TWI518404B - Liquid crystal panel inspection apparatus - Google Patents

Liquid crystal panel inspection apparatus Download PDF

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TWI518404B
TWI518404B TW103111926A TW103111926A TWI518404B TW I518404 B TWI518404 B TW I518404B TW 103111926 A TW103111926 A TW 103111926A TW 103111926 A TW103111926 A TW 103111926A TW I518404 B TWI518404 B TW I518404B
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liquid crystal
crystal panel
inspection
light
oblique illumination
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TW103111926A
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TW201447422A (en
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水野邦廣
藏所啓一
菊田誠
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日本麥克隆尼股份有限公司
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Description

液晶面板檢查裝置 LCD panel inspection device

本發明係有關於一種液晶面板檢查裝置,其係利用攝像裝置進行攝影且以背光(backlight)照射未組裝有偏光板之狀態的液晶面板,且從其影像判斷液晶面板之瑕疵位址(defect address)。 The present invention relates to a liquid crystal panel inspection apparatus which performs photographing by an image pickup apparatus and illuminates a liquid crystal panel in a state in which a polarizing plate is not assembled by a backlight, and determines a defect address of the liquid crystal panel from the image thereof (defect address) ).

在該種檢查裝置,有一種如專利文獻1所記載之檢查裝置。如第7圖所示,該種習知之檢查裝置係具備有非點亮檢查部A、及點亮檢查部B。在非點亮檢查部A中,未組裝有偏光板之液晶面板1係在未對液晶面板1之各畫素施加有電壓之非點亮(未驅動)狀態下接受檢查。此外,在點亮檢查部B中,液晶面板1係在對其各畫素經介探針單元2而施加有電壓之點亮(驅動)狀態下接受檢查。 In such an inspection apparatus, there is an inspection apparatus described in Patent Document 1. As shown in Fig. 7, the conventional inspection apparatus includes a non-lighting inspection unit A and a lighting inspection unit B. In the non-lighting inspection unit A, the liquid crystal panel 1 in which the polarizing plate is not mounted is inspected in a state where the voltage is not applied to each of the pixels of the liquid crystal panel 1 (not driven). Further, in the lighting inspection unit B, the liquid crystal panel 1 is inspected in a state in which the respective pixels pass through the probe unit 2 with a voltage applied thereto (driving).

在非點亮檢查部A中,一對的偏光板4a、4b係配置在工作台3上之液晶面板1的上方及下方。背光光源5係通過下方之偏光板4b對液晶面板1之下表面1b照射與此下表面1b呈直角之光。於工作台3中,鏡6係垂直地保持,使來自背光光源5之光的一部分藉由鏡6之反 射而朝向液晶面板1之周邊,藉此使液晶面板1之周邊部的光量增大。 In the non-lighting inspection unit A, a pair of polarizing plates 4a and 4b are disposed above and below the liquid crystal panel 1 on the table 3. The backlight source 5 irradiates the lower surface 1b of the liquid crystal panel 1 with light at a right angle to the lower surface 1b through the lower polarizing plate 4b. In the table 3, the mirror 6 is held vertically, so that a part of the light from the backlight source 5 is reversed by the mirror 6. The light is directed toward the periphery of the liquid crystal panel 1, whereby the amount of light in the peripheral portion of the liquid crystal panel 1 is increased.

液晶面板1係在接收該背光光源5之光的狀態下,透過上方之偏光板4a並藉由攝像裝置7而攝影上表面1a。一對的偏光板4a、4b係將偏光方向配置成彼此平行。此外,穿透非點亮狀態之液晶面板1之光,係於穿透之間相位90度旋轉。因此,除非於經過液晶面板1之光路存在散射因子,否則穿透液晶面板1之背光光源5的光之行進係被偏光板4a所遮斷。結果,來自背光光源5之光,不會被攝像裝置7擷取,而可由攝像裝置7獲得黑畫面。然而,當於液晶面板1有瑕疵存在、或於液晶面板1之表面1a、1b有異物附著時,來自背光光源5之強光會因瑕疵及/或異物而產生散射。由於散射光之一部分係穿透偏光板4a,故藉由攝像裝置7,前述瑕疵及/或異物被觀察為黑畫面上之亮點。 The liquid crystal panel 1 receives the light of the backlight source 5, passes through the upper polarizing plate 4a, and photographs the upper surface 1a by the imaging device 7. The pair of polarizing plates 4a and 4b are arranged such that the polarization directions are parallel to each other. Further, the light that penetrates the liquid crystal panel 1 in the non-lighting state is rotated by a phase of 90 degrees between penetrations. Therefore, unless there is a scattering factor in the optical path passing through the liquid crystal panel 1, the light traveling through the backlight source 5 of the liquid crystal panel 1 is blocked by the polarizing plate 4a. As a result, the light from the backlight source 5 is not captured by the image pickup device 7, but a black screen can be obtained by the image pickup device 7. However, when the liquid crystal panel 1 has flaws or foreign matter adheres to the surfaces 1a and 1b of the liquid crystal panel 1, the strong light from the backlight source 5 is scattered due to flaws and/or foreign matter. Since a part of the scattered light penetrates the polarizing plate 4a, the above-mentioned flaws and/or foreign matter are observed as bright spots on the black screen by the image pickup device 7.

於液晶面板1之表面1a、1b所附著之異物,例如由於藉由清洗即能夠去除,故必須將因異物所產生之亮點自考慮對象予以去除。因此,液晶面板1係接著在相同之非點亮檢查部A接受採用傾斜照明光源8之非點亮檢查。在此非點亮檢查中,點亮了組裝於工作台3之傾斜照明光源8,以取代背光光源5。此外,鏡6係以不會對來自傾斜照明光源8之光造成妨礙之方式,收容在第7圖之非點亮檢查部A中以虛線顯示之水平的收容位置。工作台3上之液晶面板1並非通過偏光板4b而是從下表面1b接收 來自傾斜照明光源8之斜照射光。該斜照射光不會直接到達至鏡6,藉由於液晶面板1之表面1a、1b所附著之異物而受到散射。然而,來自傾斜照明光源8之斜照射光係根據液晶面板1內之瑕疵,不會接收如前述異物程度那麼強之散射。結果,在傾斜照明光源8下,在通過偏光板4a並藉由攝像裝置7所攝影之液晶面板1之表面1a的黑畫面中,根據因前述異物所產生之亮點、及因前述瑕疵所產生之亮點的亮度差,即能夠辨別因前述異物所產生之亮點、及因前述瑕疵所產生之亮點。 The foreign matter adhering to the surfaces 1a and 1b of the liquid crystal panel 1 can be removed by, for example, cleaning. Therefore, it is necessary to remove the bright spots generated by the foreign matter from the object to be considered. Therefore, the liquid crystal panel 1 next receives the non-lighting inspection using the oblique illumination light source 8 in the same non-lighting inspection unit A. In this non-lighting inspection, the oblique illumination light source 8 assembled to the table 3 is lit up instead of the backlight source 5. Further, the mirror 6 is housed in a horizontal storage position which is displayed by a broken line in the non-lighting inspection portion A of Fig. 7 so as not to obstruct the light from the oblique illumination light source 8. The liquid crystal panel 1 on the stage 3 is received not from the polarizing plate 4b but from the lower surface 1b. Oblique illumination from oblique illumination source 8. The obliquely irradiated light does not directly reach the mirror 6, and is scattered by foreign matter adhering to the surfaces 1a, 1b of the liquid crystal panel 1. However, the oblique illumination light from the oblique illumination source 8 does not receive as strong a scattering as the aforementioned foreign matter depending on the flaws in the liquid crystal panel 1. As a result, under the oblique illumination light source 8, in the black screen of the surface 1a of the liquid crystal panel 1 which is photographed by the image pickup device 7 through the polarizing plate 4a, the bright spots due to the foreign matter and the defects caused by the aforementioned flaws are generated. The difference in brightness of the bright spots, that is, the bright spots caused by the foreign matter and the bright spots caused by the aforementioned flaws can be discerned.

因此,根據利用在背光光源5下之非點亮檢查部A所獲得的亮點資料、與利用在傾斜照明光源8下之非點亮檢查部A所獲得的亮點資料之比較,即能夠判斷任一亮點是否為因真實之瑕疵(畫素瑕疵)所產生之亮點。 Therefore, it is possible to judge either of the highlight data obtained by the non-lighting inspection unit A under the backlight source 5 and the highlight data obtained by the non-lighting inspection unit A under the oblique illumination source 8. Whether the highlight is the highlight of the real 瑕疵 (画素瑕疵).

然而,在利用前述之非點亮檢查部A之兩檢查中,為了在黑畫面上顯示亮點,無法迅速地決定判斷為屬於因瑕疵者所產生之亮點的畫素位址,即無法迅速地決定瑕疵之正確的畫素位址。 However, in the two inspections using the non-lighting inspection unit A described above, in order to display a bright spot on a black screen, it is not possible to quickly determine a pixel address that is determined to belong to a bright spot generated by the latter, that is, it cannot be quickly determined. The correct pixel address.

