JP2006287121A - 位置決め装置及びその制御方法 - Google Patents

位置決め装置及びその制御方法 Download PDF

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Publication number
JP2006287121A
JP2006287121A JP2005107745A JP2005107745A JP2006287121A JP 2006287121 A JP2006287121 A JP 2006287121A JP 2005107745 A JP2005107745 A JP 2005107745A JP 2005107745 A JP2005107745 A JP 2005107745A JP 2006287121 A JP2006287121 A JP 2006287121A
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JP
Japan
Prior art keywords
stage
drive
speed
driving
driver
Prior art date
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Withdrawn
Application number
JP2005107745A
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English (en)
Japanese (ja)
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JP2006287121A5 (enExample
Inventor
Yugo Shibata
雄吾 柴田
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2005107745A priority Critical patent/JP2006287121A/ja
Publication of JP2006287121A publication Critical patent/JP2006287121A/ja
Publication of JP2006287121A5 publication Critical patent/JP2006287121A5/ja
Withdrawn legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2005107745A 2005-04-04 2005-04-04 位置決め装置及びその制御方法 Withdrawn JP2006287121A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005107745A JP2006287121A (ja) 2005-04-04 2005-04-04 位置決め装置及びその制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005107745A JP2006287121A (ja) 2005-04-04 2005-04-04 位置決め装置及びその制御方法

Publications (2)

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JP2006287121A true JP2006287121A (ja) 2006-10-19
JP2006287121A5 JP2006287121A5 (enExample) 2008-05-15

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ID=37408656

Family Applications (1)

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JP2005107745A Withdrawn JP2006287121A (ja) 2005-04-04 2005-04-04 位置決め装置及びその制御方法

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JP (1) JP2006287121A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011014876A (ja) * 2009-06-04 2011-01-20 Canon Inc 位置決め装置、及びそれを用いたリソグラフィ装置並びにデバイス製造方法
JP2015099916A (ja) * 2013-10-16 2015-05-28 キヤノン株式会社 ステージ装置、リソグラフィ装置、それを用いた物品の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011014876A (ja) * 2009-06-04 2011-01-20 Canon Inc 位置決め装置、及びそれを用いたリソグラフィ装置並びにデバイス製造方法
JP2015099916A (ja) * 2013-10-16 2015-05-28 キヤノン株式会社 ステージ装置、リソグラフィ装置、それを用いた物品の製造方法

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