JP2006334722A - SURFACE COATED CERMET CUTTING TOOL WHOSE THICK FILM alpha-TYPE ALUMINUM OXIDE LAYER EXHIBITS HIGH CHIPPING RESISTANCE - Google Patents
SURFACE COATED CERMET CUTTING TOOL WHOSE THICK FILM alpha-TYPE ALUMINUM OXIDE LAYER EXHIBITS HIGH CHIPPING RESISTANCE Download PDFInfo
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- 239000011195 cermet Substances 0.000 title claims abstract description 42
- 238000005520 cutting process Methods 0.000 title claims abstract description 35
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 title claims description 4
- 239000010410 layer Substances 0.000 claims abstract description 182
- 238000009826 distribution Methods 0.000 claims abstract description 34
- 239000011247 coating layer Substances 0.000 claims abstract description 24
- 150000001875 compounds Chemical class 0.000 claims abstract description 12
- 239000000853 adhesive Substances 0.000 claims abstract description 10
- 230000001070 adhesive effect Effects 0.000 claims abstract description 10
- 239000013078 crystal Substances 0.000 claims description 25
- 239000010936 titanium Substances 0.000 claims description 14
- 238000005259 measurement Methods 0.000 claims description 12
- 238000005229 chemical vapour deposition Methods 0.000 claims description 10
- 238000010894 electron beam technology Methods 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 2
- 150000003608 titanium Chemical class 0.000 claims 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract description 7
- 238000000151 deposition Methods 0.000 abstract description 6
- 230000008021 deposition Effects 0.000 abstract description 3
- 238000005234 chemical deposition Methods 0.000 abstract 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 38
- 239000000843 powder Substances 0.000 description 21
- 239000012298 atmosphere Substances 0.000 description 14
- 239000010409 thin film Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 7
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- 239000012495 reaction gas Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 239000002994 raw material Substances 0.000 description 4
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- 230000008719 thickening Effects 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 235000000396 iron Nutrition 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910001141 Ductile iron Inorganic materials 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001887 electron backscatter diffraction Methods 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
Description
この発明は、硬質被覆層の上部層、すなわち化学蒸着形成した状態でα型の結晶構造を有する酸化アルミニウム層（以下、α型Ａｌ2Ｏ3層で示す）を、特に厚膜化した状態で、各種の鋼や鋳鉄などの切削加工に用いた場合にも、すぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具（以下、被覆サーメット工具という）に関するものである。 In the present invention, an upper layer of a hard coating layer, that is, an aluminum oxide layer (hereinafter referred to as an α-type Al 2 O 3 layer) having an α-type crystal structure in a state where chemical vapor deposition is formed is particularly thick. The present invention relates to a surface-coated cermet cutting tool (hereinafter referred to as a coated cermet tool) that exhibits excellent chipping resistance even when used for cutting various steels and cast iron.
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層が、いずれも化学蒸着形成された、Ｔｉの炭化物（以下、ＴｉＣで示す）層、窒化物（以下、同じくＴｉＮで示す）層、炭窒化物（以下、ＴｉＣＮで示す）層、炭酸化物（以下、ＴｉＣＯで示す）層、および炭窒酸化物（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなり、かつ０．５〜１５μｍの合計平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、１〜１５μｍの平均層厚を有するα型Ａｌ2Ｏ3層、
以上（ａ）および（ｂ）で構成された硬質被覆層を形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられていることも知られている。
(A) Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer formed by chemical vapor deposition of the lower layers. , A carbon oxide (hereinafter referred to as TiCO) layer, and a carbonitride oxide (hereinafter referred to as TiCNO) layer, and has a total average layer thickness of 0.5 to 15 μm. Ti compound layer,
(B) an α-type Al 2 O 3 layer whose upper layer has an average layer thickness of 1 to 15 μm;
A coated cermet tool formed by forming a hard coating layer composed of (a) and (b) above is known, and this coated cermet tool is used for continuous cutting and intermittent cutting of various steels and cast irons, for example. It is also known that
近年の切削装置のＦＡ化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削工具に対する使用寿命の一層の延命化を図る目的で、特に硬質被覆層を構成する上部層、すなわちすぐれた高温硬さと耐熱性を有するα型Ａｌ2 Ｏ3 層には一段の厚膜化が強く望まれているが、前記α型Ａｌ2 Ｏ3 層の層厚を従来実用に供されている最大平均層厚である１５μmを越えて厚膜化すると、Ａｌ2 Ｏ3 結晶粒が急激に粗大化し、かつ層自体の緻密性が著しく低下し、この結果高温強度の低下が避けられなくなり、したがって、かかる厚膜化α型Ａｌ2 Ｏ3 層を硬質被覆層の上部層として蒸着形成してなる被覆サーメット工具においては、前記厚膜化α型Ａｌ2 Ｏ3 層が原因で、切刃部にチッピング（微少欠け）が発生し易くなり、この結果使用寿命のきわめて短いものとなることから、実用に供することができないのが現状である。 In recent years, the use of FA for cutting devices has been remarkable. On the other hand, there has been a strong demand for labor saving and energy saving and further cost reduction for cutting work, and with this purpose, especially for the purpose of further extending the service life of cutting tools. upper layer constituting the hard coating layer, i.e. excellent but the hot hardness and thickening of one step in the α-type the Al 2 O 3 layer having heat resistance is strongly demanded, of the α-type the Al 2 O 3 layer When the layer thickness exceeds 15 μm, which is the maximum average layer thickness that has been practically used in the past, the Al 2 O 3 crystal grains become coarser and the denseness of the layer itself is significantly reduced. reduction in high-temperature strength is unavoidable, therefore, in the coated cermet tool formed by depositing formed as an upper layer of such thickening α type the Al 2 O 3 layer a hard coating layer, the thicker α-type Al 2 O 3 layer due chipping the cutting edge portion Minute chipping) is likely to occur, since it becomes very short for this result useful life, it can not be put to practical use at present.
