JP2006278578A - 集積型半導体レーザ素子およびその製造方法 - Google Patents
集積型半導体レーザ素子およびその製造方法 Download PDFInfo
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- JP2006278578A JP2006278578A JP2005093234A JP2005093234A JP2006278578A JP 2006278578 A JP2006278578 A JP 2006278578A JP 2005093234 A JP2005093234 A JP 2005093234A JP 2005093234 A JP2005093234 A JP 2005093234A JP 2006278578 A JP2006278578 A JP 2006278578A
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- laser element
- semiconductor laser
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- 229910001218 Gallium arsenide Inorganic materials 0.000 description 48
- 229910004298 SiO 2 Inorganic materials 0.000 description 36
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- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
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- 238000005229 chemical vapour deposition Methods 0.000 description 1
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Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005093234A JP2006278578A (ja) | 2005-03-28 | 2005-03-28 | 集積型半導体レーザ素子およびその製造方法 |
| US11/219,875 US7512167B2 (en) | 2004-09-24 | 2005-09-07 | Integrated semiconductor laser device and method of fabricating the same |
| CN 200510105528 CN1753261B (zh) | 2004-09-24 | 2005-09-23 | 集成型半导体激光元件及其制造方法 |
| CN201010164149A CN101826703A (zh) | 2004-09-24 | 2005-09-23 | 集成型半导体激光元件及其制造方法 |
| US12/256,854 US7961768B2 (en) | 2004-09-24 | 2008-10-23 | Integrated semiconductor laser device and method of fabricating the same |
| US13/100,720 US20110211609A1 (en) | 2004-09-24 | 2011-05-04 | Integrated semiconductor laser device and method of fabricating the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005093234A JP2006278578A (ja) | 2005-03-28 | 2005-03-28 | 集積型半導体レーザ素子およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006278578A true JP2006278578A (ja) | 2006-10-12 |
| JP2006278578A5 JP2006278578A5 (https=) | 2007-07-19 |
Family
ID=37213042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005093234A Pending JP2006278578A (ja) | 2004-09-24 | 2005-03-28 | 集積型半導体レーザ素子およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006278578A (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008124109A (ja) * | 2006-11-09 | 2008-05-29 | Sony Corp | 半導体レーザ、半導体レーザの製造方法、光ピックアップ、光ディスク装置、半導体装置および半導体装置の製造方法 |
| CN113454857A (zh) * | 2019-02-26 | 2021-09-28 | 新唐科技日本株式会社 | 半导体激光装置以及半导体激光元件 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06334274A (ja) * | 1993-05-07 | 1994-12-02 | Xerox Corp | 多ダイオード・レーザー・アレイ |
| JPH08181394A (ja) * | 1994-12-21 | 1996-07-12 | Mitsubishi Electric Corp | 半導体レーザ装置とこの半導体レーザ装置を備えた光ディスク装置 |
| JPH1056230A (ja) * | 1996-08-09 | 1998-02-24 | Nec Corp | 半導体レーザ装置 |
| JPH11340587A (ja) * | 1998-05-06 | 1999-12-10 | Xerox Corp | フリップチップ接合で製作した多重波長レ―ザアレ― |
| JP2001230502A (ja) * | 2000-02-15 | 2001-08-24 | Sony Corp | 発光装置およびそれを用いた光装置 |
| JP2001332805A (ja) * | 2000-05-24 | 2001-11-30 | Samsung Electro Mech Co Ltd | 2波長レーザーダイオード及びその製造方法 |
| JP2004207479A (ja) * | 2002-12-25 | 2004-07-22 | Pioneer Electronic Corp | 半導体レーザ装置及びその製造方法 |
-
2005
- 2005-03-28 JP JP2005093234A patent/JP2006278578A/ja active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06334274A (ja) * | 1993-05-07 | 1994-12-02 | Xerox Corp | 多ダイオード・レーザー・アレイ |
| JPH08181394A (ja) * | 1994-12-21 | 1996-07-12 | Mitsubishi Electric Corp | 半導体レーザ装置とこの半導体レーザ装置を備えた光ディスク装置 |
| JPH1056230A (ja) * | 1996-08-09 | 1998-02-24 | Nec Corp | 半導体レーザ装置 |
| JPH11340587A (ja) * | 1998-05-06 | 1999-12-10 | Xerox Corp | フリップチップ接合で製作した多重波長レ―ザアレ― |
| JP2001230502A (ja) * | 2000-02-15 | 2001-08-24 | Sony Corp | 発光装置およびそれを用いた光装置 |
| JP2001332805A (ja) * | 2000-05-24 | 2001-11-30 | Samsung Electro Mech Co Ltd | 2波長レーザーダイオード及びその製造方法 |
| JP2004207479A (ja) * | 2002-12-25 | 2004-07-22 | Pioneer Electronic Corp | 半導体レーザ装置及びその製造方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008124109A (ja) * | 2006-11-09 | 2008-05-29 | Sony Corp | 半導体レーザ、半導体レーザの製造方法、光ピックアップ、光ディスク装置、半導体装置および半導体装置の製造方法 |
| CN113454857A (zh) * | 2019-02-26 | 2021-09-28 | 新唐科技日本株式会社 | 半导体激光装置以及半导体激光元件 |
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