JP2006072515A - Fluid controller - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid controller that is easily installed in an inside of a semiconductor manufacturing device, easy to be connected to piping and wiring, capable of reducing the pressure loss due to the piping connection, capable of easily changing arrangement for each module, capable of preventing corrosion from occurring even if a corrosive fluid is used as the fluid, capable of changing setting of the flow rate after piping, capable of blocking a flow passage after piping, and capable of controlling the flow rate, even if the flowing-in fluid is pulsating. <P>SOLUTION: This fluid controller has a flowmeter sensor part 4, having an ultrasonic oscillator 12 for emitting ultrasonic waves into the fluid, and an ultrasonic oscillator 13 for receiving ultrasonic waves from the ultrasonic oscillator 12 to output a signal to a flowmeter amplifier part 64, and a constant flow rate valve 5 for controlling pressure of the fluid by the operating pressure, and the flowmeter sensor part 4 and the constant flow rate valve 5 are installed inside one casing 2, having a fluid flowing-in inlet 3 and a fluid flowing-out outlet 6. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a fluid control device used in a fluid transportation pipe that requires fluid control. More particularly, the present invention relates to a fluid control device that is easy to install in a semiconductor manufacturing apparatus or the like, piping and wiring connection, and that does not cause corrosion even when a corrosive fluid is used as the fluid.

  Conventionally, wet etching, in which a wafer surface is etched using cleaning water obtained by diluting a chemical solution such as hydrofluoric acid with pure water, is used as one step of a semiconductor manufacturing process. It is said that the concentration of cleaning water for these wet etching needs to be managed with high accuracy. In recent years, the method of managing the concentration of cleaning water by the flow rate ratio of pure water and chemical liquid has become the mainstream, and therefore, a fluid control device that manages the flow volume of pure water or chemical liquid with high accuracy has been applied. Yes.

  Various fluid control devices have been proposed, but there has been a pure water flow rate control device 151 that performs flow rate control when the pure water temperature is variable as shown in FIG. 6 (see, for example, Patent Document 1). The configuration includes a flow rate adjustment valve 152 that adjusts the opening degree under the effect of the operation pressure to adjust the pure water flow rate, and an operation pressure adjustment valve 153 that adjusts the operation pressure supplied to the flow rate adjustment valve 152. A flow rate measuring device 154 for measuring the flow rate of pure water output from the flow rate adjusting valve 152, and an on-off valve 155 for allowing or blocking the flow of pure water that has passed through the flow rate measuring device 154. A control device that controls the flow rate of pure water output from the flow rate adjustment valve 152 to be constant by balancing the operation pressure adjusted by the pressure adjustment valve 153 and the output pressure of pure water in the flow rate adjustment valve 152. 151 for feedback control of the operating pressure supplied from the operating pressure adjusting valve 153 to the flow rate adjusting valve 152 based on the measured value so that the measured value by the flow rate measuring device 154 is constant. It was characterized in that a control circuit. The effect is that even if the output pressure at the flow rate adjustment valve 152 changes with the temperature change of the pure water, the operation pressure is adjusted in real time in accordance with the change amount, so that the output pressure is output from the flow rate adjustment valve 152. Since the pure water flow rate is adjusted, the pure water flow rate can be maintained at a constant value with high accuracy.

  Further, as a module that performs fluid control, there is a fluid control module 156 that is connected in-line to a fluid circuit that transfers fluid as shown in FIG. 7 (see, for example, Patent Document 2). The construction includes a housing 157 having a chemically inert flow path, an adjustable control valve 158 connected to the flow path, a pressure sensor 159 connected to the flow path, and a throttle located within the flow path. And a control valve 158 and a pressure sensor 159 housed in the housing 157, and a driver 161 having a mechanical, electrical, or pneumatic configuration for driving the control valve 158, and the control valve 158 The controller 162 electrically connected to the pressure sensor 159 is housed in the housing 157. The effect is that the flow rate in the flow channel is measured from the pressure difference measured in the fluid circuit and the diameter of the throttle 160, and the control valve 158 is driven by feedback control based on the measured flow rate. The internal flow rate could be determined with high accuracy.

JP-A-11-161342 JP 2001-242940 A

  However, since the conventional pure water flow rate control device 151 has many components, when it is installed in a semiconductor manufacturing apparatus or the like, piping connection work, electrical wiring and air piping work for each component are performed. There is a problem that the operation is complicated and time-consuming, and the piping and wiring are troublesome and a mistake may occur. In addition, pressure loss occurs in the connection part because it is connected via a tube or joint when connecting the piping, and this pressure loss affects the flow rate measurement, increasing the measurement error of the flow rate. There was a problem that became difficult. Furthermore, in the flow rate measuring device 154, components that may be corroded due to its structure are used. Therefore, when a corrosive fluid is used as the fluid, the components in the flow rate measuring device 154 are corroded by permeation of corrosive gas. There was a problem.

  In addition, when the corrosive fluid is used as the fluid, the conventional flow control module 156 corrodes the controller 162 and the driver 161 when the permeated corrosive gas fills the flow control module 156, and the flow measurement and There is a risk that accurate flow control cannot be performed due to the influence of the flow control operation, or in the worst case, it may be damaged. At this time, even if the cause of the module failure is due to corrosion of the controller 162 or the driver 161, the flow control module 156 designed on the assumption that the components are integrated is difficult to repair or replace for each component. Therefore, there is a problem that the cost for repairing damage is increased because the module itself is replaced. In addition, when the fluid flowing into the fluid control device is a pulsating flow with a fast pressure fluctuation cycle, the control valve 158 operates to control the flow rate with respect to the pulsating fluid, but hunting occurs and the flow rate cannot be controlled. There was a problem, and there was a problem that the driver 161 and the control valve 158 would be damaged if continued as they were.

  The present invention has been made in view of the above-described problems of the prior art, and can be easily installed in a semiconductor manufacturing apparatus or the like, connected to piping and wiring, reduces pressure loss due to piping connection, and each module. It is possible to change the flow rate setting after piping and shut off the flow path without causing corrosion even if a corrosive fluid is used as the fluid. An object is to provide a fluid control device capable of controlling the flow rate even when pulsating.

The configuration of the fluid control device of the present invention for solving the above problems will be described with reference to FIGS.
A flowmeter sensor unit 4 including an ultrasonic transducer 12 that transmits ultrasonic waves into a fluid and an ultrasonic transducer 13 that receives ultrasonic waves transmitted from the ultrasonic transducer 12 and outputs signals to the flowmeter amplifier unit 82. And a constant flow valve 5 for controlling the pressure of the fluid by operating pressure, and the flow meter sensor unit 4 and the constant flow valve 5 are provided in one casing 2 having the fluid inlet 3 and the fluid outlet 6. The first feature is that they are connected and installed.

