JP2006153844A - Panel inspection device - Google Patents

Panel inspection device Download PDF

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JP2006153844A
JP2006153844A JP2005187153A JP2005187153A JP2006153844A JP 2006153844 A JP2006153844 A JP 2006153844A JP 2005187153 A JP2005187153 A JP 2005187153A JP 2005187153 A JP2005187153 A JP 2005187153A JP 2006153844 A JP2006153844 A JP 2006153844A
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panel
mask
inspection apparatus
centering
unit
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JP4031491B2 (en
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Heikan Den
炳煥 田
Kyozen Ryu
亨善 柳
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Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Nonlinear Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
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  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Liquid Crystal (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a panel inspection device of which structure is simplified and that can reduce the inspection period of active region inspection and visual inspection of an LCD panel. <P>SOLUTION: The panel inspection device comprises a centering unit for supporting the panel, a back light for supplying light to the back surface of the panel supported by the centering unit, a mask that is disposed movably with respect to the panel and covers the edge region as a rim of the panel so that the active region of the panel is exposed, a pin board that is disposed movably with respect to the panel and disposed contactably with an electrode of the panel so that an electric signal is applied to the panel, and a photograph section that is disposed in front of the panel and photographs one of the active region of the panel covered with the mask and the whole surface of the panel exposed by movement of the mask. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明はパネル検査装置(PANEL INSPECTION APPARATUS)に係り、より詳しくは、パネルのアクティブ領域検査及び外観検査を容易に行えるように構造を改善したパネル検査装置に関する。   The present invention relates to a panel inspection apparatus (PANEL INSPECTION APPARATUS), and more particularly to a panel inspection apparatus having an improved structure so that an active area inspection and an appearance inspection of a panel can be easily performed.

一般に、パネルはＬＣＤ(LIQUID CRYSTAL DISPLAY)に装着されて画像を形成するものであって、画像が形成されるアクティブ領域と、アクティブ領域の外側に設けられた縁領域とを含む。このようなパネルは多段階の製造工程によって製造され、このような製造工程には性能などを検査するための検査過程が含まれる。   Generally, the panel is mounted on an LCD (LIQUID CRYSTAL DISPLAY) to form an image, and includes an active area where an image is formed and an edge area provided outside the active area. Such a panel is manufactured by a multi-stage manufacturing process, and the manufacturing process includes an inspection process for inspecting performance and the like.

このようなパネルの検査過程は、電気的な信号によってパネルの画像が形成されるアクティブ領域の性能を検査するアクティブ領域検査と、パネルのアクティブ領域及び縁領域の外観品質を検査する外観検査とに分けられる。   The panel inspection process includes an active area inspection for inspecting the performance of an active area in which an image of the panel is formed by an electrical signal, and an appearance inspection for inspecting the appearance quality of the active area and the edge area of the panel. Divided.

図１は従来のパネルのアクティブ領域の性能を検査するためのパネル検査装置の概略図である。図１に示されているように、このような従来のパネル検査装置１０１はパネル１０５の下部に設けられたバックライト１１０と、バックライト１１０とパネル１０５との間に設けられてパネル１０５を支持しバックライト１１０から発生した光がパネル１０５のアクティブ領域にのみ照射されるようにパネル１０５の縁領域をカバーするパネルジグ１２０と、パネル１０５の上側に設けられてパネル１０５のアクティブ領域を撮影するカメラ１３０とを含む。   FIG. 1 is a schematic view of a panel inspection apparatus for inspecting the performance of an active area of a conventional panel. As shown in FIG. 1, such a conventional panel inspection apparatus 101 supports a panel 105 by being provided between a backlight 110 provided at a lower portion of the panel 105 and between the backlight 110 and the panel 105. A panel jig 120 that covers the edge region of the panel 105 so that light generated from the backlight 110 is irradiated only to the active region of the panel 105, and a camera that is provided on the upper side of the panel 105 and photographs the active region of the panel 105 130.

このような構成によって、従来のパネル検査装置１０１はバックライト１１０に電源を印加しパネル１０５に電気的な信号を印加してアクティブ領域に基準画像を形成させた後、アクティブ領域で画像の品質及び明るさの均一度などを検査することができる。   With such a configuration, the conventional panel inspection apparatus 101 applies power to the backlight 110 and applies an electrical signal to the panel 105 to form a reference image in the active area. The brightness uniformity can be inspected.

図２は従来のパネルの外観を検査するためのパネル検査装置の概略図である。図２に示されているように、このような従来のパネル検査装置２０１はパネル２０５の下部に設けられたバックライト２１０と、パネル２０５の上側に設けられてパネル２０５の全体外観を撮影するカメラ２３０とを含む。   FIG. 2 is a schematic view of a panel inspection apparatus for inspecting the appearance of a conventional panel. As shown in FIG. 2, such a conventional panel inspection apparatus 201 includes a backlight 210 provided at the lower part of the panel 205 and a camera provided on the upper side of the panel 205 for photographing the entire appearance of the panel 205. 230.

このような構成によって、従来のパネル検査装置２０１はバックライト２１０に電源を印加してパネル２０５全体面の外観に突き刺されるか引っ掻かれた傷などがあるか否かを検査することができる。   With such a configuration, the conventional panel inspection apparatus 201 can apply power to the backlight 210 to inspect whether there is a scratch or the like that is stuck or scratched on the appearance of the entire panel 205.

