている。即ち、水晶素板1に角部が当接しながら左右それぞれの同一の形状をしたサポート板4の凹部に同一量、接合材の接合部分の長さ、面積で接合材8を凹部に溜めて水晶素板1とサポート板4を接合する為に、水晶素板1との接合性を良好にし、水晶素板1の左右それぞれのサポート板4から水晶素板1に加わる応力に対称性を持たせることが出来、その結果、水晶素板1に加わるひねりの力の発生を抑制して水晶振動子5のエージング特性の変動を抑えて、著しく安定なものとすることが出来るものである。           FIG. 2 shows a state in which the crystal base plate 1 is supported via a bonding material 8 using a support plate 4 having a concave portion 9 whose corners abut against the crystal base plate of the support structure of the crystal resonator 5 of the present invention. It is the schematic figure seen from the main surface direction of the quartz base plate 1, and the schematic diagram seen from the side surface direction. The diagram in the dotted circle is a schematic diagram in which the support plate 4 is enlarged. Even if there is a variation in the melting time or melting temperature of the bonding material 8, the bonding material 8 dissolved in the concave portion 9 is fixed in a shape that is drooped downward by the weight of the bonding material 8 because the concave portion 9 is provided. In this case, the bonding length and the bonding area of the bonding portion between the crystal element plate 1 and the support plate 4 are constant, and the stress applied to the crystal element plate 1 from the left and right sides of the crystal element plate 1 is symmetrical. Can be given. 2 is an enlarged view around the concave portion 9 of one support plate 4, and the left and right support plates 4 of the quartz base plate 1 have the same shape. That is, the bonding material 8 is accumulated in the concave portion with the same amount, the length and the area of the bonding portion of the bonding material in the concave portion of the support plate 4 having the same shape on both the left and right sides while the corner portion is in contact with the crystal base plate 1. In order to join the base plate 1 and the support plate 4, the bondability between the crystal base plate 1 is improved and the stress applied to the crystal base plate 1 from the left and right support plates 4 of the crystal base plate 1 is symmetrical. As a result, the generation of a twisting force applied to the quartz base plate 1 can be suppressed, and the fluctuation of the aging characteristics of the quartz resonator 5 can be suppressed, so that it can be made extremely stable.

