JP4854329B2 - Fluid mixing device - Google Patents

Description

  The present invention relates to a fluid mixing device used in a fluid transport pipe for mixing two or more lines of fluid at an arbitrary ratio. More specifically, the flow rate of the fluid in each line is controlled to mix the fluid at an arbitrary ratio, and even if the pulsating fluid flows, the flow rate can be controlled without any problem, and it can be installed in a narrow space with a compact configuration. In addition, the present invention relates to a fluid mixing apparatus that facilitates piping and wiring connection in installation.

  Conventionally, wet etching, in which a wafer surface is etched using cleaning water obtained by diluting a chemical solution such as hydrofluoric acid with pure water, is used as one step of a semiconductor manufacturing process. It is said that the concentration of cleaning water for these wet etching needs to be managed with high accuracy. In recent years, the method of managing the concentration of cleaning water by the flow rate ratio of pure water and chemical liquid has become the mainstream, and for this reason, fluid mixing devices that manage the flow volume of pure water and chemical liquid with high accuracy have been applied. Yes.

  Although various proposals have been made as fluid mixing devices, there has been a multi-system flow rate control device and a control method thereof shown in FIG. 26 (see, for example, Patent Document 1). The configuration is a flow rate control device that controls the combined fluid flow rate to be the target flow rate by controlling each of the plurality of actuators 602 that respectively adjust the flow rate of the multiple fluid inflow systems 601 by outputting an operation signal. The flow control device outputs an operation signal to the other actuators 602b to 602n excluding one of the plurality of actuators 602 so that the flow rate becomes substantially constant, One is configured to output an operation signal so that the combined fluid flow rate becomes a target value. At this time, in the flow rate control device that controls the flow rate of the combined fluid that flows from the plurality of independent fluid inflow systems 601, feedback calculation is performed from the deviation between the sum of the detected flow rates of the fluid inflow systems 601 and the target value. Calculating means 603 for outputting the adjustment signal, and when the adjustment signal of the calculating means 603 reaches the upper and lower limit values, one fluid inflow system 601 is selected and the other actuators 602b to 602n are selected. Control system determination means 604 that switches to one system of actuators 602a and outputs the adjustment signal as an operation signal is provided.

JP 2004-133642 A

  However, the conventional multi-system flow rate control device and its control method are intended to set the total flow rate of each fluid inflow system 601 to the target flow rate, and each fluid inflow system 601 is not controlled independently, so at least two There is no control to mix the fluid in any ratio. In addition, when a pulsating fluid flows in each fluid inflow system 601, there is a problem that stable fluid control cannot be performed, and a problem that it is difficult to use for controlling the flow rate in a wide flow rate range because the flow rate range cannot be widened. there were. In addition, there are many components of the control device, so the control device itself becomes large and takes up space for installation, and each component is divided by member, and piping connection work, electrical wiring and air piping work are each There is a problem that the work is complicated and time-consuming, and the piping and wiring are troublesome and a mistake may occur.

  The present invention has been made in view of the above-described problems of the prior art, and mainly controls the flow rate of fluid in each line to mix the fluid at an arbitrary ratio, and even if pulsating fluid flows. An object of the present invention is to provide a fluid mixing apparatus that can control the flow rate without any problem, can be installed in a narrow space with a compact configuration, and can be easily connected to piping and wiring in the installation.

The configuration of the fluid mixing apparatus of the present invention for solving the above problems will be described with reference to the drawings. The fluid mixing apparatus mixes each fluid flowing in at least two supply lines 1 and 2 at an arbitrary ratio. Each of the supply lines 1 and 2 measures fluid control valves 4 and 10 that control the pressure of the fluid by controlling the pressure of the control fluid, and measures the actual flow rate of the fluid and converts the measured value of the actual flow rate into an electrical signal. Based on the deviation between the flow rate measuring devices 3 and 9 to be output and the measured value of the actual flow rate and the set flow rate value, a command signal for controlling the opening area of the fluid control valves 4 and 10 is provided. 10 or control units 5 and 11 for outputting fluid control valves 4 and 10 to devices that operate the fluid control valves 4 and 10 respectively, and on the most upstream side of any one of the supply lines 1 and 2. A main lever provided with an on-off valve 535a to be connected And at least one other line provided with an opening / closing valve 536a connected to the most upstream side of the other supply line, the upstream side of the main line opening / closing valve 535a and the opening / closing valve 536a of the other line. The first feature is that it comprises a flushing device 43 that is communicated with the downstream side via an on-off valve 537a .

  Each of the supply lines 1 and 2 further includes on-off valves 18 and 22 for opening or shutting off the fluid flow.

  Further, a third feature is that each of the supply lines 1 and 2 further includes throttle valves 32 and 37 capable of adjusting the flow rate of the fluid by changing the opening area.

  Further, a fourth feature is that a joining portion 15 of the supply lines 1 and 2 is provided on the most downstream side of the supply lines 1 and 2.

  A fifth feature is that on-off valves 40 and 41 are respectively arranged in the supply lines 1 and 2 immediately before the junction 15.

  Further, a sixth feature is that the merging portion 15 is a manifold valve 42 that merges the supply lines 1 and 2 into one flow path.

  Further, the main line provided with the on-off valve 535a connected to the uppermost stream side of any one of the supply lines 1 and 2, and the uppermost stream side of the other supply lines. At least one other line provided with an on-off valve 536a, and the upstream side of the on-off valve 535a of the main line and the downstream side of the on-off valve 536a of the other line are communicated via the on-off valve 537a. The seventh feature is that the flushing device 43 is provided.

Further, the seventh feature is that the various valves and the flow rate measuring device are directly connected without using independent connecting means.

Further, an eighth characteristic is that the various valves and the flow rate measuring device are arranged in one base block.

The ninth feature is that the various valves and the flow rate measuring device are accommodated in a single casing.

Further, the fluid control valves 4 and 10 are provided with a second gap 209 provided at the bottom center and opened to the bottom, an inlet channel 211 communicating with the second gap 209, and an upper face opened at the top. The first gap 210 having a diameter larger than the diameter of the second gap 209, the outlet channel 212 communicating with the first gap 210, the first gap 210, and the second gap 209 are communicated with each other. A main body 201 having a communication hole 213 having a diameter smaller than the diameter of the gap 210, the upper surface of the second gap 209 being the valve seat 214, and an air supply hole 217 and a discharge hole 218 provided on the side surface or the upper face. A bonnet 202 having a cylindrical gap 215 communicated with the inside, a stepped portion 216 provided on the inner peripheral surface of the lower end, and a spring having a through-hole 219 inserted into the stepped portion 216 of the bonnet 202. Receiver 203 and lower end A piston 204 having a first joint portion 224 having a smaller diameter than the through-hole 219 of the spring receiver 203 and having a flange portion 222 provided on the upper portion thereof and movably inserted into the gap 215 of the bonnet 202, and a flange portion of the piston 204 222, a spring 205 sandwiched and supported by the lower end surface of the spring receiver 203 and the upper end surface of the spring receiver 203, and a peripheral portion is clamped and fixed between the main body 201 and the spring receiver 203 so as to cover the first gap 210 of the main body 201. A first diaphragm 227 having a thick central portion forming the first valve chamber 231 and a through hole 219 of the spring receiver 203 are joined and fixed to the first joint portion 224 of the piston 204 at the center of the upper surface. A first valve mechanism 206 having a second joint 229, a third joint 230 provided through the communication hole 213 of the main body 201 at the center of the lower surface, and a second gap 209 in the main body A valve body 232 having a larger diameter than the communication hole 213 of the main body, and a fourth joint portion protruding from the upper end surface of the valve body 232 and joined to the third joint portion 230 of the first valve mechanism 206. 234, a second valve mechanism 207 having a rod 235 that protrudes from the lower end surface of the valve body 232, and a second diaphragm 237 that extends in the radial direction from the lower end surface of the rod 235; A projecting portion 239 located at the lower center and sandwiching and fixing the periphery of the second diaphragm 237 of the second valve mechanism 207 with the main body 201 is provided at the upper center, and a notch recess 240 is provided at the upper end of the projecting portion 239. And a base plate 208 provided with a breathing hole 241 communicating with the notch recess 240, and the valve body 232 of the second valve mechanism 207 and the valve of the main body 201 as the piston 204 moves up and down. A tenth feature is that the opening area of the fluid control unit 242 formed by the seat 214 is changed.

The fluid control valves 4 and 10 include a main body 121 formed from a fluid inlet channel 145, an outlet channel 152, a chamber 127 in which the inlet channel 145 and the outlet channel 152 communicate with each other, and a valve body 165. And a valve member 136 having a first diaphragm portion 137, and a second diaphragm portion 138 and a third diaphragm portion 139 which are located below and above the valve member 136 and have a smaller effective pressure receiving area than the first diaphragm portion 137, The member 136 and the diaphragm portions 137, 138, and 139 are attached to the chamber 127 by fixing the outer peripheral portions of the diaphragm portions 137, 138, and 139 to the main body portion 121, and the diaphragm portions 137, 138, and 139 The chamber 127 is divided into a first pressurizing chamber 128, a second valve chamber 129, a first valve chamber 130, and a second pressurizing chamber 131. The first pressurizing chamber 128 has means for constantly applying a constant inward force to the second diaphragm portion 138, the first valve chamber 130 is in communication with the inlet flow path 145, The valve chamber 129 has a valve seat 150 corresponding to the valve body 165 of the valve member 136, and is located on the first diaphragm portion 137 side with respect to the valve seat 150, and a communication hole 162 provided in the first diaphragm portion 137. Are divided into a lower second valve chamber 132 communicating with the first valve chamber 130 and an upper second valve chamber 133 provided on the second diaphragm portion 138 side and provided in communication with the outlet channel 152. And a fluid control unit 168 in which the opening area between the valve body 165 and the valve seat 150 is changed by the vertical movement of the valve member 136 and the fluid pressure in the lower second valve chamber 134 is controlled. The pressurizing chamber 131 is connected to the third diaphragm portion 139. And the eleventh aspect, further comprising a means for applying a constant force always inward by.

