JP2007057438A5 - - Google Patents

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Publication number
JP2007057438A5
JP2007057438A5 JP2005244800A JP2005244800A JP2007057438A5 JP 2007057438 A5 JP2007057438 A5 JP 2007057438A5 JP 2005244800 A JP2005244800 A JP 2005244800A JP 2005244800 A JP2005244800 A JP 2005244800A JP 2007057438 A5 JP2007057438 A5 JP 2007057438A5
Authority
JP
Japan
Prior art keywords
contactor
pressing member
probe card
convex portion
card according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005244800A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007057438A (ja
JP4642603B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005244800A priority Critical patent/JP4642603B2/ja
Priority claimed from JP2005244800A external-priority patent/JP4642603B2/ja
Publication of JP2007057438A publication Critical patent/JP2007057438A/ja
Publication of JP2007057438A5 publication Critical patent/JP2007057438A5/ja
Application granted granted Critical
Publication of JP4642603B2 publication Critical patent/JP4642603B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005244800A 2005-08-25 2005-08-25 プローブカード Expired - Fee Related JP4642603B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005244800A JP4642603B2 (ja) 2005-08-25 2005-08-25 プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005244800A JP4642603B2 (ja) 2005-08-25 2005-08-25 プローブカード

Publications (3)

Publication Number Publication Date
JP2007057438A JP2007057438A (ja) 2007-03-08
JP2007057438A5 true JP2007057438A5 (cg-RX-API-DMAC10.html) 2008-10-09
JP4642603B2 JP4642603B2 (ja) 2011-03-02

Family

ID=37921059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005244800A Expired - Fee Related JP4642603B2 (ja) 2005-08-25 2005-08-25 プローブカード

Country Status (1)

Country Link
JP (1) JP4642603B2 (cg-RX-API-DMAC10.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008126601A1 (ja) * 2007-03-14 2008-10-23 Nhk Spring Co., Ltd. プローブカード
KR101142760B1 (ko) 2007-05-31 2012-05-08 가부시키가이샤 아드반테스트 프로브 카드의 고정장치
JP5015672B2 (ja) * 2007-06-21 2012-08-29 日本電子材料株式会社 プローブカード
JP5188161B2 (ja) * 2007-11-30 2013-04-24 東京エレクトロン株式会社 プローブカード
JP5232555B2 (ja) * 2008-07-23 2013-07-10 スタンレー電気株式会社 光半導体装置モジュール

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6483328B1 (en) * 1995-11-09 2002-11-19 Formfactor, Inc. Probe card for probing wafers with raised contact elements
WO2001071779A2 (en) * 2000-03-17 2001-09-27 Formfactor, Inc. Method and apparatus for planarizing a semiconductor contactor
JP2002267687A (ja) * 2001-03-12 2002-09-18 Advantest Corp プローブカード及び試験装置
JP3621938B2 (ja) * 2002-08-09 2005-02-23 日本電子材料株式会社 プローブカード
JP2004205487A (ja) * 2002-11-01 2004-07-22 Tokyo Electron Ltd プローブカードの固定機構

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