JP2006515435A - 加熱用光素子 - Google Patents
加熱用光素子 Download PDFInfo
- Publication number
- JP2006515435A JP2006515435A JP2005518464A JP2005518464A JP2006515435A JP 2006515435 A JP2006515435 A JP 2006515435A JP 2005518464 A JP2005518464 A JP 2005518464A JP 2005518464 A JP2005518464 A JP 2005518464A JP 2006515435 A JP2006515435 A JP 2006515435A
- Authority
- JP
- Japan
- Prior art keywords
- core
- cladding
- heater
- substrate
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
- G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/30—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating
- G02F2201/307—Reflective grating, i.e. Bragg grating
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/58—Multi-wavelength, e.g. operation of the device at a plurality of wavelengths
- G02F2203/585—Add/drop devices
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
Claims (27)
- 1つの方法であって、
1つの基板にわたって1つのクラッディング内に埋め込まれた1つのコアを用いて1つの光素子を形成するステップと、
前記コアを取り囲む前記クラッディングの一部を取り除いて、1つのトレンチを形成し、それによって前記トレンチ内に形成される1つのクラッドコアを画定するステップと、
前記クラッドコアの前記複数の側部と1つの頂部とをカバーする前記クラッドコアにわたって1つのヒータを形成するステップと、を備える方法。 - 1つの基板と、1つの熱絶縁層と、前記熱絶縁層にわたって形成された1つのガラス層とを含む1つのプレーナ光回路を形成するステップと、前記熱絶縁層と前記ガラス層とを貫通して下部の前記基板まで1つのトレンチを形成するステップと、前記トレンチ内に画定された1つのクラッドコアを残すステップと、を備え、前記クラッドコアが、前記熱絶縁層にわたって前記ガラス層内に埋め込まれた1つのコアを含む請求項1に記載の方法。
- 1つの頂面と一対の対向する側面とを備えた前記クラッドコアを形成するステップと、前記1つの頂部と前記複数の側面との上に前記ヒータを画定するステップと、を含む請求項2に記載の方法。
- 前記基板と接触するように下部に前記ヒータを形成するステップを含む請求項3に記載の方法。
- マッハ‐ツェンダ干渉計を形成するステップを含む請求項1に記載の方法。
- 1つの調整済みのマッハ‐ツェンダ干渉計を形成するステップを含む請求項1に記載の方法。
- 1つのスプリッタを形成するステップを含む請求項1に記載の方法。
- 1つの光スイッチを形成するステップを含む請求項1に記載の方法。
- 1つの可変光減衰器を形成するステップを含む請求項1に記載の方法。
- 少なくとも3つの側部から前記コアを加熱することにより複数の偏光依存損失を減らすステップを含む請求項1に記載の方法。
- 1つのヒータを備えた少なくとも3つの側部に被膜された1つのブラッググレーティングを形成するステップを含む請求項1に記載の方法。
- 1つの加熱される光素子であって、前記コアにわたって1つのコアと1つのU字型ヒータとを備えた光素子。
- 1つの加熱されるブラッググレーティングを備えた請求項12に記載の素子。
- 前記素子が1つの光スイッチである請求項12に記載の素子。
- 前記素子が1つの可変光減衰器である請求項12に記載の素子。
- 前記素子が1つのスプリッタである請求項12に記載の素子。
- 1つの基板と、前記基板にわたる1つのクラッディングと、前記コアの2つの側部上の前記クラッディングを貫通する1つのトレンチと、を備えた請求項12に記載の素子。
- 前記コアにわたる前記クラッディングが1つの頂部と2つの対向する側部とを備え、前記ヒータが前記頂部と前記複数の側部とにわたって存在する請求項17に記載の素子。
- 前記ヒータが前記基板と接触する請求項18に記載の素子。
- 1つの光素子であって、1つの頂部と1つの側部とを有する1つのコアと、前記コアの頂部を加熱する1つの第1のヒータ部と、前記コアの側部を加熱する1つの第2のヒータ部と、を備えた光素子。
- 前記素子が1つのマッハ‐ツェンダ干渉計である請求項20に記載の素子。
- 前記素子が1つのスプリッタである請求項20に記載の素子。
- 前記素子が1つの光スイッチである請求項20に記載の素子。
- 前記素子が1つの可変光減衰器である請求項20に記載の素子。
- 1つの基板と、前記基板にわたる1つのクラッディングと、前記コアの2つの側部にわたる前記クラッディングを貫通する1つのトレンチと、を備えた請求項20に記載の素子。
- 前記コアにわたる前記クラッディングが1つの頂部と2つの対向する側部とを備え、前記ヒータが前記頂部と前記複数の側部とにわたって存在する請求項24に記載の素子。
- 前記ヒータが前記基板と接触する請求項25に記載の素子。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/351,828 US6961495B2 (en) | 2003-01-27 | 2003-01-27 | Heating optical devices |
PCT/US2004/000245 WO2004070458A1 (en) | 2003-01-27 | 2004-01-07 | Heating optical devices |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006515435A true JP2006515435A (ja) | 2006-05-25 |
Family
ID=32735856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005518464A Pending JP2006515435A (ja) | 2003-01-27 | 2004-01-07 | 加熱用光素子 |
Country Status (6)
Country | Link |
---|---|
US (2) | US6961495B2 (ja) |
EP (1) | EP1590706A1 (ja) |
JP (1) | JP2006515435A (ja) |
CN (1) | CN1742225A (ja) |
TW (1) | TWI256493B (ja) |
WO (1) | WO2004070458A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003149479A (ja) * | 2001-11-14 | 2003-05-21 | Hitachi Cable Ltd | 石英系ガラス光導波路及びそれを用いた光モジュール |
US20040240770A1 (en) * | 2003-05-30 | 2004-12-02 | Junnarkar Mahesh R. | Reducing the polarization dependent coupling coefficient in planar waveguide couplers |