In addition, the throttle valves 32 and 37 are formed with a valve seat surface 252 on the bottom surface of the valve chamber 253 provided in the upper portion, and an inlet channel 255 communicating with a communication port 254 provided in the center of the valve seat surface 252. A main body 251 having an outlet channel 256 communicating with the valve chamber 253, a first valve body 261 that can be inserted into the communication port 254 by axial movement of the stem in the axial direction and projecting downward from the center of the liquid contact surface, and a valve seat It was formed continuously from the second valve body 262 and the second valve body 262 in the shape of an annular ridge formed at a position separated from the first valve body 261 in the radial direction so as to be able to contact and separate from the surface 252. A diaphragm 260 integrally provided with the thin film portion 263, and a male screw portion 279 having a handle 281 fixed to the upper portion thereof and having a pitch larger than the pitch of the female screw portion 278 on the lower inner peripheral surface and the female screw portion 278 on the outer peripheral surface. A first stem 277 having an inner A first stem support body 282 having a female screw portion 283 screwed to the male screw portion 279 of the first stem 277 on the surface, and a male screw portion screwed to the female screw portion 278 of the first stem 277 on the upper outer peripheral surface. A second stem 269 having a lower end portion to which the diaphragm 260 is connected, and a diaphragm retainer 271 that is positioned below the first stem support 282 and supports the second stem 269 in a vertically movable and non-rotatable manner; A twelfth feature is that the first stem 277 and the bonnet 286 for fixing the diaphragm retainer 271 are provided.

Further, the flow meter is an ultrasonic flow meter, Karman vortex flow meter, ultrasonic vortex flow meter, impeller flow meter, electromagnetic flow meter, differential pressure flow meter, positive displacement flow meter, hot wire flow meter or It is a thirteenth feature that it is a mass flow meter.

At least, and hydrofluoric acid or hydrochloric acid, and pure water, of the two fluids, that hydrofluoric acid or hydrochloric acid is pure water with respect to 1 are mixed in a ratio of 10 to 200 14 It is characterized by.

In addition, at least three types of fluids of ammonia water or hydrochloric acid, hydrogen peroxide water, and pure water are ammonia water or hydrochloric acid 1 to 3, and hydrogen peroxide water 1 to 5, pure water. There is a fifteenth aspect of the being mixed in a ratio of 10 to 200.

In addition, at least three types of fluids, hydrofluoric acid, ammonium fluoride, and pure water, hydrofluoric acid is 1, ammonium fluoride is 7-10, and pure water is 50-100. It is a sixteenth feature that they are mixed at a ratio of

  In the present invention, the fluid control valves 4 and 10 are not particularly limited as long as the pressure can be controlled by the operation pressure of the control fluid. However, the fluid control valves 4 and 10 of the present invention perform the fluid pressure control as shown in FIG. What has the structure of the fluid control valve 4 and 10 of this invention which performs the flow control of the fluid as shown in FIG. The control fluid refers to, for example, working air or working oil. This enables stable fluid control, and even if a pulsating fluid flows, the pressure or flow rate can be stabilized at a constant pressure by the fluid control valves 4, 10, 4a. This is preferable because the flow path can be blocked only with a simple structure and a small fluid mixing device can be provided.

  In the present invention, as shown in FIG. 4, on-off valves 18 and 22 may be provided in the supply lines 16 and 17 of the fluid mixing apparatus. This is preferable because the on / off valves 18 and 22 are provided so that the on / off valves 18 and 22 can be shut off to easily perform maintenance and the like (repair and replacement of parts) of the fluid mixing device. In addition, if the fluid mixing device is provided with the on-off valves 18 and 22, when the fluid mixing device is disassembled for maintenance or the like by shutting off the flow channel, the fluid remaining in the flow channel leaks from the decomposed portion. It is preferable that the on-off valves 18 and 22 can perform an emergency shutoff of the fluid when any trouble occurs in the flow path.

  Further, the configuration of the on-off valves 18 and 22 is not particularly limited as long as it has a function of opening or shutting off the flow of fluid, and may be manually operated, such as air drive, electric drive, magnetic drive, etc. It may be automatic. In the case of automatic, a control circuit may be provided and linked to the flow rate measuring devices 19 and 23 to drive the on-off valves 18 and 22 according to the measured values, or may be driven independently from the fluid mixing device. When driven by being linked to the fluid mixing device, it is preferable because collective control can be performed in the fluid mixing device. When driving independently from the fluid mixing device, when trouble occurs in the fluid mixing device, driving is performed without affecting the trouble of the fluid mixing device when the flow path is urgently shut off by the on-off valves 18 and 22. Is preferable.

  Moreover, it is desirable to install the on-off valves 18 and 22 upstream from other valves and flow rate measuring devices in order to perform maintenance or the like. Moreover, the on-off valves 18 and 22 may be provided only on arbitrary lines of the supply lines 16 and 17 or on all lines.

  The throttle valves 32 and 37 of the present invention are not particularly limited as long as the opening area can be adjusted and the flow path is throttled to stabilize the flow rate. However, the throttle valves of the present invention as shown in FIG. What has the structure of 32 and 37 is preferable. This is because the flow rate can be adjusted in a wide range of flow rates, and the minute opening of the throttle valves 32 and 37 can be adjusted easily and precisely, so that the opening can be finely adjusted in a short time and the height can be adjusted. This is preferable because it has a compact structure without taking a place in the direction, and a small fluid mixing device can be provided.

  In FIG. 7, the pitch difference between the male screw portion 279 provided on the outer peripheral surface of the first stem 277 of the throttle valves 32 and 37 and the female screw portion 278 provided on the lower inner peripheral surface is the pitch of the male screw portion 279. However, it is desirable to provide the pitch difference in the range of 1/20 to 1/5 of the male screw pitch. Since the valve body obtains a lift amount within a certain range from fully closed to fully open, the pitch difference should be larger than 1/20 of the male thread pitch in order to prevent the stroke of the handle 281 from becoming too large and the valve height to increase. The pitch difference is preferably smaller than one fifth of the male screw pitch in order to adjust the valve with fine order and high accuracy.

  In FIG. 8, the outer diameter D1 of the straight portion 267 of the first valve body 261 is set to 0.97 D with respect to the inner diameter D of the communication port 254, but the outer diameter D1 of the straight portion 267 is the communication port 254. It is desirable that the inner diameter D is within a range of 0.95D ≦ D1 ≦ 0.995D. In order to prevent the first valve body 261 and the communication port 254 from being in sliding contact, D1 ≦ 0.995D is good, and in order to smoothly adjust the flow rate, 0.95D ≦ D1 is good.

  Further, the taper angle of the taper portion 268 of the first valve body 261 is set at 15 ° with respect to the axis, but is preferably in the range of 12 ° to 28 °. In order to adjust a wide flow rate range without increasing the valve, 12 ° or more is good, and in order not to change the flow rate rapidly with respect to the opening degree, 28 ° or less is good. The diameter D2 of the annular ridge of the second valve body 262 is set to 1.5 D with respect to the inner diameter D of the communication port 254, but the diameter D2 of the annular ridge of the second valve body 262 is The inner diameter D of the communication port 254 is preferably within a range of 1.1D ≦ D2 ≦ 2D. 1.1D ≦ D2 is good in order to obtain a space portion in which the annular groove portion 265 is reliably provided between the first valve body 261 and the second valve body 262 and the fluid flow is suppressed in the annular groove portion 265. On the other hand, in order to suppress the increase rate of the opening area formed by the second valve body 262 and the valve seat surface 252, D2 ≦ 2D is good.

  In the present invention, the flow rate measuring devices 3 and 9 are not particularly limited as long as the measured flow rate is converted into an electrical signal and output to the control units 5 and 11, and the flow rate measuring device is an ultrasonic flow meter, Karman vortex flow rate. A meter, an ultrasonic vortex flow meter, an impeller flow meter, an electromagnetic flow meter, a differential pressure flow meter, a positive displacement flow meter, a hot wire flow meter, a mass flow meter and the like are preferable. In particular, in the case of an ultrasonic flow meter as shown in FIG. 2 or FIG. 24, the flow rate can be measured with high accuracy with respect to a minute flow rate, which is suitable for fluid control of a minute flow rate. In addition, the ultrasonic vortex flowmeter as shown in FIG. 25 is suitable for fluid control of a large flow rate because the flow rate can be measured with high accuracy with respect to the large flow rate. Thus, accurate fluid control can be performed by properly using the ultrasonic flowmeter and the ultrasonic vortex flowmeter according to the flow rate of the fluid. In the present embodiment, the control units 5 and 11 are individually provided in each supply line, but may be provided in a concentrated manner.

  By having the merging portion 15 of each of the supply lines 1 and 2 on the most downstream side of each of the supply lines 1 and 2, the fluid flowing through each of the supply lines 1 and 2 is mixed. Moreover, as shown in FIG. 11, it is preferable that the on-off valves 40 and 41 are respectively arranged in the supply lines 27a and 28b immediately before the junction 39a. This is because each of the supply lines 27a and 28a can be supplied by a single supply line, or fluid can be selected and mixed from each of the supply lines 27a and 28a. When the maintenance of the supply lines 27a and 28a is performed, the on-off valves 40 and 41 are closed to prevent the backflow of the fluid and the like, and the leakage of the fluid is reliably prevented when performing the maintenance and the like. Is preferred. In addition, as shown in FIG. 12, it is preferable that the merging portion is a manifold valve 42. This is preferable because the same effect as the case where the on-off valves 40 and 41 are arranged in the supply lines 27a and 28a immediately before the junction 39a can be obtained and the fluid mixing device can be made compact. In addition, by providing a plurality of supply lines and opening and closing the on-off valves 40 and 41 and the manifold valve 42, it is possible to select and mix some of the fluids in each supply line, and to set the flow rate of each supply line It is preferable that the fluid and its mixing ratio can be freely set by changing The supply lines 27b and 28b and the manifold valve 42 may be directly connected without using independent connection means, or may be arranged in one base block, thereby making the fluid mixing device more compact. It is preferable because it can be formed. Further, a valve, a measuring instrument, or the like may be provided downstream from the merging portion 15 and is not particularly limited.

  Moreover, as shown in FIG. 14, it is preferable to provide the flushing device 43 of the present invention on the most upstream side of each supply line. As a result, the fluid flowing into any one supply line can be used for cleaning. For example, in FIG. 14, the open / close valves 535a and 536a of the flushing device 43 are closed and the open / close valve 537a is opened, so that the pure water flowing to any one supply line 27c can flow to the other supply line 28c. This is preferable because the supply line 28c can be cleaned by flushing with pure water. Further, the configuration of the flushing device 43 of the present invention is not particularly limited as long as the flushing device 43 is provided using a valve, but it is preferable that the valve is provided in one base block in which a flow path is formed. In particular, as shown in FIGS. 15 and 16, the drive units 532, 533, and 534 for opening and closing the valve bodies 550, 551, and 552 are installed on the main body 531 that is one base block in which a flow path is formed. It is more preferable that the configuration is provided at the bottom and the bottom. This is preferable because the flushing device 43 can be provided in a compact manner by integrating the on-off valves and the fluid mixing device can be provided in a compact manner.