因此,為了求得在利用前述之非點亮檢查部A之兩檢查中判斷為瑕疵之亮點的畫素位址,液晶面板1係利用點亮檢查部B,在經介探針單元2而施加電壓之點亮(驅動)狀態下接受檢查。在點亮檢查部B中,液晶面板1係在透過與偏光板4b同樣之偏光板4b,而接收來自背光光源5′之光的狀態下,通過與偏光板4a同樣之偏光板4a′藉由攝像裝置7′而進行攝影。藉由該攝影,前述 瑕疵及異物作為黑點被加以擷取於液晶面板1之點亮畫面,此外,於前述點亮畫面擷取用以界定各畫素之黑色矩陣(black matrix)。因此,可容易地自攝像裝置7′之攝影畫面讀取與因前述瑕疵所產生之亮點相對應之黑點的位址,藉此容易地得知真實之瑕疵的畫素位址。 Therefore, in order to obtain the pixel address which is determined to be a bright spot of the 瑕疵 in the two inspections of the non-lighting inspection unit A, the liquid crystal panel 1 is applied to the transmissive probe unit 2 by the lighting inspection unit B. The voltage is checked (driven) and checked. In the lighting inspection unit B, the liquid crystal panel 1 passes through the polarizing plate 4b similar to the polarizing plate 4b, and receives the light from the backlight source 5', and passes through the polarizing plate 4a' similar to the polarizing plate 4a. The imaging device 7' performs imaging. With the photography, the foregoing The black and white matter is extracted as a black dot on the lighting screen of the liquid crystal panel 1, and a black matrix for defining each pixel is extracted from the lighting screen. Therefore, the address of the black dot corresponding to the bright spot generated by the aforementioned chirp can be easily read from the photographing screen of the image pickup apparatus 7', whereby the real pixel address can be easily known.

結果,根據該瑕疵之畫素位址,能夠恰當地修理瑕疵畫素。 As a result, the 瑕疵 瑕疵 。 can be properly repaired according to the 画 画 画 。 。 。.

然而,在前述之習知的液晶面板檢查裝置中,在各個非點亮檢查部A、與點亮檢查部B需要有構成各檢查部之裝置的設置空間,而使佔地面積(footprint)擴大。此外,必須在兩檢查部A、B間移送液晶面板1,且為了使在非點亮檢查部A所獲得之亮點與在點亮檢查部B所獲得之黑點相互對應,必須進行液晶面板1之正確配置,故不利於產距時間(tact time)之縮短化。 However, in the above-described liquid crystal panel inspection apparatus, the installation space of the apparatus constituting each inspection unit is required for each of the non-lighting inspection unit A and the lighting inspection unit B, and the footprint is enlarged. . In addition, it is necessary to transfer the liquid crystal panel 1 between the two inspection units A and B, and in order to make the bright spot obtained by the non-lighting inspection unit A and the black point obtained by the lighting inspection unit B correspond to each other, the liquid crystal panel 1 must be performed. The correct configuration is not conducive to shortening the tact time.

(先前技術文獻) (previous technical literature)

(專利文獻) (Patent Literature)

專利文獻1:日本特開2008-40201號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 2008-40201

因此,本發明之目的在於提供一種液晶面板檢查裝置,其係排除習知之前述之缺點、精簡、迅速且正確地特定液晶面板之瑕疵位址。 SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a liquid crystal panel inspection apparatus which eliminates the aforementioned disadvantages, and simplifies, quickly and correctly specifies the address of a liquid crystal panel.

為了解決習知之佔地面積之問題及防止液晶 面板在兩檢查部A、B間之移送,可考慮將點亮檢查部B之探針單元2組裝至非點亮檢查部A。然而,即便僅將點亮檢查部B之探針單元2組裝至非點亮檢查部A,藉由來自傾斜照明光源8之斜照射亦無法使適當之斜照射光充分地到達至與液晶面板1之配置有傾斜照明光源之側為相反側之周邊部,在液晶面板1之周邊部會缺乏適當之照射光。該不充分之斜照射光,會成為利用在傾斜照明光源8下之非點亮檢查部A進行亮點之迅速且容易之判斷作業的阻礙。 In order to solve the problem of the known floor space and prevent liquid crystal When the panel is transferred between the two inspection units A and B, it is conceivable to assemble the probe unit 2 of the lighting inspection unit B to the non-lighting inspection unit A. However, even if only the probe unit 2 of the lighting inspection unit B is assembled to the non-lighting inspection unit A, the oblique oblique illumination from the oblique illumination light source 8 cannot sufficiently reach the oblique illumination light to the liquid crystal panel 1 The side where the side of the oblique illumination light source is disposed is the peripheral portion on the opposite side, and the appropriate illumination light is lacking in the peripheral portion of the liquid crystal panel 1. This insufficient oblique illumination light is an obstacle to the rapid and easy judgment of the bright spot by the non-lighting inspection unit A under the oblique illumination light source 8.

因此,本發明係在該傾斜照明光源光下之非點亮檢查中,為了謀求在液晶面板之周邊部之斜照射光的增強,基本上其特徵於:在工作台內設置反射手段,該反射手段係以使來自傾斜照明光源之斜照射光不經過配置於液晶面板之下方之偏光板而以適當之入射角入射至前述液晶面板之方式,將斜照射光之一部分引導至前述液晶面板之下表面的周邊部。 Therefore, in the non-lighting inspection under the light of the oblique illumination source, the present invention is basically characterized in that a reflection means is provided in the table in order to enhance the oblique illumination light in the peripheral portion of the liquid crystal panel. The means for directing oblique illumination light from the oblique illumination source to the liquid crystal panel at a suitable incident angle without passing through a polarizing plate disposed below the liquid crystal panel, and directing a portion of the oblique illumination light to the liquid crystal panel The peripheral part of the surface.

亦即,本發明係用以檢查無偏光板之液晶面板的液晶面板檢查裝置,其係包含有:升降台;工作台,配置於該升降台上,並具備有具有整體呈矩形之開口部的框體,且為了在前述升降台之上方保持前述液晶面板而利用前述框體承受該液晶面板的緣部;第1及第2偏光板,配置於前述工作台上之液晶面板之上方及下方,且彼此將偏光方向保持為預定之關係;背光單元,利用通過前述第2偏光板而自前述液晶面板之下表面與該下表面大致呈直 角之照射光照射前述工作台上之前述液晶面板;傾斜照明光源,用以自前述下表面之下方以角度方向照射前述工作台上之前述液晶面板;探針單元,為了在前述升降台之上升位置進行前述液晶面板之點亮檢查而用來對該液晶面板之畫素施加電壓;攝像裝置,用以在選擇性接收來自前述背光單元之前述呈直角之照射光及來自前述傾斜照明光源之斜照射光中任一者之狀態下,通過前述第1偏光板對前述液晶面板之上表面進行攝影;以及反射手段,配置於前述工作台內,以使來自前述傾斜照明光源之斜照射光不經過前述第2偏光板而以適當之入射角入射至前述液晶面板之方式,將前述斜照射光之一部分引導至前述液晶面板之下表面的周邊部。 That is, the present invention is a liquid crystal panel inspection apparatus for inspecting a liquid crystal panel without a polarizing plate, comprising: a lifting platform; a table disposed on the lifting platform and having an opening having an overall rectangular shape a frame body that receives the edge of the liquid crystal panel by the frame body in order to hold the liquid crystal panel above the lifting platform; and the first and second polarizing plates are disposed above and below the liquid crystal panel on the table. And maintaining the polarization direction in a predetermined relationship with each other; the backlight unit is substantially straight from the lower surface of the liquid crystal panel and the lower surface by the second polarizing plate The illuminating light of the corner illuminates the liquid crystal panel on the working table; the illuminating light source is configured to illuminate the liquid crystal panel on the working table in an angular direction from below the lower surface; the probe unit is raised in the lifting platform Positioning a lighting check of the liquid crystal panel to apply a voltage to a pixel of the liquid crystal panel; and an image pickup device for selectively receiving the oblique light from the backlight unit and the oblique light from the oblique illumination source In the state of any of the illumination light, the upper surface of the liquid crystal panel is imaged by the first polarizing plate; and the reflecting means is disposed in the table so that the oblique illumination light from the oblique illumination source does not pass through The second polarizing plate is guided to the liquid crystal panel at an appropriate incident angle, and guides one of the obliquely irradiated lights to a peripheral portion of the lower surface of the liquid crystal panel.

根據本願發明之液晶面板檢查裝置,能夠在來自設置於單一之升降台上之背光單元的照射光下進行非點亮檢查,且取代來自前述背光之照射光而在前述傾斜照明光源下進行非點亮檢查,又在來自背光單元之照射光下進行使用前述探針單元之點亮檢查。因此,不需要如習知技術般將液晶面板從非點亮檢查部A移送至點亮檢查部B,即能夠迅速地進行一連串的檢查,此外不需進行在兩檢查部A、B之對位。因此,能夠以精簡之裝置構成迅速地進行檢查,且能夠實現產距時間的縮短化。 According to the liquid crystal panel inspection apparatus of the present invention, the non-lighting inspection can be performed under the illumination light from the backlight unit provided on the single lifting platform, and the non-pointing can be performed under the oblique illumination light source instead of the illumination light from the backlight. The light inspection is performed, and the lighting inspection using the aforementioned probe unit is performed under the illumination light from the backlight unit. Therefore, it is not necessary to transfer the liquid crystal panel from the non-lighting inspection unit A to the lighting inspection unit B as in the prior art, that is, it is possible to quickly perform a series of inspections, and it is not necessary to perform the alignment between the two inspection units A and B. . Therefore, the inspection can be quickly performed with a simplified device configuration, and the production time can be shortened.

