JP2006245061A - 積層型光起電力装置およびその製造方法 - Google Patents
積層型光起電力装置およびその製造方法 Download PDFInfo
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- 150000002500 ions Chemical group 0.000 description 1
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- H01L31/0687—Multiple junction or tandem solar cells
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
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Abstract
【解決手段】 支持基板100上に、裏面金属電極3、微結晶シリコンを光電変換層に用いたボトムセル200、非晶質シリコンを光電変換層に用いたフロントセル300および表面透明電極10が順に形成されている。ボトム光電変換層5中に含有する不純物の濃度がフロント光電変換層8中に含有する不純物の濃度よりも高くなるようにフロント光電変換層8中の不純物濃度およびボトム光電変換層5中の不純物濃度の少なくとも一方が制御される。不純物は、p型ドーパントまたはn型ドーパントを含まず、炭素、窒素および酸素のうちいずれか1つ、2つまたはすべてである。
【選択図】 図1
Description
図1は本発明の一実施の形態に係る積層型光起電力装置の構造を示す模式的断面図である。
なお、上記実施の形態の積層型光起電力装置では、支持基板100とフロントセル300との間に1つのボトムセル200が設けられているが、支持基板100とフロントセル300との間に複数のボトムセルが積層されてもよい。その場合にも、上記実施の形態と同様の効果が得られる。ただし、光入射面側から1番目の光起電力素子の光電変換層が非晶質シリコンからなるとともに、2番目以降の光起電力素子の光電変換層が微結晶シリコンからなり、1番目の光起電力素子の光電変換層中の不純物濃度よりも2番目以降の光起電力素子の光電変換層中の不純物濃度が高いことが必要である。
実施例1の積層型光起電力装置の作製条件を表1に示し、比較例1の積層型光起電力装置の作製条件を表2に示す。
実施例2の積層型光起電力装置の作製条件を表5に示し、比較例2の積層型光起電力装置の作製条件を表6に示す。
実施例3の積層型光起電力装置の作製条件を表9に示し、比較例3の積層型光起電力装置の作製条件を表10に示す。
2 ポリイミド樹脂層
3 裏面金属電極
4 n層
5 ボトム光電変換層
6 p層
7 n層
8 フロント光電変換層
9 p層
10 表面透明電極
11 集電極
100 支持基板
200 ボトムセル
300 フロントセル
Claims (6)
- 実質的に真性な半導体からなる光電変換層をそれぞれ含む複数の光起電力素子を光入射面側から順に備え、
光入射面に最も近い一の光起電力素子の光電変換層が非晶質半導体を含み、他の光起電力素子の光電変換層が結晶粒を有する非単結晶半導体を含み、
前記他の各光起電力素子の光電変換層に含有する不純物の濃度が前記一の光起電力素子の光電変換層に含有する不純物の濃度よりも高いことを特徴とする積層型光起電力装置。 - 前記非単結晶半導体は、粒径1μm以下の結晶粒を有する微結晶半導体であることを特徴とする請求項1記載の積層型光起電力装置。
- 前記不純物は炭素を含み、前記他の各光起電力素子の光電変換層に含有する炭素の濃度が前記一の光起電力素子の光電変換層に含有する炭素の濃度よりも高いことを特徴とする請求項1または2記載の積層型光起電力装置。
- 前記不純物は窒素を含み、前記他の各光起電力素子の光電変換層に含有する窒素の濃度が前記一の光起電力素子の光電変換層に含有する窒素の濃度よりも高いことを特徴とする請求項1〜3のいずれかに記載の積層型光起電力装置。
- 前記不純物は酸素を含み、前記他の各光起電力素子の光電変換層に含有する酸素の濃度が前記一の光起電力素子の光電変換層に含有する酸素の濃度よりも高いことを特徴とする請求項1〜4のいずれかに記載の積層型光起電力装置。
- 実質的に真性な半導体からなる光電変換層をそれぞれ含む複数の光起電力素子を順に形成する工程を備え、
光入射面に最も近い一の光起電力素子の光電変換層が非晶質半導体を含み、他の光起電力素子の光電変換層が結晶粒を有する非単結晶半導体を含み、
前記他の各光起電力素子の光電変換層に含有する不純物の濃度が前記一の光起電力素子の光電変換層に含有する不純物の濃度よりも高くなるように、前記一の光起電力素子の光電変換層の形成条件および前記他の各光起電力素子の光電変換層の形成条件の少なくとも一方を調整する工程をさらに備えることを特徴とする積層型光起電力装置の製造方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
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JP2005054963A JP4459086B2 (ja) | 2005-02-28 | 2005-02-28 | 積層型光起電力装置およびその製造方法 |
CN2006100577781A CN1828946B (zh) | 2005-02-28 | 2006-02-27 | 叠层型光电动势装置及其制造方法 |
US11/307,956 US7923625B2 (en) | 2005-02-28 | 2006-02-28 | Stacked photovoltaic device and method of manufacturing the same |
EP06251085A EP1696493A1 (en) | 2005-02-28 | 2006-02-28 | Stacked photovoltaic device and method of manufacturing the same |
