JP2006519693A - 電界放出で特にフラット表示面を製造するために構築された触媒 - Google Patents
電界放出で特にフラット表示面を製造するために構築された触媒 Download PDFInfo
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- JP2006519693A JP2006519693A JP2006505840A JP2006505840A JP2006519693A JP 2006519693 A JP2006519693 A JP 2006519693A JP 2006505840 A JP2006505840 A JP 2006505840A JP 2006505840 A JP2006505840 A JP 2006505840A JP 2006519693 A JP2006519693 A JP 2006519693A
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- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
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- B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
- B01J37/341—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of electric or magnetic fields, wave energy or particle radiation
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/26—Deposition of carbon only
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Abstract
Description
エッチングの長さは、提案される応用例において、分布した後で最適な密度を得るために、ドロップの群の一様な初期分布を考慮して、選択される。そして、最大の直径は最も稀であり、これらの直径を有するドロップは互いに相対的に離れるという直径の静的分散が、分布により導かれる、という事実を活用する。
[1]TEO and al., Applied Physics Letters,Vol 80,No.11,pages 2011-2013
12 触媒
13 ニッケルの層
14 ドロップ
15 ドロップ
16 ドロップ
Claims (13)
- 支持材の上に触媒を構築する方法であり、以下の工程:
支持材(11)の上に触媒層(12)を堆積させる工程;
触媒層(12)をドロップ(14、15)の形状に分布するために作られたその構造物をアニールする工程;
その触媒のドロップの密度を調整するために、分布した触媒層をエッチングする工程;
を含むことを特徴とする方法。 - 触媒層(12)の堆積工程前に、支持材(11)と触媒(12)との相互作用に対するバリアを形成するバリア層(13)を支持材(11)の上に堆積する工程を、さらに含むことを特徴とする、請求項1に記載の方法。
- 分布した触媒層のエッチングは、エッチング液を使用して所定時間行う触媒のエッチング、プラズマエッチング、または、イオン照射によるエッチング、の中から選択されたエッチングであることを特徴とする、請求項1または2に記載の方法。
- さらに以下の工程:
支持材(11)の上に触媒層(12)を堆積する前に、支持材(11)の上にマスクを作り、そのマスクは開口部を通して支持材(11)をさらす工程;
その構造物の上に触媒層(12)を堆積した後であって、かつ、前記構造物をアニールする前に、そのマスクを除去する工程;
を有することを特徴とする、請求項1に記載の方法。 - さらに以下の工程:
バリア層(13)を堆積する前に、支持材(11)の上にマスクを作り、そのマスクは開口部を通して支持材(11)をさらす工程;
その構造物の上に触媒層(12)を堆積した後であって、かつ、前記構造物をアニールする前に、そのマスクを除去する工程;
を有することを特徴とする、請求項2に記載の方法。 - さらに以下の工程:
バリア層(13)を支持材(11)の上に堆積した後に、バリア層(13)の上にマスクを作り、そのマスクは開口部を通して前記層(13)をさらす工程;
その構造物の上に触媒層(12)に堆積した後であって、かつ、前記構造物をアニールする前に、そのマスクを除去する工程;
を有することを特徴とする、請求項2に記載の方法。 - 触媒層(12)の堆積は、室温でなされることを特徴とする、請求項1または2に記載の方法。
- バリア層(13)の堆積は、室温でなされることを特徴とする、請求項2に記載の方法。
- 分布した触媒層のエッチング液は、選択的にその触媒をエッチングする溶液であることを特徴とする、請求項1に記載の方法。
- 請求項1から9のいずれかに記載の方法で得られた構造物の上に存在する触媒のドロップの上にカーボンナノチューブを成長させる方法であり、
触媒のドロップ(16)の上にカーボンを堆積することを特徴とする、カーボンナノチューブの成長方法。 - バリア層(13)の堆積はTiNまたはTaNの堆積であることを特徴とする、請求項10に記載のカーボンナノチューブ成長の方法。
- 触媒層(12)の堆積は、Fe、Co、Ni、Pt、Au、または、これらの物質の任意の合金を含む群の中から選ばれたエレメントの堆積であることを特徴とする、請求項10または11に記載のカーボンナノチューブ成長の方法。
- 互いに対向するカソード及びアノードを含む装置であり、アノードは発光層により被覆され、アノード及びカソードは真空とされた空間により分離され、カソードは、請求項10から12のいずれかにより作られたカーボンナノチューブの層を含むことを特徴とする装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0302460A FR2851737B1 (fr) | 2003-02-28 | 2003-02-28 | Catalyseur structure notamment pour la realisation d'ecrans plats a emission de champ |
