JP2006202842A5 - - Google Patents

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Publication number
JP2006202842A5
JP2006202842A5 JP2005010512A JP2005010512A JP2006202842A5 JP 2006202842 A5 JP2006202842 A5 JP 2006202842A5 JP 2005010512 A JP2005010512 A JP 2005010512A JP 2005010512 A JP2005010512 A JP 2005010512A JP 2006202842 A5 JP2006202842 A5 JP 2006202842A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005010512A
Other languages
Japanese (ja)
Other versions
JP2006202842A (ja
JP4890765B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005010512A priority Critical patent/JP4890765B2/ja
Priority claimed from JP2005010512A external-priority patent/JP4890765B2/ja
Publication of JP2006202842A publication Critical patent/JP2006202842A/ja
Publication of JP2006202842A5 publication Critical patent/JP2006202842A5/ja
Application granted granted Critical
Publication of JP4890765B2 publication Critical patent/JP4890765B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005010512A 2005-01-18 2005-01-18 半導体装置及びその製造方法 Expired - Fee Related JP4890765B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005010512A JP4890765B2 (ja) 2005-01-18 2005-01-18 半導体装置及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005010512A JP4890765B2 (ja) 2005-01-18 2005-01-18 半導体装置及びその製造方法

Publications (3)

Publication Number Publication Date
JP2006202842A JP2006202842A (ja) 2006-08-03
JP2006202842A5 true JP2006202842A5 (enExample) 2007-12-27
JP4890765B2 JP4890765B2 (ja) 2012-03-07

Family

ID=36960593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005010512A Expired - Fee Related JP4890765B2 (ja) 2005-01-18 2005-01-18 半導体装置及びその製造方法

Country Status (1)

Country Link
JP (1) JP4890765B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5735429B2 (ja) * 2008-11-05 2015-06-17 パワー・インテグレーションズ・インコーポレーテッド スロープの側壁を有する垂直接合型電界効果トランジスタ、及びその製造方法
JP2010147405A (ja) * 2008-12-22 2010-07-01 Renesas Technology Corp 半導体装置およびその製造方法
JP5607947B2 (ja) * 2010-02-17 2014-10-15 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
JP5561343B2 (ja) * 2012-11-05 2014-07-30 富士電機株式会社 炭化珪素半導体装置の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2692036B2 (ja) * 1995-05-22 1997-12-17 財団法人半導体研究振興会 静電誘導トランジスタおよびその製造方法
JP2003069039A (ja) * 2001-08-29 2003-03-07 Denso Corp 炭化珪素半導体装置およびその製造方法
JP4153811B2 (ja) * 2002-03-25 2008-09-24 株式会社東芝 高耐圧半導体装置及びその製造方法
JP2004134547A (ja) * 2002-10-10 2004-04-30 Hitachi Ltd 半導体装置

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