図3は本発明の別の実施例である水晶振動子5の支持構造のサポート板4を用い、接合材8を介して水晶素板1を支持する様子を示す水晶素板1の主面方向からみた概略の図と、その側面方向からみた模式図である。点線の円内の図は、第1の凹形部10と第2の凹形部12の在るサポート板4の部分を拡大した概略の図である。サポート板4の水晶素板1側の先端部6の板厚内側面7に、接合材8を凹部に溜めて保持し、かつ水晶素板に角部の二点で当接する第1の凹形部10を有し、この第1の凹形部10に鉛直方向に連なり、サポート板4の板厚内側面7に、板厚外側面11側にサポート板4の板厚内側面7側から凹んだ第2の凹形部12を有するために、使用する接合材8の溶解時間が長く、第1の凹形部10からはみ出した接合材8が水晶素板1に接触したまま固まってしまうこと無く、第1の凹形部10からはみ出した接合材8が水晶素板1から離れて流れ込む第2の凹形部12を持つために、この実施例の場合においても、左右の同一の形状をしたサポート板4の凹部10に同一量、接合材8の接合部分の長さ、面積で接合材8を凹部に溜めて接合し水晶素板1との接合性を良好にし、水晶素板1の左右から水晶素板1に加わる応力に対称性を持たせることが出来るために、その結果、水晶素板1に水晶素板の左右から加わるひねりの力の発生を抑制して水晶振動子5のエージング特性の変動を抑え、著しく安定なものとすることが出来るものである。なお、本3図においても、点線の円内は一方のサポート板4の第一の凹部10周りの拡大図であり、水晶素板1の左右両方のサポート板4について同じ形状と成っている。即ち、この場合においても、水晶素板1に角部の二点で当接しながら左右それぞれの同一の形状をしたサポート板4の第一の凹部10に同一量、接合材の接合部分の長さ、面積で接合材8を凹部に溜めて水晶素板1とサポート板4を接合する為に、水晶素板1の左右それぞれのサポート板4から水晶素板1に加わる応力に対称性を持たせることが出来、その結果、水晶素板1に加わるひねりの力の発生を抑制して水晶振動子5のエージング特性の変動を抑えて、著しく安定なものとすることが出来るものである           FIG. 3 shows the main surface direction of the crystal base plate 1 showing a state in which the crystal base plate 1 is supported through the bonding material 8 using the support plate 4 of the support structure of the crystal resonator 5 according to another embodiment of the present invention. It is the schematic figure seen from the side, and the schematic diagram seen from the side surface direction. The diagram in the dotted circle is an enlarged schematic view of the portion of the support plate 4 where the first concave portion 10 and the second concave portion 12 are present. A first concave shape that holds and holds the bonding material 8 in the concave portion on the inner thickness surface 7 of the tip portion 6 of the support plate 4 on the side of the crystal base plate 1 and abuts the crystal base plate at two corners. And has a portion 10, which is connected to the first concave portion 10 in the vertical direction, and is recessed from the plate thickness inner surface 7 of the support plate 4 to the plate thickness outer surface 11 side from the plate thickness inner surface 7 side of the support plate 4. However, since the second concave portion 12 is provided, the melting time of the bonding material 8 to be used is long, and the bonding material 8 protruding from the first concave portion 10 is hardened while being in contact with the quartz base plate 1. In addition, since the bonding material 8 that protrudes from the first concave portion 10 has the second concave portion 12 that flows away from the quartz base plate 1, the same shape on the left and right is also obtained in this embodiment. The bonding material 8 is accumulated in the concave portion with the same amount in the concave portion 10 of the support plate 4 and the length and area of the bonding portion of the bonding material 8 and bonded. Since the bondability with the plate 1 can be improved and the stress applied to the crystal plate 1 from the left and right sides of the crystal plate 1 can be symmetrical, the crystal plate 1 can be viewed from the left and right sides of the crystal plate. It is possible to suppress the generation of the applied twisting force and suppress the fluctuation of the aging characteristic of the crystal unit 5 to make it extremely stable. In FIG. 3 as well, the dotted circle is an enlarged view around the first recess 10 of one support plate 4, and the left and right support plates 4 of the crystal base plate 1 have the same shape. That is, even in this case, the same amount of the first concave portion 10 of the support plate 4 having the same shape on both the left and right sides while contacting the crystal base plate 1 at two corners, and the length of the joining portion of the joining material In order to join the crystal element plate 1 and the support plate 4 by collecting the bonding material 8 in the recesses by area, the stress applied to the crystal element plate 1 from the left and right support plates 4 is made symmetrical. As a result, the generation of the twisting force applied to the crystal base plate 1 can be suppressed, and the fluctuation of the aging characteristic of the crystal resonator 5 can be suppressed, so that it can be made extremely stable.

図4は従来の板サポート板4を用いて水晶素板1を保持する様子を示す水晶素板の1主面方向からみた概略の図である。このような水晶振動子5の支持構造では、水晶素板1の左右の接合箇所において水晶素板1とサポート板4との接合状態である接合長さや接合面積が対称とは成らず、その結果、水晶振動子5のエージング特性を非常に悪化させるおそれがあるといった問題があった。           FIG. 4 is a schematic view of the crystal base plate 1 as viewed from the direction of one main surface, showing a state in which the crystal base plate 1 is held using the conventional plate support plate 4. In such a support structure of the crystal unit 5, the bonding length and the bonding area, which are the bonding state of the crystal element plate 1 and the support plate 4, are not symmetrical at the left and right bonding portions of the crystal element plate 1, and as a result There is a problem that the aging characteristics of the crystal unit 5 may be extremely deteriorated.

図5は従来のスリットサポート板を用いて水晶素板1を保持する様子を示す水晶素板1の主面方向からみた概略の図である。           FIG. 5 is a schematic view seen from the main surface direction of the crystal base plate 1 showing how the crystal base plate 1 is held using a conventional slit support plate.

図6は従来のサポート板4を用いた支持構造を正面方向からみた概略の図である。従来のサポート板4では、水晶素板1とサポート板4の接合状態の接合長さや接合面積は、接合材8を溜めることが無く、たれた接合部分の長さが水晶素板1の左右の接合箇所において対称と成らず水晶振動子5のエージング特性を非常に悪化させるおそれがあるといった問題があった。           FIG. 6 is a schematic view of a conventional support structure using the support plate 4 as viewed from the front. In the conventional support plate 4, the bonding length and the bonding area in the bonded state of the crystal base plate 1 and the support plate 4 do not collect the bonding material 8, and the length of the splayed joint portion is left and right of the crystal base plate 1. There is a problem in that the aging characteristics of the crystal unit 5 may be extremely deteriorated because it is not symmetric at the joint.

