JP2007035962A - 半導体装置 - Google Patents
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- G—PHYSICS
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- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
- G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
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- H—ELECTRICITY
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- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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- H—ELECTRICITY
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- G—PHYSICS
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
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- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
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- H01—ELECTRIC ELEMENTS
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Abstract
【解決手段】 半導体加速度センサ装置1は、内部にキャビティ21cを有し、下部容器21と上部蓋25とからなるパッケージと、半導体加速度センサチップ10と、上面のチップ搭載領域32aに半導体加速度センサチップ10が固着されたスペーサ32と、スペーサ32の下面におけるチップ搭載領域32a下以外の領域(糊代32b、離間領域32c)とキャビティ21cの底面21aとを接着する接着部33とを備える。
【選択図】 図1
Description
まず、本実施例による半導体加速度センサチップ10の構成を図面と共に詳細に説明する。なお、本実施例では、ピエゾ抵抗効果、すなわち発生した応力に比例して抵抗値が変化する現象を利用した、3次元加速度センサを例に挙げて説明する。
次に、上述した半導体加速度センサチップ10をパッケージングすることで形成された、本実施例による半導体加速度センサ装置1の構成を図面と共に詳細に説明する。
次に、本実施例による半導体加速度センサ装置1の製造方法を図面と共に詳細に説明する。
以上のように、本実施例による半導体装置である半導体加速度センサ装置1は、内部にキャビティ21cを有し、下部容器21と上部蓋25とからなるパッケージと、半導体加速度センサチップ10と、上面のチップ搭載領域32aに半導体加速度センサチップ10が固着されたスペーサ32と、スペーサ32の下面におけるチップ搭載領域32a下以外の領域(糊代32b、離間領域32c)とキャビティ21cの底面21aとを接着する接着部33とを備える。
図10は、本実施例による半導体加速度センサ装置2の構成を示す断面図である。また、図11は図10におけるV−V’断面図である。なお、図10は、図11におけるVI−VI’断面図に相当する。
次に、本実施例による半導体加速度センサ装置2の製造方法を図面と共に詳細に説明する。
以上のように、本実施例による半導体装置である半導体加速度センサ装置2は、実施例1と同様に、内部にキャビティ21c’を有し、下部容器21’と上部蓋25とからなるパッケージと、半導体加速度センサチップ10と、上面のチップ搭載領域32aに半導体加速度センサチップ10が固着されたスペーサ32と、スペーサ32の下面におけるチップ搭載領域32a下以外の領域(糊代32b、離間領域32c)とキャビティ21c’の第1底面21a’とを接着する接着部33とを備える。
図14は、本実施例による半導体加速度センサ装置3の構成を示す断面図である。また、図15は図14におけるVII−VII’断面図である。なお、図14は、図15におけるVIII−VIII’断面図に相当する。
次に、本実施例による半導体加速度センサ装置3の製造方法を図面と共に詳細に説明する。
以上のように、本実施例による半導体装置である半導体加速度センサ装置3は、内部にキャビティ21c”を有し、下部容器21”と上部蓋25とからなるパッケージと、半導体加速度センサチップ10と、上面のチップ搭載領域32aに半導体加速度センサチップ10が固着されたスペーサ32と、スペーサ32の下面におけるチップ搭載領域32a下以外の領域(糊代32b、離間領域32c)とキャビティ21c”の第1底面21a’とを接着する接着部33とを備える。
10 半導体加速度センサチップ
10’ ガラス基板
12 固定部
13 梁部
14 錘部
15i、15o ピエゾ抵抗素子
16 電極パッド
21、21’、21” 下部容器
21A、21B、21C、21F、21H グリーンシート
21D、21E、21G キャビティ孔
21a 底面
21a’ 第1底面
21b 段差面
21c、21c’、21c” キャビティ
21d、21d’、21” 中空の領域
21e、21e” 第2底面
21f,21f” ザグリ部
21g 凸部
21h 上面
22 フットパターン
23 配線パターン
23A、23B 導体パターン
24 熱硬化性樹脂
25 上部蓋
26 金属ワイヤ
31 ペースト材
32 スペーサ
32a チップ搭載領域
32b 糊代
32c 離間領域
33 接着部
33A 接着材料
Claims (13)
- 内部にキャビティを有するパッケージと、
所定の素子を有する半導体チップと、
上面の所定領域に前記半導体チップが固着された板状部材と、
前記板状部材の下面における前記所定領域下以外の領域と前記キャビティの壁面とを接着する接着部と
を備えたことを特徴とする半導体装置。 - 前記パッケージは、前記板状部材が接着された前記キャビティの壁面に、少なくとも前記半導体チップ下を凹陥させる凹部を有することを特徴とする請求項1記載の半導体装置。
- 前記パッケージは、前記凹部における底面に、当該凹部の底面よりも突出した上面を持つ凸部を有することを特徴とする請求項2記載の半導体装置。
- 前記板状部材の下面において、前記接着部が着設された領域と、前記所定領域下の領域とが離間していることを特徴とする請求項1から3の何れか1項に記載の半導体装置。
- 前記接着部は、前記板状部材の下面における外周に沿ってリング状に形成されていることを特徴とする請求項1から4の何れか1項に記載の半導体装置。
- 前記凸部の上面は、前記接着部が着設された前記キャビティの側面と同一平面に含まれることを特徴とする請求項3記載の半導体装置。
- 前記接着部は固化した樹脂であることを特徴とする請求項1から6の何れか1項に記載の半導体装置。