Further, a valve module 1 in which a flow meter sensor unit 4 and a constant flow valve 5 are installed in one casing 2;
Based on the flow rate value calculated by the flow meter amplifier unit 82 that calculates the flow rate based on the signal from the flow meter sensor unit 4, the electropneumatic converter 84 that adjusts the operating pressure of the constant flow valve 5, and the flow meter amplifier unit 82. A control unit 83 for adjusting the operation pressure and performing feedback control includes an electrical module 80 installed in one casing 81,
A second feature is that the valve module 1 and the electrical module 80 are configured separately, for example, each is configured by an independent casing.

The constant flow valve 5 includes a fluid inlet channel 38, an outlet channel 45, a main body 14 formed from the chamber 20 in which the inlet channel 38 and the outlet channel 45 communicate with each other, a valve body 58, A valve member 29 having one diaphragm portion 30, and a second diaphragm portion 31 and a third diaphragm portion 32 which are located at the lower and upper portions of the valve member 29 and have a smaller effective pressure receiving area than the first diaphragm portion 30,
The valve member 29 and the diaphragm portions 30, 31, 32 are mounted in the chamber 20 by fixing the outer peripheral portions of the diaphragm portions 30, 31, 32 to the main body portion 14, and the diaphragm portions 30, 31, 32 are mounted. The chamber 20 is divided into a first pressurizing chamber 21, a second valve chamber 22, a first valve chamber 23, and a second pressurizing chamber 24 by
The first pressurizing chamber 21 has means for constantly applying a constant inward force to the second diaphragm portion 31;
The first valve chamber 23 communicates with the inlet channel 38.
The second valve chamber 22 has a valve seat 43 corresponding to the valve body 58 of the valve member 29, and is located on the first diaphragm portion 30 side with respect to the valve seat 43 and is provided in the first diaphragm portion 30. A lower second valve chamber 25 communicating with the first valve chamber 23 through the hole 55 and an upper second valve chamber 26 provided on the second diaphragm portion 31 side and provided in communication with the outlet channel 45. A fluid control unit 61 that is formed separately, and the fluid pressure in the lower second valve chamber 25 is controlled by changing the opening area between the valve body 58 and the valve seat 43 by the vertical movement of the valve member 29;
The second pressurizing chamber 24 has means for constantly applying a constant inward force to the third diaphragm portion 32,
Furthermore, the constant flow valve 5 is provided with a gas supply hole 50 for supplying a pressurized gas into the first pressurizing chamber 21 and a gas from the first pressurizing chamber 21 provided on the side surface or the upper surface of the main body 14. A third feature is to have a discharge hole 73 for discharging.

  Also, cables 88 and 89 for connecting the flow meter sensor unit 4 of the valve module 1 and the flow meter amplifier unit 82 of the electrical module 80 are connected to the flow meter sensor unit 4 and / or via connectors 77, 78, 85 and 86. A fourth feature is that the flowmeter amplifier unit 82 is detachably provided.

  Further, the connector box 74 is provided in the casing 2 of the valve module 1, and the connector box 74 is provided with an intake hole 75 communicating with the discharge hole 73 of the constant flow valve 5 and an exhaust hole 76 communicating with the outside of the casing 2. This is the fifth feature.

In addition, the flowmeter sensor unit 4 includes an inlet channel 7 that communicates with the fluid inlet 3, a first rising channel 8 that is suspended from the inlet channel 7, and an inlet flow that communicates with the first rising channel 8. A straight channel 9 provided substantially parallel to the axis of the path 7, a second rising channel 10 suspended from the linear channel 9, and an axis of the inlet channel 7 communicating with the second rising channel 10. An outlet channel 11 that is provided substantially in parallel and communicates with the inlet channel 38 of the constant flow valve 5 is provided continuously, and the axis of the straight channel 9 on the side walls of the first and second rising channels 8 and 10 It is a flow meter sensor unit 4 in which the ultrasonic transducers 12 and 13 are arranged to face each other at the intersecting position,
The flow meter amplifier unit 82 is a flow meter amplifier unit 82 to which the ultrasonic transducers 12 and 13 are connected via cables 88 and 89.
The flow meter sensor unit 4 and the flow meter amplifier unit 82 constitute a flow meter,
The flow rate measuring device calculates the flow rate of the fluid flowing through the linear flow path 9 by alternately switching between transmission and reception of the ultrasonic transducers 12 and 13 and measuring the ultrasonic propagation time difference between the ultrasonic transducers 12 and 13. A sixth feature is that the ultrasonic flowmeter is configured as described above.

The flowmeter sensor unit 92 includes an inlet channel 95 that communicates with the fluid inlet 3, a vortex generator 96 that generates Karman vortices suspended in the inlet channel 95, and an outlet channel 97. A straight flow path 98 is provided continuously, and ultrasonic transducers 99 and 100 are disposed on the side wall on the downstream side of the vortex generator 96 of the straight flow path 98 so as to face each other at positions orthogonal to the flow path axial direction. Flow meter sensor unit 92,
The flow meter amplifier unit 104 is a flow meter amplifier unit 104 to which the ultrasonic transducers 99 and 100 are connected via cables 110 and 111.
The flow meter sensor unit 92 and the flow meter amplifier unit 104 constitute a flow meter measuring instrument,
The flow rate measuring device calculates the flow rate based on the phase difference between the signal transmitted by the ultrasonic transducer 99 and the signal received by the ultrasonic transducer 100 for the Karman vortex generation frequency generated downstream of the vortex generator 96. The seventh feature is that the ultrasonic vortex flowmeter is configured as described above.

  Further, the casing 81 of the electrical module 80 has an eighth feature in that a discharge port 91 provided for discharging the gas filled in the casing 81 is formed.

  In the present invention, at least the flowmeter sensor unit 4 and the constant flow valve 5 may be configured to be connected in one casing. This is because the flowmeter sensor unit 4 and the constant flow valve 5 are integrated so that the flow control device can be provided in a compact manner, and the pipe connection is facilitated, and the number of connecting parts such as joints is reduced. Pressure loss due to the connecting portion can be reduced. In addition, since the constant flow valve can control the flow rate to be constant, even if the inflowing fluid is a pulsating flow with a fast pressure fluctuation cycle, stable flow control can be performed without causing hunting. The combination with the flow meter sensor unit 4 is suitable because the flow rate of the fluid flowing out from the constant flow valve 5 is controlled by the constant flow valve 5 so as to be a constant value at the set flow rate.

  In the present invention, the constant flow valve 5 is not particularly limited as long as the flow rate can be controlled by operating pressure, but preferably has the configuration of the constant flow valve 5 of the present invention. This is because the flow rate can be changed by changing the inward force by the pressurizing means of the first pressurizing chamber 21, so that the flow rate can be changed without disassembling the valve. Since the fluid can be shut off by adjusting the inward force by the pressurizing means to be smaller than the inward force by the pressurizing means of the second pressurizing chamber 24, a separate fluid shutoff valve is connected. There is no need to set the flow rate after piping. Furthermore, the compact structure is preferable because stable flow rate control can be obtained.

  Further, the pressurizing means of the first pressurizing chamber 21 and the second pressurizing chamber 24 of the present invention is not particularly limited as long as it presses an upward or downward force. If so, it is not necessary to use metal parts that may be corroded in the constant flow valve 5, so that the constant flow valve 5 can be used without worrying about corrosion. Moreover, when using a spring, it is preferable to coat a spring with a fluororesin, and corrosion is prevented by coating.

