JP2006344754A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006344754A5 JP2006344754A5 JP2005168725A JP2005168725A JP2006344754A5 JP 2006344754 A5 JP2006344754 A5 JP 2006344754A5 JP 2005168725 A JP2005168725 A JP 2005168725A JP 2005168725 A JP2005168725 A JP 2005168725A JP 2006344754 A5 JP2006344754 A5 JP 2006344754A5
- Authority
- JP
- Japan
- Prior art keywords
- refractive index
- opening
- high refractive
- index layer
- solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims 16
- 238000006243 chemical reaction Methods 0.000 claims 7
- 238000004519 manufacturing process Methods 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000000463 material Substances 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 229910000484 niobium oxide Inorganic materials 0.000 claims 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 1
- 238000009751 slip forming Methods 0.000 claims 1
- 229910001936 tantalum oxide Inorganic materials 0.000 claims 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005168725A JP2006344754A (ja) | 2005-06-08 | 2005-06-08 | 固体撮像装置及びその製造方法 |
| US11/422,708 US7968888B2 (en) | 2005-06-08 | 2006-06-07 | Solid-state image sensor and manufacturing method thereof |
| CN2006100917092A CN1877867B (zh) | 2005-06-08 | 2006-06-08 | 固体摄像器件及摄像机 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005168725A JP2006344754A (ja) | 2005-06-08 | 2005-06-08 | 固体撮像装置及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006344754A JP2006344754A (ja) | 2006-12-21 |
| JP2006344754A5 true JP2006344754A5 (enExample) | 2008-05-08 |
Family
ID=37510229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005168725A Pending JP2006344754A (ja) | 2005-06-08 | 2005-06-08 | 固体撮像装置及びその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2006344754A (enExample) |
| CN (1) | CN1877867B (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009044076A (ja) * | 2007-08-10 | 2009-02-26 | Toshiba Corp | パターン形成方法および半導体装置の製造方法 |
| WO2011055344A1 (en) * | 2009-11-05 | 2011-05-12 | Hiok Nam Tay | Optimized light guide array for an image sensor |
| JPWO2011148574A1 (ja) * | 2010-05-28 | 2013-07-25 | パナソニック株式会社 | 固体撮像装置 |
| JP2012043939A (ja) * | 2010-08-18 | 2012-03-01 | Sony Corp | 撮像素子および撮像装置 |
| JP5197823B2 (ja) | 2011-02-09 | 2013-05-15 | キヤノン株式会社 | 光電変換装置 |
| JP2015012043A (ja) * | 2013-06-26 | 2015-01-19 | 株式会社東芝 | 撮像装置およびその製造方法 |
| JP2016096163A (ja) * | 2014-11-12 | 2016-05-26 | ソニー株式会社 | 固体撮像装置および製造方法、並びに電子機器 |
| KR102225297B1 (ko) * | 2015-09-30 | 2021-03-09 | 가부시키가이샤 니콘 | 촬상 소자 및 촬상 장치 |
| KR20240010528A (ko) * | 2015-09-30 | 2024-01-23 | 가부시키가이샤 니콘 | 촬상 소자 및 촬상 장치 |
| JP6646830B2 (ja) * | 2016-03-30 | 2020-02-14 | パナソニックＩｐマネジメント株式会社 | 光検出装置および光検出システム |
| JP6393293B2 (ja) * | 2016-06-15 | 2018-09-19 | キヤノン株式会社 | 撮像素子及び撮像装置 |
| KR102375989B1 (ko) * | 2017-08-10 | 2022-03-18 | 삼성전자주식회사 | 화소 사이의 신호 차이를 보상하는 이미지 센서 |
| CN110349987B (zh) * | 2019-07-15 | 2022-04-01 | 德淮半导体有限公司 | 相位检测自动对焦像素元件及其形成方法，图像传感器及其形成方法 |
| JP2023061622A (ja) * | 2021-10-20 | 2023-05-02 | ソニーセミコンダクタソリューションズ株式会社 | 撮像装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0555622A (ja) * | 1991-08-23 | 1993-03-05 | Fujitsu Ltd | 半導体受光装置 |
| JP2003197897A (ja) * | 2001-12-28 | 2003-07-11 | Fuji Film Microdevices Co Ltd | 半導体光電変換装置 |
-
2005
- 2005-06-08 JP JP2005168725A patent/JP2006344754A/ja active Pending
-
2006
- 2006-06-08 CN CN2006100917092A patent/CN1877867B/zh not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2014086702A5 (enExample) | ||
| JP2006344754A5 (enExample) | ||
| US9609239B2 (en) | Infrared image sensor | |
| TW201236146A (en) | Solid-state image pickup device, method for manufacturing solid-state image pickup device, and electronic apparatus | |
| CN101872033A (zh) | 遮光片阵列、遮光片阵列制造方法及镜头模组阵列 | |
| JP2012124377A (ja) | 固体撮像装置とその製造方法、及び電子機器 | |
| JP2011233862A5 (enExample) | ||
| JP2007013061A5 (enExample) | ||
| CN216485612U (zh) | 红外截止滤光片结构 | |
| TW201733103A (zh) | 影像感測器結構 | |
| US9723188B2 (en) | Image sensor, method of manufacturing the image sensor, and electronic device including the image sensor | |
| TW201339622A (zh) | 光學鏡片及其製作方法 | |
| JP6082794B2 (ja) | イメージセンサデバイス、ｃｉｓ構造、およびその形成方法 | |
| CN108807443B (zh) | 一种具有嵌入式彩色滤色片阵列的图像传感器 | |
| CN101846757A (zh) | 微透镜及微透镜阵列 | |
| CN107731860A (zh) | 一种背照式cmos图像传感器及其形成方法 | |
| TW201630169A (zh) | 具有非平坦光學介面之背側照明影像感測器 | |
| JP2005347416A (ja) | 固体撮像装置、半導体ウエハ及びカメラモジュール | |
| KR20060006202A (ko) | 씨모스 이미지 센서 및 그의 제조 방법 | |
| TW202038455A (zh) | 感測器元件及製造方法以及電子機器 | |
| JP2013012518A (ja) | 固体撮像素子 | |
| TW201519422A (zh) | 影像感測器及其製造方法 | |
| JP2015032590A5 (enExample) | ||
| JP2008091800A5 (enExample) | ||
| TWI555185B (zh) | 半導體元件及其製造方法 |