再者,在前述傾斜照明光源光下之非點亮檢查中,前述反射手段係以使來自前述傾斜照明光源之斜照射光不經過第2偏光板而以適當之入射角入射至前述液晶 面板之方式,將前述斜照射光之一部分引導至前述液晶面板之下表面。因此,在前述傾斜照明光源光下之非點亮檢查中不會發生斜照射光在前述液晶面板之周邊部的光量不足之情形。因此,可解決因該光量不足所造成之不良影響,且利用在前述傾斜照明光源光下之非點亮檢查能夠進行亮點之迅速且容易之判斷作業。 Further, in the non-lighting inspection under the oblique illumination light source, the reflection means is configured such that the oblique illumination light from the oblique illumination source is incident on the liquid crystal at an appropriate incident angle without passing through the second polarizing plate. In the manner of a panel, one of the aforementioned oblique illumination lights is guided to the lower surface of the liquid crystal panel. Therefore, in the non-lighting inspection under the light of the oblique illumination source, the amount of oblique illumination light in the peripheral portion of the liquid crystal panel does not occur. Therefore, it is possible to solve the problem of the rapid and easy judgment of the bright spot by the non-lighting inspection under the light of the oblique illumination source by the adverse effect caused by the insufficient amount of light.

為了要能夠進行對於與前述液晶面板之大小相對應之該液晶面板之下表面的均勻之斜照射,可將前述反射手段以繞著支持於前述工作台之軸之方式可轉動地加以支持,此外,藉由用以繞著前述軸轉動之作動裝置,可將前述反射手段保持在適當之角度。 In order to enable uniform oblique illumination of the lower surface of the liquid crystal panel corresponding to the size of the liquid crystal panel, the reflection means may be rotatably supported around the axis supported by the table, in addition to The aforementioned reflecting means can be maintained at an appropriate angle by means of an actuating means for rotating about the aforementioned axis.

前述反射手段係藉由前述作動裝置來調整角度,俾使利用該反射手段反射而朝入射至前述液晶面板之前述下表面之入射角設定成60度以上未達90度。 In the reflection means, the angle is adjusted by the actuator, and the incident angle incident on the lower surface of the liquid crystal panel by the reflection means is set to 60 degrees or more and less than 90 degrees.

前述反射手段之前述軸係能以沿著前述工作台之前述矩形之開口部之彼此相對向的一對邊之一方邊之方式加以配置,而前述傾斜照明光源係可為了沿著前述一對邊之另一方邊伸長而配置。前述反射手段及傾斜照明源係以彼此成對之方式,配置於前述矩形開口部之4邊的各邊。 The shaft system of the reflecting means can be disposed along one side of a pair of sides facing the opening of the rectangular opening of the table, and the oblique illumination source can be along the pair of sides The other side is stretched and arranged. The reflection means and the oblique illumination source are disposed on each of four sides of the rectangular opening portion so as to be paired with each other.

前述反射手段係可由經介在上緣呈水平之軸而支持於前述工作台的反射鏡所構成。此時,前述作動裝置係為了以所期望之前述豎起角度來保持前述反射鏡操作性地連結在前述反射鏡。 The reflection means may be constituted by a mirror supported by the stage via a horizontal axis on the upper edge. In this case, the actuating device is operatively coupled to the mirror in order to maintain the mirror at a desired erect angle.

前述作動裝置可包含有具備藉由電動馬達而能夠旋轉之螺栓構件、及螺合於該螺栓構件之螺帽構件的滾珠螺桿機構和線性馬達之任一者。 The actuating device may include any one of a ball screw mechanism including a bolt member rotatable by an electric motor and a nut member screwed to the bolt member.

前述傾斜照明光源係能以使其高度位置位於高於前述第2偏光板之高度位置之方式支持於前述升降台。此外,前述傾斜照明光源係可在前述升降台上經介支持於該升降台之前述背光用的基底而被支持於前述升降台。 The oblique illumination light source can be supported by the lifting platform such that its height position is higher than the height position of the second polarizing plate. Further, the oblique illumination light source may be supported by the lifting platform via a base for the backlight of the lifting platform on the lifting platform.

前述工作台係可經介間隔體構件並自前述升降台隔開間隔而加以保持。此時,前述傾斜照明光源係可配置於藉由前述間隔體構件所界定之前述工作台與前述升降台之間的空間。 The aforementioned table can be held by the spacer members and spaced apart from the lifting platform. In this case, the oblique illumination source may be disposed in a space between the table defined by the spacer member and the lifting platform.

前述工作台之前述框體係可將前述開口部之各邊之尺寸調整成適合於大小不同之液晶面板。如前述之框體係例如以能夠平行移動於各構件之方式組裝成井字狀而可實現。 The frame system of the table can adjust the size of each side of the opening to a liquid crystal panel suitable for different sizes. The frame system as described above can be realized, for example, by being assembled in a shape of a well in such a manner that it can move in parallel to each member.

為了取代採用前述之能夠調整之框體,而可將該工作台以能夠拆卸的方式支持於前述升降台上,俾使該工作台能夠替換成設置有適合於前述液晶面板之前述開口部的工作台。 In order to replace the frame that can be adjusted as described above, the table can be detachably supported on the lifting platform so that the table can be replaced with a work suitable for the opening of the liquid crystal panel. station.

當採用如前述之依據液晶面板之大小而能夠調整前述開口部之工作台、或能夠替換成設置有適合於前述液晶面板之前述開口部的工作台之構成時,較佳為組合下述構成:將前述反射手段以繞著支持於前述工作台之軸 之方式可轉動地加以支持,且藉由用以繞著前述軸轉動之作動裝置,將前述反射手段保持成適當之角度。這是由於不論液晶面板之大小如何皆能在適當之入射角範圍內以斜照射光均勻地照射液晶面板之故。 When a table that can adjust the opening according to the size of the liquid crystal panel or a table that is provided with the opening suitable for the opening of the liquid crystal panel is used, it is preferable to combine the following configurations: The aforementioned reflecting means is wound around the axis supported by the aforementioned workbench The manner is rotatably supported, and the aforementioned reflecting means is maintained at an appropriate angle by means of an actuating means for rotating about the aforementioned axis. This is because the liquid crystal panel can be uniformly irradiated with oblique illumination light within a suitable incident angle range regardless of the size of the liquid crystal panel.

根據本發明,如前述之方式,由於無須在兩個檢查部間移送液晶面板即可在單一之裝置上進行,故可謀求檢查裝置之精簡化,且可謀求產距時間之縮短化。又,由於利用在傾斜照明光源光下之非點亮檢查能夠進行亮點之迅速且容易之判斷作業,故能夠使產距時間進一步縮短化。 According to the present invention, since the liquid crystal panel can be transferred between the two inspection units without being transferred between the two inspection units, it is possible to simplify the inspection apparatus and to shorten the production time. Moreover, since the non-lighting inspection under the light of the oblique illumination source can perform the quick and easy judgment operation of the bright spot, the production time can be further shortened.

1、12、12′‧‧‧液晶面板 1,12,12'‧‧‧ LCD panel

1a、1b‧‧‧表面 1a, 1b‧‧‧ surface

2、40‧‧‧探針單元 2, 40‧‧‧ probe unit

3、16、16′‧‧‧工作台 3, 16, 16' ‧ ‧ workbench

5、5′‧‧‧背光光源 5, 5'‧‧‧ Backlight source

6‧‧‧鏡 6‧‧ ‧ mirror

7、7′‧‧‧攝像裝置 7, 7'‧‧‧ camera

8、32‧‧‧傾斜照明光源 8, 32‧‧‧ oblique lighting source

10‧‧‧液晶面板檢查裝置 10‧‧‧LCD panel inspection device

12a、12a′‧‧‧液晶面板之上表面 12a, 12a'‧‧‧ upper surface of the LCD panel

12b、12b′‧‧‧液晶面板之下表面 12b, 12b'‧‧‧ LCD panel lower surface

14‧‧‧升降台 14‧‧‧ Lifting platform

18‧‧‧攝像手段 18‧‧‧Photography

18a‧‧‧攝影機 18a‧‧‧ camera

20‧‧‧背光單元 20‧‧‧Backlight unit

20a‧‧‧光放射面 20a‧‧‧Light radiation surface

20b‧‧‧單元基底 20b‧‧‧ unit base

22a、22b、4a、4b、4a′‧‧‧偏光板 22a, 22b, 4a, 4b, 4a'‧‧‧ polarizing plates

24‧‧‧光擴散板 24‧‧‧Light diffuser

26‧‧‧間隔體 26‧‧‧ spacers

28‧‧‧框體 28‧‧‧ frame

28a、28a′‧‧‧開口部 28a, 28a'‧‧‧ openings

30‧‧‧空間 30‧‧‧ Space

32a‧‧‧托架 32a‧‧‧ bracket

34‧‧‧反射手段 34‧‧‧Reflex means

34a‧‧‧反射面 34a‧‧‧reflecting surface

36‧‧‧軸 36‧‧‧Axis

38‧‧‧作動裝置 38‧‧‧Acoustic device

38′‧‧‧作動裝置 38'‧‧‧ actuation device

40a‧‧‧探針 40a‧‧‧Probe

42‧‧‧影像處理裝置 42‧‧‧Image processing device

44a、44b、44c、44d‧‧‧亮點 44a, 44b, 44c, 44d‧‧‧ Highlights

46‧‧‧黑色矩陣 46‧‧‧Black matrix

A‧‧‧非點亮檢查部 A‧‧‧Non-lighting inspection department

B‧‧‧點亮檢查部 B‧‧‧Lighting inspection department

第1圖係概略性地顯示本發明之液晶面板檢查裝置的剖面圖。 Fig. 1 is a cross-sectional view schematically showing a liquid crystal panel inspection device of the present invention.