  Further, in the present invention, the flow meter sensor unit 4 of the valve module 1 and the flow meter amplifier unit 82 of the electrical module 80 may be directly connected by cables 88 and 89, but a connector 77 connected to the flow meter sensor unit 4; It is preferable that the flow meter sensor unit 4 and the flow meter amplifier unit 82 are connected by cables 88 and 89 via connectors 85 and 86 connected to 78 and the flow meter amplifier unit 82. At this time, only the connectors 77 and 78 connected to the flow meter sensor unit 4 may be provided, or only the connectors 85 and 86 connected to the flow meter amplifier unit 82 may be provided, or both may be provided. By connecting via the connector, the wiring connection of the fluid control device can be made easily and in a short time only by connecting the connector, and since it is detachable, it is easy to remove the wiring connection, so that each module This is preferable because the arrangement of the can be easily changed.

  Further, a connector box 74 may be provided in the casing 2 of the valve module 1 of the present invention. Inert gas or air discharged from the discharge hole 73 of the constant flow valve 5 is supplied into the connector box 74 from the intake hole 75 of the connector box 74 and discharged from the exhaust hole 76, so that corrosive fluid is supplied to the fluid. Even if the corrosive gas permeates into the connector box 74 when used, it is exhausted by the air flow from the intake hole 75 to the exhaust hole 76, and is difficult to collect inside the connector box 74. This is preferable because corrosion of the connectors 77 and 78 that may be corroded is prevented.

  In addition, the flow rate measuring device configured by the flow meter sensor unit 4 and the flow meter amplifier unit 82 of the present invention is not particularly limited as long as the measured flow rate is converted into an electrical signal and output to the control unit 83. An ultrasonic flow meter and an ultrasonic vortex flow meter are preferable, and those having the configurations of the ultrasonic flow meter and the ultrasonic vortex flow meter of the present invention are more preferable. In the case of the ultrasonic flowmeter of the present invention, the flow rate can be accurately measured with respect to a minute flow rate, and therefore, it is suitable for fluid control of a minute flow rate. In addition, the ultrasonic vortex flowmeter of the present invention is suitable for fluid control of a large flow rate because the flow rate can be accurately measured for a large flow rate. Thus, accurate fluid control can be performed by properly using the ultrasonic flowmeter and the ultrasonic vortex flowmeter according to the flow rate of the fluid.

  In addition, the material of the casing 2 of the present invention, the fluid inlet 3, the flowmeter sensor unit 4 excluding the ultrasonic transducers 12 and 13, the components of the constant flow valve 5, the fluid outlet 6, and the casing 81 of the electrical module 80 Can be any of vinyl chloride resin, polypropylene, polyethylene, etc., as long as they are made of resin, especially when a corrosive fluid is used as the fluid, polytetrafluoroethylene (hereinafter referred to as PTFE), polyvinylidene fluoride (hereinafter referred to as PVDF). Fluorine resin such as tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer resin (hereinafter referred to as PFA) is preferable. If it is made of fluororesin, corrosion of each part even if corrosive gas permeates. There is no worry.

  The valve module 1 according to the present invention is provided with the fluid inlet 3, the flowmeter sensor unit 4, the constant flow valve 5, and the fluid outlet 6. Other piping members such as a thermometer may be provided. The electrical module 80 is also provided with the flow meter amplifier 82, the controller 83, and the electropneumatic converter 84, but other electrical components may be provided.

The present invention has the structure as described above, and the following excellent effects can be obtained.
(1) Since the flow meter sensor unit and the constant flow valve are connected in one casing, the flow control device can be provided in a compact manner, piping connection is facilitated, and the number of connecting parts such as joints is reduced. Therefore, the pressure loss due to the connecting portion can be reduced, and stable flow rate control can be performed without causing hunting even if the inflowing fluid is a pulsating flow having a fast pressure fluctuation period.
(2) Since the valve module and the electrical module are divided into two parts, even if a corrosive gas permeates when a corrosive fluid is used as the fluid, the electrical equipment has components that may corrode. The module does not corrode because it can be isolated from the valve module through which the corrosive fluid flows.
(3) Each component that performs fluid control is installed in a valve module and an electrical module, and is divided into two parts. The parts are detachably connected via connectors so that they can be connected to a semiconductor manufacturing apparatus. Installation, piping and wiring connection are easy and can be performed in a short time, and can be easily removed, and the arrangement of each module can be easily changed.
(4) By using the constant flow valve of the configuration of the present invention, stable flow control can be performed with a compact structure, and the flow rate can be changed by changing the inward force by the pressurizing means of the first pressurizing chamber. Therefore, the flow rate can be changed without disassembling the valve, and the inward force due to the pressurizing means in the first pressurizing chamber is more than the inward force due to the pressurizing means in the second pressurizing chamber. When adjusted to a small value, the fluid can be shut off, so there is no need to connect a separate valve for shutting off the fluid, and the flow rate after piping can be set.
(5) By using the ultrasonic flowmeter of the configuration of the present invention, accurate and stable fluid control can be performed when a minute flow rate of fluid is flowing.
(6) By using the ultrasonic vortex flowmeter having the configuration of the present invention, accurate and stable fluid control can be performed when a large flow rate of fluid is flowing.

  Hereinafter, embodiments of the present invention will be described with reference to the embodiments shown in the drawings. However, it is needless to say that the present invention is not limited to the embodiments. FIG. 1 is a longitudinal sectional view of a fluid control apparatus showing a first embodiment of the present invention. FIG. 2 is an enlarged view of a main part of the constant flow valve shown in FIG. FIG. 3 is the same as FIG. 2 with another display added to FIG. FIG. 4 is a longitudinal sectional view of a fluid control apparatus showing a second embodiment of the present invention. FIG. 5 is a cross-sectional view taken along the line AA in FIG.

  Hereinafter, a fluid control apparatus according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 3.

  Reference numeral 1 denotes a valve module. The valve module 1 is formed of a casing 2, a fluid inlet 3, a flow meter sensor unit 4, a constant flow valve 5, and a fluid outlet 6, each of which has the following configuration.

  2 is a PVDF casing. In the casing 2, a flow meter sensor unit 4 and a constant flow valve 5 are fixed to the bottom surface of the casing 2 with bolts and nuts (not shown), a fluid inlet 3, a flow meter sensor unit 4, a constant flow valve 5. It is installed in a state where the flow valve 5 and the fluid outlet 6 are sequentially connected in this order. The casing 2 is provided with a connector box 74 described later. The connector box 74 is configured to be supplied with inert gas or air from the intake hole 75 and exhausted from the exhaust hole 76. Note that the flow meter sensor unit 4 and the constant flow valve 5 may be reversed in order.

  3 is a PTFE fluid inlet. The fluid inflow port 3 communicates with an inlet channel 7 of a flow meter sensor unit 4 which will be described later.