US7465903B2 (en) * | 2003-11-05 | 2008-12-16 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd. | Use of mesa structures for supporting heaters on an integrated circuit |
US7031564B2 (en) * | 2003-11-05 | 2006-04-18 | Tyler Sims | Heat transfer structures |
JP2005352202A (ja) * | 2004-06-10 | 2005-12-22 | Sumitomo Electric Ind Ltd | 光回路、光合波器及び光分波器 |
KR100637928B1 (ko) * | 2004-10-13 | 2006-10-24 | 한국전자통신연구원 | 파장 가변 광송신 모듈 |
US7421156B1 (en) * | 2006-02-09 | 2008-09-02 | Lightwave Microsystems Corporation | Methods to reduce polarization dependent loss in planar lightwave circuits |
US7711222B2 (en) * | 2006-03-03 | 2010-05-04 | Alcatel-Lucent Usa Inc. | Tunable dispersion compensation apparatus |
CA2645082A1 (en) * | 2006-03-03 | 2007-09-13 | Gemfire Corporation | Dynamically tunable waveguide chip for optical transforms |
WO2008028160A2 (en) | 2006-09-01 | 2008-03-06 | Pacific Biosciences Of California, Inc. | Substrates, systems and methods for analyzing materials |
TWI636617B (zh) | 2016-12-23 | 2018-09-21 | 財團法人工業技術研究院 | 電磁波傳輸板及差動電磁波傳輸板 |
FR3100082A1 (fr) | 2019-08-19 | 2021-02-26 | Stmicroelectronics (Crolles 2) Sas | Modulateur de phase |
US11209673B2 (en) * | 2019-10-30 | 2021-12-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Heater structure configured to improve thermal efficiency in a modulator device |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3175068A (en) * | 1962-11-28 | 1965-03-23 | Barogenics Inc | Heating apparatus for material subjected to super high pressure |
US3819250A (en) * | 1972-12-20 | 1974-06-25 | Bell Telephone Labor Inc | Temperature sensitive fiber-optic devices |
US5226430A (en) * | 1984-10-24 | 1993-07-13 | The Beth Israel Hospital | Method for angioplasty |
US5173956A (en) * | 1991-02-01 | 1992-12-22 | Hughes Aircraft Company | Thermally driven optical switch method and apparatus |
US5195161A (en) * | 1991-12-11 | 1993-03-16 | At&T Bell Laboratories | Optical waveguide comprising Bragg grating coupling means |
FR2706631B1 (fr) * | 1993-06-17 | 1997-12-12 | Oki Electric Ind Co Ltd | Module de commutation optique compact. |
US5418868A (en) * | 1993-11-17 | 1995-05-23 | At&T Corp. | Thermally activated optical switch |
US5559912A (en) * | 1995-09-15 | 1996-09-24 | International Business Machines Corporation | Wavelength-selective devices using silicon-on-insulator |
US5647039A (en) * | 1995-12-14 | 1997-07-08 | Lucent Technologies Inc. | Optical switching system and devices using a long period grating |
DE19644619A1 (de) | 1996-10-21 | 1998-04-23 | Siemens Ag | Halbleiterkörper mit Heizeinrichtung zum Beeinflussen von Licht |
GB2320104B (en) | 1997-10-16 | 1998-11-18 | Bookham Technology Ltd | Thermally isolated silicon layer |
JPH11326966A (ja) | 1998-05-12 | 1999-11-26 | Ngk Insulators Ltd | 第二高調波発生装置 |
US6192177B1 (en) * | 1998-07-17 | 2001-02-20 | Lucent Technologies Inc. | Electrically modifiable optical grating devices |
JP3868122B2 (ja) | 1998-08-12 | 2007-01-17 | 日本電信電話株式会社 | 熱光学光変調器 |
EP1238305B1 (de) | 1999-12-07 | 2005-01-26 | Optun (BVI) Ltd. | Thermooptischer wellenleiterschalter |
US7027469B2 (en) * | 2001-11-30 | 2006-04-11 | Optitune Plc | Tunable filter |
JP2005522735A (ja) * | 2002-04-09 | 2005-07-28 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | 光導波路構造における均質な加熱のための方法および装置 |
US6721478B2 (en) * | 2002-06-04 | 2004-04-13 | Hon Hai Precision Ind. Co., Ltd. | Dynamic fiber bragg grating |
US6768835B2 (en) * | 2002-09-04 | 2004-07-27 | Fitel Usa Corp | Tunable mode-converters using few mode fibers |