そこで、本発明者等は、上述のような観点から、上記の従来被覆サーメット工具の硬質被覆層を構成する１〜１５μmの平均層厚を有するα型Ａｌ2Ｏ3層に着目し、これの層厚を平均層厚で１５μmを越えて厚膜化しても、前記厚膜化α型Ａｌ2Ｏ3層が原因のチッピングが切刃部に発生しない被覆サーメット工具を開発すべく研究を行った結果、
（ａ）上記の被覆サーメット工具の硬質被覆層の下部層であるＴｉ化合物層のうちのＴｉＣＮ層（以下、従来ＴｉＣＮ層という）は、通常の化学蒸着装置にて、
反応ガス組成−体積％で、ＴｉＣｌ４：２〜１０％、ＣＨ３ＣＮ：０．５〜３％、Ｎ２：１０〜３０％、Ｈ２：残り、
反応雰囲気温度：８００〜９００℃、
反応雰囲気圧力：６〜２０ｋＰａ、
の条件で形成されるが、上記従来ＴｉＣＮ層の形成に先だって、
反応ガス組成−体積％で、ＴｉＣｌ４：０．２〜１％、ＣＨ４：１〜５％、Ｈ２：２０〜４０％、Ｎ２：５〜１５％、Ａｒ：残り、
反応雰囲気温度：７６０〜８５０℃、
反応雰囲気圧力：４〜８ｋＰａ、
成膜時間：０．８〜２．０時間、
の条件で、望ましくは０．８〜１．２μｍの平均層厚で種薄膜としてのＴｉＣＮ薄膜（以下、ＴｉＣＮ種薄膜という）を形成し、このＴｉＣＮ種薄膜の上に上記の従来ＴｉＣＮ層の形成条件と同じ条件でＴｉＣＮ層を形成すると、形成時の前記ＴｉＣＮ層は、前記ＴｉＣＮ種薄膜の結晶配列に著しく影響を受け、これを十分に履歴した状態で成膜が行われるようになることから、この結果形成されたＴｉＣＮ層（以下、「改質ＴｉＣＮ層」という）は、組織的に改質されて、上記の従来ＴｉＣＮ層に比して一段とすぐれた高温強度を有するようになること。
（ｂ）上記の従来ＴｉＣＮ層と上記（ａ）の改質ＴｉＣＮ層について、
電界放出型走査電子顕微鏡を用い、図１（ａ），（ｂ）に概略説明図で示される通り、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛０１３｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成した場合、前記従来ＴｉＣＮ層は、図３に例示される通り、｛０１３｝面の測定傾斜角の分布が０〜４５度の範囲内で不偏的な傾斜角度数分布グラフを示すのに対して、前記改質ＴｉＣＮ層は、図２に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、このシャープな最高ピークは、グラフ横軸の傾斜角区分に現れる高さが上記ＴｉＣＮ種薄膜形成時の反応雰囲気温度および反応雰囲気圧力によって変化し、グラフ横軸の傾斜角区分位置が同じく反応ガスのＴｉＣｌ４含有量によって変化すること。
（ｃ）上記の改質ＴｉＣＮ層および従来ＴｉＣＮ層の表面に、それぞれ従来α型Ａｌ2Ｏ3層の形成条件と同じ条件、すなわち、通常の化学蒸着装置にて、
反応ガス組成−体積％で、ＡｌＣｌ３：１〜５％、ＣＯ２：０．５〜１０％、ＨＣｌ：０．３〜３％、Ｈ２Ｓ：０．０２〜０．４％、Ｈ２：残り、
反応雰囲気温度：９５０〜１１００℃、
反応雰囲気圧力：３〜１３ｋＰａ、
の条件で、α型Ａｌ2Ｏ3層を平均層厚で１５μmを越えた１６〜３０μmの層厚に形成すると、前記従来ＴｉＣＮ層の上に形成された厚膜化α型Ａｌ2Ｏ3層では、上記の通りＡｌ2 Ｏ3 結晶粒の粗大化が著しく、層自体の緻密性が著しく低下することから、高温強度の低下が避けられないのに対して、前記改質ＴｉＣＮ層上に形成された厚膜化α型Ａｌ2Ｏ3層では、形成時の前記α型Ａｌ2Ｏ3層は、前記改質ＴｉＣＮ層の結晶配列に著しく影響を受け、前記改質ＴｉＣＮ層のもつ結晶配列を履歴し、これを持続しながら成膜されるようになることから、この結果形成された厚膜化α型Ａｌ2Ｏ3層においては、平均層厚で１６〜３０μmの層厚に厚膜化したにもかかわらず、層厚方向に沿って、Ａｌ2Ｏ3結晶粒の粗大化が著しく抑制され、かつ層自体の緻密性も一様に保持されたものになるので、具備する高温強度は層厚が１〜１５μｍのα型Ａｌ2Ｏ3層のもつ高温強度と同等、寧ろそれ以上の高温強度を具備するようになり、この結果耐チッピング性の低下が著しく抑制されたものになること。
（ｄ）上記の通り、上記ＴｉＣＮ種薄膜形成に際して、上記反応ガスにおけるＴｉＣｌ４の含有量を０．２〜１％とすることにより、上記改質ＴｉＣＮ層の傾斜角度数分布グラフで、シャープな最高ピークが傾斜角区分の２０〜３０度の範囲内に現れ、かつ、反応雰囲気温度を７６０〜８５０℃、反応雰囲気圧力を４〜８ｋＰａとすることにより、前記２０〜３０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の６０％以上の割合を占める傾斜角度数分布グラフを示すようになるものであり、したがって、試験結果によれば、ＴｉＣｌ４の含有量が０．２％未満になると、上記改質ＴｉＣＮ層の傾斜角度数分布グラフで、最高ピークの傾斜角区分位置が３０度を越えた位置に現れるようになり、一方その含有量が１％を越えると、逆に最高ピークの傾斜角区分位置が２０度未満の位置になってしまうものであり、また、反応雰囲気温度および反応雰囲気圧力に関しては、温度が７６０℃〜８５０℃の範囲、圧力が４〜８ｋＰａの範囲から外れると、前記改質ＴｉＣＮ層の傾斜角度数分布グラフにおける２０〜３０度の範囲内に存在する度数数割合が６０％未満になってしまい、いずれの場合も改質ＴｉＣＮ層の前記厚膜化α型Ａｌ2Ｏ3層に及ぼす履歴作用が不十分となり、前記厚膜化α型Ａｌ2Ｏ3層に所望の耐チッピング性を確保することができないこと。
以上（ａ）〜（ｄ）に示される研究結果を得たのである。
Therefore, the present inventors focused on the α-type Al 2 O 3 layer having an average layer thickness of 1 to 15 μm constituting the hard coating layer of the above-described conventional coated cermet tool from the above viewpoint, Research was conducted to develop a coated cermet tool in which chipping caused by the thickened α-type Al 2 O 3 layer does not occur at the cutting edge even if the layer thickness is increased to an average layer thickness exceeding 15 μm. result,
(A) The TiCN layer (hereinafter referred to as a conventional TiCN layer) of the Ti compound layer, which is the lower layer of the hard coating layer of the above coated cermet tool, is a normal chemical vapor deposition apparatus.
Reaction gas composition - by volume%, TiCl 4: 2~10%, CH 3 CN: 0.5~3%, N 2: 10~30%, H 2: remainder,
Reaction atmosphere temperature: 800 to 900 ° C.
Reaction atmosphere pressure: 6-20 kPa,
However, prior to the formation of the conventional TiCN layer,
Reaction gas composition - by volume%, TiCl 4: 0.2~1%, CH 4: 1~5%, H 2: 20~40%, N 2: 5~15%, Ar: the remaining,
Reaction atmosphere temperature: 760 to 850 ° C.
Reaction atmosphere pressure: 4-8 kPa,
Deposition time: 0.8 to 2.0 hours