  In the embodiment of the present invention, there are two supply lines. However, two or more supply lines may be provided, and two or more supply lines may be merged and then merged with other supply lines. Well, two or more fluids can be mixed in any ratio depending on the number of supply lines. Further, by providing a plurality of supply lines and opening and closing the on-off valves 40 and 41 and the manifold valve 42 provided on the most downstream side of each supply line, the fluid to be mixed can be selected, and the flow rate of each supply line It is preferable that the mixing ratio can be freely set by changing the setting.

  In the fluid mixing apparatus of the present invention, as shown in FIGS. 17 and 18, it is preferable that adjacent valves and flow rate measuring devices are directly connected without using independent connecting means. Direct connection without using an independent connection means here has two concepts, and one concept means that a separate tube or tube is not used. This is a method in which separate members are directly connected via the connection members 46, 47, 48, and 49 for sealing the flow path and changing the direction of the flow path without providing tubes or tubes as shown in FIG. It is. The other concept refers to not using a separate joint. This is a method of directly connecting the end face of the member to be connected or the end face of the connecting portion of the member by interposing a seal member. As a result, the fluid mixing device can be made compact, the installation space can be reduced, the installation work can be facilitated and the working time can be shortened, and the flow path in the fluid mixing device can be shortened to the minimum necessary. Therefore, it is preferable because the fluid resistance can be suppressed.

  In the fluid mixing apparatus of the present invention, as shown in FIGS. 19 and 20, it is preferable that the valve and the flow rate measuring device are arranged in one base block 51 in which a flow path is formed. This is because each component is arranged in one base block 51, the fluid mixing device can be made compact and the installation space can be reduced, the installation work becomes easy and the work time can be shortened, Since the flow path in the fluid mixing device can be shortened to the minimum necessary, the fluid resistance can be suppressed, and the number of parts can be reduced, so that the assembly of the fluid mixing device can be facilitated. It is.

  As shown in FIG. 21, the fluid mixing device of the present invention is preferably configured to be installed in one casing 53. This is preferable because the fluid mixing device is formed as one module by being installed in one casing 53, so that the installation becomes easy and the working time of the installation work can be shortened. Further, the valve 53 and the flow rate measuring device are protected by the casing 53, and the fluid mixing device is made into a black box so that the fluid mixing device adjusted for performing feedback control as in the present invention can be used as a semiconductor manufacturing device or the like. When installed, it is preferable because a user of the semiconductor manufacturing apparatus can prevent the occurrence of problems by easily disassembling the fluid mixing apparatus.

  Furthermore, the fluid mixing device of the present invention is preferably such that the handle portion 54 of the throttle valve 37f is exposed outside the casing 53, and the operator can easily operate the handle portion 54 manually or the like. It is. Moreover, you may make it the structure which exposed the flow measuring devices 3 and 9 from the casing 53 from the casing as needed.

  The order of installation of the flow rate measuring devices 3 and 9, the fluid control valves 4 and 10, the on-off valves 18 and 22, and the throttle valves 32 and 37 of the present invention is not particularly limited. 32 and 37 are preferably located downstream of the fluid control valves 4 and 10 and the flow rate measuring devices 3 and 9, since the flow rate can be easily and stably adjusted.

  In addition, the fluid mixing device of the present invention can be used in various factories such as chemistry, semiconductor manufacturing field, medical field, food, etc., as long as the flow rate of fluids in at least two supply lines needs to be controlled at an arbitrary value. Although it may be used in various industries such as fields, it is preferable to be placed in a semiconductor manufacturing apparatus. The pre-process of the semiconductor manufacturing process includes a photoresist process, a pattern exposure process, an etching process, a flattening process, etc., and the concentration of these cleaning waters is controlled by the flow rate ratio of pure water and chemicals. It is preferred to use a fluid mixing device.

  In addition, the fluid mixed in the fluid mixing apparatus of the present invention and the ratio of the fluids in the fluid mixing apparatus having at least two or more supply lines include two types of fluids, hydrofluoric acid or hydrochloric acid, and pure water. It is preferable that pure water is mixed at a ratio of 10 to 200 with respect to 1 of hydrofluoric acid or hydrochloric acid. Further, in the fluid mixing device having at least three supply lines, three types of fluids, that is, ammonia water or hydrochloric acid, hydrogen peroxide water, and pure water, in which ammonia water or hydrochloric acid is 1 to 3 In addition, it is preferable that hydrogen peroxide water is mixed at a ratio of 1 to 5 and pure water at a ratio of 10 to 200, and three types of fluids of hydrofluoric acid, ammonium fluoride, and pure water are fluorinated. It is preferable that 1 to 10 of hydrofluoric acid is mixed with 7 to 10 of ammonium fluoride and 50 to 100 of pure water. The mixed fluid in which these fluids are mixed in the above ratio is suitably used as a chemical solution when performing substrate surface treatment or the like in the pre-process of the semiconductor manufacturing process.

  A mixed fluid that is a mixture of hydrofluoric acid and pure water, or a mixed fluid that is a mixture of hydrochloric acid and pure water is used to remove natural oxide film, normal oxide film, or metal (metal ion) in substrate surface treatment. It is suitable as a chemical solution to be used. The ratio of pure water to hydrofluoric acid or hydrochloric acid 1 is desirably 10 or more in order to suppress the occurrence of unevenness in the substrate due to an increase in the concentration of the chemical solution, and oxidation is caused by the decrease in the concentration of the chemical solution. In order to prevent a reduction in the treatment effect of film removal or metal removal, it is desirable that it is 200 or less. In addition, this mixed fluid can be effectively used at a liquid temperature of 20 ° C to 25 ° C.

  A mixed fluid in which ammonia water, hydrogen peroxide water, and pure water are mixed is used as a chemical solution for removing foreign matters (particles) in the surface treatment of the substrate. A mixed fluid in which hydrochloric acid, hydrogen peroxide water, and pure water is mixed is a metal solution. It is suitable as a chemical solution used for removal and the like. The ratio of aqueous hydrogen peroxide to ammonia water or hydrochloric acid 1 to 3 is preferably in the range of 1 to 5 in order to effectively remove foreign substances and metals. The ratio of pure water to ammonia water or hydrochloric acid 1 to 3 is desirably 10 or more in order to suppress the occurrence of unevenness or surface roughness on the substrate due to an increase in the concentration of the chemical solution, and the concentration of the chemical solution is decreased. In order to prevent the processing effect of removing foreign matters and metals from decreasing, it is desirable that the number is 200 or less. In addition, this mixed fluid can be effectively used at a liquid temperature of 25 ° C. to 80 ° C., and can be used more effectively at a liquid temperature of 60 ° C. to 70 ° C.

  A mixed fluid obtained by mixing hydrofluoric acid, ammonium fluoride and pure water is suitable for oxide film etching in the surface treatment of a substrate. The ratio of ammonium fluoride to hydrofluoric acid is preferably within a range of 7 to 10 in order to effectively perform oxide film etching. The ratio of pure water to hydrofluoric acid 1 is desirably 50 or more in order to suppress the occurrence of unevenness and surface roughness on the substrate due to an increase in the concentration of the chemical solution, and the concentration of the chemical solution is decreased. In order to prevent a reduction in the processing effect of the oxide film etching, it is desirable that it is 100 or less. In addition, this mixed fluid can be effectively used at a liquid temperature of 20 ° C to 25 ° C.

  The fluid mixing device of the present invention may have a configuration in which a plurality of supply lines through which the same fluid flows are provided. This is, for example, a fluid mixing device composed of one supply line for flowing pure water and two supply lines for flowing hydrochloric acid, and the case of flowing hydrochloric acid to one supply line and the case of flowing to two supply lines. By selecting and allowing the flow rate of hydrochloric acid to be set in a wide range, the mixing ratio of pure water and hydrochloric acid mixed by the fluid mixing device can be set in a wide range.

  Further, the materials of the flow rate measuring devices 3 and 9, fluid control valves 4 and 10, on-off valves 18 and 22, and throttle valves 32 and 37 of the present invention are components that form a flow path in contact with the fluid. Fluorine resins such as polytetrafluoroethylene (hereinafter referred to as PTFE), polyvinylidene fluoride (hereinafter referred to as PVDF), and tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer resin (hereinafter referred to as PFA). It is possible to use hydrofluoric acid, hydrochloric acid, hydrogen peroxide water, ammonia water, and ammonium fluoride without any problem even if the liquid temperature is in the range of 20 ° C to 80 ° C. Even if the corrosive gas permeates, it can be used without worrying about corrosion of the valve and the flow meter. Other materials include polypropylene (hereinafter referred to as PP), polyethylene (hereinafter referred to as PE), vinyl chloride resin (hereinafter referred to as PVC), etc. PP is hydrofluoric acid, hydrochloric acid, aqueous ammonia, fluorine. Ammonium fluoride can be used without problems even when the liquid temperature is in the range of 20 ° C. to 80 ° C., and PE is composed of hydrofluoric acid, hydrochloric acid, hydrogen peroxide solution, aqueous ammonia, and ammonium fluoride at a temperature of 20 ° C. to 60 ° C. It can be used without any problem even if it is flowed in the range of ℃, PVC is hydrochloric acid or ammonia water in the liquid temperature range of 20 ℃ ~ 60 ℃, liquid temperature of hydrofluoric acid, hydrogen peroxide solution, ammonium fluoride is 20 ℃ It can be used without problems even if it is flowed in the range of ˜25 ° C. The material of each component that does not come into contact with the liquid is not particularly limited as long as it has a required strength. Further, the spring 205 used for the fluid control valves 4 and 10 does not come into contact with the liquid, but when a corrosive fluid is allowed to flow, coating with a fluororesin prevents corrosion when the corrosive gas permeates.