PCT/FR2004/050076 WO2004078348A1 (fr) | 2003-02-28 | 2004-02-24 | Catalyseur structure notamment pour la realisation d'ecrans plats a emission de champ |
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JP2006519693A true JP2006519693A (ja) | 2006-08-31 |
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JP2006505840A Pending JP2006519693A (ja) | 2003-02-28 | 2004-02-24 | 電界放出で特にフラット表示面を製造するために構築された触媒 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20060264323A1 (ja) |
EP (1) | EP1601463A1 (ja) |
JP (1) | JP2006519693A (ja) |
KR (1) | KR101018448B1 (ja) |
CN (1) | CN100571868C (ja) |
FR (1) | FR2851737B1 (ja) |
TW (1) | TW200419004A (ja) |
WO (1) | WO2004078348A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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US20050233263A1 (en) * | 2004-04-20 | 2005-10-20 | Applied Materials, Inc. | Growth of carbon nanotubes at low temperature |
CN1316062C (zh) * | 2004-10-28 | 2007-05-16 | 河北工业大学 | 反应等离子喷涂纳米晶氮化钛涂层的方法 |
FR2885898B1 (fr) | 2005-05-17 | 2007-07-06 | Commissariat Energie Atomique | Composant microfluidique comprenant au moins un canal rempli de nanotubes et procede de fabrication d'un tel composant microfluidique. |
CN100467369C (zh) * | 2005-05-28 | 2009-03-11 | 鸿富锦精密工业(深圳)有限公司 | 碳纳米管的制备方法 |
US20070237706A1 (en) * | 2006-04-10 | 2007-10-11 | International Business Machines Corporation | Embedded nanoparticle films and method for their formation in selective areas on a surface |
US7956345B2 (en) * | 2007-01-24 | 2011-06-07 | Stmicroelectronics Asia Pacific Pte. Ltd. | CNT devices, low-temperature fabrication of CNT and CNT photo-resists |
FR2925039B1 (fr) * | 2007-12-14 | 2013-08-02 | Commissariat Energie Atomique | Procede de fabrication collective de nanofibres de carbone a la surface de micromotifs elabores a la surface d'un substrat et structure comprenant des nanofibres a la surface de micromotifs |
JP5058283B2 (ja) * | 2010-03-15 | 2012-10-24 | 株式会社東芝 | ナノカーボン生成用触媒の処理方法及びナノカーボンの製造方法 |
CN103990462B (zh) * | 2014-05-19 | 2017-02-01 | 中国矿业大学 | 一种镍基催化剂纳米薄膜的制备方法 |
CN107119262A (zh) * | 2017-05-27 | 2017-09-01 | 华南理工大学 | 一种镍金属基体表面催化生长碳纳米管薄膜的方法 |
Citations (4)
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WO2000030141A1 (en) * | 1998-11-12 | 2000-05-25 | The Board Of Trustees Of The Leland Stanford Junior University | Self-oriented bundles of carbon nanotubes and method of making same |
JP2001032071A (ja) * | 1999-06-18 | 2001-02-06 | Cheol Jin Lee | 熱化学気相蒸着装置及びこれを用いたカーボンナノチューブの低温合成方法 |
JP2002338221A (ja) * | 2001-03-14 | 2002-11-27 | Mitsubishi Gas Chem Co Inc | 配向性カーボンナノチューブ膜の製造方法 |
JP2004026532A (ja) * | 2002-06-24 | 2004-01-29 | Honda Motor Co Ltd | カーボンナノチューブの形成方法 |
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EP1059266A3 (en) * | 1999-06-11 | 2000-12-20 | Iljin Nanotech Co., Ltd. | Mass synthesis method of high purity carbon nanotubes vertically aligned over large-size substrate using thermal chemical vapor deposition |