US12/836,342 US8124867B2 (en) | 2005-02-28 | 2010-07-14 | Stacked photovoltaic device and method of manufacturing the same |
US13/300,369 US8383927B2 (en) | 2005-02-28 | 2011-11-18 | Stacked photovoltaic device and method of manufacturing the same |
US13/739,631 US20130125954A1 (en) | 2005-02-28 | 2013-01-11 | Stacked photovoltaic device |
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JP2005054963A JP4459086B2 (ja) | 2005-02-28 | 2005-02-28 | 積層型光起電力装置およびその製造方法 |
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JP2006245061A true JP2006245061A (ja) | 2006-09-14 |
JP2006245061A5 JP2006245061A5 (ja) | 2007-04-19 |
JP4459086B2 JP4459086B2 (ja) | 2010-04-28 |
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JP2005054963A Expired - Fee Related JP4459086B2 (ja) | 2005-02-28 | 2005-02-28 | 積層型光起電力装置およびその製造方法 |
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US (4) | US7923625B2 (ja) |
EP (1) | EP1696493A1 (ja) |
JP (1) | JP4459086B2 (ja) |
CN (1) | CN1828946B (ja) |
Cited By (2)
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WO2011148679A1 (ja) * | 2010-05-27 | 2011-12-01 | シャープ株式会社 | 光電変換装置 |
JP2012523125A (ja) * | 2009-06-10 | 2012-09-27 | シンシリコン・コーポレーション | 光起電モジュール、及び、タンデム型半導体層スタックを有する光起電モジュールを製造する方法 |
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JP4459086B2 (ja) * | 2005-02-28 | 2010-04-28 | 三洋電機株式会社 | 積層型光起電力装置およびその製造方法 |
US7851693B2 (en) * | 2006-05-05 | 2010-12-14 | Palo Alto Research Center Incorporated | Passively cooled solar concentrating photovoltaic device |
US20100310775A1 (en) * | 2009-06-09 | 2010-12-09 | International Business Machines Corporation | Spalling for a Semiconductor Substrate |
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CN102479863A (zh) * | 2010-11-24 | 2012-05-30 | 吉富新能源科技(上海)有限公司 | 高光电转换效率的三层型太阳能电池 |
CN102130196A (zh) * | 2010-12-31 | 2011-07-20 | 常州天合光能有限公司 | 一种低电阻的晶体硅太阳电池组件 |
CN102130197A (zh) * | 2010-12-31 | 2011-07-20 | 常州天合光能有限公司 | 一种反光与低电阻的晶体硅太阳电池组件及其连接焊带 |
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US4591892A (en) * | 1982-08-24 | 1986-05-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor photoelectric conversion device |
JPS59231878A (ja) | 1983-06-13 | 1984-12-26 | Semiconductor Energy Lab Co Ltd | 半導体装置作製方法 |
JPH06101573B2 (ja) | 1984-04-13 | 1994-12-12 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US4878097A (en) * | 1984-05-15 | 1989-10-31 | Eastman Kodak Company | Semiconductor photoelectric conversion device and method for making same |
JPS63224322A (ja) | 1987-03-13 | 1988-09-19 | Sanyo Electric Co Ltd | 非晶質シリコンアロイ膜 |
JPS63318166A (ja) | 1987-06-19 | 1988-12-27 | Sanyo Electric Co Ltd | 光起電力装置 |
