JP2006520923A5 - - Google Patents
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- Publication number
- JP2006520923A5 JP2006520923A5 JP2006504729A JP2006504729A JP2006520923A5 JP 2006520923 A5 JP2006520923 A5 JP 2006520923A5 JP 2006504729 A JP2006504729 A JP 2006504729A JP 2006504729 A JP2006504729 A JP 2006504729A JP 2006520923 A5 JP2006520923 A5 JP 2006520923A5
- Authority
- JP
- Japan
- Prior art keywords
- photoresist layer
- concavo
- convex
- photoresist
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims 20
- 239000000758 substrate Substances 0.000 claims 8
- 239000011159 matrix material Substances 0.000 claims 7
- 238000000034 method Methods 0.000 claims 2
- 238000000465 moulding Methods 0.000 claims 2
- 230000000737 periodic Effects 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000005266 casting Methods 0.000 claims 1
- 230000001427 coherent Effects 0.000 claims 1
- 230000000875 corresponding Effects 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
- 238000005755 formation reaction Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000007493 shaping process Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10318105A DE10318105B4 (de) | 2003-03-21 | 2003-04-22 | Verfahren zur Herstellung von Mikrostrukturen |
| PCT/EP2004/002822 WO2004083911A1 (de) | 2003-03-21 | 2004-03-18 | Mikrostruktur und verfahren zur herstellung von mikrostrukturen |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006520923A JP2006520923A (ja) | 2006-09-14 |
| JP2006520923A5 true JP2006520923A5 (pl) | 2007-07-19 |
| JP4495722B2 JP4495722B2 (ja) | 2010-07-07 |
Family
ID=37052560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006504729A Expired - Fee Related JP4495722B2 (ja) | 2003-04-22 | 2004-03-18 | ミクロ構造の作成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4495722B2 (pl) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5104220B2 (ja) | 2007-11-02 | 2012-12-19 | 住友電気工業株式会社 | 回折光学素子およびその製造方法 |
| JP5391670B2 (ja) * | 2007-12-27 | 2014-01-15 | セイコーエプソン株式会社 | 微細構造体の製造方法 |
| JP2009244529A (ja) * | 2008-03-31 | 2009-10-22 | Konica Minolta Opto Inc | 遮光部及びレンズ鏡胴 |
| JP2009294383A (ja) * | 2008-06-04 | 2009-12-17 | Toppan Printing Co Ltd | 表示体及び情報印刷物 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57139872A (en) * | 1981-02-03 | 1982-08-30 | Landis & Gyr Ag | Method of and apparatus for preventing faking of document |
| JPS63181142A (ja) * | 1987-01-21 | 1988-07-26 | Toppan Printing Co Ltd | 光学的記録媒体の製造方法 |
| JP2812758B2 (ja) * | 1988-04-12 | 1998-10-22 | 大日本印刷株式会社 | 光記録体及びその製造方法 |
| GB9524862D0 (en) * | 1995-12-06 | 1996-02-07 | The Technology Partnership Plc | Colour diffractive structure |
| DE19708776C1 (de) * | 1997-03-04 | 1998-06-18 | Fraunhofer Ges Forschung | Entspiegelungsschicht sowie Verfahren zur Herstellung derselben |
| JP4334656B2 (ja) * | 1999-03-15 | 2009-09-30 | 大日本印刷株式会社 | 変色性蒸着媒体とその製造方法 |
| DE19915943A1 (de) * | 1999-04-09 | 2000-10-12 | Ovd Kinegram Ag Zug | Dekorationsfolie |
-
2004
- 2004-03-18 JP JP2006504729A patent/JP4495722B2/ja not_active Expired - Fee Related
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