JP2006258632A - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP2006258632A
JP2006258632A JP2005076948A JP2005076948A JP2006258632A JP 2006258632 A JP2006258632 A JP 2006258632A JP 2005076948 A JP2005076948 A JP 2005076948A JP 2005076948 A JP2005076948 A JP 2005076948A JP 2006258632 A JP2006258632 A JP 2006258632A
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Japan
Prior art keywords
substrate
inspected
inspection
irradiation
glass substrate
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JP2005076948A
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Japanese (ja)
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JP2006258632A5 (enExample
Inventor
Tatsuo Ichise
達雄 市瀬
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Olympus Corp
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Olympus Corp
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Priority to JP2005076948A priority Critical patent/JP2006258632A/ja
Publication of JP2006258632A publication Critical patent/JP2006258632A/ja
Publication of JP2006258632A5 publication Critical patent/JP2006258632A5/ja
Pending legal-status Critical Current

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JP2005076948A 2005-03-17 2005-03-17 基板検査装置 Pending JP2006258632A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005076948A JP2006258632A (ja) 2005-03-17 2005-03-17 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005076948A JP2006258632A (ja) 2005-03-17 2005-03-17 基板検査装置

Publications (2)

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JP2006258632A true JP2006258632A (ja) 2006-09-28
JP2006258632A5 JP2006258632A5 (enExample) 2008-04-24

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JP2005076948A Pending JP2006258632A (ja) 2005-03-17 2005-03-17 基板検査装置

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JP (1) JP2006258632A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008102062A (ja) * 2006-10-20 2008-05-01 Mitsubishi Heavy Ind Ltd 基板検査方法及び基板検査装置及びそれを備えたインライン成膜装置
JP2009051654A (ja) * 2007-08-29 2009-03-12 Toppan Printing Co Ltd 基板搬送装置及び基板検査装置
JP2009068889A (ja) * 2007-09-11 2009-04-02 Toppan Printing Co Ltd カラーフィルタ外観検査装置における欠陥検出機能の点検治具
JP2010281651A (ja) * 2009-06-04 2010-12-16 Panasonic Corp 光学検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004333198A (ja) * 2003-05-01 2004-11-25 Olympus Corp 基板検査装置
JP2005061956A (ja) * 2003-08-11 2005-03-10 Dainippon Printing Co Ltd 検査システムおよび調整部材

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004333198A (ja) * 2003-05-01 2004-11-25 Olympus Corp 基板検査装置
JP2005061956A (ja) * 2003-08-11 2005-03-10 Dainippon Printing Co Ltd 検査システムおよび調整部材

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008102062A (ja) * 2006-10-20 2008-05-01 Mitsubishi Heavy Ind Ltd 基板検査方法及び基板検査装置及びそれを備えたインライン成膜装置
JP2009051654A (ja) * 2007-08-29 2009-03-12 Toppan Printing Co Ltd 基板搬送装置及び基板検査装置
JP2009068889A (ja) * 2007-09-11 2009-04-02 Toppan Printing Co Ltd カラーフィルタ外観検査装置における欠陥検出機能の点検治具
JP2010281651A (ja) * 2009-06-04 2010-12-16 Panasonic Corp 光学検査装置

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