第2圖係顯示處於在背光光源光下之非點亮(非驅動)檢查步驟之液晶面板檢查裝置的剖面圖。 Fig. 2 is a cross-sectional view showing a liquid crystal panel inspection apparatus which is in a non-lighting (non-driving) inspection step under backlight light.

第3圖係顯示處於在傾斜照明光源光下之非點亮(非驅動)檢查步驟之液晶面板檢查裝置的剖面圖。 Figure 3 is a cross-sectional view showing a liquid crystal panel inspection apparatus in a non-lighting (non-driving) inspection step under oblique illumination source light.

第4圖係顯示處於在背光光源光下之點亮(驅動)檢查步驟之液晶面板檢查裝置的剖面圖。 Fig. 4 is a cross-sectional view showing a liquid crystal panel inspection apparatus which is in a lighting (driving) inspection step under backlight light.

第5圖係顯示在各檢查步驟中藉由攝像裝置所獲得之攝像畫面,第5圖(a)係於第2圖所示之在背光光源光下之非點亮(非驅動)檢查步驟所獲得之攝像畫面,第5圖 (b)係於第3圖所示之在傾斜照明光源光下之非點亮(非驅動)檢查步驟所獲得之攝像畫面,而第5圖(c)係於第4圖所示之在背光光源光下之點亮(驅動)檢查步驟所獲得之攝像畫面。 Fig. 5 is a view showing an imaging screen obtained by an imaging device in each inspection step, and Fig. 5(a) is a non-lighting (non-driving) inspection step under backlight light source shown in Fig. 2; Acquired camera image, Figure 5 (b) The image obtained by the non-lighting (non-driving) inspection step under the oblique illumination source light shown in Fig. 3, and Fig. 5(c) is the backlight shown in Fig. 4. The image of the camera obtained by the lighting (drive) inspection step under the light source.

第6圖係顯示本發明之液晶面板檢查裝置之其他例之與第3圖同樣之剖面圖。 Fig. 6 is a cross-sectional view similar to Fig. 3 showing another example of the liquid crystal panel inspection device of the present invention.

第7圖係顯示習知之液晶面板檢查裝置的剖面圖。 Fig. 7 is a cross-sectional view showing a conventional liquid crystal panel inspection device.

本發明之液晶面板檢查裝置10係使用於不具有一對之偏光板之液晶面板12之檢查。液晶面板12係具有矩形之平面形狀,且在液晶面板12之一方之表面(上表面)12a的各邊部分排列有用以對液晶面板12之各畫素施加驅動電壓之以往眾所周知之電極(未圖示)。 The liquid crystal panel inspection device 10 of the present invention is used for inspection of the liquid crystal panel 12 having no pair of polarizing plates. The liquid crystal panel 12 has a rectangular planar shape, and conventionally known electrodes for applying a driving voltage to each pixel of the liquid crystal panel 12 are arranged on each side of the surface (upper surface) 12a of one of the liquid crystal panels 12 (not shown). Show).

液晶面板檢查裝置10係包含有:能夠沿著在第1圖觀看屬於上下方向之垂直方向(z軸方向)升降的升降台14;支持於該升降台上,且用以保持屬於被檢查體之液晶面板12的工作台16;以及能夠自工作台16之上方對保持於該工作台上之液晶面板12之上表面12a進行攝影之例如CCD攝影機的攝像手段18。 The liquid crystal panel inspection apparatus 10 includes an elevating table 14 that can be moved up and down in a vertical direction (z-axis direction) that belongs to the vertical direction in the first drawing, and is supported by the elevating table and is used to hold the object to be inspected. A table 16 of the liquid crystal panel 12; and an imaging means 18 such as a CCD camera capable of photographing the upper surface 12a of the liquid crystal panel 12 held on the table from above the table 16.

升降台14係例如能夠朝與z軸呈直角之xy平面之x、y方向移動,此外可由能夠繞著z軸旋轉之xyzθ載物台(stage)來構成。於該升降台14上,以往眾所周知的背光單元20係以位於保持在工作台16上之液晶面板12之大致正下方之方式配置。背光單元20係以使其光放射面 20a與保持在工作台16上之液晶面板12之下表面12b大致平行之方式,利用單元基底20b而安裝於升降台14。 The elevating table 14 is movable, for example, in the x and y directions of the xy plane at right angles to the z-axis, and may be configured by an xyzθ stage that is rotatable about the z-axis. On the elevating table 14, a conventionally known backlight unit 20 is disposed so as to be positioned substantially directly below the liquid crystal panel 12 held on the table 16. The backlight unit 20 is configured to have its light emitting surface The 20a is attached to the elevating table 14 by the unit base 20b so as to be substantially parallel to the lower surface 12b of the liquid crystal panel 12 held on the table 16.

於攝像手段18與背光單元20之間,第1及第2之偏光板22a、22b係以各自位於液晶面板12之上方及下方之方式配置。在圖示之例子中,採用3台攝影機18a、18a、18a作為攝像手段18,且各攝影機18a係以令攝影領域些微重複之方式排列而配置。此外,3片之第1偏光板22a係對應於各攝影機18a而配置。取而代之地,可利用單一之第1偏光板22a來覆蓋各攝影機18a之攝影區域。 Between the imaging device 18 and the backlight unit 20, the first and second polarizing plates 22a and 22b are disposed above and below the liquid crystal panel 12, respectively. In the illustrated example, three cameras 18a, 18a, and 18a are used as the imaging means 18, and each of the cameras 18a is arranged such that the field of photography is slightly repeated. Further, the three first polarizing plates 22a are arranged corresponding to the respective cameras 18a. Instead, a single first polarizing plate 22a can be used to cover the imaging area of each camera 18a.

第2偏光板22b係隔介用以謀求光強度之均勻化之光擴散板24而配置於背光單元20之光放射面20a上。第1偏光板22a及第2偏光板22b,係以令其偏光方向彼此平行之方式加以保持。 The second polarizing plate 22b is disposed on the light emitting surface 20a of the backlight unit 20 via the light diffusing plate 24 for achieving uniform light intensity. The first polarizing plate 22a and the second polarizing plate 22b are held such that their polarization directions are parallel to each other.

保持液晶面板12之工作台16係具備具有邊部分之整體呈矩形的框體28,該邊部分係經介間隔體26並自該升降台朝上方隔開間隔而保持在升降台14上、並且沿著矩形之液晶面板12之各邊所配置。框體28係具有矩形之開口部28a,而框體28之各邊部分係承受液晶面板12所對應的各邊部分。來自經過前述之光擴散板24及第2偏光板22b之背光單元20之光,係通過工作台16之開口部28a,並能夠以大致與液晶面板12之下表面12b呈直角之角度照射在該下表面12b。 The table 16 holding the liquid crystal panel 12 is provided with a frame body 28 having a rectangular portion as a whole, and the side portions are held by the spacers 26 and spaced apart from the lifting table upwards on the lifting table 14, and Arranged along each side of the rectangular liquid crystal panel 12. The frame body 28 has a rectangular opening portion 28a, and each side portion of the frame body 28 receives the respective side portions corresponding to the liquid crystal panel 12. The light from the backlight unit 20 passing through the light diffusing plate 24 and the second polarizing plate 22b passes through the opening 28a of the table 16, and can be irradiated at an angle substantially at right angles to the lower surface 12b of the liquid crystal panel 12. Lower surface 12b.