本発明の水晶振動子の支持構造の概略の正面図である。It is a schematic front view of the support structure of the crystal unit of the present invention. 本発明の水晶振動子の支持構造の水晶素板に角部が当接する凹部の在るサポート板を用い、接合材を介して水晶素板を支持する様子を示す水晶素板の主面方向からみた概略の図と、その側面方向からみた模式図である。点線の円内の図は、一方のサポート板の凹部周りを拡大した概略の図である。From the main surface direction of the crystal element plate showing a state in which the crystal element plate of the support structure of the present invention has a concave portion with which a corner portion abuts and supports the crystal element plate via a bonding material It is the schematic figure seen, and the schematic diagram seen from the side surface direction. The diagram in the dotted circle is a schematic diagram enlarging the concave portion of one support plate. 本発明の別の実施例である水晶振動子の支持構造のサポート板を用い、接合材を介して水晶素板を支持する様子を示す水晶素板の主面方向からみた概略の図と、その側面方向からみた模式図である。点線の円内の図は、第1の凹形部と第2の凹形部の在る一方のサポート板の先端付近の部分を拡大した概略の図である。Schematic view seen from the main surface direction of the crystal base plate showing a state of supporting the crystal base plate through the bonding material using the support plate of the support structure of the crystal resonator which is another embodiment of the present invention, and its It is the schematic diagram seen from the side surface direction. The diagram in the dotted circle is an enlarged schematic view of a portion near the tip of one support plate where the first concave portion and the second concave portion are present. 従来の板サポート板を用いて水晶素板を保持する様子を示す水晶素板の主面方向からみた概略の図である。It is the schematic seen from the main surface direction of the crystal base plate which shows a mode that a crystal base plate is hold | maintained using the conventional plate support plate. 従来のスリットサポート板を用いて水晶素板を保持する様子を示す水晶素板の主面方向からみた概略の図である。It is the schematic seen from the main surface direction of the crystal base plate which shows a mode that a crystal base plate is hold | maintained using the conventional slit support plate. 従来のサポート板を用いた支持構造を前方方向からみた概略の図である。It is the schematic which looked at the support structure using the conventional support plate from the front direction.

符号の説明Explanation of symbols

1 水晶素板
2 金属ベース
3 金属端子
4 サポート板
5 水晶振動子
6 先端部
7 板厚内側面
8 接合材
9 水晶素板に角部が当接する凹部
10 水晶素板に角部の二点で当接する第1の凹形部
11 板厚外側面
12 第2の凹形部
DESCRIPTION OF SYMBOLS 1 Crystal base plate 2 Metal base 3 Metal terminal 4 Support plate 5 Crystal oscillator 6 Tip part 7 Thickness inner side surface 8 Bonding material 9 Recess 10 where a corner | angular part contact | connects a crystal base plate 1st concave part 11 which contact | abuts Thickness outer side surface 12 2nd concave part

Claims (2)

水晶素板が金属ベースを気密貫通する二本の金属端子に固定されたサポート板により支持される水晶振動子の支持構造において、
該サポート板の該水晶素板側の先端部の板厚内側面に接合材が凹部に溜めて保持され、かつ該水晶素板に角部が当接する凹部を有することを特徴とする水晶振動子の支持構造。
In the support structure of the crystal resonator, the crystal base plate is supported by a support plate fixed to two metal terminals hermetically penetrating the metal base.
A quartz resonator having a concave portion in which a bonding material is accumulated and held in a concave portion on the inner surface of a thickness portion of a tip portion of the support plate on the quartz base plate side, and a corner portion is in contact with the quartz base plate Support structure.
該サポート板の該水晶素板側の先端部の板厚内側面に、接合材が凹部に溜めて保持され、かつ該水晶素板に角部の二点で当接する第1の凹形部を有し、該第1の凹形部に壁を隔てて鉛直方向に連なり、該サポート板の板厚内側面に、板厚外側面側に該サポート板の板厚内側面側から凹んだ第2の凹形部を有することを特徴とする請求項1に記載の水晶振動子の支持構造。           On the inner surface of the thickness of the support plate at the tip of the quartz base plate side, a first concave portion that holds the bonding material in a concave portion and is in contact with the quartz base plate at two corners is provided. A second concave portion extending in a vertical direction across a wall from the first concave portion and recessed from the inner thickness side of the support plate on the inner thickness side of the support plate and on the outer thickness side of the support plate. The support structure for a crystal resonator according to claim 1, comprising: a concave portion.
JP2004380181A 2004-12-28 2004-12-28 Support structure for crystal vibrator Pending JP2006186839A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106797198A (en) * 2014-08-20 2017-05-31 日本电波工业株式会社 The manufacture method of oscillation device and oscillation device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106797198A (en) * 2014-08-20 2017-05-31 日本电波工业株式会社 The manufacture method of oscillation device and oscillation device

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