JP2006186304A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2006186304A JP2006186304A JP2005193748A JP2005193748A JP2006186304A JP 2006186304 A JP2006186304 A JP 2006186304A JP 2005193748 A JP2005193748 A JP 2005193748A JP 2005193748 A JP2005193748 A JP 2005193748A JP 2006186304 A JP2006186304 A JP 2006186304A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 110
- 229910052751 metal Inorganic materials 0.000 claims abstract description 179
- 239000002184 metal Substances 0.000 claims abstract description 179
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 238000005520 cutting process Methods 0.000 claims abstract description 46
- 238000000227 grinding Methods 0.000 claims abstract description 33
- 238000005498 polishing Methods 0.000 claims abstract description 32
- 230000001681 protective effect Effects 0.000 claims description 111
- 238000000034 method Methods 0.000 claims description 75
- 229910000679 solder Inorganic materials 0.000 claims description 67
- 239000011347 resin Substances 0.000 claims description 28
- 229920005989 resin Polymers 0.000 claims description 28
- 229910003460 diamond Inorganic materials 0.000 claims description 8
- 239000010432 diamond Substances 0.000 claims description 8
- 239000006061 abrasive grain Substances 0.000 claims description 6
- 238000004070 electrodeposition Methods 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 abstract description 78
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 78
- 238000000059 patterning Methods 0.000 abstract description 22
- 238000007796 conventional method Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 173
- 239000010410 layer Substances 0.000 description 53
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 24
- 239000010931 gold Substances 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 238000004544 sputter deposition Methods 0.000 description 13
- 239000010949 copper Substances 0.000 description 12
- 239000010936 titanium Substances 0.000 description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 10
- 229910052737 gold Inorganic materials 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000012545 processing Methods 0.000 description 10
- 239000010409 thin film Substances 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 229910052759 nickel Inorganic materials 0.000 description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 8
- 238000005422 blasting Methods 0.000 description 8
- 229910052719 titanium Inorganic materials 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000012986 modification Methods 0.000 description 6
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- 230000002093 peripheral effect Effects 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 238000005476 soldering Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910017944 Ag—Cu Inorganic materials 0.000 description 1
- 229910018125 Al-Si Inorganic materials 0.000 description 1
- 229910018520 Al—Si Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910017755 Cu-Sn Inorganic materials 0.000 description 1
- 229910017927 Cu—Sn Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 229910018100 Ni-Sn Inorganic materials 0.000 description 1