しかし、このような従来のパネル検査装置はパネルのアクティブ領域検査及び外観検査を行うように各々別途に設けられ、各パネル検査装置の間にはパネルを移送するための別途の移送手段が設けられなければならないので、パネル検査装置の構造が複雑で検査時間が長くなるという問題がある。   However, such a conventional panel inspection apparatus is separately provided so as to perform an active area inspection and a visual inspection of the panel, and a separate transfer means for transferring the panel is provided between the panel inspection apparatuses. Therefore, there is a problem that the structure of the panel inspection apparatus is complicated and the inspection time becomes long.

そして、このような従来のパネル検査装置は各パネルに合うように別途のパネルジグが設けられなければならないので、多様な大きさを有するパネルを容易に支持することができる方策が要求される。   Such a conventional panel inspection apparatus needs to be provided with a separate panel jig so as to be fitted to each panel. Therefore, a measure that can easily support panels having various sizes is required.

そこで、本発明は上記の問題に鑑みてなされたものであり、その目的は、構造を単純化し、パネルのアクティブ領域検査及び外観検査の検査時間を減らすことができるパネル検査装置を提供することにある。   Accordingly, the present invention has been made in view of the above problems, and an object of the present invention is to provide a panel inspection apparatus capable of simplifying the structure and reducing the inspection time of the active area inspection and the appearance inspection of the panel. is there.

また、本発明の他の目的は、多様な大きさのパネルを支持することができるパネル検査装置を提供することにある。   Another object of the present invention is to provide a panel inspection apparatus that can support panels of various sizes.

上記課題を解決するために、本発明によるパネル検査装置は、パネルを検査するためのパネル検査装置において、前記パネルを支持するセンタリングユニットと；前記センタリングユニットに支持された前記パネルの背面に光を供給するバックライトと；前記パネルに対して移動可能に設けられ、前記パネルのアクティブ領域が露出されるように前記パネルの周縁である縁領域をカバーするマスクと；前記パネルに対して移動可能に設けられ、前記パネルに電気的な信号を印加するように前記パネルの電極と接触可能に設けられたピンボードと；前記パネルの前方に設けられ、前記マスクによってカバーされた前記パネルのアクティブ領域及び前記マスクの移動によって露出された前記パネルの全体面のうちのいずれか一つを撮影する撮影部と、を含むことを特徴とする。   In order to solve the above-described problems, a panel inspection apparatus according to the present invention is a panel inspection apparatus for inspecting a panel; a centering unit that supports the panel; and a light beam on a back surface of the panel supported by the centering unit. A backlight to be supplied; a mask that is movable with respect to the panel and covers an edge region that is a peripheral edge of the panel so that an active area of the panel is exposed; and movable with respect to the panel A pin board provided in contact with an electrode of the panel so as to apply an electrical signal to the panel; an active area of the panel provided in front of the panel and covered by the mask; An imaging unit for imaging any one of the entire surface of the panel exposed by the movement of the mask. , Characterized in that it comprises a.

ここで、前記センタリングユニットは、前記パネルを、前記マスク、前記ピンボード及び前記撮影部のうちの少なくとも一つの中心に位置するように支持することができる。   Here, the centering unit can support the panel so as to be positioned at the center of at least one of the mask, the pinboard, and the imaging unit.

前記センタリングユニットは、前記パネルの両側面と接触可能に設けられた少なくとも一対のセンタリング部材と、前記一対のセンタリング部材が前記パネルに接触して支持するように前記一対のセンタリング部材を移動させるセンタリング部材駆動部とを含むことができる。   The centering unit includes at least a pair of centering members provided so as to be in contact with both side surfaces of the panel, and a centering member that moves the pair of centering members so that the pair of centering members are in contact with and support the panel. And a driving unit.

前記パネルの前方に設けられて前記パネルの前面に光を供給するフロントライトをさらに含むことができる。   A front light provided in front of the panel and supplying light to the front surface of the panel may be further included.

前記バックライトに対して移動可能に前記パネルの前方に設けられた支持台をさらに含み、前記支持台は前記フロントライトを支持し、前記マスク及び前記ピンボードを移動可能に支持することができる。   It further includes a support base provided in front of the panel so as to be movable with respect to the backlight. The support base supports the front light, and can support the mask and the pin board so as to be movable.

前記支持台に対して前記マスク及び前記ピンボードを一体に移動するように支持するマスク駆動部をさらに含み、前記マスク駆動部は前記マスク及び前記ピンボードを前記支持台の板面に起立した方向に移動させる第１駆動部と、前記マスク及び前記ピンボードを前記支持台の板面と並んだ方向に移動させる第２駆動部とを含むことができる。   A mask driving unit that supports the mask and the pin board so as to move together with the support; and the mask driving unit stands in a direction in which the mask and the pin board stand on the plate surface of the support; And a second driving unit for moving the mask and the pin board in a direction aligned with the plate surface of the support base.

前記マスクは前記パネルの前面縁領域と接触可能に設けられることができる。   The mask may be provided in contact with a front edge region of the panel.

前記バックライト及び前記パネルの間に設けられた保護板をさらに含むことができる。   A protective plate may be further provided between the backlight and the panel.