於藉由間隔體26而保持在工作台16與升降 台14之間的空間30,配置有例如4個直線狀之傾斜照明光源32。於第1圖中顯示有4個傾斜照明光源32中彼此相對向之兩者。各傾斜照明光源32係以與液晶面板12所對應之各邊大致呈平行地伸長、並且彼此共同圍起背光單元20之光放射面20a之方式配置。此外,各傾斜照明光源32係保持在液晶面板12之外方區域之下方並高於第2偏光板22b之高度位置,且利用托架32a保持在背光單元20之單元基底20b上。可將傾斜照明光源32直接支持在升降台14,以取代支持在單元基底20b。 Keeped on the table 16 and lifted by the spacer 26 The space 30 between the stages 14 is provided with, for example, four linear oblique illumination sources 32. Two of the four oblique illumination sources 32 are shown opposite each other in FIG. Each of the oblique illumination light sources 32 is disposed so as to extend substantially parallel to each side corresponding to the liquid crystal panel 12 and to surround the light emission surface 20a of the backlight unit 20. Further, each of the oblique illumination light sources 32 is held below the outer region of the liquid crystal panel 12 and higher than the height position of the second polarizing plate 22b, and is held by the unit base 20b of the backlight unit 20 by the bracket 32a. The tilting illumination source 32 can be directly supported on the lifting platform 14 instead of being supported on the unit substrate 20b.

於工作台16之內側、亦即框體28之開口部28a之側,以沿著框體28所對應的邊部分之方式,配置有例如反射鏡之反射手段34,該反射手段34係配置成使其反射面34a朝向開口部28a之中央。各反射手段34係藉由大致水平地配置並且支持在工作台16之軸36,利用上緣可轉動地支持在工作台16。此外,於工作台16設置有使各反射手段34繞著軸36轉動之作動裝置38。 On the inner side of the table 16, that is, on the side of the opening 28a of the casing 28, for example, a reflecting means 34 for reflecting the mirror is disposed along the side portion corresponding to the frame 28, and the reflecting means 34 is arranged such that The reflecting surface 34a is directed toward the center of the opening portion 28a. Each of the reflecting means 34 is rotatably supported on the table 16 by the upper edge by being disposed substantially horizontally and supported on the shaft 36 of the table 16. Further, an actuating device 38 for rotating each of the reflecting means 34 about the shaft 36 is provided on the table 16.

各作動裝置38係為了調整屬於反射面34a與水平面之狭角之反射手段34的豎起角度θ並且保持成所期望之設定角,而操作性地連結在對應之反射手段34之下緣。就如前述之作動手段38而言,可採用具備有未圖示之電動馬達、藉由該電動馬達而能夠旋轉之螺栓(bolt)構件、以及螺合於該螺栓構件之螺帽(nut)構件之以往眾所周知的滾珠螺桿(ball screw)機構、或線性馬達(linear motor)等。 Each actuating device 38 is operatively coupled to the lower edge of the corresponding reflecting means 34 in order to adjust the erection angle θ of the reflecting means 34 belonging to the narrowing angle of the reflecting surface 34a and the horizontal plane and to maintain the desired set angle. As described above, the actuating means 38 may include an electric motor (not shown), a bolt member rotatable by the electric motor, and a nut member screwed to the bolt member. A conventional ball screw mechanism or a linear motor has been known.

作動裝置38係藉由將各豎起角度θ設定為未達90度,藉此如後述配置於開口部28a所對應之各邊之一方的各反射手段34係以分別朝液晶面板12之下表面12b之入射角成為適當角度之方式,將來自沿著相對向之另一方之邊而配置的傾斜照明光源32之斜照射光引導至下表面12b。 The actuating device 38 sets the respective erecting angles θ to less than 90 degrees, whereby the reflecting means 34 disposed on one of the sides corresponding to the opening 28a as described later are respectively directed toward the lower surface of the liquid crystal panel 12. The incident angle of 12b is an appropriate angle, and the oblique illumination light from the oblique illumination light source 32 disposed along the opposite side is guided to the lower surface 12b.

在第1圖所示之例子中,為了能夠替換具有與液晶面板12之大小相對應之開口部28a的工作台16,工作台16係藉由未圖示之螺栓螺帽組裝體或可解除之夾緊機構等而能夠拆卸地結合在間隔體26。 In the example shown in Fig. 1, in order to replace the table 16 having the opening 28a corresponding to the size of the liquid crystal panel 12, the table 16 is detachable from a bolt nut assembly (not shown). The spacer 26 is detachably coupled to the clamp mechanism or the like.

於第1圖中,係以實線顯示工作台16,該工作台16係具有適合於以實線所示之液晶面板12之大小的開口部28a,此外以虛擬線顯示工作台16′,該工作台16′係具有適合於液晶面板12′之大小的開口部28a′,而該液晶面板12′係具有小於以實線所示之液晶面板12之尺寸。 In the first drawing, the table 16 is shown in a solid line, and the table 16 has an opening portion 28a suitable for the size of the liquid crystal panel 12 shown by a solid line, and the table 16' is displayed by a virtual line. The stage 16' has an opening portion 28a' suitable for the size of the liquid crystal panel 12', and the liquid crystal panel 12' has a size smaller than that of the liquid crystal panel 12 shown by a solid line.

與液晶面板12之尺寸相對應而將工作台16之整體替換成如前述之工作台16′來取代之,則例如日本特開2007-163426號公報所揭露,藉由可平行移動地將4個邊構件結合成井字狀或由字狀,即可構成具有可調整尺寸之開口部28a的框體28。 In place of the size of the liquid crystal panel 12, the whole of the table 16 is replaced by the above-described table 16'. For example, as disclosed in Japanese Laid-Open Patent Publication No. 2007-163426, four can be moved in parallel. The frame member 28 having the adjustable opening portion 28a can be formed by combining the side members in a shape of a well or a letter.

於工作台16之上方,配置有以往眾所周知之探針單元40,其係為了進行該工作台上之液晶面板12之點亮檢查而驅動該液晶面板。探針單元40係在升降台 14之上升位置令所對應之探針40a接觸於液晶面板12之前述電極其。 Above the table 16, a conventionally known probe unit 40 is disposed to drive the liquid crystal panel in order to perform lighting inspection of the liquid crystal panel 12 on the table. The probe unit 40 is attached to the lifting platform The rising position of 14 causes the corresponding probe 40a to contact the aforementioned electrode of the liquid crystal panel 12.

攝像手段18係設定為在液晶面板12之檢查之際與液晶面板12之距離為固定。藉由各攝像手段18所獲得之影像資料,係傳送至以往眾所周知之影像處理裝置42。 The imaging means 18 is set to be fixed to the liquid crystal panel 12 at the time of inspection of the liquid crystal panel 12. The image data obtained by each imaging device 18 is transmitted to a conventionally known image processing device 42.

以下,說明使用液晶面板檢查裝置10來檢查液晶面板12之順序。 Hereinafter, the procedure for inspecting the liquid crystal panel 12 using the liquid crystal panel inspection device 10 will be described.

[在背光照射光下之非點亮檢查] [Non-lighting check under backlight illumination]

在背光照射光下之非點亮檢查中,傾斜照明光源32係處於熄滅狀態,且點亮背光單元20,亦即點亮背光光源。此外,如第2圖所示,探針單元40之各探針40a,由於處於未接觸液晶面板12之前述電極之狀態,故液晶面板12係處於非點亮(非驅動)狀態。 In the non-lighting inspection under backlight illumination, the oblique illumination source 32 is in an extinguished state, and the backlight unit 20 is turned on, that is, the backlight source is turned on. Further, as shown in Fig. 2, the probes 40a of the probe unit 40 are in a state of not contacting the electrodes of the liquid crystal panel 12, so that the liquid crystal panel 12 is in a non-lighting (non-driving) state.

在非點亮狀態中,自背光單元20之光放射面20a所放射之光,係藉由光擴散板24並在適當地分散之狀態下穿透第2偏光板22b。來自背光單元20之光係藉由經過第2偏光板22b而轉換為偏光,且該偏光係以大致直角之方式入射至液晶面板12。由於液晶面板12處於非驅動狀態,故前述偏光係藉由液晶面板12之穿透而90度旋轉於其偏光面。經90度旋轉於該偏光面之偏光,係由第1偏光板22a遮斷穿過。 In the non-lighting state, the light emitted from the light emitting surface 20a of the backlight unit 20 is transmitted through the second polarizing plate 22b by the light diffusing plate 24 while being appropriately dispersed. The light from the backlight unit 20 is converted into polarized light by passing through the second polarizing plate 22b, and the polarized light is incident on the liquid crystal panel 12 at a substantially right angle. Since the liquid crystal panel 12 is in a non-driving state, the polarized light is rotated by 90 degrees on its polarizing surface by the penetration of the liquid crystal panel 12. The polarized light that is rotated by 90 degrees on the polarizing surface is blocked by the first polarizing plate 22a.