The present invention has the structure as described above, and the following excellent effects can be obtained.
(1) By performing feedback control for each supply line of the fluid mixing device, it is possible to stabilize the actual flow rate of the fluid in each supply line so that it becomes a set flow rate with good responsiveness, and mixing at a set ratio In addition, the fluid can be automatically mixed at an arbitrary ratio by changing the set flow rate value.
(2) When the fluid control valve of the present invention is used in the supply line, even if a pulsating fluid flows, the fluid control valve can stabilize the pressure or flow rate at a constant pressure, and the fluid mixing device has a compact configuration. Can be provided small.
(3) When an on-off valve is provided in the supply line, maintenance of the fluid mixing device can be easily performed without causing the fluid to leak by closing the on-off valve, and there is some trouble in the flow path. When this occurs, an emergency shutoff of the fluid can be performed with an on-off valve.
(4) When the throttle valve of the present invention is used in the fluid mixing device, the flow rate can be adjusted in a wide flow range, and the fine opening of the throttle valve can be easily and precisely adjusted, so that the flow rate can be finely adjusted. In addition to being able to perform in a short time, the fluid mixing device can be made small because of a compact structure without taking up a place in the height direction.
(5) If an on-off valve is arranged in the supply line immediately before the merging portion, fluid can be supplied from a single supply line or fluid can be selected and mixed from each supply line. If a manifold valve is provided at the junction, the fluid mixing device can be made more compact.
(6) When the flushing device is arranged on the most upstream side of each supply line, the other supply lines can be flushed with the fluid flowing through the first supply line by the operation of the flushing device, and cleaning can be easily performed.
(7) By directly connecting the various valves and flow rate measuring instrument of the fluid mixing device, the fluid mixing device can be made compact and the installation space can be reduced, the installation work can be facilitated and the work time can be shortened. The flow path in the apparatus is shortened to the minimum necessary, and the fluid resistance can be suppressed.
(8) If the fluid mixing device is provided in one base block with a flow path, the fluid mixing device can be made compact, and the installation space can be reduced, making the installation work easier and reducing the work time. Since the number of parts is small, the assembly of the fluid mixing device can be facilitated, and the flow path in the fluid mixing device can be shortened to the minimum necessary and the fluid resistance can be suppressed.
(9) When the fluid mixing device is installed in one casing, the installation work time can be shortened, each valve and the flow rate measuring device are protected by the casing, and the fluid mixing device is made into a black box. Therefore, it is possible to prevent a trouble caused by the decomposition from occurring.

  Hereinafter, embodiments of the present invention will be described with reference to examples shown in the drawings. However, it is needless to say that the present invention is not limited to the examples. FIG. 1 is a block diagram schematically showing a first embodiment of the fluid mixing apparatus of the present invention. FIG. 2 is a longitudinal sectional view of the flow rate measuring device. FIG. 3 is a longitudinal sectional view of the fluid control valve. FIG. 4 is a block diagram schematically showing a second embodiment of the fluid mixing apparatus of the present invention. FIG. 5 is a longitudinal sectional view of the on-off valve. FIG. 6 is a block diagram schematically showing a third embodiment of the fluid mixing apparatus of the present invention. FIG. 7 is a longitudinal sectional view of the throttle valve. FIG. 8 is an enlarged view of a main part showing the throttle valve of FIG. 7 in an open state. FIG. 9 is an enlarged view of an essential part showing the throttle valve of FIG. 7 in a closed state. FIG. 10 is an enlarged view of a main part showing the throttle valve of FIG. 7 in a half-open state. FIG. 11 is a block diagram schematically showing a fourth embodiment of the fluid mixing apparatus of the present invention. FIG. 12 is a block diagram schematically showing a fifth embodiment of the fluid mixing apparatus of the present invention. FIG. 13 is a sectional view of the manifold valve. FIG. 14 is a block diagram schematically showing a sixth embodiment of the fluid mixing apparatus of the present invention. FIG. 15 is a perspective view schematically showing the flow path of the flushing device of the present invention. FIG. 16 is a longitudinal sectional view taken along line AA in FIG. FIG. 17 is a plan view schematically showing a seventh embodiment of the fluid mixing apparatus of the present invention. 18 is a cross-sectional view taken along line BB in FIG. FIG. 19 is a plan view schematically showing an eighth embodiment of the fluid mixing apparatus of the present invention. 20 is a cross-sectional view taken along the line CC of FIG. FIG. 21 is a plan view schematically showing a ninth embodiment of the fluid mixing apparatus of the present invention. FIG. 22 is a longitudinal sectional view of another fluid control valve of the tenth embodiment of the fluid mixing apparatus of the present invention. FIG. 23 is the same as FIG. 22 with another display added to FIG. FIG. 24 is a longitudinal sectional view of another flow rate measuring device according to the eleventh embodiment of the fluid mixing apparatus of the present invention. FIG. 25 is a longitudinal sectional view of another flow rate measuring device of the twelfth embodiment of the fluid mixing apparatus of the present invention.

  Hereinafter, a fluid mixing apparatus according to a first embodiment of the present invention will be described with reference to FIGS.

  The fluid mixing device is formed from two supply lines, a first supply line 1 and a second supply line 2. The first supply line 1 is connected in the order of the flow rate measuring device 3 and the fluid control valve 4, and a control unit 5 is provided. The second supply line 2 is connected in the order of the flow rate measuring device 9 and the fluid control valve 10, and is connected to the control unit 11. Is provided. A merging portion 15 of the supply lines 1 and 2 is provided on the most downstream side of the first and second supply lines 1 and 2. Each configuration is as follows.

  Reference numerals 3 and 9 denote flow rate measuring devices which are ultrasonic flow meters for measuring the flow rate of the fluid. The flow rate measuring devices 3 and 9 are provided in parallel with the inlet channel 371, the straight channel 372 suspended from the inlet channel 371, and the inlet channel 371 suspended from the straight channel 372. The ultrasonic transducers 374 and 375 are arranged opposite to each other at positions where the side walls of the inlet and outlet channels 371 and 373 intersect with the axis of the straight channel 372. The ultrasonic vibrators 374 and 375 are covered with a fluororesin, and wirings extending from the vibrators 374 and 375 are connected to calculation units 6 and 12 of the control units 5 and 11 described later. The ultrasonic transducers 374 and 375 of the flow rate measuring devices 3 and 9 are made of PFA.

  4 and 10 are fluid control valves for controlling the fluid pressure in accordance with the operation pressure. The fluid control valves 4 and 10 are formed of a main body 201, a bonnet 202, a spring receiver 203, a piston 204, a spring 205, a first valve mechanism body 206, a second valve mechanism body 207, and a base plate 208.

  Reference numeral 201 denotes a PTFE main body having a diameter larger than the diameter of the second gap 209 provided open to the bottom at the center of the lower part and the second gap 209 provided open at the top at the upper part. The inlet channel 211 having one gap 210 and communicating with the second gap 209 on the side surface, and the outlet channel 212 communicating with the first gap 210 on the surface facing the inlet channel 211. In addition, a communication hole 213 that communicates the first gap 210 and the second gap 209 and has a diameter smaller than the diameter of the first gap 210 is provided. The upper surface portion of the second gap 209 is a valve seat 214.

  202 is a PVDF bonnet, in which a cylindrical gap 215 and a stepped portion 216 having a diameter larger than that of the gap 215 are provided on the inner peripheral surface of the lower end, and in order to supply compressed air to the inside of the gap 215 on the side surface. An air supply hole 217 that communicates between the air gap 215 and the outside, and a microhole discharge hole 218 for discharging a small amount of compressed air introduced from the air supply hole 217 are provided. Note that the discharge hole 218 may be omitted if it is not necessary for supplying compressed air.

  203 is a flat circular spring receiver made of PVDF, has a through hole 219 in the center, and is fitted into the stepped portion 216 of the bonnet 202 at substantially the upper half. An annular groove 220 is provided on the side surface of the spring receiver 203, and an O-ring 221 is attached to prevent the compressed air from flowing out from the bonnet 202 to the outside.

  Reference numeral 204 denotes a PVDF piston, which has a disk-shaped flange 222 at the top, a piston shaft 223 that protrudes in a cylindrical shape from the center lower portion of the flange 222, and a female screw that is provided at the lower end of the piston shaft 223 The first joint 224 is formed of a portion. The piston shaft 223 is provided with a smaller diameter than the through hole 219 of the spring receiver 203, and the first joint portion 224 is joined to the second joint portion 229 of the first valve mechanism 206 described later by screwing.

  Reference numeral 205 denotes a SUS spring, which is sandwiched between the lower end surface of the flange portion 222 of the piston 204 and the upper end surface of the spring receiver 203. The spring 205 also expands and contracts as the piston 204 moves up and down, but a long free length is preferably used so that the change in load at that time is small.

  Reference numeral 206 denotes a PTFE first valve mechanism, which includes a membrane portion 226 having a cylindrical portion 225 provided so as to protrude upward from the outer peripheral edge portion, a first diaphragm 227 having a thick portion at the center portion, A second joint portion 229 made of a small-diameter male screw provided at the upper end portion of the shaft portion 228 provided to protrude from the center upper surface of the diaphragm 227, and a female formed at the lower end portion protruding from the center lower surface. It has the 3rd junction part 230 screwed together with the 4th junction part 234 of the postscript 2nd valve mechanism body 207 which consists of a thread part. The cylindrical portion 225 of the first diaphragm 227 is sandwiched and fixed between the main body 201 and the spring receiver 203 so that the first valve chamber 231 formed from the lower surface of the first diaphragm 227 is hermetically formed. Yes. The upper surface of the first diaphragm 227 and the gap 215 of the bonnet 202 are sealed through an O-ring 221 to form an air chamber filled with compressed air supplied from the air supply hole 217 of the bonnet 202. .

  Reference numeral 207 denotes a PTFE second valve mechanism body, which is provided inside the second gap 209 of the main body 201 and provided with a larger diameter than the communication hole 213, and protrudes from the upper end surface of the valve body 232. A shaft portion 233, a fourth joint portion 234 comprising a male screw portion that is joined and fixed to the third joint portion 230 provided at the upper end thereof, and a rod provided so as to protrude from the lower end surface of the valve body 232 235, and a second diaphragm 237 having a cylindrical protrusion 236 that extends in the radial direction from the lower end surface of the rod 235 and protrudes downward from the peripheral edge. The cylindrical protrusion 236 of the second diaphragm 237 is sandwiched between a protrusion 239 of the base plate 208 and the main body 201, which will be described later, so that a second gap 209 of the main body 201 and the second diaphragm 237 are formed. The second valve chamber 238 is sealed.

  Reference numeral 208 denotes a PVDF base plate having a protruding portion 239 for holding and fixing the cylindrical protruding portion 236 of the second diaphragm 237 of the second valve mechanism 207 between the main body 201 at the upper center. A notch recess 240 is provided at the upper end, and a breathing hole 241 communicating with the notch recess 240 is provided on the side surface. The main body 201 is passed between the bonnet 202 and fixed with bolts and nuts (not shown). is doing. In this embodiment, the spring 205 is provided in the gap 215 of the bonnet 202 to urge the piston 204, the first valve mechanism 206, and the second valve mechanism 207 upward. A configuration may be adopted in which the piston 204, the first valve mechanism 206, and the second valve mechanism 207 are urged upward by being provided in the notch recess 240 of the base plate 208.