本発明によると、構造を単純化してパネルのアクティブ領域検査及び外観検査の検査時間を減らすことができるパネル検査装置を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the structure can be simplified and the panel inspection apparatus which can reduce the inspection time of the active area inspection of a panel and an external appearance inspection can be provided.

また、センタリングユニットを設けて多様な大きさのパネルを支持することができるパネル検査装置を提供することができる。   In addition, it is possible to provide a panel inspection apparatus that can support various-sized panels by providing a centering unit.

以下、添付図面を参照して本発明について詳細に説明する。   Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

本発明によるパネル検査装置１は、パネル５の画像を形成するアクティブ領域６の性能を検査するアクティブ領域検査、及びパネル５の全体外観を検査する外観検査を順次に行うことができるように設けられた装置である。   The panel inspection apparatus 1 according to the present invention is provided so that an active area inspection for inspecting the performance of the active area 6 for forming an image of the panel 5 and an appearance inspection for inspecting the overall appearance of the panel 5 can be sequentially performed. Device.

図３は本発明によるパネル検査装置１の概略図であり、図４乃至図７は本発明の一例によるパネル検査装置１の斜視図及び作動斜視図である。これら図面に示されているように、本発明によるパネル検査装置１はパネル５を検査するようにパネル５を支持するセンタリングユニット２０と、センタリングユニット２０に支持されたパネル５の背面に光を供給するバックライト１０と、パネル５に対して移動可能に設けられパネル５のアクティブ領域６が露出されるようにパネル５の周縁である縁領域７をカバーするマスク３３と、パネル５に対して移動可能に設けられパネル５に電気的な信号を印加するようにパネル５の電極８と接触可能に設けられたピンボード３５と、パネル５の前方に設けられパネル５を検査するためにパネル５を撮影する撮影部６０と、を含む。本発明によるパネル検査装置１はパネル５の前方に設けられパネル５の前面(front side)に光を供給するフロントライト３２をさらに含むことができる。本発明によるパネル検査装置１はバックライト１０に対して移動可能にパネル５の前方に設けられた支持台３０をさらに含むことができ、支持台３０に対してマスク３３及びピンボード３５を一体に移動可能に支持するマスク駆動部４１をさらに含むことができる。本発明によるパネル検査装置１はバックライト１０及びパネル５の間に設けられた保護板１５をさらに含むことができる。   FIG. 3 is a schematic view of the panel inspection apparatus 1 according to the present invention, and FIGS. 4 to 7 are a perspective view and an operation perspective view of the panel inspection apparatus 1 according to an example of the present invention. As shown in these drawings, the panel inspection apparatus 1 according to the present invention supplies light to the centering unit 20 that supports the panel 5 and the back surface of the panel 5 supported by the centering unit 20 so as to inspect the panel 5. And a mask 33 that is provided so as to be movable with respect to the panel 5 and covers the edge region 7 that is the peripheral edge of the panel 5 so that the active region 6 of the panel 5 is exposed. A pin board 35 provided so as to be able to contact the electrode 8 of the panel 5 so as to apply an electrical signal to the panel 5, and a panel 5 provided in front of the panel 5 for inspecting the panel 5. A photographing unit 60 for photographing. The panel inspection apparatus 1 according to the present invention may further include a front light 32 that is provided in front of the panel 5 and supplies light to the front side of the panel 5. The panel inspection apparatus 1 according to the present invention may further include a support base 30 provided in front of the panel 5 so as to be movable with respect to the backlight 10. The mask 33 and the pin board 35 are integrated with the support base 30. A mask driving unit 41 that is movably supported may be further included. The panel inspection apparatus 1 according to the present invention may further include a protection plate 15 provided between the backlight 10 and the panel 5.

パネル５はＴＦＴ−ＬＣＤ(THIN FILM TRANSISTOR-LIQUID CRYSTAL DISPLAY)に装着されて画像を形成するディスプレイパネルを示す。しかし、パネル５はＰＤＰ(PLASMA DISPLAY PANEL)及び有機ＥＬＤ(ELECTRO LUMINESCENCE DISPLAY)のような平面ディスプレイに装着されて画像を形成するディスプレイパネルを示すこともできる。パネル５は板状のガラス基板などで設けられ、画像を形成するように電気的回路を構成するパターンなどが形成された状態で検査を受けるようにパネル検査装置１に移送される。パネル５はその中央に画像が形成されるアクティブ領域(active area)６と、アクティブ領域６の外側であるパネル５の縁領域７と、パネル５の縁領域７にパターンなどと連結されピンボード３５と接触可能に設けられた複数の電極８とを含む。パネル５はパネル移送手段(図示せず)によってパネル検査装置１に供給及び排出されることができる。そして、このようなパネル移送手段はパネル５を安着させて移送するコンベヤー方式及びパネル５を真空吸着して後述の保護板１５に安着させる真空吸着方式など多様な方式に構成されることができる。パネル５は本発明の一例として、図５に示されているように、保護板１５に安着しているので、パネル５の前方はパネル５の上側を示す。   Panel 5 is a display panel that is mounted on a TFT-LCD (THIN FILM TRANSISTOR-LIQUID CRYSTAL DISPLAY) to form an image. However, the panel 5 may be a display panel that forms an image by being mounted on a flat display such as a PDP (PLASMA DISPLAY PANEL) and an organic ELD (ELECTRO LUMINESCENCE DISPLAY). The panel 5 is provided by a plate-like glass substrate or the like, and is transferred to the panel inspection apparatus 1 so as to be inspected in a state in which a pattern constituting an electric circuit is formed so as to form an image. The panel 5 is connected to the active area 6 in which an image is formed at the center thereof, the edge area 7 of the panel 5 outside the active area 6, and a pattern to the edge area 7 of the panel 5. And a plurality of electrodes 8 provided in contact with each other. The panel 5 can be supplied to and discharged from the panel inspection apparatus 1 by panel transfer means (not shown). Such panel transfer means may be configured in various systems such as a conveyor system for seating and transporting the panel 5 and a vacuum suction system for vacuum-sucking the panel 5 and seating on the protective plate 15 described later. it can. As an example of the present invention, the panel 5 is seated on the protective plate 15 as shown in FIG. 5, and therefore the front of the panel 5 indicates the upper side of the panel 5.