結果,在各攝影機18a不會擷取前述偏光,而通過第1偏光板22a之液晶面板12的影像,除非於液晶 面板12之上表面12a或下表面12b附著有異物、或者於液晶面板12之畫素存在有瑕疵,否則利用各攝影機18a所攝影,且其資料利用影像處理裝置42處理所獲得之液晶面板12的攝影畫面,應觀察為黑畫面。然而,當於液晶面板12之上表面12a及/或下表面12b附著有異物、或者於液晶面板12之畫素內部有異物時,該等異物為前述偏光之散射原因,該散射光即通過第1偏光板22a並於攝像手段18擷取為亮點。 As a result, the image of the liquid crystal panel 12 passing through the first polarizing plate 22a is not captured by the respective cameras 18a, except for the liquid crystal. A foreign object is attached to the upper surface 12a or the lower surface 12b of the panel 12, or a pixel of the liquid crystal panel 12 is present, otherwise it is photographed by each camera 18a, and the data is processed by the image processing device 42 to obtain the obtained liquid crystal panel 12. The photographic screen should be observed as a black screen. However, when foreign matter adheres to the upper surface 12a and/or the lower surface 12b of the liquid crystal panel 12, or if there is a foreign matter inside the pixel of the liquid crystal panel 12, the foreign matter is a cause of scattering of the polarized light, and the scattered light passes through the first The polarizing plate 22a is picked up by the imaging means 18 as a bright spot.

來自前述之背光單元20之光經過光擴散板24及第2偏光板22b所獲得之前述偏光,係因保持成近似於直角之角度θ之豎起角度之反射面34a而實質上不會朝向液晶面板12之周邊部。 The polarized light obtained by the light from the backlight unit 20 passing through the light diffusing plate 24 and the second polarizing plate 22b is substantially not opposed to the liquid crystal by the reflecting surface 34a which is maintained at an angle of erecting at an angle θ of a right angle. The peripheral portion of the panel 12.

第5圖(a)係顯示分布於由影像處理裝置42所獲得之前述黑畫面上之亮點之例子。於第5圖(a)所示之例中,觀察到4個亮點44a、44b、44c、44d。 Fig. 5(a) shows an example of bright spots distributed on the aforementioned black screen obtained by the image processing device 42. In the example shown in Fig. 5(a), four bright spots 44a, 44b, 44c, and 44d are observed.

必須辨別該等4個亮點44a、44b、44c、44d中之任一者是否屬於因非畫素瑕疵之附著於液晶面板12之上表面12a及/或下表面12b之異物所產生者、或是否屬於因視為畫素瑕疵之液晶面板12之畫素內部之異物所產生者。為了判斷因該異物之附著所產生之亮點、及因畫素瑕疵所產生之亮點,而進行以下所述之在傾斜照明光源光下之非點亮檢查。 It is necessary to discriminate whether or not any of the four bright spots 44a, 44b, 44c, 44d belongs to a foreign matter attached to the upper surface 12a and/or the lower surface 12b of the liquid crystal panel 12 by a non-pixel, or whether It is produced by foreign matter inside the pixel of the liquid crystal panel 12 which is regarded as a picture. In order to determine the bright spots caused by the adhesion of the foreign matter and the bright spots generated by the pixels, the non-lighting inspection under the oblique illumination source light described below is performed.

[在傾斜照明光源光下之非點亮檢查] [Non-lighting check under oblique illumination source light]

在傾斜照明光源下之非點亮檢查中,點亮傾 斜照明光源32來取代背光單元20,而背光單元20係處於熄滅狀態。此外,如第3圖所示,探針單元40之各探針40a係由於處於與液晶面板12之前述電極之非接觸狀態,故液晶面板12係處於非點亮(非驅動)狀態。 In the non-lighting inspection under the oblique illumination source, the lighting is tilted The backlight unit 20 is replaced by an oblique illumination source 32, and the backlight unit 20 is in an extinguished state. Further, as shown in FIG. 3, since the probes 40a of the probe unit 40 are in a non-contact state with the electrodes of the liquid crystal panel 12, the liquid crystal panel 12 is in a non-lighting (non-driving) state.

來自傾斜照射光源32之光並未經過光擴散板24及第2偏光板22b,而是朝向工作台16上之液晶面板12之下表面12b朝斜上方照射。雖沿著液晶面板12之各邊而配置有傾斜照射光源32,惟於該傾斜照射光源所接近之對應之液晶面板12之前述邊的附近,來自該傾斜照明光源之光係難以充分到達。例如,在第3圖觀看自位於圖中之右方之傾斜照射光源32所放射之斜光,係難以直接地充分到達位於液晶面板12之圖中右方之周邊部。同樣地,自位於圖中之左方之傾斜照射光源32所放射之斜光,亦難以直接地充分到達位於液晶面板12之圖中左方之周邊部。 The light from the oblique illumination source 32 does not pass through the light diffusion plate 24 and the second polarizing plate 22b, but is irradiated obliquely upward toward the lower surface 12b of the liquid crystal panel 12 on the table 16. Although the oblique illumination light source 32 is disposed along each side of the liquid crystal panel 12, it is difficult to sufficiently reach the light system from the oblique illumination source in the vicinity of the side of the liquid crystal panel 12 corresponding to the oblique illumination source. For example, viewing the oblique light emitted from the oblique illumination light source 32 located on the right side in the figure in FIG. 3 is difficult to directly reach the peripheral portion on the right side in the figure of the liquid crystal panel 12. Similarly, it is difficult to directly reach the peripheral portion on the left side in the drawing of the liquid crystal panel 12 from the oblique light radiated from the oblique illumination light source 32 located on the left side in the drawing.

然而,本發明之液晶面板檢查裝置10中,設置有反射手段34,其係用以藉由作動裝置38將豎起角度θ調整為適當之角度,該作動裝置38係藉由軸36可轉動地支持在工作台16。因此,例如自設置於第3圖之右方之傾斜照射光源32所放射之斜光之一部分,係藉由設置於位於相反側之第3圖之左方之反射手段34的反射面34a,而朝向位於液晶面板12之下表面12b之圖中右方之周邊部,並以α度之入射角被引導。同樣地,自設置於第3圖之左方之傾斜照射光源32所放射之斜光的一部分,係藉由設置於位於相反側之反射手段34的反射面34a,而朝向位 於液晶面板12之下表面12b之圖中左方之周邊部,並以α度之入射角被引導。 However, in the liquid crystal panel inspection apparatus 10 of the present invention, a reflection means 34 is provided for adjusting the erection angle θ to an appropriate angle by the actuation means 38, the actuating means 38 being rotatably rotated by the shaft 36 Support at workbench 16. Therefore, for example, a portion of the oblique light radiated from the oblique illumination light source 32 provided on the right side of the third figure is directed by the reflection surface 34a of the reflection means 34 provided on the left side of the third figure on the opposite side. The peripheral portion on the right side in the lower surface 12b of the liquid crystal panel 12 is guided at an incident angle of α degrees. Similarly, a part of the oblique light radiated from the oblique illumination light source 32 provided on the left side of the third figure is oriented toward the reflection surface 34a of the reflection means 34 on the opposite side. The peripheral portion on the left side in the lower surface 12b of the liquid crystal panel 12 is guided at an incident angle of α degrees.

由於藉由在該等反射手段34之反射面34a的反射光,使液晶面板12之各周邊部的光量增大,故解決了在該周邊部的光量不足。反射手段34的前述之豎起角度θ,係可調整成未達90度之適當角度,俾使往反射面34a之入射角α成為60度以上未達90度。 Since the amount of light in each peripheral portion of the liquid crystal panel 12 is increased by the reflected light on the reflecting surface 34a of the reflecting means 34, the amount of light in the peripheral portion is insufficient. The aforementioned erection angle θ of the reflecting means 34 can be adjusted to an appropriate angle of less than 90 degrees, so that the incident angle α to the reflecting surface 34a becomes 60 degrees or more and less than 90 degrees.

來自傾斜照射光源32之斜的照射光,除非受到散射,否則不會經過第1偏光板22a而到達攝像手段18。然而,當於液晶面板12之上表面12a或下表面12b附著有異物時,該異物之散射光的一部份係經過第1偏光板22a而擷取至攝像手段18。此外,即使液晶面板12內之瑕疵,雖亦產生散射,但不會接收如前述異物程度那麼強之散射。結果,在傾斜照射光源32之斜照射光下,在通過第1偏光板22a並藉由攝像手段18所攝影之液晶面板12的上表面12a的黑畫面,如第5圖(b)所示,於如第5圖(a)所示之相同位置觀察到4個亮點44a、44b、44c、44d。然而,由於因異物所產生之亮點、與因前述瑕疵所產生之亮點之間會產生明確之亮度差,故影像處理裝置42係藉由於該影像處理裝置設定適當之閾值,依據該等之亮度差來辨別因異物所產生之亮點與因畫素瑕疵所產生之亮點。在圖示之例子中,亮點44b、44c、44d為因異物所產生者,而較亮點44b、44c、44d亮度還低之亮點44a為因畫素瑕疵所產生者。因此,可判定亮點44a為屬於檢測對象的畫素 瑕疵。 The oblique illuminating light from the oblique illuminating light source 32 does not pass through the first polarizing plate 22a and reaches the imaging means 18 unless it is scattered. However, when a foreign matter adheres to the upper surface 12a or the lower surface 12b of the liquid crystal panel 12, a part of the scattered light of the foreign matter is drawn to the imaging means 18 via the first polarizing plate 22a. Further, even if the ruthenium in the liquid crystal panel 12 is scattered, it does not receive scattering as strong as the foreign matter described above. As a result, under the oblique illuminating light of the oblique illuminating light source 32, the black screen of the upper surface 12a of the liquid crystal panel 12 photographed by the first polarizing plate 22a by the imaging means 18 is as shown in Fig. 5(b). Four bright spots 44a, 44b, 44c, and 44d are observed at the same position as shown in Fig. 5(a). However, since a bright luminance difference between the bright spot generated by the foreign object and the bright spot generated by the foregoing defect is generated, the image processing device 42 sets the appropriate threshold value according to the brightness difference of the image processing device. To identify the bright spots caused by foreign objects and the bright spots caused by the pixels. In the illustrated example, the bright spots 44b, 44c, and 44d are generated by foreign matter, and the bright spots 44a having lower brightness of the brighter points 44b, 44c, and 44d are generated by the pixels. Therefore, it can be determined that the bright spot 44a is a pixel belonging to the detection target. defect.