  Reference numeral 4 denotes a flowmeter sensor unit that measures the flow rate of the fluid. The flowmeter sensor unit 4 includes an inlet channel 7 that communicates with the fluid inlet 3, a first rising channel 8 that is suspended from the inlet channel 7, and an inlet channel 7 that communicates with the first rising channel 8. A straight channel 9 provided substantially parallel to the axis of the second channel, a second rising channel 10 suspended from the linear channel 9, and a parallel to the axis of the inlet channel 7 communicating with the second rising channel 10. The ultrasonic vibrators 12 and 13 are opposed to each other at a position intersecting with the axis of the straight flow path 9 on the side walls of the first and second rising flow paths 8 and 10. Has been placed. The ultrasonic vibrators 12 and 13 are covered with a fluororesin, and wiring extending from the vibrators 12 and 13 is connected to connectors 77 and 78 in a connector box 74 described later. The parts other than the ultrasonic transducers 12 and 13 of the flow meter sensor unit 4 are made of PFA.

  A constant flow valve 5 controls the flow rate according to the operation pressure. The constant flow valve 5 is formed of a main body part 14, a valve member 29, a first diaphragm part 30, a second diaphragm part 31, a third diaphragm part 32, and a fourth diaphragm part 33.

  The main body 14 has a chamber 20 that is divided into a first pressurizing chamber 21, a second valve chamber 22, a first valve chamber 23, and a second pressurizing chamber 24, and a fluid flows into the chamber 20 from the outside. The inlet channel 38 and the outlet channel 45 for flowing out from the chamber 20 to the outside are divided into a main body D18, a main body C17, a main body B16, a main body A15, and a main body E19, and these are integrally formed. It is assembled and configured.

  Reference numeral 15 denotes a PTFE main body A located inside the main body 14. A flat circular stepped portion 34 is provided in the upper portion, and the lower first valve has a smaller diameter than the stepped portion 34 in the center of the stepped portion 34. An opening 35 serving as the chamber 27 is provided continuously below the opening 35, and a planar step portion 36 having a planar circular shape having a diameter larger than the diameter of the opening 35 is provided continuously. An annular groove 37 is provided on the upper surface of the main body A15, that is, the peripheral edge of the stepped portion 34, and an inlet channel 38 communicating with the opening 35 of the main body A15 from the side surface is provided. The inlet channel 38 communicates with the outlet channel 11 of the flowmeter sensor unit 4.

  Reference numeral 16 denotes a PTFE main body B which is engaged and fixed to the upper surface of the main body A15. A flat circular stepped portion 39 is provided on the upper portion, and the upper step having a smaller diameter than the stepped portion 39 is provided at the center of the stepped portion 39. An opening 40 serving as the two-valve chamber 26 is provided. Further, an opening 41 having a diameter smaller than the diameter of the opening 40 and a planar circular lower step 42 having the same diameter as the step 34 of the main body A15 are continuously provided below the opening 40. ing. A valve seat 43 is formed around the lower end of the opening 41. An annular groove 44 is provided at a position opposite to the annular groove 37 of the main body A15 on the lower surface portion of the main body B16, that is, the peripheral edge portion of the lower stepped portion 42, and is located on the opposite side to the inlet channel 38 of the main body A15. An outlet channel 45 communicating with the opening 40 from the side surface of the main body B16 is provided. The outlet channel 45 communicates with the fluid outlet 6 described later.

  Reference numeral 17 denotes a PTFE main body C which is fitted and fixed to the upper part of the main body B16. A flat circular diaphragm chamber 46 which penetrates the upper and lower end surfaces of the main body C17 in the center and expands in diameter at the upper part, and the diaphragm chamber 46 and the outside And an annular protrusion 48 fitted to the stepped portion 39 of the main body B16 at the lower end surface is provided around the diaphragm chamber 46.

  Reference numeral 18 denotes a PTFE main body D located at the upper part of the main body C17. The main body D is provided with an air chamber 49 in the lower portion and through the upper surface in the center, and introduces an inert gas or air into the air chamber 49 from the outside. The air supply hole 50 is provided. Further, a microscopic discharge hole 73 provided through the side surface is provided.

  Reference numeral 19 denotes a PVDF main body E which is fitted and fixed to the bottom of the main body A15. The central portion is provided with an opening 51 serving as a second pressurizing chamber 24 opened on the upper surface. Is provided with an annular protrusion 52 fitted and fixed to the lower stepped portion 36 of the main body A15. A small-diameter breathing hole 53 that communicates with the opening 51 is provided on the side surface of the main body E19.

  The five main bodies A15, B16, C17, D18, and E19 constituting the main body 14 described above are clamped and fixed by bolts and nuts (not shown).

  29 is a valve member made of PTFE, which extends in the radial direction from the thickened portion 54 provided in the center in the shape of a flange, the communication hole 55 provided through the thickened portion 54, and the outer peripheral surface of the thickened portion 54. A first diaphragm portion 30 having a circular thin film portion 56 provided and an annular rib portion 57 provided so as to protrude vertically on the outer peripheral edge portion of the thin film portion 56, and an upper center of the first diaphragm portion 30 are provided. An inverted mortar-shaped valve body 58, an upper rod 59 that protrudes upward from the upper portion of the valve body 58, and has an upper end formed in a substantially hemispherical shape, and a lower end surface central portion of the thick portion 54. It has a lower rod 60 that protrudes and has a lower end formed in a substantially hemispherical shape, and is integrally formed. An annular rib portion 57 provided on the outer peripheral edge of the first diaphragm portion 30 is fitted into both annular concave grooves 37 and 44 provided in the main body A15 and the main body B16, and is sandwiched and fixed between the main body A15 and the main body B16. . Further, a space formed between the inclined surface of the valve body 58 and the peripheral edge portion of the lower end surface of the opening 41 of the main body B16 is a fluid control unit 61.

  31 is a second diaphragm portion made of PTFE, and includes a cylindrical thick portion 62 at the center, a circular thin film portion 63 provided radially extending from the lower end surface of the thick portion 62, and a thin film portion 63. It has the annular seal part 64 provided in the outer periphery part, and is formed integrally. Further, the annular seal portion 64 at the peripheral edge of the thin film portion 63 is sandwiched and fixed between the stepped portion 39 at the upper portion of the main body B16 and the annular protrusion 48 of the main body C17.

  The pressure receiving area of the second diaphragm portion 31 needs to be provided smaller than that of the first diaphragm portion 30.

  Reference numeral 32 denotes a third diaphragm portion made of PTFE, which has the same shape as the second diaphragm portion 31 and is arranged upside down. The upper end surface of the thick portion 65 is in contact with the lower rod 60 of the valve member 29, and the annular seal portion 67 at the peripheral portion of the thin film portion 66 is the lower step portion 36 of the main body A15 and the annular protrusion 52 of the main body E19. It is clamped and fixed.

  The pressure receiving area of the third diaphragm portion 32 needs to be provided smaller than that of the first diaphragm portion 30 as described above.