バックライト１０はパネル５の下側に配置されるようにベース部材９によって支持されてパネル５の背面に光を供給する。バックライト１０とパネル５との間には偏光板(polarizer plate)１３のような多様な光学シートを設けることができる。バックライト１０は多様な大きさのパネル５に光を供給できるように十分に大きく設けられる。   The backlight 10 is supported by the base member 9 so as to be disposed below the panel 5 and supplies light to the back surface of the panel 5. Various optical sheets such as a polarizer plate 13 can be provided between the backlight 10 and the panel 5. The backlight 10 is provided sufficiently large so that light can be supplied to the panels 5 having various sizes.

保護板１５は偏光板１３とパネル５との間に透明な材質で設けられて、供給されたパネル５と偏光板１３などを保護する。保護板１５はバックライト１０の全体をカバーするように十分に大きく設けられる。   The protective plate 15 is provided between the polarizing plate 13 and the panel 5 with a transparent material, and protects the supplied panel 5 and the polarizing plate 13. The protection plate 15 is provided sufficiently large so as to cover the entire backlight 10.

支持台３０は保護板１５の上側に配置され、支持台駆動部５１によってベース部材９に対して乗降可能に設けられる。支持台３０は板状に設けられ、その中央領域にはマスク３３及びピンボード３５が通過するように支持台貫通部３１が形成される。つまり、支持台３０は四角ドーナッツ形状に設けられる。しかし、支持台３０はドーナッツ形状に限定されず多様な形状に設けられることができる。   The support table 30 is disposed on the upper side of the protection plate 15 and is provided so as to be able to get on and off the base member 9 by the support table driving unit 51. The support base 30 is provided in a plate shape, and a support base penetrating portion 31 is formed in the central region so that the mask 33 and the pin board 35 pass through. That is, the support base 30 is provided in a square donut shape. However, the support base 30 is not limited to the donut shape and can be provided in various shapes.

支持台駆動部５１は一側がベース部材９に結合され他側が支持台３０に結合されて支持台３０をベース部材９に対して昇降させる。支持台駆動部５１は本発明の一例としてシリンダー方式に設けられるが、支持台３０及びベース部材９に結合されたスクリュー及びスクリューを回転させて支持台３０を乗降させる駆動モータのような多様な方式に設けられることができる。支持台駆動部５１は複数個設けられることが好ましい。   The support base drive unit 51 has one side coupled to the base member 9 and the other side coupled to the support base 30 to raise and lower the support base 30 relative to the base member 9. Although the support base drive unit 51 is provided in a cylinder system as an example of the present invention, various systems such as a drive motor that rotates the screw and the screw coupled to the support base 30 and the base member 9 to get on and off the support base 30. Can be provided. It is preferable that a plurality of support base driving parts 51 are provided.

フロントライト３２は支持台３０の下部面に装着されてパネル５の前面(front side)である上部面に光を供給する。フロントライト３２はパネル５の上部側面に配置されるように支持台３０に結合されてパネル５に傾斜するように光を供給する。フロントライト３２は本発明の一例として四角形状のパネル５に対応して四角ドーナッツ形状に設けられる。しかし、フロントライト３２はドーナッツ形状に限定されず多様な形状に設けられることができる。   The front light 32 is mounted on the lower surface of the support base 30 and supplies light to the upper surface which is the front side of the panel 5. The front light 32 is coupled to the support base 30 so as to be disposed on the upper side surface of the panel 5 and supplies light so as to be inclined to the panel 5. As an example of the present invention, the front light 32 is provided in a square donut shape corresponding to the quadrangular panel 5. However, the front light 32 is not limited to the donut shape and can be provided in various shapes.

マスク３３はパネル５の縁領域７をカバーするように板状に設けられる。マスク３３はパネル５のアクティブ領域６が露出されるように中央領域にマスク貫通部３４が形成されたドーナッツ形状に設けられる。マスク３３はマスク駆動部４１によって移動可能に設けられる。マスク３３はパネル５の前面縁領域７と接触可能に設けられる。ここで、マスク３３は、後述のピンボード３５のピン３６がパネル５の一側に設けられた電極８と接触するために電極８を加圧する場合にパネル５の他側が上げられることを防止することができる。   The mask 33 is provided in a plate shape so as to cover the edge region 7 of the panel 5. The mask 33 is provided in a donut shape in which a mask penetrating portion 34 is formed in the central region so that the active region 6 of the panel 5 is exposed. The mask 33 is movably provided by the mask driving unit 41. The mask 33 is provided so as to be in contact with the front edge region 7 of the panel 5. Here, the mask 33 prevents the other side of the panel 5 from being lifted when the electrode 36 is pressurized so that the pins 36 of the pin board 35 described later come into contact with the electrode 8 provided on one side of the panel 5. be able to.