- 229910018532 Ni—Sn Inorganic materials 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 229910018594 Si-Cu Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910008465 Si—Cu Inorganic materials 0.000 description 1
- 229910008996 Sn—Ni—Cu Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/03—Manufacturing methods
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- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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Abstract
【解決手段】 半導体基板1の一面1a上にアルミニウム電極11、保護膜12を順次形成し、保護膜12に開口部12aを形成し、開口部12aから臨むアルミニウム電極11の表面11a上に金属電極13を形成してなる半導体装置において、保護膜12の上面に対して開口部12aから臨むアルミニウム電極11の表面11aが引っ込むように段差が形成され、金属電極13は、アルミニウム電極11および保護膜12の上に形成された膜を切削、研削もしくは研磨によりパターニングすることで、開口部12aから臨むアルミニウム電極11の表面11aおよび保護膜12の側面12bのみに形成する。
【選択図】 図2
Description
この工程では、上記図3(a)と同様に、半導体基板であるシリコン基板1の表面1a上に下地電極としてのアルミニウム電極11を形成し、アルミニウム電極11の上に保護膜12を形成し、保護膜12に開口部12aを形成する(下地電極形成工程)。
この工程では、上記図3(b)と同様に、開口部12aから臨むアルミニウム電極11の表面11a上および保護膜12上に、接続用の金属電極13を形成する(金属電極形成工程)。
続いて、本工程では、凹み部131を含む金属電極13の上に、樹脂からなる樹脂膜14を形成するとともに、樹脂膜14を当該凹み部131に充填する(樹脂膜形成工程)。ここでは、樹脂膜14は、レジスト材料などの樹脂からなる膜であり、スピンコート法などにより成膜することができる。
次に、本工程では、上述した切削、研削、研磨あるいはショットブラストを用いた機械的除去加工により、金属電極13のうち凹み部131およびこの凹み部131に充填された樹脂膜14を残しつつ、金属電極13のうち凹み部131における周辺端部132が露出するように、金属電極13および樹脂膜14を除去する(金属電極および樹脂膜の機械的除去加工工程)。
続いて、本工程では、金属電極13の凹み部131における上記周辺端部132を化学的にエッチングすることによって、当該周辺端部131を保護膜12の上面よりも低くする(凹み部周辺端部のエッチング工程)。
そして、本工程では、金属電極13の凹み部131内に残っている樹脂膜14を除去する(残存樹脂膜除去工程)。具体的には、アルカリ系のレジスト剥離液などを用いて残存樹脂膜14の除去を行う。こうして、本例において、アルミニウム電極11および金属電極13より構成されるエミッタ電極2およびゲート電極3ができあがる。
本工程では、上記図6(a)における下地電極形成工程と同様に、シリコン基板1の表面1a上への下地電極としてのアルミニウム電極11の形成、および開口部12aを有する保護膜12の形成を行う。
続いて、本工程では、凹み部131を含む金属電極13の上に、はんだ層15を形成するとともに、このはんだ層15を当該凹み部131に充填する(はんだ層形成工程)。
次に、本工程では、上述した切削、研削、研磨あるいはショットブラストを用いた機械的除去加工により、金属電極13のうち凹み部131およびこの凹み部131に充填されたはんだ層15を残しつつ、金属電極13のうち凹み部131における周辺端部132が露出するように、金属電極13およびはんだ15を除去する(金属電極およびはんだ層の機械的除去加工工程)。
なお、上記実施形態では、下地電極としてアルミニウム電極11を用いたが、下地電極としては、CuまたはCuを主成分とするCu電極を用いてもよい。
1b…半導体基板の他面としての裏面、
11…下地電極としてのアルミニウム電極、11a…アルミニウム電極の表面、
12…保護膜、12a…保護膜の開口部、12b…保護膜の側面、
13…金属電極、60…はんだ。
Claims (7)
- 半導体基板(1)の一面(1a)上に下地電極(11)を形成し、前記下地電極(11)の上に保護膜(12)を形成し、前記保護膜(12)に開口部(12a)を形成するとともに、前記開口部(12a)から臨む前記下地電極(11)の表面(11a)上に、接続用の金属電極(13)を形成してなる半導体装置において、
前記保護膜(12)の上面に対して前記開口部(12a)から臨む前記下地電極(11)の表面(11a)が引っ込むように段差が形成されており、
前記金属電極(13)は、前記下地電極(11)および前記保護膜(12)の上に形成された膜を機械的に削る機械的除去加工によりパターニングすることによって、前記開口部(12a)から臨む前記下地電極(11)の表面(11a)および前記段差を形成する前記保護膜(12)の側面(12b)のみに形成されたものとなっていることを特徴とする半導体装置。 - 前記保護膜(12)の上面に対して、前記金属電極(13)のうち前記下地電極(11)の中央部上に位置する部位の上面は、段差をもって引っ込んでいることを特徴とする請求項1に記載の半導体装置。
- 前記保護膜(12)は樹脂よりなることを特徴とする請求項1または2に記載の半導体装置。
- 前記金属電極(13)のうち前記段差を形成する前記保護膜(12)の側面(12b)に形成された部位は、前記金属電極(13)を介し、はんだ(60)が接していることを特徴とする請求項1ないし3のいずれか1つに記載の半導体装置。
- 前記金属電極(13)は、バイトもしくは多刃工具を用いた切削法によりパタ−ニングされたものであることを特徴とする請求項1ないし4のいずれか1つに記載の半導体装置。
- 前記金属電極(13)は、ダイヤモンドホイ−ルもしくはGC砥石もしくは電着砥石を用いた研削法によりパターニングされたものであることを特徴とする請求項1ないし4のいずれか1つに記載の半導体装置。
- 前記金属電極(13)は、砥粒を用いた研磨法によりパターニングされたものであることを特徴とする請求項1ないし4のいずれか1つに記載の半導体装置。
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DE102008012678B4 (de) * | 2007-03-06 | 2010-10-14 | DENSO CORPORATION, Kariya-shi | Verfahren zum Bilden einer metallischen Elektrode und die metallische Elektrode aufweisende Halbleitervorrichtung |
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