The TiCN thin film as a seed thin film (hereinafter referred to as a TiCN seed thin film) is preferably formed with an average layer thickness of 0.8 to 1.2 μm under the above conditions, and the above-mentioned conventional TiCN layer is formed on the TiCN seed thin film. When the TiCN layer is formed under the same conditions as those described above, the TiCN layer at the time of formation is significantly affected by the crystal arrangement of the TiCN seed thin film, and the film formation is performed in a state in which the TiCN layer is sufficiently historyd. The resulting TiCN layer (hereinafter referred to as a “modified TiCN layer”) is systematically modified to have a higher temperature strength than that of the conventional TiCN layer.
(B) About the conventional TiCN layer and the modified TiCN layer of (a),
Using a field emission scanning electron microscope, as shown in the schematic explanatory diagrams of FIGS. 1A and 1B, electron beams are individually applied to crystal grains having a cubic crystal lattice existing within the measurement range of the surface polished surface. Irradiation is performed to measure an inclination angle formed by a normal line of a {013} plane that is a crystal plane of the crystal grain with respect to a normal line of the surface-polished surface. When the measured inclination angle within the range is divided for each pitch of 0.25 degrees and the inclination angle number distribution graph is created by summing up the frequencies existing in each division, the conventional TiCN layer is formed as shown in FIG. As shown in FIG. 2, while the distribution of the measured tilt angle of the {013} plane shows an unbiased tilt angle number distribution graph within the range of 0 to 45 degrees, the modified TiCN layer is shown in FIG. As illustrated, the sharpest peak appears at a specific position in the tilt angle section, and this The maximum peak that appears on the horizontal axis of the graph varies depending on the reaction atmosphere temperature and the pressure of the reaction atmosphere when the TiCN seed thin film is formed. Varies with TiCl 4 content.
(C) On the surfaces of the modified TiCN layer and the conventional TiCN layer, the same conditions as the formation conditions of the conventional α-type Al 2 O 3 layer, that is, in a normal chemical vapor deposition apparatus,
Reaction gas composition - by volume%, AlCl 3: 1~5%, CO 2: 0.5~10%, HCl: 0.3~3%, H 2 S: 0.02~0.4%, H 2 :remaining,
Reaction atmosphere temperature: 950-1100 ° C.
Reaction atmosphere pressure: 3 to 13 kPa,
When the α-type Al 2 O 3 layer is formed to an average layer thickness of 16 to 30 μm exceeding 15 μm, the thickened α-type Al 2 O 3 layer formed on the conventional TiCN layer is formed. In this case, as described above, the Al 2 O 3 crystal grains are greatly coarsened, and the denseness of the layer itself is remarkably lowered. Therefore, the high temperature strength is unavoidably lowered, but it is formed on the modified TiCN layer. the thickening α-type Al 2 O 3 layer is, the α-type the Al 2 O 3 layer at the time of formation, the reformed significantly influenced by the crystal array of TiCN layer, the crystal array having a said reformed TiCN layer In the thickened α-type Al 2 O 3 layer formed as a result, the film thickness is increased to an average layer thickness of 16 to 30 μm. Nevertheless ized, along the thickness direction, Al 2 O 3 grain coarsening significantly suppressed, and the layer Since also the density of the body becomes what is uniformly held, high temperature strength, comprising the equivalent high temperature strength with the layer thickness of α-type Al 2 O 3 layer of 1 to 15 m, but rather includes a more high-temperature strength As a result, the reduction in chipping resistance is remarkably suppressed.