ピンボード３５はパネル５の電極８と接触可能に設けられた複数のピン３６を含む。ピンボード３５は本発明の一例としてマスク３３と同様にドーナッツ形状に設けられマスク３３の上側に設けられる。ピンボード３５はマスク３３の上側にマスク３３と結合されてマスク駆動部４１と共に移動可能に設けられる。しかし、ピンボード３５はマスク３３と別途の駆動手段によって移動することもできる。   The pin board 35 includes a plurality of pins 36 provided so as to be in contact with the electrodes 8 of the panel 5. As an example of the present invention, the pin board 35 is provided in a donut shape like the mask 33 and is provided above the mask 33. The pin board 35 is coupled to the mask 33 on the upper side of the mask 33 so as to be movable together with the mask driving unit 41. However, the pin board 35 can be moved by the mask 33 and a separate driving means.

マスク駆動部４１は一側が支持台３０に結合され、他側がマスク３３に結合されて、マスク３３及びピンボード３５を支持台３０に対して移動させる。マスク駆動部４１はマスク３３及びピンボード３５を支持台３０の板面に起立した方向に移動させる第１駆動部４２と、マスク３３及びピンボード３５を支持台３０の板面と並んだ方向に移動させる第２駆動部４５とを含む。   One side of the mask driving unit 41 is coupled to the support base 30 and the other side is coupled to the mask 33 to move the mask 33 and the pin board 35 relative to the support base 30. The mask drive unit 41 moves the mask 33 and the pin board 35 in the direction standing on the plate surface of the support table 30, and the mask 33 and the pin board 35 in the direction aligned with the plate surface of the support table 30. A second drive unit 45 to be moved.

マスク駆動部４１は、第１駆動部４２と、一側が支持台に結合され他側がマスク３３に結合されてマスク３３及びピンボード３５を支持台３０に対して前後方向に移動させる第２駆動部４５とを含む。   The mask drive unit 41 includes a first drive unit 42 and a second drive unit that has one side coupled to the support base and the other side coupled to the mask 33 to move the mask 33 and the pin board 35 in the front-rear direction with respect to the support base 30. 45.

第１駆動部４２は一側が支持台に結合され他側がマスク３３に結合されてマスク３３及びピンボード３５を支持台３０に対して上下方向に移動させる。第１駆動部４２は、支持台３０から上下に起立した第１ガイド４３と、マスク３３及びピンボード３５に結合されて第１ガイド４３に沿ってスライディングする第１スライダー４４とを含む。第１駆動部４２は第１スライダー４４が第１ガイド４３に沿ってスライディングできるように駆動するシリンダーユニット(図示せず)などをさらに含む。第１駆動部４２はマスク３３及びピンボード３５が支持台貫通部３１を通過してパネル５に接触可能なように移動させる。   The first driving unit 42 has one side coupled to the support base and the other side coupled to the mask 33 to move the mask 33 and the pin board 35 in the vertical direction with respect to the support base 30. The first drive unit 42 includes a first guide 43 that stands up and down from the support base 30, and a first slider 44 that is coupled to the mask 33 and the pin board 35 and slides along the first guide 43. The first driving unit 42 further includes a cylinder unit (not shown) that drives the first slider 44 to slide along the first guide 43. The first drive unit 42 moves the mask 33 and the pin board 35 so as to be able to contact the panel 5 through the support base penetrating part 31.

第２駆動部４５は一側が支持台に結合され他側がマスク３３に結合されてマスク３３及びピンボード３５を支持台３０に対して前後方向に移動させる。第２駆動部４５は支持台３０の上側に前後方向に設けられた第２ガイド４６と、マスク３３及びピンボード３５に結合されて第２ガイド４６に沿ってスライディングする第２スライダー４７と、第２スライダー４７が第２ガイド４６に沿ってスライディングできるように駆動するシリンダーユニット４８とを含む。第２駆動部４５は支持台３０の上側に上昇したマスク３３及びピンボード３５を前後方向に移動させる。   The second driving unit 45 has one side coupled to the support base and the other side coupled to the mask 33 to move the mask 33 and the pin board 35 in the front-rear direction with respect to the support base 30. The second driving unit 45 includes a second guide 46 provided in the front-rear direction on the upper side of the support 30, a second slider 47 coupled to the mask 33 and the pin board 35 and sliding along the second guide 46, 2 includes a cylinder unit 48 that is driven so that the slider 47 can slide along the second guide 46. The second driving unit 45 moves the mask 33 and the pin board 35 that have been raised above the support base 30 in the front-rear direction.