  Reference numeral 33 denotes a fourth diaphragm portion. A cylindrical rib 68 having an outer diameter substantially the same as that of the diaphragm chamber 46 of the main body C17 at the peripheral portion, a columnar portion 69 at the center, and the inner periphery of the lower end surface of the cylindrical rib 68 and the columnar shape. The film portion 70 is provided so as to connect to the outer periphery of the upper end surface of the portion 69. The cylindrical rib 68 is fitted and fixed to the diaphragm chamber 46 of the main body C17, and is clamped and fixed between the main body D18 and the main body C17, and the columnar portion 69 is movable up and down in the diaphragm chamber 46. Further, the thick part 62 of the second diaphragm part 31 is fitted to the lower part of the cylindrical part 69.

  Reference numerals 71 and 72 denote a PVDF spring receiver disposed in the opening 51 of the main body E19 and a SUS spring coated with fluororesin. Both pressurize the third diaphragm portion 32 inward (upward in the figure).

  From the top, the chamber 20 formed inside the main body by the above-described configurations is formed from the first diaphragm 21 and the first diaphragm 30 formed from the fourth diaphragm 33 and the air chamber 49 of the main body D18. A second second valve chamber 25 formed between the lower stepped portion 42 of B16, a second diaphragm portion 31, and an upper second valve chamber 26 formed of the opening 40 of the main body B16. Upper first formed by the lower first valve chamber 27 formed by the two valve chamber 22, the third diaphragm portion 32, and the opening 35 of the main body A15, the first diaphragm portion 30, and the step portion 34 of the main body A15. It can be seen that the first pressure chamber 23 composed of the valve chamber 28 and the second pressurizing chamber 24 formed by the third diaphragm portion 32 and the opening 51 of the main body E19 are divided.

  6 is a PTFE fluid outlet.

  A PVDF connector box 74 is provided in the casing 2. The connector box 74 is provided with an intake hole 75 communicating with the inside of the casing 2 and an exhaust hole 76 communicating with the outside of the casing 2, and the intake hole 75 is connected to the discharge hole 73 of the constant flow valve 5 via a tube. ing. The connector box 74 is configured to be supplied with compressed inert gas or air from the intake hole 75 and exhaust from the exhaust hole 76. Connectors 77 and 78 connected to wiring extending from the ultrasonic transducers 12 and 13 are disposed in the connector box 74, and the connectors 77 and 78 are connected to wiring extending from the flowmeter amplifier unit 82 of the electrical module 80 described later. The cables 88 and 89 are detachably connected to the connectors.

  In addition, an air connector 79 connected to a pipe extending to the air supply hole 50 of the constant flow valve 5 is fixed to the casing 2 so that the connecting portion protrudes from the outer surface of the casing 2.

  Reference numeral 80 denotes an electrical module. The electrical module 80 is formed of a casing 81, a flowmeter amplifier unit 82, a control unit 83, and an electropneumatic converter 84, each of which has the following configuration.

  Reference numeral 81 denotes a PVDF casing. A flowmeter amplifier unit 82, a control unit 83, and an electropneumatic converter 84 are installed in the casing 81. In addition, the casing 81 is supplied with inert gas or air from the outside to the electropneumatic converter 84, the casing 81 is provided with a discharge port 91, and compressed air is supplied into the casing 81 from the electropneumatic converter 84. Yes. The casing 81 is formed so that compressed air supplied from the electropneumatic converter 84 into the casing 81 is discharged from the discharge port 91.

  82 is a flow meter amplifier unit. The flow meter amplifier unit 82 has a calculation unit that calculates the flow rate from the signal output from the flow meter sensor unit 4. The calculation unit includes a transmission circuit that outputs ultrasonic vibration of a fixed period to the ultrasonic transducer 12 on the transmission side, a reception circuit that receives ultrasonic vibration from the ultrasonic transducer 13 on the reception side, and each ultrasonic wave A comparison circuit for comparing the propagation time of vibration and an arithmetic circuit for calculating a flow rate from the propagation time difference output from the comparison circuit are provided.

  Reference numeral 83 denotes a control unit. The control unit 83 has a control circuit that controls the operation pressure of the electropneumatic converter 84 described later by performing feedback control on the flow rate output from the flow meter amplifier unit 82 so that the flow rate is set. .

  84 is an electropneumatic converter that adjusts the operating pressure of the inert gas or air. The electropneumatic converter 84 is composed of an electromagnetic valve that is electrically driven to adjust the operating pressure proportionally, and adjusts the operating pressure of the constant flow valve 5 in accordance with a control signal from the control unit 83.

  In addition, connectors 85 and 86 connected to the wiring extending from the flowmeter amplifier unit 82 are fixed to the casing 81 so that the connecting portions protrude from the outer surface of the casing 81. Similarly, an air connector 87 connected to a pipe extending from the electropneumatic converter 84 is fixed so that the connection portion protrudes from the outer surface of the casing 81.

  The valve module 1 and the electrical module 80 connect the connectors of the cables 88 and 89 to the connectors 77, 78, 85 and 86 of the modules 1 and 80, respectively, so that the tube 90 is connected to the modules 1 and 80. The air connectors 79 and 87 are detachably connected to each of the air connectors 79 and 87 so as to be divided into two parts. Note that the number of cables of the present invention is two, but they may be combined. In this case, one connector is also provided for each module 1, 80.

  Next, the operation of the fluid control apparatus according to the first embodiment of the present invention will be described.

The fluid flowing in from the fluid inlet 3 of the valve module 1 first flows into the flow meter sensor unit 4.
The flow rate of the fluid that has flowed into the flowmeter sensor unit 4 is measured by the straight flow path 9. The ultrasonic vibration is propagated from the ultrasonic transducer 12 located on the upstream side to the ultrasonic transducer 13 located on the downstream side with respect to the fluid flow. The ultrasonic vibration received by the ultrasonic transducer 13 is converted into an electric signal and output to the calculation unit of the flowmeter amplifier unit 82. When the ultrasonic vibration propagates from the upstream ultrasonic transducer 12 to the downstream ultrasonic transducer 13 and is received, transmission / reception is instantaneously switched in the calculation unit, and the ultrasonic transducer located on the downstream side The ultrasonic vibration is propagated from 13 to the ultrasonic transducer 12 located on the upstream side. The ultrasonic vibration received by the ultrasonic transducer 12 is converted into an electric signal and output to the calculation unit of the flowmeter amplifier unit 82. At this time, since the ultrasonic vibration propagates against the flow of the fluid in the straight flow path 9, the propagation of the ultrasonic vibration in the fluid is greater than when the ultrasonic vibration is propagated from the upstream side to the downstream side. The speed is delayed and the propagation time is increased. The output mutual electrical signals are measured for propagation times in the calculation unit of the flowmeter amplifier unit 82, and the flow rate is calculated from the difference in propagation time. The flow rate calculated by the flow meter amplifier unit 82 is converted into an electrical signal and output to the control unit 83.