來自該傾斜照射光源32之斜的照射光係如前述之方式,由於藉由反射手段34弭補在液晶面板12之周邊部之光量不足,因此以所期望之光量擴散在液晶面板12之大致全部區域。因此,即使前述之因異物所產生之亮點、因畫素瑕疵所產生之亮點位於液晶面板12之例如周邊部,亦可依據兩者亮點之亮度差而較容易且確實地辨別兩者。 The oblique illuminating light from the oblique illuminating light source 32 is as described above, and the amount of light that is entangled in the peripheral portion of the liquid crystal panel 12 by the reflecting means 34 is insufficient, so that substantially all of the liquid crystal panel 12 is diffused with a desired amount of light. region. Therefore, even if the bright spot generated by the foreign matter or the bright spot generated by the pixel is located at, for example, the peripheral portion of the liquid crystal panel 12, it is possible to easily and surely distinguish the two depending on the difference in luminance between the bright spots.

[點亮檢查] [Lighting check]

接著,工作台16上之液晶面板12,係在驅動各畫素之狀態下接受點亮檢查。如第4圖所示,在該點亮檢查中,探針單元40之各探針40a係接觸於工作台16上之液晶面板12之對應的前述電極,且對各畫素供應驅動電壓。因此,液晶面板12之各畫素並未令穿透液晶面板12之光的偏光面旋轉。因此,當再次點亮背光單元20來取代傾斜照射光源32時,來自背光單元20之光雖經過光擴散板24及第2偏光板22b而轉換為均勻之偏光,惟由於液晶面板12處於驅動狀態,故該偏光不會使該偏光面旋轉而穿透液晶面板12,且到達第1偏光板22a。該第1偏光板22a係允許未使偏光面旋轉之前述偏光之穿透。結果,藉由攝像手段18所獲得之液晶面板12的影像係成為點亮畫面,亦即液晶面板12為黑白面板時形成白畫面,而液晶面板12為彩色面板時形成與濾光器之配色相對應的色畫面。 Next, the liquid crystal panel 12 on the stage 16 receives the lighting inspection while driving the respective pixels. As shown in Fig. 4, in the lighting inspection, each probe 40a of the probe unit 40 contacts the corresponding electrode of the liquid crystal panel 12 on the stage 16, and supplies a driving voltage to each pixel. Therefore, the respective pixels of the liquid crystal panel 12 do not rotate the polarizing surface of the light that penetrates the liquid crystal panel 12. Therefore, when the backlight unit 20 is turned on again to replace the oblique illumination light source 32, the light from the backlight unit 20 is converted into uniform polarization by the light diffusion plate 24 and the second polarizing plate 22b, but the liquid crystal panel 12 is driven. Therefore, the polarized light does not rotate the polarizing surface and penetrates the liquid crystal panel 12, and reaches the first polarizing plate 22a. The first polarizing plate 22a allows penetration of the polarized light that does not rotate the polarizing surface. As a result, the image of the liquid crystal panel 12 obtained by the imaging means 18 becomes a lighting screen, that is, when the liquid crystal panel 12 is a black and white panel, a white screen is formed, and when the liquid crystal panel 12 is a color panel, a color matching phase with the filter is formed. Corresponding color picture.

如第5圖(c)所示,在該點亮畫面中,前述之畫素瑕疵及異物係擷取為與各個對應之黑點44a、44b、44c、44d,此外於前述點亮畫面中,擷取有用以界定各畫素之黑色矩陣46。由第5圖(a)及第5圖(b)所獲得之黑影像或其影像資料判斷亮點44a為因畫素瑕疵所產生者,而與該亮點44a對應之點亮畫面上之黑點44a的畫素位址,係可由黑色矩陣46所映射之第5圖(c)之影像或者其影像資料容易地獲得。因此,可容易地獲得第5圖(c)之黑點44a的畫素位址。 As shown in FIG. 5(c), in the lighting screen, the pixel and foreign matter are extracted as corresponding black dots 44a, 44b, 44c, and 44d, and in the lighting screen. A black matrix 46 that is useful to define each pixel is taken. The black image obtained by the fifth image (a) and the fifth image (b) or the image data thereof determines that the bright spot 44a is the one generated by the pixel, and the black dot 44a on the lighting screen corresponding to the bright spot 44a. The pixel address can be easily obtained from the image of Fig. 5(c) mapped by the black matrix 46 or its image data. Therefore, the pixel address of the black dot 44a of Fig. 5(c) can be easily obtained.

根據本發明之液晶面板檢查裝置10,如前述之方式,由於可在單一之液晶面板檢查裝置10之單一的工作台16上進行液晶面板12之前述的全部檢查步驟,故可謀求檢查裝置之精簡化,並可謀求產距時間之縮短化。再者,在利用傾斜照明光源32之斜光下之非點亮檢查中,由於藉由反射手段34可將充分之照射光引導至液晶面板12之周邊部,故即使在液晶面板12之周邊部,亦可迅速且容易地判斷因附著於液晶面板12之表面12a、12b之異物所產生的亮點、與因畫素瑕疵所產生之亮點,故能夠使產距時間之進一步的縮短化。 According to the liquid crystal panel inspection apparatus 10 of the present invention, as described above, since all of the above-described inspection steps of the liquid crystal panel 12 can be performed on a single stage 16 of the single liquid crystal panel inspection apparatus 10, it is possible to simplify the inspection apparatus. And can seek to shorten the production time. Further, in the non-lighting inspection under the oblique light using the oblique illumination light source 32, since the sufficient illumination light can be guided to the peripheral portion of the liquid crystal panel 12 by the reflection means 34, even in the peripheral portion of the liquid crystal panel 12, It is also possible to quickly and easily determine the bright spots caused by the foreign matter adhering to the surfaces 12a and 12b of the liquid crystal panel 12 and the bright spots caused by the pixels, so that the production time can be further shortened.

第6圖係顯示採用工作台16′之例子,且顯示與第3圖同樣之利用在傾斜照明光源光下之非點亮檢查之圖式,該工作台16′係如於第1圖以虛擬線所示,具有適合於液晶面板12′之大小的開口部28a′,而該液晶面板12′係具有較第1圖中以實線所示之液晶面板12還 小之尺寸。 Fig. 6 is a view showing an example of using the table 16', and showing a pattern of non-lighting inspection using the light under the oblique illumination source as in Fig. 3, the table 16' is virtual as shown in Fig. 1. As shown by the line, there is an opening portion 28a' suitable for the size of the liquid crystal panel 12', and the liquid crystal panel 12' has a liquid crystal panel 12 as shown by a solid line in FIG. Small size.

如第6圖所示,相較於處理大型之液晶面板12的情形,處理小型之液晶面板12′的情形,反射手段34之豎起角度θ係設定為較前者之情形還小之值。該反射手段34之豎起角度θ,係與於前述之大型之液晶面板12的情形同樣地,藉由工作台16′之作動裝置38′的操作,以令往液晶面板12′之下表面12b′之入射角α設定成為適當之角度範圍(60度以上未達90度)的角度之方式,俾可在液晶面板12′之周邊部確保充分之光量。 As shown in Fig. 6, in the case of processing the small liquid crystal panel 12', the erection angle θ of the reflecting means 34 is set to be smaller than the former case. The erecting angle θ of the reflecting means 34 is the same as that of the large liquid crystal panel 12 described above, by the operation of the actuating means 38' of the table 16' to the lower surface 12b of the liquid crystal panel 12'. The incident angle α is set to an angle of an appropriate angular range (60 degrees or more and less than 90 degrees), and a sufficient amount of light can be secured in the peripheral portion of the liquid crystal panel 12'.

(產業上之可利用性) (industrial availability)

本發明並不限定為上述實施例,只要未偏離其宗旨,即可進行各種之變更。例如,可將反射手段之豎起角度θ設為固定。此外,可採用單一之攝影機作為攝像手段18,且可依據必要之影像解像度增加攝影機之台數。 The present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit and scope of the invention. For example, the raising angle θ of the reflecting means can be set to be fixed. In addition, a single camera can be used as the imaging means 18, and the number of cameras can be increased in accordance with the necessary image resolution.

