JP2006287121A5 - - Google Patents

Download PDF

Info

Publication number
JP2006287121A5
JP2006287121A5 JP2005107745A JP2005107745A JP2006287121A5 JP 2006287121 A5 JP2006287121 A5 JP 2006287121A5 JP 2005107745 A JP2005107745 A JP 2005107745A JP 2005107745 A JP2005107745 A JP 2005107745A JP 2006287121 A5 JP2006287121 A5 JP 2006287121A5
Authority
JP
Japan
Prior art keywords
stage
drive
positioning device
speed
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005107745A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006287121A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005107745A priority Critical patent/JP2006287121A/ja
Priority claimed from JP2005107745A external-priority patent/JP2006287121A/ja
Publication of JP2006287121A publication Critical patent/JP2006287121A/ja
Publication of JP2006287121A5 publication Critical patent/JP2006287121A5/ja
Withdrawn legal-status Critical Current

Links

JP2005107745A 2005-04-04 2005-04-04 位置決め装置及びその制御方法 Withdrawn JP2006287121A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005107745A JP2006287121A (ja) 2005-04-04 2005-04-04 位置決め装置及びその制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005107745A JP2006287121A (ja) 2005-04-04 2005-04-04 位置決め装置及びその制御方法

Publications (2)

Publication Number Publication Date
JP2006287121A JP2006287121A (ja) 2006-10-19
JP2006287121A5 true JP2006287121A5 (enExample) 2008-05-15

Family

ID=37408656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005107745A Withdrawn JP2006287121A (ja) 2005-04-04 2005-04-04 位置決め装置及びその制御方法

Country Status (1)

Country Link
JP (1) JP2006287121A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5641772B2 (ja) * 2009-06-04 2014-12-17 キヤノン株式会社 位置決め装置、及びそれを用いたリソグラフィ装置並びにデバイス製造方法
JP6444127B2 (ja) * 2013-10-16 2018-12-26 キヤノン株式会社 ステージ装置、リソグラフィ装置、それを用いた物品の製造方法

Similar Documents

Publication Publication Date Title
JP2012050303A5 (ja) 駆動装置および光学機器
JP2008295284A5 (ja) ブラシレス電気機械、装置、移動体、及び、ロボット
WO2008023779A3 (en) Single-phase brushless motor
JP2006178291A5 (enExample)
JP2004340372A5 (enExample)
CN103791013B (zh) 集成式惯性电磁作动器
JP2006180645A5 (enExample)
JP2015515846A5 (enExample)
FI126171B (fi) Järjestelmä, koneistojarru ja menetelmä koneistojarrun ohjaamiseksi
JP2014201162A5 (enExample)
KR20220030965A (ko) 솔레노이드 방식의 브레이크 장치, 이를 구비한 모터 및 브레이크 해제 방법
WO2014095017A3 (de) Verfahren zum betreiben einer linearmotoranordnung und linearmotoranordnung
JP2015116921A (ja) 電動パーキングブレーキ装置
JP2004302639A (ja) 振動制御装置
CN112335161A (zh) 线性电动机的固定件、线性电动机及线性电动机系统
CA2429282A1 (en) Method and apparatus for operating a vehicle safety arm
JP2009055776A5 (enExample)
JP2015139350A (ja) モータ回生制御装置およびモータ回生制御方法
US11545872B2 (en) Motor with brake
TW202521862A (zh) 無勵磁作動制動器
JP2008278596A5 (enExample)
TW200637134A (en) Linear actuator comprising velocity sensor
CN207581248U (zh) 电梯制动器的控制装置以及电梯系统
JP2008112757A5 (enExample)
JP2008167638A5 (enExample)