(D) As described above, when the TiCN seed thin film is formed, the TiCl 4 content in the reaction gas is set to 0.2 to 1%, whereby the tilt angle distribution graph of the modified TiCN layer is sharp. The highest peak appears in the range of 20 to 30 degrees of the inclination angle section, and exists in the range of 20 to 30 degrees by setting the reaction atmosphere temperature to 760 to 850 ° C. and the reaction atmosphere pressure to 4 to 8 kPa. The inclination frequency distribution graph occupies a proportion of 60% or more of the entire frequency in the inclination angle frequency distribution graph. Therefore, according to the test results, the content of TiCl 4 is If it is less than 0.2%, the gradient angle distribution graph of the modified TiCN layer will appear at a position where the highest peak inclination angle section exceeds 30 degrees, while its inclusion If it exceeds 1%, the maximum peak tilt angle section position will be less than 20 degrees, and the reaction atmosphere temperature and reaction atmosphere pressure are 760 ° C. to 850 ° C. When the range and pressure are out of the range of 4 to 8 kPa, the frequency ratio existing in the range of 20 to 30 degrees in the gradient angle distribution graph of the modified TiCN layer becomes less than 60%. However, the history effect of the modified TiCN layer on the thickened α-type Al 2 O 3 layer becomes insufficient, and the desired chipping resistance cannot be ensured in the thickened α-type Al 2 O 3 layer. .
The research results shown in (a) to (d) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、ＷＣ基超硬合金またはＴｉＣＮ基サーメットで構成された工具基体の表面に、硬質被覆層として、
（ａ）いずれも化学蒸着形成された、ＴｉＣ層、ＴｉＮ層、およびＴｉＣＮ層のうちの１層または２層以上からなり、かつ０．１〜２μｍの合計平均層厚を有する密着性Ｔｉ化合物層、
（ｂ）１〜１０μｍの平均層厚で化学蒸着形成され、かつ、
電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛０１３｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、２０〜３０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記２０〜３０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の６０％以上の割合を占める傾斜角度数分布グラフを示す改質ＴｉＣＮ層、
以上（ａ）および（ｂ）の密着性Ｔｉ化合物層および改質ＴｉＣＮ層を介して、
（ｃ）１６〜３０μｍの平均層厚を有する厚膜化α型Ａｌ2Ｏ3層、
を蒸着形成してなる、厚膜化α型Ａｌ2Ｏ3層がすぐれた耐チッピング性を発揮する被覆サーメット工具に特徴を有するものである。
The present invention has been made based on the above research results, and as a hard coating layer on the surface of a tool base made of WC-based cemented carbide or TiCN-based cermet,
(A) Adhesive Ti compound layer formed by chemical vapor deposition, consisting of one or more of TiC layer, TiN layer, and TiCN layer, and having a total average layer thickness of 0.1 to 2 μm ,
(B) formed by chemical vapor deposition with an average layer thickness of 1-10 μm, and
Using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and the crystal grain is normal to the surface polished surface. The tilt angle formed by the normal line of the {013} plane, which is the crystal plane, is measured, and among the measured tilt angles, the measured tilt angles within the range of 0 to 45 degrees are classified for each pitch of 0.25 degrees. In addition, in the inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the highest peak exists in the tilt angle section within the range of 20 to 30 degrees and also exists within the range of 20 to 30 degrees. A modified TiCN layer showing a tilt angle frequency distribution graph in which the total frequency to occupy accounts for 60% or more of the total frequency in the tilt angle frequency distribution graph,
Through the adhesive Ti compound layer and the modified TiCN layer of (a) and (b) above,
(C) a thickened α-type Al 2 O 3 layer having an average layer thickness of 16 to 30 μm,
A thickened α-type Al 2 O 3 layer formed by vapor-depositing is characterized by a coated cermet tool that exhibits excellent chipping resistance.
つぎに、この発明の被覆サーメット工具の硬質被覆層の構成層について、上記の通りに数値限定した理由を以下に説明する。
（ａ）密着性Ｔｉ化合物層
密着性Ｔｉ化合物層は、工具基体および改質ＴｉＣＮ層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性向上に寄与する作用をもつが、その合計平均層厚が０．１μｍ未満では、所望のすぐれた密着性を確保することができず、一方前記密着性は２μｍまでの合計平均層厚で充分であることから、その合計平均層厚を０．１〜２μｍと定めた。
（ｂ）改質ＴｉＣＮ層
上記の通り、上記ＴｉＣＮ種薄膜形成に際して、上記反応ガスにおけるＴｉＣｌ４の含有量を０．２〜１％とすることにより、傾斜角度数分布グラフで、シャープな最高ピークが傾斜角区分の２０〜３０度の範囲内に現れ、かつ、反応雰囲気温度を７６０〜８５０℃、反応雰囲気圧力を４〜８ｋＰａとすることにより、前記２０〜３０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の６０％以上の割合を占める傾斜角度数分布グラフを示す改質ＴｉＣＮ層が形成されるようになり、この結果として改質ＴｉＣＮ層はすぐれた高温強度を具備するようになるほか、これの上に形成される厚膜化α型Ａｌ2Ｏ3層の組織に影響を及ぼし、Ａｌ2Ｏ3結晶粒の粗大化を著しく抑制し、かつ層自体の緻密性を厚膜化しても層厚方向に沿って一様に保持せしめる作用があるが、その平均層厚が１μｍ未満では前記作用に所望の効果が得られず、一方その平均層厚が１０μｍを越えると、偏摩耗の原因となる熱塑性変形が発生し易くなり、これが前記厚膜化α型Ａｌ2Ｏ3層のチッピング発生の原因となることから、その平均層厚を１〜１０μｍと定めた。
（ｃ）厚膜化α型Ａｌ2Ｏ3層
上記の通り改質ＴｉＣＮ層の介在によって、これの組織的履歴を受け、結晶粒の粗大化が抑制され、かつ、組織的緻密性が保持された厚膜化α型Ａｌ2Ｏ3層の形成が可能となり、この結果１〜１５μｍの平均層厚を有するα型Ａｌ2Ｏ3層が具備する高温強度と同等以上の高温強度を具備し、耐チッピング性の低下が抑制されるようになる外、Ａｌ2Ｏ3層自身のもつすぐれた高温硬さと耐熱性によって、硬質被覆層の耐摩耗性向上に寄与するが、その平均層厚が１６μｍ未満では厚膜化の要求に十分満足に対応することができず、一方その平均層厚が３０μｍを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚を１６〜３０μｍと定めた。
Next, the reason why the constituent layers of the hard coating layer of the coated cermet tool of the present invention are numerically limited as described above will be described below.