  Next, the fluid that has passed through the flowmeter sensor unit 4 flows into the constant flow valve 5. The control unit 83 outputs a signal to the electropneumatic converter 84 so that the deviation becomes zero from the deviation from the flow rate measured in real time with respect to an arbitrary set flow rate, and the electropneumatic converter 84 responds accordingly. The operating pressure is supplied to the constant flow valve 5 and driven. The fluid flowing out of the constant flow valve 5 is controlled by the constant flow valve 5 so that the flow rate becomes a constant value at the set flow rate, that is, the deviation between the set flow rate and the measured flow rate is converged to zero.

  Here, the operation of the constant flow valve 5 with respect to the operating pressure supplied from the electropneumatic converter 84 will be described. The fluid that has flowed into the first valve chamber 23 from the inlet channel 38 of the main body A15 is reduced in pressure by passing through the communication hole 55 of the valve member 29 and flows into the lower second valve chamber 25. Furthermore, when the fluid flows from the lower second valve chamber 25 through the fluid control unit 61 into the upper second valve chamber 26, the fluid is decompressed again by the pressure loss in the fluid control unit 61 and flows out from the outlet channel 45. Here, since the diameter of the communication hole 55 is sufficiently small, the flow rate flowing through the valve is determined by the pressure difference before and after the communication hole 55.

  At this time, when the force that each diaphragm portion 30, 31, 32 receives from the fluid is seen, the first diaphragm portion 30 is moved upward in the second direction by the fluid pressure difference between the first valve chamber 23 and the lower second valve chamber 25. The diaphragm portion 31 receives an upward force due to the fluid pressure in the upper second valve chamber 26, and the third diaphragm portion 32 receives a downward force due to the fluid pressure in the first valve chamber 23. Here, since the pressure receiving area of the first diaphragm portion 30 is sufficiently larger than the pressure receiving areas of the second diaphragm portion 31 and the third diaphragm portion 32, the force acting on the second and third diaphragm portions 31, 32 is The force acting on the first diaphragm portion 30 can be almost ignored. Therefore, the force that the valve member 29 receives from the fluid is an upward force due to the fluid pressure difference in the first valve chamber 23 and the lower second valve chamber 25.

  Further, the valve member 29 is biased downward by the pressurizing means of the first pressurizing chamber 21 and simultaneously biased upward by the pressurizing means of the second pressurizing chamber 24. If the force of the pressurizing means in the first pressurizing chamber 21 is adjusted to be larger than the force of the pressurizing means in the second pressurizing chamber 24, the resultant force that the valve member 29 receives from each pressurizing means is a downward force. Become. Here, the pressurizing means of the first pressurizing chamber 21 is based on the operating pressure supplied from the electropneumatic converter 84, and the pressurizing means of the second pressurizing chamber 24 is based on the repulsive force of the spring 72. Is.

  Accordingly, the valve member 29 is stabilized at a position where the downward resultant force by each pressurizing means and the upward force due to the fluid pressure difference in the first valve chamber 23 and the lower second valve chamber 25 are balanced. That is, the pressure in the lower second valve chamber 25 is independently adjusted by the opening area of the fluid control unit 61 so that the resultant force by each pressurizing means and the force by the fluid pressure difference are balanced. Therefore, the fluid pressure difference between the first valve chamber 23 and the lower second valve chamber 25 is constant, and the differential pressure before and after the communication hole 55 is kept constant, so that the flow rate through the valve is always kept constant. It is.

  Here, the constant flow valve 5 operates by balancing the resultant force of each pressurizing means acting on the valve member 29 and the force due to the pressure difference between the first valve chamber 23 and the lower second valve chamber 25. If the resultant force of each pressurizing means acting on the member 29 is adjusted and changed, the fluid pressure difference between the first valve chamber 23 and the lower second valve chamber 25 becomes a value corresponding thereto. That is, by adjusting the downward force by the pressurizing means of the first pressurizing chamber, that is, the operating pressure supplied from the electropneumatic converter 84, the differential pressure around the communication hole 55 can be changed and adjusted. The flow rate can be set to an arbitrary flow rate without disassembling the valve.

  Further, if the force by the pressurizing means in the first pressurizing chamber 21 is adjusted to be smaller than the force by the pressurizing means in the second pressurizing chamber 24, the resultant force acting on the valve member 29 becomes only upward, and the valve of the valve member 29 The body 58 is pressed against the valve seat 43 of the opening 41 of the main body B16, and the fluid can be shut off. That is, if the electropneumatic converter 84 is not adjusted to apply an operating pressure, the constant flow valve is closed.

  With the above operation, the fluid flowing into the fluid inlet 3 of the valve module 1 is controlled to be constant at the set flow rate, and flows out from the fluid outlet 6. The ultrasonic flow meter comprising the flow meter sensor unit 4 and the flow meter amplifier unit 82 measures the flow rate from the propagation time difference with respect to the flow direction of the fluid, and therefore can accurately measure the flow rate even with a minute flow rate. The compact and stable flow rate control can be obtained by the configuration, so it has an excellent effect on fluid control of minute flow rate. Further, even if the upstream pressure or the downstream pressure of the fluid flowing into the fluid inlet 3 of the valve module 1 fluctuates, the flow rate is kept constant by the operation of the constant flow valve 5 so that the instantaneous pulsation of the pump, etc. The flow rate can be stably controlled even if a general pressure fluctuation occurs. Further, since the constant flow valve 5 can be used as an on-off valve by adjusting the operation pressure, it is not necessary to connect a separate fluid shutoff valve. Further, since each component of the valve module 1 is integrally provided in the casing 2, the pressure loss at the connection portion is minimized, and the flow rate can be measured with less error.

  Next, when the fluid of the fluid control device according to the first embodiment of the present invention is a corrosive fluid, an operation when corrosive gas permeates into the valve module will be described.

  The fluid control device of the present invention is configured by being divided into two parts, a valve module 1 and an electrical module 80. Each component in the valve module 1 is made of a fluororesin that is resistant to corrosion, so there is no concern about corrosion. Since the ultrasonic vibrators 12 and 13 are also covered with the fluororesin, corrosion can be prevented, and the spring 72 Can be prevented from being corroded because it is coated with a foot resin. The portions of the valve module 1 that may be corroded are connectors 77 and 78, but the inside of the connector box 74 in which the connectors 77 and 78 are disposed is compressed air that is discharged from the discharge hole 73 and supplied from the intake hole 75. Is always discharged out of the casing 2 from the exhaust hole 76, so that the corrosive gas that has permeated is discharged along with the flow of air, and is less likely to accumulate in the connector box 74 to prevent corrosion. Can do.

  On the other hand, although the electrical module 80 has components that affect flow measurement and fluid control when corroded, it is configured separately from the valve module 1, so it can be installed at a position where corrosive gas does not affect it. Corrosion of parts in the electrical module 80 can be prevented. Further, the inside of the casing 81 of the electrical module 80 is installed at a position where the electrical module 80 is affected by the corrosive gas when the compressed air supplied into the casing 81 from the electropneumatic converter 84 is always exhausted from the exhaust port 91. Even if this is done, the permeated corrosive gas will be discharged along with the air flow, and it will be difficult to accumulate in the casing 81, and corrosion of each part of the electrical module 80 can be prevented.

