JP2007036571A - 半導体装置及びその製造方法 - Google Patents
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Abstract
【解決手段】 半導体基板35の第1の主面35Aに形成され、半導体素子を有する素子形成層36を備えた半導体チップ11と、半導体素子と電気的に接続され、半導体チップ11を貫通する貫通電極15,16と、半導体基板35の第2の主面35B側に形成されたパッチアンテナ33とを設けて、半導体素子の給電用ラインと電気的に接続された貫通電極15と、パッチアンテナ33とを電気的に接続する。
【選択図】 図3
Description
図3は、本発明の第1の実施の形態による半導体装置の断面図である。
図20は、本発明の第2の実施の形態に係る半導体装置の断面図である。図20において、第1の実施の形態の半導体装置10と同一構成部分には同一符号を付す。
図22は、本発明の第3の実施の形態に係る半導体装置の断面図である。図22において、第1の実施の形態の半導体装置10と同一構成部分には同一符号を付す。
11 半導体チップ
12,13 保護膜
12A 上面
13A,13B,22A,22B,32A,32B,45A,46A,46B,48A,48B,49A,52A 開口部
13C 面
14,22,32,71,73 絶縁膜
15,16 貫通電極
15A,16A 貫通部
15B,15C,16B,16C 接続部
17,29 配線
18,30 絶縁層
20,21 ビア
20A,21A,41A 面
24 拡散防止膜
25 外部接続端子
28 グラウンド層
33 パッチアンテナ
35 半導体基板
35A 第1の主面
35B 第2の主面
36 素子形成層
37 電極パッド
39A,39B 貫通孔
41,62 ビア部
42 アンテナ部
45,46,48,49,51,52 レジスト層
61 逆F型アンテナ
72 受動素子
B 半導体装置形成領域
D 切断位置
Claims (8)
- 半導体基板と、該半導体基板の第1の主面に形成され、半導体素子を有する素子形成層とを備えた半導体チップと、
前記半導体素子と電気的に接続された受動素子とを備えた半導体装置であって、
前記受動素子を前記半導体基板の第1の主面とは反対側の第2の主面側に設けて、前記受動素子と半導体素子とを、前記半導体チップを貫通する貫通電極により電気的に接続したことを特徴とする半導体装置。 - 前記半導体基板の第2の主面に設けられたグランド層と、該グラウンド層を覆う第1の絶縁層とをさらに備え、
前記貫通電極は、前記グラウンド層と電気的に接続される第1の貫通電極と、前記半導体素子の給電ラインと電気的に接続される第2の貫通電極とを有することを特徴とする請求項1に記載の半導体装置。 - 前記受動素子は、パッチアンテナまたは逆F型アンテナであることを特徴とする請求項1または2記載の半導体装置。
- 前記受動素子がパッチアンテナの場合、前記受動素子は、前記第2の貫通電極と電気的に接続されることを特徴とする請求項3記載の半導体装置。
- 前記受動素子が逆F型アンテナの場合、前記受動素子は、前記第1及び第2の貫通電極と電気的に接続されることを特徴とする請求項3記載の半導体装置。
- 前記素子形成層上に設けられた第2の絶縁層と、該第2の絶縁層上に設けられた外部接続端子とをさらに備え、
前記第2の絶縁層に、前記外部接続端子と第1及び第2の貫通電極との間を電気的に接続する配線パターンを設けたことを特徴とする請求項1〜5のいずれか一項記載の半導体装置。 - 半導体基板の第1の主面に形成された素子形成層を有する半導体チップと、前記半導体基板の第1の主面とは反対側の第2の主面側に設けられた受動素子と、前記半導体チップを貫通し、前記受動素子と半導体素子とを電気的に接続する貫通電極とを備えた半導体装置の製造方法であって、
前記半導体基板は、前記半導体装置が形成される半導体装置形成領域を複数有しており、
前記半導体基板の複数の半導体装置形成領域に前記素子形成層を形成する第1の工程と、
前記貫通電極を形成する第2の工程と、
前記受動素子を形成する第3の工程と、
前記第1〜第3の工程後に前記半導体基板を切断して前記半導体装置を個片化する第4の工程とを含むことを特徴とする半導体基板の製造方法。 - 前記第3の工程と第4の工程の間に、前記半導体基板の第1の主面側に、前記貫通電極と電気的に接続される外部接続端子を形成する工程をさらに設けたことを特徴とする請求項7記載の半導体装置の製造方法。
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Cited By (2)
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JP2009158743A (ja) * | 2007-12-27 | 2009-07-16 | Shinko Electric Ind Co Ltd | 半導体装置及びその製造方法 |
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US7569924B2 (en) | 2009-08-04 |
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