  Reference numerals 5 and 11 denote control units. The control units 5 and 11 have calculation units 6 and 12 for calculating a flow rate from signals output from the flow rate measuring devices 3 and 9, and control units 7 and 13 for performing feedback control. The calculation units 6 and 12 include a transmission circuit that outputs ultrasonic vibration of a fixed period to the ultrasonic transducer 374 on the transmission side, a reception circuit that receives ultrasonic vibration from the ultrasonic transducer 375 on the reception side, A comparison circuit that compares the propagation times of the ultrasonic vibrations and an arithmetic circuit that calculates a flow rate from the propagation time difference output from the comparison circuit are provided. The control units 7 and 13 have a control circuit that controls the operation pressure of the electropneumatic converters 8 and 14 to be described later so that the flow rate is set to the flow rate output from the calculation units 6 and 12. . In this embodiment, the control units 5 and 11 are provided separately from the fluid mixing device in order to perform centralized control in another place, but may be provided integrally with the fluid mixing device.

  8 and 14 are electropneumatic converters that adjust the operating pressure of the compressed air disposed in the control units 5 and 11. The electropneumatic converters 8 and 14 are composed of electromagnetic valves that are electrically driven to adjust the operation pressure proportionally, and the operation of the fluid control valves 4 and 10 according to the control signals from the control units 5 and 11. Adjust pressure. Note that the electropneumatic converters 8 and 14 may be disposed separately from the control units 5 and 11 without being disposed therein.

  Next, the operation of the fluid mixing apparatus according to the first embodiment of the present invention will be described.

  Here, pure water is introduced into the first supply line 1, and hydrofluoric acid is introduced into the second supply line 2, and mixing is performed so that pure water: hydrofluoric acid = 10: 1. First, the flow rate of pure water flowing into the first supply line 1 is measured by the flow rate measuring device 3, and the operation pressure of the fluid control valve 4 is controlled by the control unit 5 in accordance with the measured flow rate. The most downstream flow rate of the first supply line becomes a set flow rate (the flow rate for the flow rate ratio of the first supply line 1 and the second supply line 2 is 10: 1 and the mixed fluid becomes the set flow rate). To be controlled. Further, the flow rate of the hydrofluoric acid flowing into the second supply line 2 is measured by the flow rate measuring device 9, and the operation pressure of the fluid control valve 10 is controlled by the control unit 11 in accordance with the measured flow rate. The flow rate at the most downstream of the second supply line 2 is the set flow rate (the flow rate at which the ratio of the flow rates of the first supply line 1 and the second supply line 2 is 10: 1 and the mixed fluid becomes the set flow rate) It is controlled to become. Pure water and hydrofluoric acid, the flow rates of which are controlled by the first and second supply lines 1 and 2, are merged and mixed in the merge section 15. The mixed fluid (dilute hydrofluoric acid) mixed is used in the processing step of the substrate cleaning apparatus, and the oxide film of the substrate is removed by the mixed fluid in the cleaning apparatus.

  Next, each operation | movement of the flow measuring devices 3 and 9, the fluid control valves 4 and 10, and the control parts 5 and 11 is demonstrated, referring FIG. 1 thru | or FIG.

  The flow rate of pure water or hydrofluoric acid that has flowed into the flow rate measuring instruments 3 and 9 is measured in the straight flow path 372. The ultrasonic vibration is propagated from the ultrasonic vibrator 374 located on the upstream side to the ultrasonic vibrator 375 located on the downstream side with respect to the flow of pure water or hydrofluoric acid. The ultrasonic vibration received by the ultrasonic transducer 375 is converted into an electric signal and output to the calculation units 6 and 12 of the control units 5 and 11. When the ultrasonic vibration propagates from the upstream ultrasonic transducer 374 to the downstream ultrasonic transducer 375 and is received, transmission / reception is instantaneously switched in the arithmetic units 6 and 12 and positioned downstream. Ultrasonic vibration is propagated from the ultrasonic transducer 375 toward the ultrasonic transducer 374 located upstream. The ultrasonic vibration received by the ultrasonic transducer 374 is converted into an electric signal and output to the calculation units 6 and 12 in the control units 5 and 11. At this time, since the ultrasonic vibration propagates against the flow of the fluid in the straight flow path 372, the propagation of the ultrasonic vibration in the fluid is greater than when the ultrasonic vibration is propagated from the upstream side to the downstream side. The speed is delayed and the propagation time is increased. The output electrical signals are measured for propagation times in the calculation units 6 and 12, and the flow rate is calculated from the difference in propagation times. The flow rates calculated by the calculation units 6 and 12 are converted into electrical signals and output to the control units 7 and 13.

  Next, the pure water or hydrofluoric acid that has passed through the flow rate measuring devices 3 and 9 flows into the fluid control valves 4 and 10. The control units 7 and 13 of the control units 5 and 11 output a signal to the electropneumatic converters 8 and 14 so that the deviation is zero from the deviation from the flow rate measured in real time with respect to any set flow rate. Then, the electropneumatic converters 8 and 14 supply the operation pressure corresponding thereto to the fluid control valves 4 and 10 to drive them. The flow rate of pure water or hydrofluoric acid flowing out from the fluid control valves 4 and 10 is determined by the relationship between the pressure adjusted by the fluid control valves 4 and 10 and the pressure loss after the fluid control valves 4 and 10. The higher the regulated pressure, the larger the flow rate. Conversely, the lower the pressure, the smaller the flow rate. Therefore, pure water or hydrofluoric acid is controlled by the fluid control valves 4 and 10 so that the flow rate becomes a constant value at the set flow rate, that is, the deviation between the set flow rate and the measured flow rate is converged to zero. The

  Here, the action | operation with respect to the fluid (pure water or hydrofluoric acid) of the fluid control valve 4 and 10 with respect to the operation pressure supplied from the electropneumatic converters 8 and 14 is demonstrated (refer FIG. 3).

  The valve body 232 of the second valve mechanism 207 includes the repulsive force of the spring 205 sandwiched between the flange 222 of the piston 204 and the spring receiver 203, and the fluid pressure on the lower surface of the first diaphragm 227 of the first valve mechanism 206. Due to this, a force for urging upward acts, and a force for urging downward by the operating pressure on the upper surface of the first diaphragm 227 is exerted. More precisely, although the lower surface of the valve body 232 and the upper surface of the second diaphragm 237 of the second valve mechanism 207 are subjected to fluid pressure, their pressure receiving areas are substantially equal, so the force is almost offset. . Therefore, the valve body 232 of the second valve mechanism 207 is stationary at a position where the above-described three forces are balanced.

  When the operating pressure supplied from the electropneumatic converters 8 and 14 is increased, the force that pushes down the first diaphragm 227 increases, so that a valve body 232 of the second valve mechanism 207 and the valve seat 214 are formed. Since the opening area of the fluid control unit 242 increases, the pressure in the first valve chamber 231 can be increased. Conversely, when the operating pressure is decreased, the opening area of the fluid control unit 242 is decreased and the pressure is also decreased. Therefore, an arbitrary pressure can be set by adjusting the operation pressure.

  In this state, when the upstream fluid pressure increases, the pressure in the first valve chamber 231 increases instantaneously. Then, the force that the lower surface of the first diaphragm 227 receives from the fluid is greater than the force that the upper surface of the first diaphragm 227 receives from the compressed air due to the operating pressure, and the first diaphragm 227 moves upward. Accordingly, the position of the valve body 232 also moves upward, so that the opening area of the fluid control unit 242 formed between the valve seat 214 and the pressure in the first valve chamber 231 is reduced. Eventually, the position of the valve body 232 moves to a position where the three forces are balanced and stops. At this time, if the load of the spring 205 does not change significantly, the pressure inside the gap 215, that is, the force received by the upper surface of the first diaphragm 227 is constant, so that the pressure received by the lower surface of the first diaphragm 227 is substantially constant. Therefore, the fluid pressure on the lower surface of the first diaphragm 227, that is, the pressure in the first valve chamber 231 is almost the same as the original pressure before the upstream pressure increases.

  When the upstream fluid pressure decreases, the pressure in the first valve chamber 231 also decreases instantaneously. Then, the force that the lower surface of the first diaphragm 227 receives from the fluid is smaller than the force that the upper surface of the first diaphragm 227 receives from the compressed air due to the operating pressure, and the first diaphragm 227 moves downward. Accordingly, the position of the valve body 232 also moves downward, so that the opening area of the fluid control unit 242 formed between the valve seat 214 and the fluid pressure in the first valve chamber 231 is increased. Eventually, the position of the valve body 232 moves to a position where the three forces are balanced and stops. Accordingly, the fluid pressure in the first valve chamber 231 is substantially the same as the original pressure, as in the case where the upstream pressure has increased.

  As a result, the fluid control valves 4 and 10 can obtain a compact and stable pressure control of the fluid (pure water or hydrofluoric acid) by the above-described configuration, and the fluid flow rate is also constant due to the constant fluid pressure. Further, even if the upstream pressure of the fluid (pure water or hydrofluoric acid) flowing into the supply line fluctuates, the flow rate is independently maintained constant by the operation of the fluid control valves 4 and 10, so that the pump pulsation, etc. Even if instantaneous pressure fluctuations occur, the flow rate can be controlled stably.

  By the above operation, the pure water and hydrofluoric acid flowing into the first and second supply lines of the fluid mixing device are flown by the flow rate measuring devices 3 and 9, the fluid control valves 4 and 10, and the control units 5 and 11, respectively. Then, the flow rate of pure water or hydrofluoric acid is stabilized in the respective supply lines by feedback control so as to become the set flow rate with good responsiveness, merged at the merging unit 15, mixed at a set ratio, and discharged. Moreover, the flow volume which flows into the 1st, 2nd supply lines 1 and 2 is changed into a desired actual flow value by changing the setting flow volume value of the control parts 5 and 11, and pure water and hydrofluoric acid are automatically changed to arbitrary Can be mixed in proportions.

  Next, a fluid mixing apparatus according to a second embodiment of the present invention will be described with reference to FIGS.

  The fluid mixing device is formed by two supply lines, a first supply line 16 and a second supply line 17. The first supply line 16 is connected in the order of an on-off valve 18, a flow rate measuring device 19, and a fluid control valve 20, and a control unit 21 is provided. The second supply line 17 is an on-off valve 22, a flow rate measuring device 23, and a fluid control valve 24. Are connected in this order, and a control unit 25 is provided. At the most downstream side of the first and second supply lines 16 and 17, a junction 26 of the supply lines 16 and 17 is provided. Each configuration is as follows.