JP2704565B2 (ja) | 1990-12-27 | 1998-01-26 | 株式会社半導体エネルギー研究所 | 光電変換装置 |
US5298086A (en) * | 1992-05-15 | 1994-03-29 | United Solar Systems Corporation | Method for the manufacture of improved efficiency tandem photovoltaic device and device manufactured thereby |
JPH07169985A (ja) | 1994-10-27 | 1995-07-04 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
JPH09246578A (ja) * | 1996-03-11 | 1997-09-19 | Sanyo Electric Co Ltd | 光起電力素子 |
JP3768672B2 (ja) * | 1998-02-26 | 2006-04-19 | キヤノン株式会社 | 積層型光起電力素子 |
JP4208281B2 (ja) | 1998-02-26 | 2009-01-14 | キヤノン株式会社 | 積層型光起電力素子 |
JPH11274527A (ja) | 1998-03-24 | 1999-10-08 | Sanyo Electric Co Ltd | 光起電力装置 |
JP2000058889A (ja) | 1998-08-07 | 2000-02-25 | Kanegafuchi Chem Ind Co Ltd | シリコン系薄膜およびシリコン系薄膜光電変換装置 |
JP4126810B2 (ja) | 1999-06-25 | 2008-07-30 | 富士電機ホールディングス株式会社 | 薄膜太陽電池の製造装置 |
JP4032610B2 (ja) * | 2000-06-16 | 2008-01-16 | 富士電機アドバンストテクノロジー株式会社 | 非単結晶薄膜太陽電池の製造方法 |
JP2002231985A (ja) | 2001-02-05 | 2002-08-16 | Canon Inc | 光起電力素子 |
US6858308B2 (en) * | 2001-03-12 | 2005-02-22 | Canon Kabushiki Kaisha | Semiconductor element, and method of forming silicon-based film |
JP4459086B2 (ja) * | 2005-02-28 | 2010-04-28 | 三洋電機株式会社 | 積層型光起電力装置およびその製造方法 |
-
2005
- 2005-02-28 JP JP2005054963A patent/JP4459086B2/ja not_active Expired - Fee Related
-
2006
- 2006-02-27 CN CN2006100577781A patent/CN1828946B/zh not_active Expired - Fee Related
- 2006-02-28 US US11/307,956 patent/US7923625B2/en not_active Expired - Fee Related
- 2006-02-28 EP EP06251085A patent/EP1696493A1/en not_active Withdrawn
-
2010
- 2010-07-14 US US12/836,342 patent/US8124867B2/en not_active Expired - Fee Related
-
2011
- 2011-11-18 US US13/300,369 patent/US8383927B2/en active Active
-
2013
- 2013-01-11 US US13/739,631 patent/US20130125954A1/en not_active Abandoned
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012523125A (ja) * | 2009-06-10 | 2012-09-27 | シンシリコン・コーポレーション | 光起電モジュール、及び、タンデム型半導体層スタックを有する光起電モジュールを製造する方法 |
WO2011148679A1 (ja) * | 2010-05-27 | 2011-12-01 | シャープ株式会社 | 光電変換装置 |
JP2011249577A (ja) * | 2010-05-27 | 2011-12-08 | Sharp Corp | 光電変換装置 |
AU2011259535B2 (en) * | 2010-05-27 | 2013-05-30 | Sharp Kk | Photoelectric conversion device |
Also Published As
Publication number | Publication date |
---|---|
US20060207648A1 (en) | 2006-09-21 |
US20100275970A1 (en) | 2010-11-04 |
US8383927B2 (en) | 2013-02-26 |
US7923625B2 (en) | 2011-04-12 |
JP4459086B2 (ja) | 2010-04-28 |
EP1696493A1 (en) | 2006-08-30 |
US8124867B2 (en) | 2012-02-28 |
US20120060893A1 (en) | 2012-03-15 |
CN1828946A (zh) | 2006-09-06 |
US20130125954A1 (en) | 2013-05-23 |
CN1828946B (zh) | 2010-06-09 |
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