JP2006189788A5 - - Google Patents

Download PDF

Info

Publication number
JP2006189788A5
JP2006189788A5 JP2005276496A JP2005276496A JP2006189788A5 JP 2006189788 A5 JP2006189788 A5 JP 2006189788A5 JP 2005276496 A JP2005276496 A JP 2005276496A JP 2005276496 A JP2005276496 A JP 2005276496A JP 2006189788 A5 JP2006189788 A5 JP 2006189788A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005276496A
Other languages
Japanese (ja)
Other versions
JP4618075B2 (ja
JP2006189788A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2005276496A external-priority patent/JP4618075B2/ja
Priority to JP2005276496A priority Critical patent/JP4618075B2/ja
Priority to PCT/JP2006/312357 priority patent/WO2007034604A1/ja
Priority to US12/067,911 priority patent/US8871422B2/en
Priority to TW095122118A priority patent/TWI407255B/zh
Priority to KR1020087009228A priority patent/KR100981830B1/ko
Publication of JP2006189788A publication Critical patent/JP2006189788A/ja
Publication of JP2006189788A5 publication Critical patent/JP2006189788A5/ja
Priority to US13/006,300 priority patent/US8758977B2/en
Publication of JP4618075B2 publication Critical patent/JP4618075B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2005276496A 2004-09-29 2005-09-22 ネガ型感光性樹脂組成物及びパターン形成方法 Expired - Lifetime JP4618075B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2005276496A JP4618075B2 (ja) 2004-09-29 2005-09-22 ネガ型感光性樹脂組成物及びパターン形成方法
KR1020087009228A KR100981830B1 (ko) 2005-09-22 2006-06-20 네거티브형 감광성 수지 조성물, 패턴 형성방법 및전자부품
US12/067,911 US8871422B2 (en) 2005-09-22 2006-06-20 Negative-type photosensitive resin composition, pattern forming method and electronic parts
TW095122118A TWI407255B (zh) 2005-09-22 2006-06-20 負片型感光性樹脂組成物、圖案形成方法以及電子零件
PCT/JP2006/312357 WO2007034604A1 (ja) 2005-09-22 2006-06-20 ネガ型感光性樹脂組成物、パターン形成方法及び電子部品
US13/006,300 US8758977B2 (en) 2005-09-22 2011-01-13 Negative-type photosensitive resin composition, pattern forming method and electronic parts

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004283962 2004-09-29
JP2004354071 2004-12-07
JP2005276496A JP4618075B2 (ja) 2004-09-29 2005-09-22 ネガ型感光性樹脂組成物及びパターン形成方法

Publications (3)

Publication Number Publication Date
JP2006189788A JP2006189788A (ja) 2006-07-20
JP2006189788A5 true JP2006189788A5 (enExample) 2009-03-05
JP4618075B2 JP4618075B2 (ja) 2011-01-26

Family

ID=36797016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005276496A Expired - Lifetime JP4618075B2 (ja) 2004-09-29 2005-09-22 ネガ型感光性樹脂組成物及びパターン形成方法

Country Status (1)