  Next, a procedure for installing the fluid control apparatus according to the first embodiment of the present invention in the semiconductor manufacturing apparatus will be described.

  First, the valve module 1 is disposed at a predetermined position of a pipe line in the semiconductor manufacturing apparatus, the fluid inlet 3 and the fluid outlet 6 are connected to the pipe of the pipe, and the valve module 1 is fixed in the semiconductor manufacturing apparatus. And the electrical module 80 is installed in the predetermined position away from the pipe line in a semiconductor manufacturing apparatus. Next, one connector of the cables 88 and 89 is placed in the connector box 74 of the valve module 1 and connected to the connectors 77 and 78, and the other connector of the cables 88 and 89 is connected to the connectors 85 and 86 of the electrical module 80. . Subsequently, one end of the tube 90 is inserted and connected to the air connector 79 of the valve module 1, and the other end of the tube 90 is inserted and connected to the air connector 87 of the electrical module 80. By the above procedure, installation in the semiconductor manufacturing apparatus can be performed very easily, and the connection between the wiring and the air piping can be performed easily and in a short time by only connecting the connector. Further, according to the configuration of the present invention, replacement work is easy even when a part of the fluid control device is damaged. Furthermore, when installing a plurality of fluid control devices, it is possible to collectively manage the fluid control devices of the present invention by installing each electrical module together in the control box.

  Hereinafter, the fluid control apparatus according to the second embodiment of the present invention will be described with reference to FIGS. 4 and 5.

  Reference numeral 92 denotes a flowmeter sensor unit installed in the casing 94 of the valve module 93. The flowmeter sensor unit 92 includes a linear flow path 98 including an inlet flow path 95, a vortex generator 96 that generates a Karman vortex suspended in the inlet flow path 95, and an outlet flow path 97. On the downstream side wall of the vortex generator 96 of the flow path 98, the ultrasonic transducers 99 and 100 are disposed opposite to each other at positions orthogonal to the flow path axis direction. The ultrasonic vibrators 99 and 100 are covered with a fluororesin, and wiring extending from the vibrators 99 and 100 is connected to the connectors 102 and 103 in the connector box 101. Similar to the first embodiment, the connector box 101 is formed such that compressed inert gas or air from its intake hole is supplied and exhausted from the exhaust hole. The parts other than the ultrasonic transducers 99 and 100 of the flowmeter sensor unit 92 are made of PTFE.

  Reference numeral 104 denotes a flowmeter amplifier unit disposed in the casing 107 of the electrical module 106. The flow meter amplifier unit 104 is provided with a calculation unit that calculates the flow rate of the fluid by obtaining the flow velocity of the fluid flowing through the flow path from the Karman vortex generation cycle (frequency). The calculation unit includes a transmission circuit that outputs ultrasonic vibrations having a fixed period to the ultrasonic transducer 99 on the transmission side, a reception circuit that receives ultrasonic vibrations from the ultrasonic transducer 100 on the reception side, and each ultrasonic vibration. And a calculation circuit for calculating the flow rate by integrating the Karman vortex detection signals output from the comparison circuit. In addition, connectors 108 and 109 connected to the wiring extending from the flowmeter amplifier unit 104 are fixed to the casing 107 so that the connection portions protrude from the outer surface of the casing 107.

  The valve module 93 and the electrical module 106 are divided into two parts by detachably connecting the connectors of the cables 110 and 111 to the connectors 102, 103, 108, and 109 of the modules 93 and 106, respectively. . Since the other structure of 2nd Embodiment is the same as that of 1st Embodiment, description is abbreviate | omitted.

  Next, the operation of the fluid control apparatus according to the second embodiment of the present invention will be described.

  The fluid that has flowed into the valve module 93 first flows into the flow meter sensor unit 92. The flow rate of the fluid that has flowed into the flowmeter sensor unit 92 is measured by the straight flow path 98. The ultrasonic vibration is propagated from the ultrasonic vibrator 99 toward the ultrasonic vibrator 100 with respect to the fluid flowing in the straight flow path 98. The Karman vortex generated downstream of the vortex generator 96 is generated at a period proportional to the flow velocity of the fluid, and Karman vortices with different vortex directions are alternately generated. When passing, it is accelerated or decelerated in the direction of travel. Therefore, the frequency (period) of the ultrasonic vibration received by the ultrasonic transducer 100 varies due to the Karman vortex. The ultrasonic vibrations transmitted and received by the ultrasonic transducers 99 and 100 are converted into electric signals and output to the calculation unit of the flow meter amplifier unit 104. In the calculation unit of the flowmeter amplifier unit 104, the Kalman obtained from the phase difference between the ultrasonic vibration output from the ultrasonic transducer 99 on the transmission side and the ultrasonic vibration output from the ultrasonic transducer 100 on the reception side. Based on the frequency of the vortex, the flow rate of the fluid flowing through the straight flow path 98 is calculated. The flow rate calculated by the flow meter amplifier unit 104 is converted into an electrical signal and output to the control unit 105. Since the operation of other parts of the second embodiment is the same as that of the first embodiment, the description thereof is omitted.

  Further, when the fluid used in the second embodiment is a corrosive fluid, the action when the corrosive gas permeates into the valve module and the fluid control device of the second embodiment are installed in the semiconductor manufacturing apparatus. Since the procedure is the same as that of the first embodiment, description thereof is omitted. The ultrasonic vortex flow meter comprising the flow meter sensor unit 92 and the flow meter amplifier unit 104 can generate a Karman vortex as the flow rate increases, so that the flow rate can be accurately measured even at a large flow rate, and is excellent in fluid control of a large flow rate. Demonstrate the effect.

It is a longitudinal cross-sectional view of the fluid control apparatus which shows the 1st Example of this invention. FIG. 2 is an enlarged view of a main part of the constant flow valve in FIG. It is the same figure as FIG. 2 which added another display to FIG. It is a longitudinal cross-sectional view of the fluid control apparatus which shows 2nd embodiment of this invention. It is sectional drawing which follows the AA line of FIG. It is a conceptual block diagram which shows the conventional control apparatus of a pure water flow rate. It is a fragmentary sectional view showing the conventional fluid control module.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Valve module 2 Casing 3 Fluid inlet 4 Flowmeter sensor part 5 Constant flow valve 6 Fluid outlet 7 Inlet flow path 8 First rising flow path 9 Straight flow path 10 Second rising flow path 11 Outlet flow path 12 Ultrasonic vibration Child 13 Ultrasonic vibrator 14 Body 15 Body A
16 Body B
17 Body C
18 Body D
19 Body E
20 chamber 21 first pressurization chamber 22 second valve chamber 23 first valve chamber 24 second pressurization chamber 25 lower second valve chamber 26 upper second valve chamber 27 lower first valve chamber 28 upper first valve chamber 29 valve Member 30 1st diaphragm part 31 2nd diaphragm part 32 3rd diaphragm part 33 4th diaphragm part 38 Inlet flow path 43 Valve seat 45 Outlet flow path 55 Communication hole 58 Valve element 61 Fluid control part 74 Connector box 75 Intake hole 76 Exhaust Hole 77 Connector 78 Connector 79 Air Connector 80 Electrical Module 81 Casing 82 Flowmeter Amplifier Unit 83 Control Unit 84 Electropneumatic Converter 85 Connector 86 Connector 87 Air Connector 88 Cable 89 Cable 90 Tube 91 Outlet 92 Flowmeter Sensor Unit 93 Valve Module 94 Casing 95 Inlet channel 96 Vortex generator 9 Outlet channel 98 the straight channel 99 ultrasonic transducers 100 ultrasonic transducers 101 connector box 102 connector 103 connector 104 flowmeter amplifier unit 105 control unit 106 electrical module 107 casing 108 connector 109 connector 110 cable 111 cable