10‧‧‧液晶面板檢查裝置 10‧‧‧LCD panel inspection device

12、12′‧‧‧液晶面板 12, 12'‧‧‧ LCD panel

12a‧‧‧液晶面板之上表面 12a‧‧‧Top surface of the LCD panel

12b‧‧‧液晶面板之下表面 12b‧‧‧Under the surface of the LCD panel

14‧‧‧升降台 14‧‧‧ Lifting platform

16、16′‧‧‧工作台 16, 16'‧‧‧ Workbench

18‧‧‧攝像手段 18‧‧‧Photography

18a‧‧‧攝影機 18a‧‧‧ camera

20‧‧‧背光單元 20‧‧‧Backlight unit

20a‧‧‧光放射面 20a‧‧‧Light radiation surface

20b‧‧‧單元基底 20b‧‧‧ unit base

22a、22b‧‧‧偏光板 22a, 22b‧‧‧ polarizing plate

24‧‧‧光擴散板 24‧‧‧Light diffuser

26‧‧‧間隔體 26‧‧‧ spacers

28‧‧‧框體 28‧‧‧ frame

28a、28a′‧‧‧開口部 28a, 28a'‧‧‧ openings

30‧‧‧空間 30‧‧‧ Space

32‧‧‧傾斜照明光源 32‧‧‧Slant illumination source

32a‧‧‧托架 32a‧‧‧ bracket

34‧‧‧反射手段 34‧‧‧Reflex means

34a‧‧‧反射面 34a‧‧‧reflecting surface

36‧‧‧軸 36‧‧‧Axis

38‧‧‧作動裝置 38‧‧‧Acoustic device

40‧‧‧探針單元 40‧‧‧ probe unit

40a‧‧‧探針 40a‧‧‧Probe

42‧‧‧影像處理裝置 42‧‧‧Image processing device

Claims (10)

一種液晶面板檢查裝置,係用以檢查無偏光板之液晶面板,該液晶面板檢查裝置係包含有:升降台;工作台,配置於該升降台上,並具備有具有整體呈矩形之開口部的框體,且為了在前述升降台之上方保持前述液晶面板而利用前述框體承受該液晶面板的緣部;第1及第2偏光板,配置於前述工作台上之液晶面板之上方及下方,且彼此將偏光方向保持為預定之關係;背光單元,利用通過前述第2偏光板而自前述液晶面板之下表面與該下表面大致呈直角之照射光照射前述工作台上之前述液晶面板;傾斜照明光源,用以自前述下表面之下方以角度方向照射前述工作台上之前述液晶面板;探針單元,為了在前述升降台之上升位置進行前述液晶面板之點亮檢查而用以對該液晶面板之畫素施加電壓;攝像裝置,用以在選擇性接收來自前述背光單元之前述呈直角之照射光及來自前述傾斜照明光源之斜照射光中任一者之狀態下,通過前述第1偏光板對前述液晶面板之上表面進行攝影;以及反射手段,配置於前述工作台內,以使來自沿著 前述框體之對應邊所配置之前述傾斜照明光源之斜照射光不經過前述第2偏光板而以適當之入射角入射至前述液晶面板之方式,將前述斜照射光之一部分引導至前述液晶面板之下表面的前述傾斜照明光源所接近之周邊部。 A liquid crystal panel inspection device for inspecting a liquid crystal panel without a polarizing plate, the liquid crystal panel inspection device comprising: a lifting platform; a table disposed on the lifting platform and having an opening having an overall rectangular shape a frame body that receives the edge of the liquid crystal panel by the frame body in order to hold the liquid crystal panel above the lifting platform; and the first and second polarizing plates are disposed above and below the liquid crystal panel on the table. And maintaining the polarization direction in a predetermined relationship with each other; and the backlight unit illuminates the liquid crystal panel on the stage by irradiation light from the lower surface of the liquid crystal panel and the lower surface of the liquid crystal panel by the second polarizing plate; The illumination light source is configured to illuminate the liquid crystal panel on the worktable in an angular direction from below the lower surface; the probe unit is configured to perform the lighting inspection of the liquid crystal panel at a rising position of the lifting platform a pixel applied to the panel; an imaging device for selectively receiving the aforementioned right angle photo from the backlight unit The upper surface of the liquid crystal panel is imaged by the first polarizing plate in a state of light and oblique oblique light from the oblique illumination light source; and the reflecting means is disposed in the table so as to be from the edge the The oblique illumination light of the oblique illumination light source disposed on the corresponding side of the frame body is incident on the liquid crystal panel at an appropriate incident angle without passing through the second polarizing plate, and guides one of the oblique illumination light to the liquid crystal panel. The peripheral portion of the lower surface of the surface adjacent to the oblique illumination source. 如申請專利範圍第1項所述之液晶面板檢查裝置,其中,前述反射手段係為了要能夠進行對於與前述液晶面板之大小相對應之該液晶面板之下表面的均勻之斜照射,以繞著支持於前述工作台之軸之方式可轉動地被支持,且該反射手段係藉由用以繞著前述軸轉動之作動裝置,保持成適當之角度。 The liquid crystal panel inspection apparatus according to claim 1, wherein the reflection means is configured to be capable of performing uniform oblique illumination on a lower surface of the liquid crystal panel corresponding to the size of the liquid crystal panel. The means supported by the shaft of the aforementioned table is rotatably supported, and the reflecting means is maintained at an appropriate angle by means of an actuating means for rotating about the aforementioned axis. 如申請專利範圍第2項所述之液晶面板檢查裝置,其中,前述反射手段係藉由前述作動裝置來調整角度,俾使利用該反射手段反射而朝入射至前述液晶面板之前述下表面之入射角設定成60度以上未達90度。 The liquid crystal panel inspection apparatus according to the second aspect of the invention, wherein the reflection means adjusts an angle by the actuator, and reflects incident on the lower surface of the liquid crystal panel by reflection by the reflection means. The angle is set to 60 degrees or more and less than 90 degrees. 如申請專利範圍第2項或第3項所述之液晶面板檢查裝置,其中,前述反射手段之前述軸係以沿著前述工作台之前述矩形之開口部之彼此相對向的一對邊之一方邊之方式配置,而前述傾斜照明光源係為了沿著前述一對邊之另一方邊伸長而配置。 The liquid crystal panel inspection apparatus according to claim 2, wherein the axis of the reflection means is one of a pair of sides facing each other along an opening of the rectangular shape of the table. Arranged while being arranged, the oblique illumination source is arranged to extend along the other side of the pair of sides. 如申請專利範圍第4項所述之液晶面板檢查裝置,其中,前述反射手段係包括經介在上緣呈水平之軸而支持於前述工作台的反射鏡,而前述作動裝置係為了以所期望之前述豎起角度保持前述反射鏡而操作性地連 結在前述反射鏡。 The liquid crystal panel inspection apparatus according to claim 4, wherein the reflection means includes a mirror supported by the stage via a horizontal axis on the upper edge, and the actuator is intended to be desired. The aforementioned erect angle maintains the aforementioned mirror and is operatively connected Attached to the aforementioned mirror. 如申請專利範圍第5項所述之液晶面板檢查裝置,其中,前述作動裝置係包含有具備藉由該電動馬達而能夠旋轉之螺栓構件、及螺合於該螺栓構件之螺帽構件的滾珠螺桿機構和線性馬達之任一者。 The liquid crystal panel inspection apparatus according to claim 5, wherein the actuator includes a bolt member including a bolt member rotatable by the electric motor and a nut member screwed to the bolt member. Any of a mechanism and a linear motor. 如申請專利範圍第1項所述之液晶面板檢查裝置,其中,前述傾斜照明光源係以使其高度位置位於高於前述第2偏光板之高度位置之方式支持於前述升降台。 The liquid crystal panel inspection apparatus according to claim 1, wherein the oblique illumination light source is supported by the elevation platform such that a height position thereof is higher than a height position of the second polarizing plate. 如申請專利範圍第7項所述之液晶面板檢查裝置,其中,前述工作台係經介間隔體構件自前述升降台隔開間隔而加以保持,而前述傾斜照明光源係配置於藉由前述間隔體構件所界定之前述工作台與前述升降台之間的空間。 The liquid crystal panel inspection apparatus according to claim 7, wherein the table is held by a spacer from the elevating table, and the oblique illumination source is disposed by the spacer. The space between the aforementioned workbench defined by the member and the aforementioned lifting platform. 如申請專利範圍第1項所述之液晶面板檢查裝置,其中,前述工作台之前述框體係將前述開口部之各邊之尺寸能夠調整成適合於大小不同之液晶面板。 The liquid crystal panel inspection apparatus according to claim 1, wherein the frame system of the table can adjust the size of each side of the opening to be suitable for a liquid crystal panel having a different size. 如申請專利範圍第1項所述之液晶面板檢查裝置,其中,前述工作台係以能夠拆卸之方式支持於前述升降台上,俾使該工作台能夠替換成設置有適合於前述液晶面板之前述開口部的工作台。 The liquid crystal panel inspection apparatus according to claim 1, wherein the table is detachably supported on the lifting platform, and the table can be replaced with the aforementioned one suitable for the liquid crystal panel. Workbench in the opening.
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