撮影部６０はパネル５の前方に設けられマスク３３によってカバーされたパネル５のアクティブ領域６及びマスク３３の移動によって露出されたパネル５の全体面のうちのいずれか一つを撮影する。撮影部６０は、パネル５の前面を撮影するためのカメラ６１と、カメラ６１をベース部材９に対して支持するカメラ支持台６３とを含む。撮影部６０はカメラ６１によって撮影された映像を分析して不良の有無を判断する制御部(図示せず)と連結される。   The photographing unit 60 photographs one of the active area 6 of the panel 5 provided in front of the panel 5 and covered by the mask 33 and the entire surface of the panel 5 exposed by the movement of the mask 33. The photographing unit 60 includes a camera 61 for photographing the front surface of the panel 5 and a camera support base 63 that supports the camera 61 with respect to the base member 9. The photographing unit 60 is connected to a control unit (not shown) that analyzes an image photographed by the camera 61 and determines whether there is a defect.

カメラ６１はパネル５の上側に設けられてパネル５の前面を撮影する。カメラ６１は、パネル５のアクティブ領域６を検査するためにマスク３３及びピンボード３５がパネル５に接触した場合には、マスク貫通部３４を通じてパネル５のアクティブ領域６を撮影し、パネル５の外観を検査するためにマスク３３及びピンボード３５がパネル５から移動した場合には、パネル５のアクティブ領域６及び縁領域７を含むパネル５の全体面を撮影する。   The camera 61 is provided on the upper side of the panel 5 and photographs the front surface of the panel 5. When the mask 33 and the pin board 35 come into contact with the panel 5 in order to inspect the active area 6 of the panel 5, the camera 61 photographs the active area 6 of the panel 5 through the mask penetrating part 34 and the appearance of the panel 5. When the mask 33 and the pin board 35 are moved from the panel 5 to inspect the above, the entire surface of the panel 5 including the active area 6 and the edge area 7 of the panel 5 is photographed.

センタリングユニット２０はパネル５をマスク３３、ピンボード３５及び撮影部６０のうちの少なくとも一つの中心に位置するように支持する。センタリングユニット２０は、パネル５の両側面と接触可能に設けられた少なくとも一対のセンタリング部材２１と、一対のセンタリング部材２１がパネル５に接触して支持するように一対のセンタリング部材２１を移動させるセンタリング部材駆動部２３とを含む。   The centering unit 20 supports the panel 5 so as to be positioned at the center of at least one of the mask 33, the pin board 35, and the imaging unit 60. The centering unit 20 includes at least a pair of centering members 21 provided so as to be in contact with both side surfaces of the panel 5 and a centering that moves the pair of centering members 21 so that the pair of centering members 21 are in contact with and supported by the panel 5. Member drive unit 23.

センタリング部材２１は保護板１５に移送されたパネル５を支持するように保護板１５上に移動可能に設けられる。センタリング部材２１はパネル５の両側面を支持するように一対設けられることができ、パネル５の左右側面及び前後側面を支持するように二対設けられることもできる。センタリング部材２１はパネル５の側面と接触可能に長い棒状に設けられる。   The centering member 21 is movably provided on the protection plate 15 so as to support the panel 5 transferred to the protection plate 15. A pair of centering members 21 may be provided so as to support both side surfaces of the panel 5, and two pairs of centering members 21 may be provided so as to support the left and right side surfaces and the front and back side surfaces of the panel 5. The centering member 21 is provided in a long bar shape so as to be in contact with the side surface of the panel 5.

センタリング部材駆動部２３は、一対のセンタリング部材２１と結合された駆動スクリュー２４と、駆動スクリュー２４を回転させてセンタリング部材２１を移動させる駆動モータ２５とを含む。センタリング部材駆動部２３は二対のセンタリング部材２１を移動させるように一対設けられることができる。   The centering member drive unit 23 includes a drive screw 24 coupled to the pair of centering members 21 and a drive motor 25 that rotates the drive screw 24 to move the centering member 21. A pair of centering member driving units 23 may be provided to move two pairs of centering members 21.

このような構成によって、本発明によるパネル検査装置１の作動過程を説明すると次の通りである。   The operation process of the panel inspection apparatus 1 according to the present invention will be described as follows.

まず、支持台駆動部５１によって支持台３０をベース部材９に対して上昇させて保護板１５上にパネル５を安着させ、センタリングユニット２０を駆動してパネル５を支持する(図５参照)。そして、支持台駆動部５１によって支持台３０をベース部材９に対して下降させた後、マスク駆動部４１の第２駆動部４５によってマスク３３及びピンボード３５を支持台貫通部３１に対応して前後方向に移動させる(図６参照)。その後、マスク駆動部４１の第１駆動部４２によってマスク３３及びピンボード３５を支持台貫通部３１を通過してパネル５に接触させる(図７参照)。そして、バックライト１０及びフロントライト３２に電源を印加し、ピンボード３５のピン３６を通じてパネル５の電極８に電気的信号を印加してパネル５のアクティブ領域６に画像を形成させる。その後、カメラ６１によってパネル５のアクティブ領域６を撮影してアクティブ領域６の不良の有無を判断するようにアクティブ領域検査を行うことができる。そして、マスク駆動部４１の第１駆動部４２及び第２駆動部４５を順次に作動させて図４に示された状態でマスク３３及びピンボード３５を移動させる。そして、センタリングユニット２０を駆動してパネル５からセンタリング部材２１を離脱させる。その後、カメラ６１によってパネル５のアクティブ領域６及び縁領域７を含む全体面を撮影してパネル５の外観の不良の有無を判断するように外観検査を行うことができる。   First, the support base 30 is raised with respect to the base member 9 by the support base drive unit 51 to seat the panel 5 on the protective plate 15, and the centering unit 20 is driven to support the panel 5 (see FIG. 5). . Then, after the support base 30 is lowered with respect to the base member 9 by the support base drive part 51, the mask 33 and the pin board 35 are made to correspond to the support base penetration part 31 by the second drive part 45 of the mask drive part 41. Move in the front-rear direction (see FIG. 6). Thereafter, the mask 33 and the pin board 35 are brought into contact with the panel 5 through the support base penetrating part 31 by the first driving part 42 of the mask driving part 41 (see FIG. 7). Then, power is applied to the backlight 10 and the front light 32, and an electrical signal is applied to the electrode 8 of the panel 5 through the pin 36 of the pin board 35 to form an image in the active area 6 of the panel 5. Thereafter, the active area inspection can be performed so that the active area 6 of the panel 5 is photographed by the camera 61 to determine whether or not the active area 6 is defective. Then, the first driving unit 42 and the second driving unit 45 of the mask driving unit 41 are sequentially operated to move the mask 33 and the pin board 35 in the state shown in FIG. Then, the centering unit 20 is driven to detach the centering member 21 from the panel 5. Thereafter, the entire surface including the active area 6 and the edge area 7 of the panel 5 can be photographed by the camera 61 to perform an appearance inspection so as to determine whether or not the appearance of the panel 5 is defective.