(A) Adhesive Ti compound layer The adhesive Ti compound layer adheres firmly to both the tool substrate and the modified TiCN layer, and thus has the effect of contributing to improved adhesion of the hard coating layer to the tool substrate. If the total average layer thickness is less than 0.1 μm, the desired excellent adhesion cannot be ensured. On the other hand, the total average layer thickness up to 2 μm is sufficient. Was determined to be 0.1 to 2 μm.
(B) Modified TiCN layer As described above, when forming the TiCN seed thin film, by setting the content of TiCl 4 in the reaction gas to 0.2 to 1%, a sharp maximum peak in the inclination angle number distribution graph Appears within the range of 20 to 30 degrees of the tilt angle section, and the reaction atmosphere temperature is set to 760 to 850 ° C. and the reaction atmosphere pressure is set to 4 to 8 kPa, whereby the frequency existing in the range of 20 to 30 degrees The modified TiCN layer showing the inclination angle number distribution graph in which the total of occupies a ratio of 60% or more of the entire frequency in the inclination angle number distribution graph is formed. As a result, the modified TiCN layer has an excellent high temperature. in addition to so comprise a strength affects the tissue formed is thicker α type the Al 2 O 3 layer on top of this, Al 2 O 3 is suppressed significantly grain coarsening, and the layer itself Even if the denseness is increased, there is an effect of maintaining the thickness uniformly in the layer thickness direction. However, if the average layer thickness is less than 1 μm, the desired effect cannot be obtained in the above operation, while the average layer thickness is 10 μm. If it exceeds 1, the thermoplastic deformation that causes uneven wear tends to occur, and this causes the chipping of the thickened α-type Al 2 O 3 layer. Therefore, the average layer thickness is set to 1 to 10 μm. It was.
(C) Thickened α-type Al 2 O 3 layer As described above, due to the presence of the modified TiCN layer, it receives this organizational history, suppresses the coarsening of the crystal grains, and maintains the structural denseness. It is possible to form a thickened α-type Al 2 O 3 layer, and as a result, has a high-temperature strength equal to or higher than the high-temperature strength of the α-type Al 2 O 3 layer having an average layer thickness of 1 to 15 μm, In addition to the reduction in chipping resistance being reduced, the excellent high-temperature hardness and heat resistance of the Al 2 O 3 layer itself contributes to improving the wear resistance of the hard coating layer, but the average layer thickness is 16 μm. If the average layer thickness is less than 30 μm, the average layer thickness of 16-30 μm cannot be satisfactorily met. On the other hand, if the average layer thickness exceeds 30 μm, chipping is likely to occur. It was determined.
なお、切削工具の使用前後の識別を目的として、黄金色の色調を有するＴｉＮ層を、硬質被覆層の最表面層として必要に応じて蒸着形成してもよいが、この場合の平均層厚は０．１〜１μｍでよく、これは０．１μｍ未満では、十分な識別効果が得られず、一方前記ＴｉＮ層による前記識別効果は１μｍまでの平均層厚で十分であるという理由からである。 In addition, for the purpose of identifying before and after the use of the cutting tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer, but the average layer thickness in this case is It may be 0.1 to 1 μm, and if it is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient for an average layer thickness of up to 1 μm.
この発明の被覆サーメット工具は、硬質被覆層としての改質ＴｉＣＮ層がすぐれた高温強度を有し、かつ、これの上に形成される厚膜化α型Ａｌ2Ｏ3層に組織的影響を及ぼし、この結果前記厚膜化α型Ａｌ2Ｏ3層は前記改質ＴｉＣＮ層の履歴を受けて、１〜１５μｍの平均層厚を有するα型Ａｌ2Ｏ3層が具備する高温強度と同等、あるいはこれ以上の高温強度を具備するようになることから、平均層厚で１６〜３０μmの層厚に厚膜化したにもかかわらず、チッピングの発生なく、すぐれた耐摩耗性を長期に亘って発揮するようになものである。 In the coated cermet tool of the present invention, the modified TiCN layer as a hard coating layer has excellent high-temperature strength, and has a systematic influence on the thickened α-type Al 2 O 3 layer formed thereon. As a result, the thickened α-type Al 2 O 3 layer receives the history of the modified TiCN layer and is equivalent to the high temperature strength of the α-type Al 2 O 3 layer having an average layer thickness of 1 to 15 μm. In addition, since it has a high temperature strength higher than this, it has excellent wear resistance over a long period of time without occurrence of chipping even though the average layer thickness is increased to a layer thickness of 16 to 30 μm. It is something that will be exhibited.
つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。 Next, the coated cermet tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3Ｃ2粉末、ＴｉＮ粉末、ＴａＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で３０時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０６ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４０８に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｆをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders are blended into the composition shown in Table 1, added with wax, ball mill mixed in acetone for 30 hours, dried under reduced pressure, and then pressed into a green compact of a predetermined shape at a pressure of 98 MPa. The green compact was vacuum sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour, and after sintering, the cutting edge portion was R: 0.06 mm honing By performing the processing, tool bases A to F made of a WC-base cemented carbide having a throwaway tip shape specified in ISO · CNMG120408 were manufactured.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比で、ＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで３０時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１２０４１２のチップ形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｆを形成した。 Further, as raw material powders, TiCN (mass ratio, TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC, all having an average particle diameter of 0.5 to 2 μm. Powder, Co powder, and Ni powder are prepared. These raw material powders are blended in the blending composition shown in Table 2, wet-mixed for 30 hours with a ball mill, dried, and then pressed into green compacts at a pressure of 98 MPa. The green compact is sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after sintering, the cutting edge portion is subjected to a honing process of R: 0.07 mm. Tool bases a to f made of TiCN-based cermet having a chip shape conforming to ISO standards / CNMG 120212 were formed.
つぎに、これらの工具基体Ａ〜Ｆおよび工具基体ａ〜ｆの表面に、通常の化学蒸着装置を用い、表３および表４に示される条件にて、硬質被覆層として密着性Ｔｉ化合物層および改質ＴｉＣＮ層を、表５に示される組み合わせで、かつ目標層厚で蒸着形成し、ついで同じく表３に示される条件にて、同厚膜化α型Ａｌ2Ｏ3層を同じく表５に示される組み合わせで、かつ目標層厚で蒸着形成することにより本発明被覆サーメット工具１〜１３をそれぞれ製造した。 Next, on the surfaces of these tool bases A to F and tool bases a to f, an ordinary chemical vapor deposition apparatus is used, and under the conditions shown in Tables 3 and 4, an adhesive Ti compound layer as a hard coating layer and The modified TiCN layer was formed by vapor deposition in the combination shown in Table 5 and with the target layer thickness, and then the same thickened α-type Al 2 O 3 layer was also shown in Table 5 under the same conditions as shown in Table 3. The coated cermet tools 1 to 13 of the present invention were produced by vapor deposition with the combinations shown and with the target layer thickness.
また、比較の目的で、表６に示される通り、本発明被覆サーメット工具１〜１３の硬質被覆層を構成する改質ＴｉＣＮ層に代って、表３に示される条件で従来ＴｉＣＮ層を形成する以外は同一の条件で比較被覆サーメット工具１〜１３をそれぞれ製造した。 For comparison purposes, as shown in Table 6, instead of the modified TiCN layer constituting the hard coating layer of the coated cermet tools 1 to 13 of the present invention, a conventional TiCN layer is formed under the conditions shown in Table 3. Comparative coated cermet tools 1 to 13 were produced under the same conditions except for the above.
ついで、上記の本発明被覆サーメット工具と比較被覆サーメット工具の硬質被覆層を構成する改質ＴｉＣＮ層および従来ＴｉＣＮ層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。 Next, an inclination angle number distribution graph was prepared for each of the modified TiCN layer and the conventional TiCN layer constituting the hard coating layer of the above-described coated cermet tool of the present invention and the comparative coated cermet tool using a field emission scanning electron microscope. .
すなわち、上記傾斜角度数分布グラフは、上記の履歴ＴｉＣＮ層および従来ＴｉＣＮ層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、前記表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に照射して、電子後方散乱回折像装置を用い、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛０１３｝面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
この結果得られた各種の改質ＴｉＣＮ層および従来ＴｉＣＮの傾斜角度数分布グラフにおいて、｛０１３｝面が最高ピークを示す傾斜角区分、並びに２０〜３０度の範囲内の傾斜角区分内に存在する傾斜角度数の傾斜角度数分布グラフ全体の傾斜角度数に占める割合をそれぞれ表５，６にそれぞれ示した。
That is, the inclination angle number distribution graph is set in a lens barrel of a field emission scanning electron microscope in a state where the surfaces of the hysteresis TiCN layer and the conventional TiCN layer are polished surfaces, and 70 ° An electron backscatter diffraction image apparatus is used by irradiating an electron beam with an acceleration voltage of 15 kV at an incident angle with an irradiation current of 1 nA on each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface. , Measuring the inclination angle formed by the normal of the {013} plane, which is the crystal plane of the crystal grain, with respect to the normal of the polished surface at an interval of 0.1 μm / step in a region of 30 × 50 μm, Based on the measurement results, the measurement inclination angles within the range of 0 to 45 degrees out of the measurement inclination angles are divided for each pitch of 0.25 degrees, and the frequencies existing in each division are tabulated. Created by.
In the graphs of slope angle distribution of various modified TiCN layers and conventional TiCN obtained as a result of this, the {013} plane exists in the slope section where the highest peak is present, and the slope section within the range of 20 to 30 degrees. Tables 5 and 6 show the ratios of the tilt angle numbers to the tilt angle number distribution graph as a whole.