  18 and 22 are on-off valves. The on-off valves 18 and 22 are formed by a main body 101, a drive unit 102, a piston 103, a diaphragm presser 104, and a valve body 105.

  A PTFE main body 101 has a valve chamber 106 at the center of the upper end in the axial direction, and an inlet channel 107 and an outlet channel 108 communicating with the valve chamber 106. The inlet channel 107 is connected to each supply line. The outlet channels 108 communicate with the flow rate measuring devices 19, 23. An annular groove 109 is provided outside the valve chamber 106 on the upper surface of the main body 101.

  Reference numeral 102 denotes a PVDF drive unit, which is provided with a cylindrical cylinder part 110 inside, and is fixed to the upper part of the main body 101 with bolts and nuts (not shown). A pair of working fluid supply ports 111 and 112 communicated with the upper side and the lower side of the cylinder unit 110 are provided on the side surface of the drive unit 102.

  Reference numeral 103 denotes a PVDF piston, which is fitted into the cylinder portion 110 of the driving portion 102 so as to be sealed and movable up and down in the axial direction, and a rod portion 113 is provided at the center of the bottom surface.

  A PVDF diaphragm retainer 104 has a through-hole 114 through which the rod portion 113 of the piston 103 penetrates at the center, and is sandwiched between the main body 101 and the drive portion 102.

  Reference numeral 105 denotes a PTFE valve element housed in the valve chamber 106, which is screwed to the tip of the rod portion 113 of the piston 103 that passes through the through hole 114 of the diaphragm retainer 104 and protrudes from the lower surface of the diaphragm retainer 104. In accordance with the vertical movement of the piston 103, it moves up and down in the axial direction. The valve body 105 has a diaphragm 115 on the outer periphery, and the outer peripheral edge of the diaphragm 115 is fitted into the annular groove 109 of the main body 101 and is sandwiched between the diaphragm presser 104 and the main body 101. Since the other structure of the second embodiment is the same as that of the first embodiment, the description thereof is omitted.

  Next, the operation of the fluid mixing apparatus according to the second embodiment of the present invention will be described.

  The operation of the on-off valves 18 and 22 is such that when compressed air is injected from the outside as the working fluid from the working fluid supply port 112, the piston 103 is pushed up by the pressure of the compressed air, so the rod portion 113 joined thereto is moved upward. The valve body 105 joined to the lower end of the rod portion 113 is also lifted upward and the valve is opened.

  On the other hand, when compressed air is injected from the working fluid supply port 111, as the piston 103 is pushed down, the rod portion 113 and the valve body 105 joined to the lower end thereof are also pushed down, and the valve is closed. It becomes. Since other operations of the second embodiment are the same as those of the first embodiment, description thereof is omitted.

  With the above operation, when the on-off valve is closed by providing an on-off valve in each supply line, the fluid is shut off by the on-off valve, so maintenance of the flow rate measuring instrument, fluid control valve, control unit, etc. of each supply line It can be done easily. In addition, when any trouble occurs in the flow path, the fluid can be shut off urgently by closing the on-off valve. For example, corrosive fluid leaks to corrode parts in the semiconductor manufacturing equipment. Secondary disasters such as can be prevented. Since other operations of the second embodiment are the same as those of the first embodiment, description thereof is omitted.

  Next, a fluid mixing apparatus according to a third embodiment of the present invention will be described with reference to FIGS.

  The fluid mixing device is formed by two supply lines, a first supply line 27 and a second supply line 28. The first supply line 27 is connected in the order of an on-off valve 29, a flow rate measuring device 30, a fluid control valve 31, and a throttle valve 32, and a control unit 33 is provided. The second supply line 28 is an on-off valve 34, a flow rate measuring device 35, A fluid control valve 36 and a throttle valve 37 are connected in this order, and a control unit 38 is provided. A junction 39 of the supply lines 27 and 28 is provided on the most downstream side of the first and second supply lines 27 and 28. Each configuration is as follows.

  32 and 37 are throttle valves whose opening areas can be adjusted. The throttle valve is formed by a main body 251, a diaphragm 260, a second stem 269, a diaphragm retainer 271, a first stem 277, a first stem support 282, and a bonnet 286.

  Reference numeral 251 denotes a PTFE main body. The main body 251 has a substantially mortar-shaped valve chamber 253 formed by a diaphragm 260 described later, and the bottom of the valve chamber 253 is sealed by a second valve body 262 described later to fully close the flow path. A valve seat surface 252 is formed, and has an inlet channel 255 communicating with a communication port 254 provided at the center of the valve seat surface 252 and an outlet channel 256 communicating with the valve chamber 253. A concave portion 258 for receiving the fitting portion 273 of the post-membrane diaphragm 271 is provided above the valve chamber 253, and an annular concave portion 257 for fitting the annular locking portion 264 of the post-diaphragm 260 is provided on the bottom surface thereof. ing. A male screw part 259 to which a bonnet 286 described later is screwed is provided on the upper outer peripheral surface of the main body 251.

  Reference numeral 260 denotes a PTFE diaphragm having a first valve body 261 projecting from the center of the liquid contact surface at the lower part of the diaphragm 260 and a tip formed at a position separated from the first valve body 261 in the radial direction. An annular convex second valve body 262 having a circular arc cross section, a thin film portion 263 continuously formed in the radial direction from the second valve body 262, and an annular locking portion having a rectangular cross section on the outer periphery of the thin film portion 263 H.264 and a connecting portion 266 connected to the lower end portion of the second stem 269, which will be described later, are integrally provided on the upper portion of the diaphragm 260. The first valve body 261 has a linear portion 267 and a tapered portion 268 continuously provided downward, and an annular groove portion 265 is formed between the first valve body 261 and the second valve body 262. Yes. In order to suppress the flow of fluid in the space portion of the annular groove portion 265, the volume of the space formed by the annular groove portion 265 and the valve seat surface 252 when fully closed is equal to the straight line of the first valve body 261 when fully closed. It is set to at least twice the volume of the space formed by the portion 267 and the communication port 254. Further, as shown in FIG. 3, the outer diameter D1 of the linear portion 267 of the first valve body 261 is set to 0.97D with respect to the inner diameter D of the communication port 254, and the taper portion 268 of the first valve body 261 The taper angle is set to 15 ° with respect to the axis, and the diameter D2 of the annular ridge of the second valve body 262 is set to 1.5D with respect to the inner diameter D of the communication port 254. The diaphragm 260 is sandwiched and fixed between the main body 251 and the diaphragm retainer 271 described below with the annular locking portion 264 fitted in the annular recess 257 of the main body 251.

  Reference numeral 269 denotes a PP second stem. A male screw portion 270 that is screwed into a female screw portion 278 of the first stem 277, which will be described later, is provided on the upper outer peripheral surface of the second stem 269, the lower outer periphery is formed in a hexagonal shape, and the diaphragm 260 is connected to the lower end portion. The parts 266 are connected by screwing.

  Reference numeral 271 denotes a PP diaphragm presser. An insertion portion 272 having a hexagonal outer periphery is provided on the upper portion of the diaphragm retainer 271, a fitting portion 273 having a hexagonal outer periphery is provided on the lower portion, and a flange portion 274 is provided on the outer periphery of the central portion. A hexagonal through hole 275 is provided on the inner periphery of the diaphragm retainer 271, and a tapered portion 276 that decreases in diameter from the lower end surface toward the through hole 275 is provided. The insertion portion 272 is non-rotatably fitted to a hollow portion 284 of the first stem support 282 described later, and the fitting portion 273 is non-rotatably fitted to the recess 258 of the main body 251. The second stem 269 is inserted into the through hole 275, and the second stem 269 is supported so as to be movable up and down and not rotatable.

  277 is a first stem made of PP. A female screw portion 278 having a pitch of 1.25 mm and a male screw portion 279 having a pitch of 1.5 mm are arranged on the outer peripheral surface of the first stem 277 at a lower inner peripheral surface thereof. The pitch difference between the male screw portion 279 and the female screw portion 278 is 0.25 mm, and is formed to be one sixth of the pitch of the male screw portion 279. A stopper portion 280 is provided on the outer periphery of the lower portion of the first stem 277 so as to protrude in the radial direction, and a handle 281 is fixed to the upper portion.

  Reference numeral 282 denotes a first stem support made of PP. A female screw portion 283 that is screwed into a male screw portion 279 of the first stem 277 is provided on the upper inner peripheral surface of the first stem support 282, and an insertion portion 272 for a post-diaphragm retainer 271 is provided on the lower inner periphery. Is provided with a hexagonal hollow portion 284 that is non-rotatably fitted, and a flange portion 285 that is fixed by a bonnet 286 described later is provided on the outer periphery of the lower portion.

  Reference numeral 286 denotes a PP bonnet. A locking portion 287 having an inner diameter smaller than the outer diameter of the flange portion 285 of the first stem support 282 is provided on the upper portion of the bonnet 286, and is screwed to the male screw portion 259 of the main body 251 on the lower inner peripheral surface. A female screw portion 288 is provided. The bonnet 286 is screwed into the main body 251 in such a manner that the flange 285 of the first stem support 282 and the flange 274 of the diaphragm retainer 271 are sandwiched between the locking portion 287 and the main body 251. Can be fixed. Since the other structure of the third embodiment is the same as that of the second embodiment, the description thereof is omitted.

  Next, the operation of the fluid mixing apparatus according to the third embodiment of the present invention will be described.

  The operation in which the throttle valves 32 and 37 adjust the opening degree is as follows. First, when the throttle valves 32 and 37 of this embodiment are fully closed (the state shown in FIG. 9), the fluid flowing in from the inlet channel 255 is The second valve body 262 pressed against the valve seat surface 252 is closed.