US6920159B2 (en) * | 2002-11-29 | 2005-07-19 | Optitune Plc | Tunable optical source |
-
2003
- 2003-01-27 US US10/351,828 patent/US6961495B2/en not_active Expired - Fee Related
-
2004
- 2004-01-07 CN CN200480002744.1A patent/CN1742225A/zh active Pending
- 2004-01-07 WO PCT/US2004/000245 patent/WO2004070458A1/en active Application Filing
- 2004-01-07 EP EP04700594A patent/EP1590706A1/en not_active Withdrawn
- 2004-01-07 JP JP2005518464A patent/JP2006515435A/ja active Pending
- 2004-01-15 TW TW093101051A patent/TWI256493B/zh not_active IP Right Cessation
-
2005
- 2005-06-13 US US11/151,010 patent/US7177502B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TWI256493B (en) | 2006-06-11 |
US7177502B2 (en) | 2007-02-13 |
US20040146247A1 (en) | 2004-07-29 |
EP1590706A1 (en) | 2005-11-02 |
US20050232543A1 (en) | 2005-10-20 |
US6961495B2 (en) | 2005-11-01 |
WO2004070458A1 (en) | 2004-08-19 |
TW200413747A (en) | 2004-08-01 |
CN1742225A (zh) | 2006-03-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7177502B2 (en) | Heating optical devices | |
US7590312B2 (en) | Interferometer optical switch and variable optical attenuator | |
JP5261542B2 (ja) | 光回路装置 | |
US6704487B2 (en) | Method and system for reducing dn/dt birefringence in a thermo-optic PLC device | |
US6870979B2 (en) | Optical circuit, method for manufacturing optical circuit, optical circuit device and method for controlling optical circuit device | |
JP4675336B2 (ja) | 導波路型可変光減衰器 | |
EP1279999A1 (en) | Polarization-insensitive variable optical attenuator | |
JP4550630B2 (ja) | 可変分散補償器 | |
JP2006058858A (ja) | 導波路型熱光学位相シフタおよびその光回路 | |
US7010198B2 (en) | Birefringence trimming of integrated optical devices by elevated heating | |
US6819859B2 (en) | Planar lightwave circuit type variable optical attenuator | |
JP4267888B2 (ja) | 光回路および光回路装置ならびに光回路の製造方法 | |
JP4110879B2 (ja) | 光学部品 | |
JP2005024891A (ja) | 光可変減衰器、光可変減衰器アレイ及びそれらを用いた光回路及び光可変減衰器の制御方法 | |
Kamei et al. | 50-ghz-spacing athermal mach–zehnder interferometer-synchronized arrayed-waveguide grating with improved temperature insensitivity | |
JP2004286830A (ja) | 導波路型光可変減衰器 | |
Mizuno et al. | Uniform wavelength spacing Mach-Zehnder interferometer using phase-generating couplers | |
JP2002169130A (ja) | 光減衰器 | |
WO2024037885A1 (en) | A variable optical attenuator | |
JP2005010219A (ja) | 偏波無依存性導波路型光分岐素子 | |
Narevicius et al. | Controlled mode interaction based wide-band and robust optical switching unit in silica-on-silicon | |
Narevicius et al. | Fabrication, polarisation and wavelength insensitive optical switch/attenuator based on adiabatic mode multiplexer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070308 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070508 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20070806 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20070813 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20070906 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20070913 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20071004 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20071012 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20071107 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20071204 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080208 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080325 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20080425 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20090306 |