JP2006261608A5 - - Google Patents

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Publication number
JP2006261608A5
JP2006261608A5 JP2005080595A JP2005080595A JP2006261608A5 JP 2006261608 A5 JP2006261608 A5 JP 2006261608A5 JP 2005080595 A JP2005080595 A JP 2005080595A JP 2005080595 A JP2005080595 A JP 2005080595A JP 2006261608 A5 JP2006261608 A5 JP 2006261608A5
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JP
Japan
Prior art keywords
manufacturing apparatus
device manufacturing
chamber
load lock
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005080595A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006261608A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005080595A priority Critical patent/JP2006261608A/ja
Priority claimed from JP2005080595A external-priority patent/JP2006261608A/ja
Priority to US11/376,240 priority patent/US20060207680A1/en
Publication of JP2006261608A publication Critical patent/JP2006261608A/ja
Publication of JP2006261608A5 publication Critical patent/JP2006261608A5/ja
Withdrawn legal-status Critical Current

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JP2005080595A 2005-03-18 2005-03-18 デバイス製造装置及び制御方法 Withdrawn JP2006261608A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005080595A JP2006261608A (ja) 2005-03-18 2005-03-18 デバイス製造装置及び制御方法
US11/376,240 US20060207680A1 (en) 2005-03-18 2006-03-16 Device manufacturing apparatus and method of controlling same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005080595A JP2006261608A (ja) 2005-03-18 2005-03-18 デバイス製造装置及び制御方法

Publications (2)

Publication Number Publication Date
JP2006261608A JP2006261608A (ja) 2006-09-28
JP2006261608A5 true JP2006261608A5 (https=) 2008-05-08

Family

ID=37009066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005080595A Withdrawn JP2006261608A (ja) 2005-03-18 2005-03-18 デバイス製造装置及び制御方法

Country Status (2)

Country Link
US (1) US20060207680A1 (https=)
JP (1) JP2006261608A (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4963678B2 (ja) * 2007-04-06 2012-06-27 キヤノン株式会社 雰囲気置換方法
JP2011091160A (ja) * 2009-10-21 2011-05-06 Ulvac Japan Ltd 基板搬送装置及び基板処理装置
JP5597433B2 (ja) * 2010-04-16 2014-10-01 株式会社日立ハイテクノロジーズ 真空処理装置
JP5617708B2 (ja) * 2011-03-16 2014-11-05 東京エレクトロン株式会社 蓋体開閉装置
KR20180045316A (ko) * 2016-10-25 2018-05-04 삼성전자주식회사 설비 전방 단부 모듈 및 이를 포함하는 반도체 제조 장치
CN110770890B (zh) 2017-06-23 2023-09-08 应用材料公司 可索引侧储存仓设备、加热的侧储存仓设备、系统和方法
US10388547B2 (en) 2017-06-23 2019-08-20 Applied Materials, Inc. Side storage pods, equipment front end modules, and methods for processing substrates
JP7812776B2 (ja) * 2022-12-01 2026-02-10 東京エレクトロン株式会社 搬送モジュールおよび搬送方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6852194B2 (en) * 2001-05-21 2005-02-08 Tokyo Electron Limited Processing apparatus, transferring apparatus and transferring method
US20030029715A1 (en) * 2001-07-25 2003-02-13 Applied Materials, Inc. An Apparatus For Annealing Substrates In Physical Vapor Deposition Systems
KR100443121B1 (ko) * 2001-11-29 2004-08-04 삼성전자주식회사 반도체 공정의 수행 방법 및 반도체 공정 장치

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