- 前記着設部はシリコーン樹脂またはフッ素樹脂であることを特徴とする請求項1から6の何れか1項に記載の半導体装置。
- 前記板状部材は、シリコン板であることを特徴とする請求項1から8の何れか1項に記載の半導体装置。
- 前記半導体チップに形成された第1電極パッドと、
前記パッケージに形成され、少なくとも一部が前記キャビティ内部で露出された配線パターンと、
前記パッケージの底面に形成され、前記配線パターンと電気的に接続された第2電極パッドと、
前記第1電極パッドと、前記露出された配線パターンとを接続する金属ワイヤと
をさらに有することを特徴とする請求項1から9の何れか1項に記載の半導体装置。 - 前記パッケージの少なくとも一部はセラミック製であることを特徴とする請求項1から10の何れか1項に記載の半導体装置。
- 前記半導体チップは加速度センサであることを特徴とする請求項1から11の何れか1項に記載の半導体装置。
- 前記半導体チップは、前記板状部材に固着された固定部と、当該固定部に対して変位可能な錘部と、一方の端が前記錘部に固定され且つ他方の端が前記固定部に固定れた可撓性の梁部と、前記梁部に着設された圧電素子とを含む加速度センサであることを特徴とする請求項1から11の何れか1項に記載の半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005217817A JP4740678B2 (ja) | 2005-07-27 | 2005-07-27 | 半導体装置 |
CN200610077372A CN100595909C (zh) | 2005-07-27 | 2006-04-29 | 半导体器件 |
KR1020060040309A KR20070014005A (ko) | 2005-07-27 | 2006-05-04 | 반도체 장치 |
US11/427,784 US7615835B2 (en) | 2005-07-27 | 2006-06-29 | Package for semiconductor acceleration sensor |
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Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005217817A JP4740678B2 (ja) | 2005-07-27 | 2005-07-27 | 半導体装置 |
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JP2011083196A Division JP2011180146A (ja) | 2011-04-04 | 2011-04-04 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
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JP2007035962A true JP2007035962A (ja) | 2007-02-08 |
JP4740678B2 JP4740678B2 (ja) | 2011-08-03 |
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JP2005217817A Expired - Fee Related JP4740678B2 (ja) | 2005-07-27 | 2005-07-27 | 半導体装置 |
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US (1) | US7615835B2 (ja) |
JP (1) | JP4740678B2 (ja) |
KR (1) | KR20070014005A (ja) |
CN (1) | CN100595909C (ja) |
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JP2014010131A (ja) * | 2012-07-03 | 2014-01-20 | Sony Corp | センサデバイス |
US10866260B2 (en) | 2017-03-24 | 2020-12-15 | Seiko Epson Corporation | Physical quantity sensor, electronic apparatus, and vehicle |
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US8148808B2 (en) * | 2007-08-13 | 2012-04-03 | Lv Sensors, Inc. | Partitioning of electronic packages |
US9095072B2 (en) | 2010-09-18 | 2015-07-28 | Fairchild Semiconductor Corporation | Multi-die MEMS package |
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US8813564B2 (en) | 2010-09-18 | 2014-08-26 | Fairchild Semiconductor Corporation | MEMS multi-axis gyroscope with central suspension and gimbal structure |
EP2619536B1 (en) | 2010-09-20 | 2016-11-02 | Fairchild Semiconductor Corporation | Microelectromechanical pressure sensor including reference capacitor |
US9870968B2 (en) * | 2011-10-27 | 2018-01-16 | Global Circuit Innovations Incorporated | Repackaged integrated circuit and assembly method |
WO2013084294A1 (ja) * | 2011-12-06 | 2013-06-13 | 株式会社日立製作所 | 力学量測定装置 |
KR101849223B1 (ko) * | 2012-01-17 | 2018-04-17 | 삼성전자주식회사 | 반도체 패키지 및 그 제조 방법 |
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US20070024409A1 (en) | 2007-02-01 |
CN1905167A (zh) | 2007-01-31 |
KR20070014005A (ko) | 2007-01-31 |
CN100595909C (zh) | 2010-03-24 |
JP4740678B2 (ja) | 2011-08-03 |
US7615835B2 (en) | 2009-11-10 |
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