JP2006186099A - 積層圧電素子及び振動波駆動装置 - Google Patents

積層圧電素子及び振動波駆動装置 Download PDF

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Publication number
JP2006186099A
JP2006186099A JP2004377892A JP2004377892A JP2006186099A JP 2006186099 A JP2006186099 A JP 2006186099A JP 2004377892 A JP2004377892 A JP 2004377892A JP 2004377892 A JP2004377892 A JP 2004377892A JP 2006186099 A JP2006186099 A JP 2006186099A
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JP
Japan
Prior art keywords
piezoelectric element
piezoelectric
laminated
layers
vibrating body
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Pending
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JP2004377892A
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English (en)
Japanese (ja)
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JP2006186099A5 (enrdf_load_stackoverflow
Inventor
Yutaka Maruyama
裕 丸山
Nobuyuki Kojima
信行 小島
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Canon Inc
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Canon Inc
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Priority to JP2004377892A priority Critical patent/JP2006186099A/ja
Publication of JP2006186099A publication Critical patent/JP2006186099A/ja
Publication of JP2006186099A5 publication Critical patent/JP2006186099A5/ja
Pending legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2004377892A 2004-12-27 2004-12-27 積層圧電素子及び振動波駆動装置 Pending JP2006186099A (ja)

Priority Applications (1)

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JP2004377892A JP2006186099A (ja) 2004-12-27 2004-12-27 積層圧電素子及び振動波駆動装置

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JP2004377892A JP2006186099A (ja) 2004-12-27 2004-12-27 積層圧電素子及び振動波駆動装置

Publications (2)

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JP2006186099A true JP2006186099A (ja) 2006-07-13
JP2006186099A5 JP2006186099A5 (enrdf_load_stackoverflow) 2008-02-21

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JP2004377892A Pending JP2006186099A (ja) 2004-12-27 2004-12-27 積層圧電素子及び振動波駆動装置

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JP (1) JP2006186099A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008253069A (ja) * 2007-03-30 2008-10-16 Canon Inc 積層圧電素子及び振動波駆動装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05175567A (ja) * 1991-12-20 1993-07-13 Olympus Optical Co Ltd 積層型アクチュエータ
JPH11220893A (ja) * 1997-11-27 1999-08-10 Canon Inc 振動型アクチュエータおよび振動型駆動装置
JP2000156988A (ja) * 1998-09-18 2000-06-06 Seiko Instruments Inc 圧電アクチュエ―タおよび圧電アクチュエ―タ付電子機器
JP2001045774A (ja) * 1999-07-28 2001-02-16 Canon Inc 電気−機械エネルギー変換素子を振動源とする振動体、この振動体を駆動源とする振動波駆動装置、振動波駆動装置を有する装置およびこの振動体を搬送源とする搬送装置
JP2003046156A (ja) * 2001-07-31 2003-02-14 Canon Inc 積層電気−機械エネルギー変換素子および振動波駆動装置
JP2004297951A (ja) * 2003-03-27 2004-10-21 Olympus Corp 超音波振動子及び超音波モータ
JP2004335554A (ja) * 2003-04-30 2004-11-25 Canon Inc 積層電気−機械エネルギ変換素子の製造方法
JP2005168281A (ja) * 2003-11-13 2005-06-23 Canon Inc 積層圧電素子及び振動波駆動装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05175567A (ja) * 1991-12-20 1993-07-13 Olympus Optical Co Ltd 積層型アクチュエータ
JPH11220893A (ja) * 1997-11-27 1999-08-10 Canon Inc 振動型アクチュエータおよび振動型駆動装置
JP2000156988A (ja) * 1998-09-18 2000-06-06 Seiko Instruments Inc 圧電アクチュエ―タおよび圧電アクチュエ―タ付電子機器
JP2001045774A (ja) * 1999-07-28 2001-02-16 Canon Inc 電気−機械エネルギー変換素子を振動源とする振動体、この振動体を駆動源とする振動波駆動装置、振動波駆動装置を有する装置およびこの振動体を搬送源とする搬送装置
JP2003046156A (ja) * 2001-07-31 2003-02-14 Canon Inc 積層電気−機械エネルギー変換素子および振動波駆動装置
JP2004297951A (ja) * 2003-03-27 2004-10-21 Olympus Corp 超音波振動子及び超音波モータ
JP2004335554A (ja) * 2003-04-30 2004-11-25 Canon Inc 積層電気−機械エネルギ変換素子の製造方法
JP2005168281A (ja) * 2003-11-13 2005-06-23 Canon Inc 積層圧電素子及び振動波駆動装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008253069A (ja) * 2007-03-30 2008-10-16 Canon Inc 積層圧電素子及び振動波駆動装置

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