JP2006210659A5 - - Google Patents

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Publication number
JP2006210659A5
JP2006210659A5 JP2005020947A JP2005020947A JP2006210659A5 JP 2006210659 A5 JP2006210659 A5 JP 2006210659A5 JP 2005020947 A JP2005020947 A JP 2005020947A JP 2005020947 A JP2005020947 A JP 2005020947A JP 2006210659 A5 JP2006210659 A5 JP 2006210659A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005020947A
Other languages
Japanese (ja)
Other versions
JP4740605B2 (ja
JP2006210659A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005020947A priority Critical patent/JP4740605B2/ja
Priority claimed from JP2005020947A external-priority patent/JP4740605B2/ja
Publication of JP2006210659A publication Critical patent/JP2006210659A/ja
Publication of JP2006210659A5 publication Critical patent/JP2006210659A5/ja
Application granted granted Critical
Publication of JP4740605B2 publication Critical patent/JP4740605B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005020947A 2005-01-28 2005-01-28 気体制御回転移動装置及び気体制御アクチュエータ Expired - Fee Related JP4740605B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005020947A JP4740605B2 (ja) 2005-01-28 2005-01-28 気体制御回転移動装置及び気体制御アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005020947A JP4740605B2 (ja) 2005-01-28 2005-01-28 気体制御回転移動装置及び気体制御アクチュエータ

Publications (3)

Publication Number Publication Date
JP2006210659A JP2006210659A (ja) 2006-08-10
JP2006210659A5 true JP2006210659A5 (enExample) 2008-03-13
JP4740605B2 JP4740605B2 (ja) 2011-08-03

Family

ID=36967156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005020947A Expired - Fee Related JP4740605B2 (ja) 2005-01-28 2005-01-28 気体制御回転移動装置及び気体制御アクチュエータ

Country Status (1)

Country Link
JP (1) JP4740605B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2003846A (en) * 2008-12-19 2010-06-22 Asml Netherlands Bv Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless.
EP2221668B1 (en) 2009-02-24 2021-04-14 ASML Netherlands B.V. Lithographic apparatus and positioning assembly

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5388440A (en) * 1977-01-14 1978-08-03 Hitachi Ltd Static pressure bearing guide
JPS53121569A (en) * 1977-03-31 1978-10-24 Toshiba Corp Vapor growth method
JPS5687318A (en) * 1979-12-18 1981-07-15 Toshiba Corp Finely movable table
JPS59129636A (ja) * 1983-01-10 1984-07-26 Hitachi Ltd ６自由度を有するステ−ジの制御装置
JPS6022239A (ja) * 1983-07-18 1985-02-04 Fujitsu Ltd 音声デ−タ編集方式
JPH061956B2 (ja) * 1984-08-10 1994-01-05 九州日立マクセル株式会社 充電回路
JPS62147433A (ja) * 1985-12-20 1987-07-01 Matsushita Electric Ind Co Ltd 液晶表示パネル線欠陥救済方法
JPS62156425A (ja) * 1985-12-28 1987-07-11 Fudo Constr Co Ltd 遮断板の打設工法
JPS63245347A (ja) * 1987-03-31 1988-10-12 Sumitomo Heavy Ind Ltd 微小駆動機構
JPH029550A (ja) * 1988-12-21 1990-01-12 Hitachi Ltd ６自由度微動ステージの駆動装置
JPH09317767A (ja) * 1996-05-28 1997-12-09 Nippon Seiko Kk 位置決め装置
JPH10148204A (ja) * 1996-11-18 1998-06-02 Ckd Corp アクチュエータ

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