これによって、本発明によるパネル検査装置はパネル５のアクティブ領域検査及び外観検査を一つの装置で遂行できるようにすることによって構造を単純化させることができ、検査時間を減らすことができる。   Accordingly, the panel inspection apparatus according to the present invention can simplify the structure and reduce the inspection time by enabling the active area inspection and the appearance inspection of the panel 5 to be performed by one apparatus.

そして、本発明によるパネル検査装置はセンタリングユニットによって多様な大きさのパネルを支持することができる。   The panel inspection apparatus according to the present invention can support panels of various sizes by the centering unit.

従来のパネルのアクティブ領域検査用パネル検査装置の概略図である。It is the schematic of the panel inspection apparatus for the active area inspection of the conventional panel. 従来のパネルの外観検査用パネル検査装置の概略図である。It is the schematic of the panel inspection apparatus for the conventional appearance inspection of a panel. 本発明によるパネル検査装置の概略図である。It is the schematic of the panel inspection apparatus by this invention. 本発明の一例によるパネル検査装置の斜視図である。It is a perspective view of the panel inspection apparatus by an example of this invention. 図４のパネル検査装置の作動斜視図である。It is an operation | movement perspective view of the panel inspection apparatus of FIG. 図４のパネル検査装置の作動斜視図である。It is an operation | movement perspective view of the panel inspection apparatus of FIG. 図４のパネル検査装置の作動斜視図である。It is an operation | movement perspective view of the panel inspection apparatus of FIG.

符号の説明Explanation of symbols

１ パネル検査装置
５ パネル
８ 電極
９ ベース部材
１０ バックライト
１５ 保護板
２０ センタリングユニット
２１ センタリング部材
２３ センタリング部材駆動部
３０ 支持台
３２ フロントライト
３３ マスク
３５ ピンボード
４１ マスク駆動部
４２ 第１駆動部
４５ 第２駆動部
５１ 支持台駆動部
６０ 撮影部
６１ カメラ
DESCRIPTION OF SYMBOLS 1 Panel inspection apparatus 5 Panel 8 Electrode 9 Base member 10 Backlight 15 Protection board 20 Centering unit 21 Centering member 23 Centering member drive part 30 Support stand 32 Front light 33 Mask 35 Pin board 41 Mask drive part 42 1st drive part 45 1st 2 drive part 51 support stand drive part 60 imaging part 61 camera

Claims (8)