Claims (8)

An ultrasonic transducer (12) that transmits ultrasonic waves into the fluid, and an ultrasonic transducer (13) that receives the ultrasonic waves transmitted from the ultrasonic transducer (12) and outputs a signal to the flow meter amplifier unit (82) And a constant flow valve (5) for controlling the flow rate of the fluid by operating pressure, and at least the flow meter sensor unit (4) and the constant flow valve (5) Connected and installed in one casing (2) having a fluid inlet (3) and a fluid outlet (6),
A fluid control device. A valve module (1) in which the flow meter sensor unit (4) and a constant flow valve (5) are arranged in one casing (2);
A flow meter amplifier unit (82) for calculating a flow rate based on a signal from the flow meter sensor unit (4), an electropneumatic converter (84) for adjusting the operation pressure of the constant flow valve (5), and a flow meter amplifier unit (82 And a control unit (83) for adjusting the operation pressure based on the flow rate value calculated in (1) and performing feedback control, and an electrical module (80) installed in one casing (81),
The valve module (1) and the electrical module (80) are configured separately.
The fluid control apparatus according to claim 1. The constant flow valve (5) is formed of a fluid inlet channel (38), an outlet channel (45), and a chamber (20) in which the inlet channel (38) and the outlet channel (45) communicate with each other. A main body (14), a valve member (29) having a valve body (58) and a first diaphragm portion (30), and a lower portion and an upper portion of the valve member (29) from the first diaphragm portion (30). The second diaphragm portion (31) and the third diaphragm portion (32) having a small effective pressure receiving area,
The valve member (29) and each diaphragm part (30, 31, 32) are mounted in the chamber (20) by fixing the outer peripheral part of each diaphragm part (30, 31, 32) to the main body part (14). And each diaphragm portion (30, 31, 32) causes the chamber (20) to be a first pressurizing chamber (21), a second valve chamber (22), a first valve chamber (23), and a second pressurizing chamber. (24)
The first pressurizing chamber (21) has means for constantly applying a constant force inward to the second diaphragm portion (31),
The first valve chamber (23) communicates with the inlet channel (38),
The second valve chamber (22) has a valve seat (43) corresponding to the valve body (58) of the valve member (29), and is closer to the first diaphragm portion (30) than the valve seat (43). A lower second valve chamber (25) that is located and communicates with the first valve chamber (23) through a communication hole (55) provided in the first diaphragm portion (30), and the second diaphragm portion (31) side And the upper second valve chamber (26) provided in communication with the outlet channel (45). The valve body (58) and the valve seat (43) are moved by the vertical movement of the valve member (29). And a fluid control unit (61) in which the fluid pressure in the lower second valve chamber (25) is controlled by changing the opening area between
The second pressurizing chamber (24) has means for constantly applying a constant force inward to the third diaphragm portion (32).
The fluid control apparatus according to claim 1, wherein the fluid control apparatus is configured as described above. Cables (88, 89) connecting the flow meter sensor unit (4) of the valve module (1) and the flow meter amplifier unit (82) of the electrical module (80) are connectors (77, 78, 85, 86). The flow meter sensor unit (4) and / or the flow meter amplifier unit (82) are detachably provided via the
The fluid control device according to any one of claims 1 to 3, wherein the fluid control device is characterized in that: An air supply hole (50) for supplying pressurized gas into the first pressurizing chamber (21) and the first pressurizing chamber on the side surface or the upper surface of the main body (14) of the constant flow valve (5). (21) A discharge hole (73) for discharging gas from the inside is provided,
The discharge hole (73) communicates with an intake hole (75) of a connector box (74) provided in the casing (2) of the valve module (1), and the connector box (74) is connected to the outside of the casing (2). An exhaust hole (76) that communicates is provided,
The fluid control apparatus according to claim 4. The flowmeter sensor unit (4) includes an inlet channel (7) communicating with the fluid inlet (3), a first rising channel (8) suspended from the inlet channel (7), and a first A straight channel (9) provided in communication with the rising channel (8) and substantially parallel to the axis of the inlet channel (7), and a second rising channel (10) suspended from the straight channel (9). ), And an outlet channel (11) that communicates with the second rising channel (10) and communicates with the inlet channel (38) of the constant flow valve (5) provided substantially parallel to the axis of the inlet channel (7). Are arranged continuously, and the ultrasonic transducers (12, 13) are opposed to each other at a position intersecting with the axis of the straight flow path (9) on the side walls of the first and second rising flow paths (8, 10). The flow meter sensor unit (4) arranged
The flow meter amplifier unit (82) is a flow meter amplifier unit (82) to which ultrasonic transducers (12, 13) are connected via cables (88, 89),
The flow meter sensor unit (4) and the flow meter amplifier unit (82) alternately switch transmission / reception of the ultrasonic transducers (12, 13) to transmit ultrasonic waves between the ultrasonic transducers (12, 13). Constituting an ultrasonic flowmeter that calculates the flow rate of the fluid flowing through the straight flow path (9) by measuring the time difference;
The fluid control device according to any one of claims 1 to 5, wherein the fluid control device is configured as described above. The flowmeter sensor unit (92) includes an inlet channel (95) communicating with the fluid inlet (3) and a vortex generator (96) that generates Karman vortices suspended in the inlet channel (95). And a straight flow path (98) having an outlet flow path (97) are continuously provided, and an ultrasonic transducer (on the downstream side wall of the vortex generator (96) of the straight flow path (98) is provided. 99, 100) is a flow meter sensor unit (92) arranged opposite to each other at a position orthogonal to the flow path axis direction,
The flow meter amplifier unit (104) is a flow meter amplifier unit (104) to which an ultrasonic transducer (99, 100) is connected via a cable (110, 111).
The flowmeter sensor unit (92) and the flowmeter amplifier unit (104) transmit the generated frequency of Karman vortex generated downstream of the vortex generator (96) and the supersonic signal (99) transmitted to the Constituting an ultrasonic vortex flowmeter for calculating the flow rate according to the phase difference with the signal received by the acoustic transducer (100);
The fluid control device according to any one of claims 1 to 5, wherein the fluid control device is configured as described above. The casing (81) of the electrical module (80) has a discharge port (91) provided for discharging the gas filled in the casing (81).
The fluid control device according to any one of claims 2 to 7, wherein the fluid control device is characterized in that:

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