JP2015032590A5 - - Google Patents
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- Publication number
- JP2015032590A5 JP2015032590A5 JP2013158558A JP2013158558A JP2015032590A5 JP 2015032590 A5 JP2015032590 A5 JP 2015032590A5 JP 2013158558 A JP2013158558 A JP 2013158558A JP 2013158558 A JP2013158558 A JP 2013158558A JP 2015032590 A5 JP2015032590 A5 JP 2015032590A5
- Authority
- JP
- Japan
- Prior art keywords
- silicon substrate
- film
- imaging device
- protective film
- optical filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 67
- 229910052710 silicon Inorganic materials 0.000 claims description 67
- 239000010703 silicon Substances 0.000 claims description 67
- 239000000758 substrate Substances 0.000 claims description 65
- 230000001681 protective effect Effects 0.000 claims description 57
- 238000003384 imaging method Methods 0.000 claims description 36
- 230000003287 optical effect Effects 0.000 claims description 29
- 238000004519 manufacturing process Methods 0.000 claims description 23
- 238000006243 chemical reaction Methods 0.000 claims description 16
- 229920005989 resin Polymers 0.000 claims description 13
- 239000011347 resin Substances 0.000 claims description 13
- 150000003377 silicon compounds Chemical class 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000010419 fine particle Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 239000011241 protective layer Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- 239000010410 layer Substances 0.000 claims description 4
- 239000000049 pigment Substances 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 239000011859 microparticle Substances 0.000 claims description 2
- 229910001111 Fine metal Inorganic materials 0.000 claims 2
- 239000002923 metal particle Substances 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 239000010408 film Substances 0.000 description 85
- 238000000034 method Methods 0.000 description 7
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 229920006026 co-polymeric resin Polymers 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011817 metal compound particle Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229920005990 polystyrene resin Polymers 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013158558A JP6175964B2 (ja) | 2013-07-31 | 2013-07-31 | 撮像素子、撮像装置、並びに、製造装置および方法 |
| US14/340,350 US9263493B2 (en) | 2013-07-31 | 2014-07-24 | Image pickup element, imaging apparatus, manufacturing apparatus for image pickup element, and manufacturing method for image pickup element |
| CN201410356266.XA CN104347659B (zh) | 2013-07-31 | 2014-07-24 | 图像拾取元件、其制造设备及制造方法以及成像设备 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013158558A JP6175964B2 (ja) | 2013-07-31 | 2013-07-31 | 撮像素子、撮像装置、並びに、製造装置および方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015032590A JP2015032590A (ja) | 2015-02-16 |
| JP2015032590A5 true JP2015032590A5 (enExample) | 2016-02-18 |
| JP6175964B2 JP6175964B2 (ja) | 2017-08-09 |
Family
ID=52426918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013158558A Expired - Fee Related JP6175964B2 (ja) | 2013-07-31 | 2013-07-31 | 撮像素子、撮像装置、並びに、製造装置および方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9263493B2 (enExample) |
| JP (1) | JP6175964B2 (enExample) |
| CN (1) | CN104347659B (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015076475A (ja) * | 2013-10-08 | 2015-04-20 | ソニー株式会社 | 固体撮像装置およびその製造方法、並びに電子機器 |
| US9980257B2 (en) * | 2014-09-26 | 2018-05-22 | Qualcomm Incorporated | Ultra-low latency LTE reference signal transmission |
| US9955462B2 (en) | 2014-09-26 | 2018-04-24 | Qualcomm Incorporated | Ultra-low latency LTE control data communication |
| JP6493087B2 (ja) * | 2015-08-24 | 2019-04-03 | 株式会社デンソー | 車載カメラ装置 |
| CN108353121B (zh) * | 2015-11-06 | 2020-11-03 | Lg伊诺特有限公司 | 相机模组 |
| WO2018199065A1 (ja) * | 2017-04-25 | 2018-11-01 | 富士フイルム株式会社 | 撮像装置および積層体 |
| JP7503399B2 (ja) * | 2020-03-16 | 2024-06-20 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像装置及びその製造方法、並びに電子機器 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02312274A (ja) * | 1989-05-26 | 1990-12-27 | Fujitsu Ltd | カラー固体撮像装置及びその製造方法 |
| JPH08125153A (ja) * | 1994-10-24 | 1996-05-17 | Olympus Optical Co Ltd | 固体撮像装置及びその製造方法 |
| JP2003197897A (ja) * | 2001-12-28 | 2003-07-11 | Fuji Film Microdevices Co Ltd | 半導体光電変換装置 |
| JP2005049636A (ja) * | 2003-07-29 | 2005-02-24 | Toyo Ink Mfg Co Ltd | カラーフィルタ用着色組成物およびカラーフィルタ |
| JP4867160B2 (ja) * | 2004-11-26 | 2012-02-01 | ソニー株式会社 | 光電変換素子及び光電変換装置 |
| CN101263201B (zh) * | 2005-09-16 | 2012-10-17 | 松下电器产业株式会社 | 复合材料、及使用该材料的光学部件 |
| JP2008060464A (ja) * | 2006-09-01 | 2008-03-13 | Fujifilm Corp | マイクロレンズ用材料、マイクロレンズおよびその製造方法 |
| KR100875178B1 (ko) * | 2007-09-07 | 2008-12-22 | 주식회사 동부하이텍 | 이미지 센서 및 그 제조 방법 |
| JP2009168872A (ja) * | 2008-01-11 | 2009-07-30 | Sony Corp | レンズの製造方法および固体撮像装置の製造方法 |
| JP4835719B2 (ja) * | 2008-05-22 | 2011-12-14 | ソニー株式会社 | 固体撮像装置及び電子機器 |
| JP5434252B2 (ja) * | 2009-05-14 | 2014-03-05 | ソニー株式会社 | 固体撮像装置、および、その製造方法、電子機器 |
| JP5573417B2 (ja) * | 2010-06-29 | 2014-08-20 | 東洋インキＳｃホールディングス株式会社 | カラーフィルタ用青色着色組成物、およびカラー固体撮像素子に用いるカラーフィルタ |
| JP5663925B2 (ja) * | 2010-03-31 | 2015-02-04 | ソニー株式会社 | 固体撮像装置、および、その製造方法、電子機器 |
| JP2012023251A (ja) * | 2010-07-15 | 2012-02-02 | Sony Corp | 固体撮像素子及び固体撮像素子の製造方法、電子機器 |
| JP2012234968A (ja) * | 2011-04-28 | 2012-11-29 | Sharp Corp | 固体撮像装置およびその製造方法、並びに電子情報機器 |
| JP2013077740A (ja) * | 2011-09-30 | 2013-04-25 | Sony Corp | 固体撮像素子、固体撮像素子の製造方法、及び、電子機器 |
| US20130100324A1 (en) * | 2011-10-21 | 2013-04-25 | Sony Corporation | Method of manufacturing solid-state image pickup element, solid-state image pickup element, image pickup device, electronic apparatus, solid-state image pickup device, and method of manufacturing solid-state image pickup device |
| JP2013120886A (ja) * | 2011-12-08 | 2013-06-17 | Sony Corp | 固体撮像素子およびその製造方法、並びに、電子機器 |
-
2013
- 2013-07-31 JP JP2013158558A patent/JP6175964B2/ja not_active Expired - Fee Related
-
2014
- 2014-07-24 CN CN201410356266.XA patent/CN104347659B/zh not_active Expired - Fee Related
- 2014-07-24 US US14/340,350 patent/US9263493B2/en not_active Expired - Fee Related
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