  When the handle 281 is rotated in the direction in which the valve is opened, the first stem 277 is raised by the pitch of the external thread portion 279 along with the rotation of the handle 281. The second stem 269 screwed into the female screw portion 278 on the peripheral surface is lowered by the pitch of the female screw portion 278 of the first stem 277. However, since the second stem 269 is accommodated in the through hole 275 of the diaphragm retainer 271 in a non-rotatable state and can move only in the vertical direction, the second stem 269 has an outer periphery of the first stem 277 with respect to the main body 251. The pitch difference between the male screw portion 279 of the surface and the female screw portion 278 of the inner peripheral surface, in this embodiment, the pitch of the male screw portion 279 of the first stem 277 is 1.5 mm, and the pitch of the female screw portion 278 of the first stem 277 Therefore, when the handle 281 interlocked with the first stem 277 is rotated once, the second stem 269 is raised by 0.25 mm (1/6 of the pitch of the male screw portion 279). Along with this, the diaphragm 260 connected to the second stem 269 rises, so that the second valve body 262 initially pressed against the valve seat surface 252 of the main body 251 is separated from the valve seat surface 252, The valve body 261 rises as the diaphragm rises, and the throttle valves 32 and 37 are in a half-open state (the state shown in FIG. 10). The fluid flows from the inlet channel 255 into the valve chamber 253, passes through the outlet channel 256, and is discharged.

  Next, when the throttle valves 32 and 37 are in the half-opened state (the state shown in FIG. 10) and the handle 281 is further rotated in the opening direction, the stopper portion 280 on the lower outer periphery of the first stem 277 is the ceiling of the first stem support 282. The rotation is stopped by pressing against the surface. The diaphragm 260 rises in conjunction with the rotation of the handle 281, the first stem 277 and the second stem 269, the first valve body 261 and the second valve body 262 rise as the diaphragm 260 rises, and the valve It will be in a fully open state (state of FIG. 8). Since the first valve body 261 does not come out of the communication port 254 even in the fully opened state, the flow rate of the throttle valves 32 and 37 is adjusted from fully closed to fully opened.

  In the above operation, the opening area S1 of the first flow rate adjusting portion 289 formed by the first valve body 261 and the communication port 254 according to the opening degree until the throttle valves 32 and 37 are fully closed to fully opened, and the second valve The opening area S2 of the second flow rate adjusting unit 290 formed by the body 262 and the valve seat surface 252 changes, but the action of adjusting the flow rate differs depending on the magnitude relationship between S1 and S2. Hereinafter, the relationship between S1 and S2 and the mechanism of adjusting the flow rate from the fully closed to the fully opened degree of the throttle valves 32 and 37 will be described with reference to FIGS.

  In the case of S1> S2, the opening degree of the throttle valves 32 and 37 is from fully closed to slightly open, and the flow rate is adjusted by the second flow rate adjusting unit 290, that is, by the magnitude of S2. Within the range of S1> S2, the first flow rate adjusting unit 289 can adjust the flow rate to be constant by the straight portion 267 and the communication port 254 of the first valve body 261, and the fluid is flowed by the first flow rate adjusting unit 289. Is made constant and then flows into the space formed by the annular groove 265 before reaching the second flow rate adjusting part 290. The fluid hits the bottom surface of the annular groove portion 265, spreads in the radial direction, hits the inner peripheral surface of the second valve body 262, and further changes the flow direction to reach the second flow rate adjustment portion 290. Stagnated. For this reason, the flow of the fluid is suppressed in the space portion, and a rapid increase in the flow rate can be suppressed. The flow reaches the second flow rate adjustment unit 290 with a flow sufficiently controllable by the second flow rate adjustment unit 290, and the second flow rate adjustment unit Since the flow rate is accurately adjusted at 290, the minute flow rate when the throttle valves 32 and 37 are slightly opened can be adjusted. At this time, since the diameter D2 of the annular ridge of the second valve body 262 is provided within the range of 1.1D ≦ D2 ≦ 2D with respect to the inner diameter D of the communication port 254, an increase in flow rate is suppressed. An effective annular groove 265 can be formed between the first valve body 261 and the second valve body 262, and the flow of fluid from the first flow rate adjusting unit 289 in the space formed by the annular groove 265. Can be suppressed.

  In the case of S1 = S2, the opening area S1 of the first flow rate adjusting unit 289 and the opening area S2 of the second flow rate adjusting unit 290 are the same, and the portion that adjusts the flow rate from this point in time is the second flow rate adjusting unit 290. It switches to one flow rate adjustment part 289. That is, the flow rate is adjusted by the magnitude of S1.

  In the case of S1 <S2, the opening degree of the throttle valves 32 and 37 is from slightly opened to fully opened, and fine flow rate adjustment is difficult in the second flow rate adjustment unit 290, and by the first flow rate adjustment unit 289, That is, it is adjusted by the magnitude of S1. Within the range of S <b> 1 <S <b> 2, the first flow rate adjusting unit 289 adjusts the flow rate by the tapered portion 268 of the first valve body 261 and the communication port 254, and the tapered portion 268 of the first valve body 261 is controlled by the throttle valve 32. Since the opening area S1 is set so as to increase in proportion to the opening of 37, the flow rate is adjusted to increase linearly as the opening of the throttle valves 32, 37 is increased. be able to.

  Therefore, the throttle valves 32 and 37 of the present invention adjust the flow rate by the second flow rate adjustment unit 290 when the opening degree is very small, and from the second flow rate adjustment unit 290 to the first flow rate adjustment unit 289 when the opening degree is increased. Since the flow rate is adjusted by switching to, the flow rate can be proportionally proportional to the opening from fully closed to fully open, and the flow rate can be reliably adjusted from minute to large flow rates. The flow rate can be adjusted in the flow range.

  Next, when the throttle valves 32 and 37 are fully opened and the handle 281 is turned in the closing direction, the valve body is lowered by the reverse operation of the turning operation in the opening direction. , 37 according to the opening degree. When the handle 281 is rotated in the closing direction to be in the fully closed state, the second valve body 262 and the valve seat surface 252 can be surely fully sealed by line contact. When the throttle valves 32 and 37 are fully closed, the first valve body 261 is not in contact with the communication port 254 at all times. It can be prevented from being deformed due to wear or the like, and it can be prevented that the flow rate adjustment characteristics cannot be stabilized by long-term use.

  With the above operation, the feedback-controlled fluid is stably controlled to have a set flow rate by finely adjusting the flow rate with the throttle valves 32 and 37. Further, by changing the opening degree of the throttle valves 32 and 37, the flow rate of each supply line can be controlled in a wide flow rate range. Furthermore, since the throttle valve is configured to easily adjust the fine opening, the fine adjustment of the opening can be performed precisely and in a short time. Since other operations of the third embodiment are the same as those of the second embodiment, description thereof is omitted.

  Next, a fluid mixing apparatus according to a fourth embodiment of the present invention will be described with reference to FIG.

  In the fluid mixing device of this embodiment, in the third embodiment, an opening / closing valve 40 is provided immediately before the merging portion 39a of the first supply line 27a, and an opening / closing valve 41 is provided immediately before the merging portion 39a of the second supply line 28a. Is provided. The on-off valves 40 and 41 have the configuration shown in FIG. 5, and the configuration of each supply line is the same as that of the third embodiment, so that the description thereof is omitted.

  Next, the operation of the fluid mixing apparatus according to the fourth embodiment of the present invention will be described.

  Here, pure water is allowed to flow into the first supply line 27a, and hydrofluoric acid is allowed to flow into the second supply line 28a, and mixing is performed so that pure water: hydrofluoric acid = 10: 1. When the on-off valves 40 and 41 are in the open state, the pure water and hydrofluoric acid whose flow rates are controlled by the first and second supply lines 27a and 28a are merged at the merge section 39a, and the set ratio (first supply) The ratio of the flow rates of the line 27a and the second supply line 28a is mixed at 10: 1), and the mixture is discharged at the set flow rate. The mixed fluid mixed is introduced into the cleaning tank of the substrate cleaning device from the fluid mixing device, and the oxide film on the substrate is removed. When the on-off valve 40 is open and the on-off valve 41 is closed, only pure water controlled by the first supply line 27a flows out. When the on-off valve 40 is closed and the on-off valve 41 is in an open state, only the hydrofluoric acid controlled by the second supply line 28a flows out. Since the operation of each supply line is the same as in the third embodiment, the description thereof is omitted.

  With the above operation, the opening / closing valves 40 and 41 are provided immediately before the junction 39a, so that the pure water of the first supply line 27a, the hydrofluoric acid of the second supply line 28a, and the mixed fluid of each fluid are selected and supplied. Each can be drained at any flow rate.

  Next, based on FIG. 12, FIG. 13, the fluid mixing apparatus which is the 5th Example of this invention is demonstrated.

  In the third embodiment, the fluid mixing apparatus of the present embodiment has a configuration in which a manifold valve 42 is provided at the junction of the first and second supply lines 27b and 28b. Each configuration is as follows.

  Reference numeral 42 denotes a manifold valve. The manifold valve 42 is formed by a main body 501, a first valve body 510, a second valve body 511, and drive units 512 and 513.

  Reference numeral 501 denotes a main body, and a cylindrical first valve chamber 503 and a second valve chamber 504 communicated by a connection flow path 502 are provided on the upper portion of the main body 501. A first series opening 505 is provided in the center of the bottom of the first valve chamber 503, and a first flow path 507 communicating with the first supply line 27 b is provided in the first series opening 505. A second communication port 506 is provided at the bottom center of the second valve chamber 504, and a second flow path 508 communicating with the second supply line 28 b is provided at the second communication port 506. The first valve chamber 503 is provided with a branch channel 509 through which fluid mixed in the manifold valve flows out. The first flow path 507 and the second flow path 508 are provided in parallel on the same side surface of the main body 501, and the branch flow path 509 is provided in a direction orthogonal to the flow paths 507 and 508.

  Reference numeral 510 denotes a first valve body that opens and closes the first series opening 505, and is accommodated in the first valve chamber 503. Reference numeral 511 denotes a second valve body that opens and closes the second communication port 506 and is accommodated in the second valve chamber 504. Reference numeral 512 denotes a drive unit that opens and closes the first valve body 510, and reference numeral 513 denotes a drive unit that opens and closes the second valve body 511. The configuration of the drive units 512 and 513 is the same as that of the drive unit 102 of the on-off valve in FIG. Since the configuration of each supply line is the same as that of the third embodiment, the description thereof is omitted.

  Next, the operation of the fluid mixing apparatus according to the fifth embodiment of the present invention will be described.

  Here, pure water is allowed to flow into the first supply line 27b, and hydrofluoric acid is allowed to flow into the second supply line 28b, and mixing is performed so that pure water: hydrofluoric acid = 10: 1. The first valve body 510 is raised by the drive unit 512 of the manifold valve 42 to open the first communication port 505, and the second valve body 511 is raised by the drive unit 513 to open the second communication port 506. In this case (state of FIG. 13), the pure water controlled by the first supply line 27b flows into the first valve chamber 503 through the first flow path 507, and hydrofluoric acid controlled by the second supply line 28b. Flows into the second valve chamber 504 through the second flow path 508, and the pure water and hydrofluoric acid merge in the second valve chamber 504, and set ratio (the first supply line 27b and the second supply line). The ratio of the flow rate of 28b is mixed at 10: 1), and flows out from the branch channel 509 at the set flow rate. The mixed fluid mixed is introduced into the cleaning tank of the substrate cleaning device from the fluid mixing device, and the oxide film on the substrate is removed.

