JP2006072515A - 流体制御装置 - Google Patents

流体制御装置 Download PDF

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Publication number
JP2006072515A
JP2006072515A JP2004252870A JP2004252870A JP2006072515A JP 2006072515 A JP2006072515 A JP 2006072515A JP 2004252870 A JP2004252870 A JP 2004252870A JP 2004252870 A JP2004252870 A JP 2004252870A JP 2006072515 A JP2006072515 A JP 2006072515A
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JP
Japan
Prior art keywords
valve
fluid
flow
flow meter
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004252870A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006072515A5 (fr
Inventor
Kenro Yoshino
研郎 吉野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Yukizai Corp
Original Assignee
Asahi Organic Chemicals Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Organic Chemicals Industry Co Ltd filed Critical Asahi Organic Chemicals Industry Co Ltd
Priority to JP2004252870A priority Critical patent/JP2006072515A/ja
Priority to US11/661,388 priority patent/US20080029174A1/en
Priority to KR1020077004685A priority patent/KR101124447B1/ko
Priority to PCT/JP2005/016168 priority patent/WO2006025550A1/fr
Priority to TW094129656A priority patent/TW200611095A/zh
Publication of JP2006072515A publication Critical patent/JP2006072515A/ja
Publication of JP2006072515A5 publication Critical patent/JP2006072515A5/ja
Pending legal-status Critical Current

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  • Fluid-Driven Valves (AREA)
  • Flow Control (AREA)
JP2004252870A 2004-08-31 2004-08-31 流体制御装置 Pending JP2006072515A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2004252870A JP2006072515A (ja) 2004-08-31 2004-08-31 流体制御装置
US11/661,388 US20080029174A1 (en) 2004-08-31 2005-08-29 Fluid Control Device
KR1020077004685A KR101124447B1 (ko) 2004-08-31 2005-08-29 유체제어장치
PCT/JP2005/016168 WO2006025550A1 (fr) 2004-08-31 2005-08-29 Dispositif de contrôle de fluide
TW094129656A TW200611095A (en) 2004-08-31 2005-08-30 A fluid control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004252870A JP2006072515A (ja) 2004-08-31 2004-08-31 流体制御装置

Publications (2)

Publication Number Publication Date
JP2006072515A true JP2006072515A (ja) 2006-03-16
JP2006072515A5 JP2006072515A5 (fr) 2007-09-20

Family

ID=36153110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004252870A Pending JP2006072515A (ja) 2004-08-31 2004-08-31 流体制御装置

Country Status (1)

Country Link
JP (1) JP2006072515A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008121784A (ja) * 2006-11-13 2008-05-29 Ckd Corp 流体制御弁
US11536385B2 (en) 2018-07-09 2022-12-27 Fujikin Incorporated Fluid control device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008121784A (ja) * 2006-11-13 2008-05-29 Ckd Corp 流体制御弁
US11536385B2 (en) 2018-07-09 2022-12-27 Fujikin Incorporated Fluid control device

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