US6692324B2 (en) * | 2000-08-29 | 2004-02-17 | Ut-Battelle, Llc | Single self-aligned carbon containing tips |
US6649431B2 (en) * | 2001-02-27 | 2003-11-18 | Ut. Battelle, Llc | Carbon tips with expanded bases grown with simultaneous application of carbon source and etchant gases |
US6525453B2 (en) * | 2001-05-02 | 2003-02-25 | Huang Chung Cheng | Field emitting display |
JP2002343280A (ja) * | 2001-05-16 | 2002-11-29 | Hitachi Ltd | 表示装置とその製造方法 |
FR2832995B1 (fr) * | 2001-12-04 | 2004-02-27 | Thales Sa | Procede de croissance catalytique de nanotubes ou nanofibres comprenant une barriere de diffusion de type alliage nisi |
-
2003
- 2003-02-28 FR FR0302460A patent/FR2851737B1/fr not_active Expired - Fee Related
-
2004
- 2004-02-18 TW TW093103976A patent/TW200419004A/zh unknown
- 2004-02-24 KR KR1020057015970A patent/KR101018448B1/ko not_active IP Right Cessation
- 2004-02-24 US US10/546,284 patent/US20060264323A1/en not_active Abandoned
- 2004-02-24 EP EP04713932A patent/EP1601463A1/fr not_active Withdrawn
- 2004-02-24 WO PCT/FR2004/050076 patent/WO2004078348A1/fr active Application Filing
- 2004-02-24 CN CNB2004800054788A patent/CN100571868C/zh not_active Expired - Fee Related
- 2004-02-24 JP JP2006505840A patent/JP2006519693A/ja active Pending
Patent Citations (4)
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WO2000030141A1 (en) * | 1998-11-12 | 2000-05-25 | The Board Of Trustees Of The Leland Stanford Junior University | Self-oriented bundles of carbon nanotubes and method of making same |
JP2001032071A (ja) * | 1999-06-18 | 2001-02-06 | Cheol Jin Lee | 熱化学気相蒸着装置及びこれを用いたカーボンナノチューブの低温合成方法 |
JP2002338221A (ja) * | 2001-03-14 | 2002-11-27 | Mitsubishi Gas Chem Co Inc | 配向性カーボンナノチューブ膜の製造方法 |
JP2004026532A (ja) * | 2002-06-24 | 2004-01-29 | Honda Motor Co Ltd | カーボンナノチューブの形成方法 |
Non-Patent Citations (2)
Title |
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JPN6010037045, K.B.K.TEO et al., "Field emission from dense,sparse,and patterned arrays of carbon nanofibers", Applid Physics Letters, 2002, Vol.80,No.11, page.2011−2013 * |
JPN6010037047, Masako YUDASAKA et al., "Specific conditions for Ni catalyzed carbon nanotube growth by chemical vapor deposition", Applied Physics Letters, 1995, Vol67,No.17, page.2477−2479 * |
Also Published As
Publication number | Publication date |
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CN100571868C (zh) | 2009-12-23 |
KR20050103510A (ko) | 2005-10-31 |
FR2851737A1 (fr) | 2004-09-03 |
FR2851737B1 (fr) | 2006-05-26 |
CN1753730A (zh) | 2006-03-29 |
TW200419004A (en) | 2004-10-01 |
US20060264323A1 (en) | 2006-11-23 |
WO2004078348A1 (fr) | 2004-09-16 |
EP1601463A1 (fr) | 2005-12-07 |
KR101018448B1 (ko) | 2011-03-02 |
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