Country Link
JP (1) JP4618075B2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5099979B2 (ja) * 2005-04-27 2012-12-19 日立化成デュポンマイクロシステムズ株式会社 ネガ型感光性樹脂組成物、パターンの製造方法及び電子部品
TWI407255B (zh) 2005-09-22 2013-09-01 Hitachi Chem Dupont Microsys 負片型感光性樹脂組成物、圖案形成方法以及電子零件
US20100159217A1 (en) * 2006-06-20 2010-06-24 Hitachi Chemical Dupont Microsystems, Ltd Negative-type photosensitive resin composition, method for forming patterns, and electronic parts
JP5076390B2 (ja) * 2006-07-31 2012-11-21 日立化成デュポンマイクロシステムズ株式会社 ネガ型感光性樹脂組成物、パターン硬化膜の製造方法および電子部品
EP2133743B1 (en) 2007-03-12 2018-01-24 Hitachi Chemical DuPont Microsystems, Ltd. Photosensitive resin composition, process for producing patterned hardened film with use thereof and electronic part
JP5176872B2 (ja) 2007-10-29 2013-04-03 日立化成デュポンマイクロシステムズ株式会社 ポジ型感光性樹脂組成物、パタ−ンの製造方法及び電子部品
JP5290686B2 (ja) * 2008-09-26 2013-09-18 旭化成イーマテリアルズ株式会社 感光性樹脂組成物
JP5142918B2 (ja) * 2008-09-26 2013-02-13 旭化成イーマテリアルズ株式会社 感光性樹脂組成物
JP5571990B2 (ja) * 2009-06-04 2014-08-13 旭化成イーマテリアルズ株式会社 ネガ型感光性樹脂組成物、硬化レリーフパターン形成・製造方法、並びに半導体装置
JP5771361B2 (ja) * 2010-04-22 2015-08-26 富士フイルム株式会社 パターン形成方法、化学増幅型レジスト組成物、及び、レジスト膜
US10204803B2 (en) 2013-09-17 2019-02-12 Deca Technologies Inc. Two step method of rapid curing a semiconductor polymer layer
US9159547B2 (en) * 2013-09-17 2015-10-13 Deca Technologies Inc. Two step method of rapid curing a semiconductor polymer layer
US9519221B2 (en) * 2014-01-13 2016-12-13 Applied Materials, Inc. Method for microwave processing of photosensitive polyimides
JP6583258B2 (ja) 2014-02-19 2019-10-02 日立化成デュポンマイクロシステムズ株式会社 樹脂組成物、それによって形成される硬化膜及びパターン硬化膜、及びそれらの製造方法
US10777633B2 (en) * 2017-09-29 2020-09-15 Sharp Kabushiki Kaisha Display device, display device manufacturing method, and display device manufacturing apparatus
JPWO2024147289A1 (enExample) * 2023-01-06 2024-07-11

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3966590B2 (ja) * 1997-11-20 2007-08-29 旭化成エレクトロニクス株式会社 感光性組成物
JP2001033964A (ja) * 1999-07-15 2001-02-09 Hitachi Chem Co Ltd ネガ型感光性樹脂組成物、パターンの製造法及び電子部品
JP4288796B2 (ja) * 1999-10-29 2009-07-01 日立化成デュポンマイクロシステムズ株式会社 ネガ型感光性樹脂組成物、パターンの製造法及び電子部品
JP2002169286A (ja) * 2000-11-30 2002-06-14 Hitachi Chemical Dupont Microsystems Ltd 感光性重合体組成物、パターンの製造法及び電子部品
JP4211225B2 (ja) * 2001-02-27 2009-01-21 日本ゼオン株式会社 感放射線性樹脂組成物
JP2003121998A (ja) * 2001-10-11 2003-04-23 Hitachi Chemical Dupont Microsystems Ltd 感光性重合体組成物及びパターン製造法及び電子部品

Similar Documents

Publication Publication Date Title
BE2021C519I2 (enExample)
BE2021C524I2 (enExample)
BE2013C074I2 (enExample)
BE2013C014I2 (enExample)
BE2012C042I2 (enExample)
BRPI0601358B8 (pt) Aplicador de clipe cirúrgico
BRPI0601402B8 (pt) Aplicador de grampos cirúrgicos
BR122017004707A2 (enExample)
BRPI0609157A8 (enExample)
BE2019C013I2 (enExample)
BRPI0608519A2 (enExample)
BR122020005056A2 (enExample)
AP2140A (enExample)
BR122016029989A2 (enExample)
BRPI0604219A (enExample)
BRPI0618215B8 (enExample)
BY2237U (enExample)
BE2017C062I2 (enExample)
CN105122969C (enExample)
CN300725998S (zh) 鞋帮
CN300726008S (zh) 鞋帮
CN300726591S (zh) 冷冰食品制作器
CN300726508S (zh) 头部遮挡板
CN300726222S (zh) 包装纸(金色高金火腿肠)
CN300726002S (zh) 鞋帮