上記の各種の傾斜角度数分布グラフにおいて、表５，６にそれぞれ示される通り、本発明被覆サーメット工具の履歴ＴｉＣＮ層は、いずれも｛０１３｝面の測定傾斜角の分布が２０〜３０度の範囲内の傾斜角区分に最高ピークが現れ、かつ２０〜３０度の範囲内の傾斜角区分内に存在する傾斜角度数の割合が６０％以上である傾斜角度数分布グラフを示すのに対して、従来被覆サーメット工具の従来ＴｉＣＮ層は、いずれも｛０１３｝面の測定傾斜角の分布が０〜４５度の範囲内で不偏的で、最高ピークが存在せず、２０〜３０度の範囲内の傾斜角区分内に存在する傾斜角度数の割合も３０％以下である傾斜角度数分布グラフを示すものであった。 In the above-mentioned various inclination angle number distribution graphs, as shown in Tables 5 and 6, each of the history TiCN layers of the coated cermet tool of the present invention has a distribution of measured inclination angles on the {013} plane of 20 to 30 degrees. In contrast to the inclination angle number distribution graph in which the highest peak appears in the inclination angle section within the range, and the ratio of the inclination angle numbers existing in the inclination angle section within the range of 20 to 30 degrees is 60% or more. In the conventional TiCN layer of the conventional coated cermet tool, the distribution of the measured inclination angle of the {013} plane is unbiased within the range of 0 to 45 degrees, the highest peak does not exist, and the range of 20 to 30 degrees. The inclination angle number distribution graph in which the ratio of the inclination angle numbers existing in the inclination angle section is 30% or less was also shown.
なお、図２は、本発明被覆サーメット工具４の改質ＴｉＣＮ層の傾斜角度数分布グラフ、図３は、比較被覆サーメット工具４の従来ＴｉＣＮ層の傾斜角度数分布グラフをそれぞれ示すものである。 FIG. 2 is a graph showing the distribution of inclination angle numbers of the modified TiCN layer of the coated cermet tool 4 of the present invention, and FIG. 3 is a graph showing the distribution of inclination angle numbers of the conventional TiCN layer of the comparative coated cermet tool 4.
さらに、上記の本発明被覆サーメット工具１〜１３および比較被覆サーメット工具１〜１３について、これの硬質被覆層の構成層を電子線マイクロアナライザー（ＥＰＭＡ）およびオージェ分光分析装置を用いて観察（層の縦断面を観察）したところ、前者および後者とも目標組成と実質的に同じ組成を有する密着性Ｔｉ化合物層とα型Ａｌ2Ｏ3層からなることが確認された。また、これらの被覆サーメット工具の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定（同じく縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。 Further, for the above-described coated cermet tools 1 to 13 and comparative coated cermet tools 1 to 13, the constituent layers of the hard coating layer were observed using an electron beam microanalyzer (EPMA) and an Auger spectroscopic analyzer (layer When the longitudinal section was observed), it was confirmed that both the former and the latter were composed of an adhesive Ti compound layer and an α-type Al 2 O 3 layer having substantially the same composition as the target composition. Moreover, when the thickness of the constituent layer of the hard coating layer of these coated cermet tools was measured using a scanning electron microscope (same longitudinal section measurement), the average layer thickness (substantially the same as the target layer thickness) Average value of 5-point measurement) was shown.
つぎに、上記の各種の被覆サーメット工具をいずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆サーメット工具１〜１３および従来被覆サーメット工具１〜１３について、
被削材：ＪＩＳ・ＳＮＣＭ２２０の丸棒、
切削速度：２７０ｍ／ｍｉｎ、
切り込み：２ｍｍ、
送り：０．３５ｍｍ／ｒｅｖ、
切削時間：２８分、
の条件（切削条件Ａ）での合金鋼の乾式連続切削試験、
被削材：ＪＩＳ・Ｓ１５Ｃの長さ方向等間隔４本縦溝入り丸棒、
切削速度：３００ｍ／ｍｉｎ、
切り込み：２．５ｍｍ、
送り：０．２５ｍｍ／ｒｅｖ、
切削時間：２２分、
の条件（切削条件Ｂ）での炭素鋼の乾式断続切削試験、
被削材：ＪＩＳ・ＦＣＤ４００の長さ方向等間隔４本縦溝入り丸棒、
切削速度：２８０ｍ／ｍｉｎ、
切り込み：２ｍｍ、
送り：０．３ｍｍ／ｒｅｖ、
切削時間：２２分、
の条件（切削条件Ｃ）でのダクタイル鋳鉄の乾式断続切削試験を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表７に示した。
Next, with the various coated cermet tools described above, the present coated cermet tools 1 to 13 and the conventional coated cermet tools 1 to 13 in the state where all the above-mentioned various coated cermet tools are screwed to the tip of the tool steel tool with a fixing jig.
Work material: JIS / SNCM220 round bar,
Cutting speed: 270 m / min,
Cutting depth: 2mm,
Feed: 0.35mm / rev,
Cutting time: 28 minutes,
Dry continuous cutting test of alloy steel under the following conditions (cutting condition A),
Work material: JIS-S15C lengthwise equal length 4 round grooved round bar,
Cutting speed: 300 m / min,
Incision: 2.5mm,
Feed: 0.25mm / rev,
Cutting time: 22 minutes
Dry intermittent cutting test of carbon steel under the conditions (cutting condition B)
Work material: JIS / FCD400 in the longitudinal direction, 4 equally spaced round bars,
Cutting speed: 280 m / min,
Cutting depth: 2mm,
Feed: 0.3mm / rev,
Cutting time: 22 minutes
A dry intermittent cutting test of ductile cast iron was performed under the above conditions (cutting condition C), and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Table 7.