パネルを検査するためのパネル検査装置において、
前記パネルを支持するセンタリングユニットと、
前記センタリングユニットに支持された前記パネルの背面に光を供給するバックライトと、
前記パネルに対して移動可能に設けられ、前記パネルのアクティブ領域が露出されるように前記パネルの周縁である縁領域をカバーするマスクと、
前記パネルに対して移動可能に設けられ、前記パネルに電気的な信号を印加するように前記パネルの電極と接触可能に設けられたピンボードと、
前記パネルの前方に設けられ、前記マスクによってカバーされた前記パネルのアクティブ領域及び前記マスクの移動によって露出された前記パネルの全体面のうちのいずれか一つを撮影する撮影部と、を含むことを特徴とするパネル検査装置。 In panel inspection equipment for inspecting panels,
A centering unit for supporting the panel;
A backlight for supplying light to the back surface of the panel supported by the centering unit;
A mask that is movably provided with respect to the panel and covers an edge region that is a peripheral edge of the panel so that an active region of the panel is exposed;
A pin board provided so as to be movable with respect to the panel, and provided so as to be in contact with an electrode of the panel so as to apply an electrical signal to the panel;
An imaging unit that is provided in front of the panel and that images any one of an active area of the panel covered by the mask and an entire surface of the panel exposed by movement of the mask. Panel inspection device characterized by 前記センタリングユニットは、前記パネルを、前記マスク、前記ピンボード及び前記撮影部のうちの少なくとも一つの中心に位置するように支持することを特徴とする請求項１に記載のパネル検査装置。   The panel inspection apparatus according to claim 1, wherein the centering unit supports the panel so as to be positioned at a center of at least one of the mask, the pinboard, and the imaging unit. 前記センタリングユニットは、
前記パネルの両側面と接触可能に設けられた少なくとも一対のセンタリング部材と、
前記一対のセンタリング部材が前記パネルに接触して支持するように前記一対のセンタリング部材を移動させるセンタリング部材駆動部と、を含むことを特徴とする請求項２に記載のパネル検査装置。 The centering unit is
At least a pair of centering members provided in contact with both side surfaces of the panel;
The panel inspection apparatus according to claim 2, further comprising: a centering member driving unit that moves the pair of centering members so that the pair of centering members contact and support the panel. 前記パネルの前方に設けられて前記パネルの前面に光を供給するフロントライトをさらに含むことを特徴とする請求項１に記載のパネル検査装置。   The panel inspection apparatus according to claim 1, further comprising a front light that is provided in front of the panel and supplies light to a front surface of the panel. 前記バックライトに対して移動可能に前記パネルの前方に設けられた支持台をさらに含み、
前記支持台は前記フロントライトを支持し、前記マスク及び前記ピンボードを移動可能に支持することを特徴とする請求項４に記載のパネル検査装置。 A support base provided in front of the panel so as to be movable with respect to the backlight;
The panel inspection apparatus according to claim 4, wherein the support base supports the front light and movably supports the mask and the pin board. 前記支持台に対して前記マスク及び前記ピンボードを一体に移動するように支持するマスク駆動部をさらに含み、
前記マスク駆動部は前記マスク及び前記ピンボードを前記支持台の板面に起立した方向に移動させる第１駆動部と、前記マスク及び前記ピンボードを前記支持台の板面と並んだ方向に移動させる第２駆動部と、を含むことを特徴とする請求項５に記載のパネル検査装置。 A mask driving unit for supporting the mask and the pinboard so as to move integrally with the support;
The mask driving unit moves the mask and the pin board in a direction standing on the plate surface of the support base, and moves the mask and the pin board in a direction aligned with the plate surface of the support base. The panel inspection apparatus according to claim 5, further comprising a second driving unit. 前記マスクは前記パネルの前面縁領域と接触可能に設けられたことを特徴とする請求項１に記載のパネル検査装置。   The panel inspection apparatus according to claim 1, wherein the mask is provided so as to be in contact with a front edge region of the panel. 前記バックライト及び前記パネルの間に設けられた保護板をさらに含むことを特徴とする請求項１に記載のパネル検査装置。
The panel inspection apparatus according to claim 1, further comprising a protective plate provided between the backlight and the panel.
JP2005187153A 2004-11-26 2005-06-27 Panel inspection device Active JP4031491B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104019961A (en) * 2014-05-29 2014-09-03 京东方光科技有限公司 Backlight source detection device
WO2015100983A1 (en) * 2013-12-30 2015-07-09 京东方科技集团股份有限公司 Direct-lit backlight module testing device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63246795A (en) * 1987-04-01 1988-10-13 日本電信電話株式会社 Display tester
JPH0783794A (en) * 1993-09-14 1995-03-31 Hitachi Electron Eng Co Ltd Positioning mechanism of large-sized liquid crystal panel
JPH0936208A (en) * 1995-07-14 1997-02-07 Tokyo Electron Ltd Inspection device
JP2000337999A (en) * 1999-05-27 2000-12-08 Minato Electronics Inc Method and apparatus for automatically detecting image quality of display element using mask plate
JP2003065962A (en) * 2001-08-28 2003-03-05 Hitachi Industries Co Ltd Apparatus and method for inspecting liquid crystal panel substrate
JP2003194669A (en) * 2001-12-27 2003-07-09 Seiko Epson Corp Inspection method and inspection device for liquid crystal device
JP2004287368A (en) * 2003-01-27 2004-10-14 Tokyo Electron Ltd Inspecting device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63246795A (en) * 1987-04-01 1988-10-13 日本電信電話株式会社 Display tester
JPH0783794A (en) * 1993-09-14 1995-03-31 Hitachi Electron Eng Co Ltd Positioning mechanism of large-sized liquid crystal panel
JPH0936208A (en) * 1995-07-14 1997-02-07 Tokyo Electron Ltd Inspection device
JP2000337999A (en) * 1999-05-27 2000-12-08 Minato Electronics Inc Method and apparatus for automatically detecting image quality of display element using mask plate
JP2003065962A (en) * 2001-08-28 2003-03-05 Hitachi Industries Co Ltd Apparatus and method for inspecting liquid crystal panel substrate
JP2003194669A (en) * 2001-12-27 2003-07-09 Seiko Epson Corp Inspection method and inspection device for liquid crystal device
JP2004287368A (en) * 2003-01-27 2004-10-14 Tokyo Electron Ltd Inspecting device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015100983A1 (en) * 2013-12-30 2015-07-09 京东方科技集团股份有限公司 Direct-lit backlight module testing device
US9740033B2 (en) 2013-12-30 2017-08-22 Boe Technology Group Co., Ltd. Test apparatus of a direct-light-type backlight module
CN104019961A (en) * 2014-05-29 2014-09-03 京东方光科技有限公司 Backlight source detection device
US9523647B2 (en) 2014-05-29 2016-12-20 Boe Technology Group Co., Ltd. Backlight inspection equipment

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