表５〜７に示される結果から、本発明被覆サーメット工具１〜１３は、いずれも硬質被覆層のうちの１層が、｛０１３｝面の傾斜角が２０〜３０度の範囲内の傾斜角区分で最高ピークを示すと共に、前記２０〜３０度の傾斜角区分範囲内に存在する度数の合計割合が６０％以上を占める傾斜角度数分布グラフを示す改質ＴｉＣＮ層で構成され、これの上に蒸着形成される厚膜化α型Ａｌ2Ｏ3層は前記改質ＴｉＣＮ層の履歴を強力に受け、組織的に影響されて、１６〜３０μｍの厚膜であるにもかかわらず、１〜１５μｍの平均層厚を有するα型Ａｌ2Ｏ3層が具備する高温強度と同等、あるいはこれ以上の高温強度を具備することから、切刃部のチッピング発生が著しく抑制され、すぐれた耐摩耗性を長期に亘って発揮するのに対して、硬質被覆層が、｛０１３｝面の測定傾斜角の分布が０〜４５度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示す従来ＴｉＣＮ層の上に厚膜化α型Ａｌ2Ｏ3層を蒸着形成してなる比較被覆サーメット工具１〜１３においては、いずれも前記厚膜化α型Ａｌ2Ｏ3層の高温強度不足が原因で、切刃部にチッピングが発生し、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 5 to 7, in the coated cermet tools 1 to 13 of the present invention, one of the hard coating layers has an inclination angle within the range of the inclination angle of the {013} plane of 20 to 30 degrees. It is composed of a modified TiCN layer that shows the highest peak in the section and shows a tilt angle number distribution graph in which the total ratio of the frequencies existing in the tilt angle section range of 20 to 30 degrees occupies 60% or more. The thickened α-type Al 2 O 3 layer formed by vapor deposition is strongly affected by the history of the modified TiCN layer and is systematically affected, although it is a thick film of 16 to 30 μm. Since it has high temperature strength equal to or higher than that of α-type Al 2 O 3 layer having an average layer thickness of 15 μm, chipping at the cutting edge is remarkably suppressed, and excellent wear resistance The hard coat Layers, {013} distribution measurement inclination angle of the surface is an unbiased manner within the 0-45 degrees, thickened α-type Al over the conventional TiCN layer exhibiting the tilt angle frequency distribution graph the highest peak does not exist in comparison coated cermet tools 1 to 13 comprising depositing form 2 O 3 layer, both in high-temperature strength insufficient cause of the thickening α type the Al 2 O 3 layer, chipping occurs in the cutting edge, It is clear that the service life is reached in a relatively short time.
上述のように、この発明の被覆サーメット工具は、これの硬質被覆層を構成するα型Ａｌ2Ｏ3層の層厚を平均層厚で１６〜３０μmに厚くしても、各種の鋼や鋳鉄などの切削加工で、すぐれた耐チッピング性を示し、長期に亘ってすぐれた耐摩耗性を発揮し、使用寿命の延命化を可能とするものであるから、切削加工のＦＡ化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated cermet tool according to the present invention can be applied to various steels and cast irons even if the α-type Al 2 O 3 layer constituting the hard coating layer is thickened to an average layer thickness of 16 to 30 μm. It shows excellent chipping resistance in cutting processes, etc., exhibits excellent wear resistance over a long period of time, and can extend the service life. It can be used satisfactorily for labor saving, energy saving, and cost reduction.
Claims (1)
（ａ）いずれも化学蒸着形成された、Ｔｉの炭化物層、窒化物層、および炭窒化物層のうちの１層または２層以上からなり、かつ０．１〜２μｍの合計平均層厚を有する密着性Ｔｉ化合物層、
（ｂ）１〜１０μｍの平均層厚で化学蒸着形成され、かつ、
電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛０１３｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、２０〜３０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記２０〜３０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の６０％以上の割合を占める傾斜角度数分布グラフを示す改質炭窒化チタン層、
以上（ａ）および（ｂ）の密着性Ｔｉ化合物層および改質炭窒化チタン層を介して、
（ｃ）１６〜３０μｍの平均層厚を有し、かつ化学蒸着形成された状態でα型の結晶構造を有する厚膜化α型酸化アルミニウム層、
を蒸着形成してなる、厚膜化α型酸化アルミニウム層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具。 As a hard coating layer on the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) All are formed of one or more of Ti carbide layer, nitride layer, and carbonitride layer formed by chemical vapor deposition, and have a total average layer thickness of 0.1 to 2 μm. Adhesive Ti compound layer,
(B) formed by chemical vapor deposition with an average layer thickness of 1-10 μm, and
Using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and the crystal grain is normal to the surface polished surface. The tilt angle formed by the normal line of the {013} plane, which is the crystal plane, is measured, and among the measured tilt angles, the measured tilt angles within the range of 0 to 45 degrees are classified for each pitch of 0.25 degrees. In addition, in the inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the highest peak exists in the tilt angle section within the range of 20 to 30 degrees and also exists within the range of 20 to 30 degrees. A modified titanium carbonitride layer showing an inclination angle distribution graph in which the total frequency to be occupied accounts for 60% or more of the entire frequency in the inclination angle distribution graph,
Through the adhesive Ti compound layer and modified titanium carbonitride layer of (a) and (b) above,
(C) a thickened α-type aluminum oxide layer having an average layer thickness of 16 to 30 μm and having an α-type crystal structure in a state of chemical vapor deposition;
A surface-coated cermet cutting tool that exhibits excellent chipping resistance with a thickened α-type aluminum oxide layer.
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| JP2004122269A (en) * | 2002-10-01 | 2004-04-22 | Mitsubishi Materials Corp | Surface coated cermet cutting tool exhibiting superior chipping resistance under high speed heavy duty cutting |
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| JP2004122269A (en) * | 2002-10-01 | 2004-04-22 | Mitsubishi Materials Corp | Surface coated cermet cutting tool exhibiting superior chipping resistance under high speed heavy duty cutting |
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