  Similarly, when the drive units 512 and 513 are driven to open the first series port 505 and the second communication port 506 to be closed, the second supply line 28b is closed and does not flow, but the first supply The pure water controlled by the line 27 b flows out from the branch flow path 509 through the first flow path 507, the first valve chamber 503, and the second valve chamber 504.

  Similarly, when the drive units 512 and 513 are driven to close the first communication port 505 and the second communication port 506 to the open state, the first supply line 27b is closed and does not flow, and the second supply The hydrofluoric acid controlled by the line 28 b flows out from the branch channel 509 through the second channel 508 and the second valve chamber 504. Since the operation of each supply line is the same as in the third embodiment, the description thereof is omitted.

  With the above operation, by providing the manifold valve 42, it is possible to selectively supply pure water of the first supply line 27b, hydrofluoric acid of the second supply line 28b, and mixed fluids of the respective fluids. Can be discharged at a flow rate of In addition, with the above configuration, the fluid mixing device can be switched in a compact manner at the junction.

  Next, a fluid mixing apparatus according to a sixth embodiment of the present invention will be described with reference to FIGS.

  In the third embodiment, the fluid mixing apparatus of the present embodiment has a configuration in which a flushing device 43 is provided on the most upstream side of the first and second supply lines. The configuration of the flushing device 43 is as follows.

  43 is a flushing device installed on the most upstream side of the device having two supply lines. The flushing device 43 is formed by a main body 531 in which a flow path is formed, and a drive unit A532, a drive unit B533, and a drive unit C534 that open and close the flow path. Each configuration is as follows.

  Reference numeral 531 denotes a PTFE main body. A substantially mortar-shaped valve chamber A535 and a valve chamber B536 are provided on the upper portion of the main body 531, and a valve chamber C537 is provided on the lower portion of the main body 531. The valve chamber B536 and the valve chamber C537 are provided on the upper and lower portions of the main body 531. Are arranged on substantially the same axis. A valve seat is formed on the bottom surface of the valve chamber A535 to fully seal the flow path by pressure contact with a valve body A550 described later. The valve passage A538 and the valve chamber A535 communicate with a communication port provided at the center of the valve seat. It has an outlet channel A539 that communicates. Similarly to the valve chamber A535, the valve chamber B536 and the valve chamber C537 are formed with valve seats on the bottom surface, and the inlet channel B540 and the outlet channel B541 that communicate with the valve chamber B536, respectively, and the inlet channel that communicates with the valve chamber C537, respectively. A C542 and an outlet channel C543 are provided.

  Further, a first inlet 544 and a second inlet 545 are provided on one side surface of the main body 531, and a first outlet 546 and a second outlet 547 are provided on the other side surface. The flow path communicating with the first inflow port 544 is divided into two flow paths at the first branch portion 548, and the flow paths communicating with the inlet flow path A538 and the inlet flow path C542 are formed. The channel communicating with the first outlet 546 communicates with the outlet channel A539. The channel communicating with the second inlet 545 communicates with the inlet channel B540. The flow path communicating with the second outlet 547 is divided into two flow paths at the second branch portion 549, and the flow paths communicating with the outlet flow path B541 and the outlet flow path C543 are formed. The first outlet 546 communicates with the first supply line 27c, and the second outlet 547 communicates with the second supply line 28c.

  At this time, the flow path formed in communication from the first inlet 544 to the first outlet 546 through the inlet flow path A538, the valve chamber A535, and the outlet flow path A539 is referred to as a first line that is a main line. The flow path formed from the inlet 545 to the second outlet 547 through the inlet channel B540, the valve chamber B536, the outlet channel B541, and the second outlet 547 is referred to as a second line. A flow path formed in communication with the second branch portion 549 through C542, the valve chamber C537, and the outlet flow path C543 is referred to as a connection line.

  Reference numerals 532, 533, and 534 denote PVDF driving units A, B, and C. The drive unit A532, the drive unit B533, and the drive unit C534 include a valve body A550, a valve body B551, and a valve body C552 that open and close the valve by pressing and separating from the valve seats of the valve chamber A535, the valve chamber B536, and the valve chamber C537. Is provided. The configuration of the drive units 532, 533, and 534 is the same as that of the drive unit 102 of the on-off valve in FIG.

  Here, the on-off valve 535a in FIG. 14 corresponds to a portion formed by the valve chamber A535 in FIG. 15 and FIG. 16 and the valve body A550 of the drive unit A532, and the on-off valve 536a is formed by the valve body B536 and the valve body B551 of the drive unit B533. In the formed portion, the on-off valve 537a corresponds to a portion formed by the valve chamber C537 and the valve body C552 of the drive unit C534. Since the configuration of each supply line is the same as that of the third embodiment, the description thereof is omitted.

  Next, the operation of the fluid mixing apparatus according to the sixth embodiment of the present invention will be described.

  Here, pure water is introduced into the first supply line 27c, hydrochloric acid is introduced into the second supply line 28c, and mixing is performed so that pure water: hydrochloric acid = 20: 1. In the normal mode, the valve body A550 and the valve body B551 are pulled up to open the valve chamber A535 and the valve chamber B536, and the valve body C552 is pushed down (upward in the drawing) to close the valve chamber C537. (State of FIG. 16). At this time, pure water and hydrochloric acid flow independently through the first line and the second line. When pure water is introduced into the first inlet 544 and hydrochloric acid is introduced into the second inlet 545, the pure water that has entered the first inlet 544 passes through the inlet channel A538, the valve chamber A535, and the outlet channel A539. Then, the hydrochloric acid flowing into the first supply line 27c from the first outlet 546 and flowing into the second inlet 545 passes through the inlet channel B540, the valve chamber B536, and the outlet channel B541 and passes through the second outlet 547. It will flow into the two supply lines 28c. Since the operation of each supply line is the same as that of the third embodiment, description thereof is omitted. At this time, the first supply line 27c and the second supply line 28c are mixed at a flow rate ratio of 20: 1 and flow out at a set flow rate. The mixed fluid that has flowed out is introduced into the cleaning tank of the substrate cleaning apparatus from the fluid mixing apparatus, and the oxide film on the substrate is removed.

  In the flushing mode, the valve body A550 and the valve body B551 are pushed downward to close the valve chamber A535 and the valve chamber B536, and the valve body C552 is lifted upward to open the valve chamber C537. At this time, the first line and the second line are connected by the connecting line, and a flow path that flows from the first inlet 544 to the second outlet 547 is formed. Here, the pure water flowing through the first supply line 27c passes through the first inlet 544 through the first branch 548, the inlet channel C542, the valve chamber C537, the outlet channel C543, and the second branch 549, and then passes through the second branch 549. The pure water can flow from the outlet 547 to the second supply line 28c, whereby the second supply line 28c can be flushed with pure water to clean the second supply line 28c.

  By providing the flushing device 43 of the present embodiment by the above operation, the normal mode and the flushing mode can be easily selected, and cleaning can be performed by flushing each supply line in the flushing mode. Further, the flushing device 43 of the present embodiment can be provided as a single member by forming a flow path in one base block which is the main body 531, and the flow path of the flushing apparatus 43 is connected to a pipe or the like. Therefore, the number of parts can be reduced, the flushing device 43 can be formed more compactly, and the flow path can be shortened, so that the fluid resistance can be suppressed.

  Next, a fluid mixing apparatus according to a seventh embodiment of the present invention will be described with reference to FIGS.

  In the fluid mixing device of this embodiment, in the third embodiment, the on-off valves 29d and 34d of the first and second supply lines 27d and 28d are arranged in one base block 44, and the first and second supply lines 27d and 28d fluid control valves 31d and 36d and throttle valves 32d and 37d are disposed in one base block 45, and flow rate measuring devices 30d and 35d are connected to the base blocks 44 and 45, respectively, by connecting members 46, 47, 48, 49 is interposed. This is a direct connection method when a separate tube or tube is not used. Each configuration is as follows.

  44 is a base block in which the on-off valves 29d and 34d of the first and second supply lines 27d and 28d are arranged. The base block 45 is formed with a flow path for the opening / closing valve 29d of the first supply line 27d and a flow path for the opening / closing valve 34d of the second supply line 28d.

  45 is a base block in which the fluid control valves 31d and 36d and the throttle valves 32d and 37d of the first and second supply lines 27d and 28d are arranged. The flow path of the fluid control valve 31d and the throttle valve 32d of the first supply line 27d and the flow path of the fluid control valve 36d and the throttle valve 37d of the second supply line 28d communicate with the base block 45 in this order. Is formed. In addition, the outlet flow path of the throttle valve 32d of the first supply line 27d communicates with the outlet flow path of the throttle valve 37d of the second supply line 28d to form a junction 39d, and communicates from the junction 39d to the outlet 50. is doing. Note that the merging portion 39d may not be provided in the base block 45 but may merge the flow paths that have flowed out from the supply lines of the base block 45.

  46, 47, 48, and 49 are connecting members that change the direction of the flow path. The direction of the flow path is changed from the outlet flow path of the on-off valves 29d and 34d via the connection members 46 and 48 and directly connected to the inlet flow paths of the flow rate measuring instruments 30d and 35d, respectively. The direction of the flow path is changed from the outlet flow path via the connecting members 47 and 49, and each is directly connected to and communicated with the inlet flow path of the fluid control valves 31d and 36d. The configuration and operation of the valves and flow rate measuring instruments of each supply line are the same as those in the third embodiment, and the description thereof is omitted.

  Thereby, since the adjacent valve and the flow rate measuring device are directly connected without using a tube or pipe which is an independent connecting means, the fluid mixing device can be made compact and the space of the installation place can be reduced. Moreover, installation work becomes easy and working time can be shortened, and fluid resistance can be suppressed by shortening the flow path in the fluid mixing apparatus.

  Next, based on FIG. 19, FIG. 20, the fluid mixing apparatus of the 8th Example of this invention is demonstrated.

  In the third embodiment, the fluid mixing apparatus of the present embodiment is the same as the first and second supply lines 27e, 28e, on-off valves 29e, 34e, flow rate measuring devices 30e, 35e, fluid control valves 31e, 36e, and throttle valve 32e. , 37e are arranged in one base block 51. Each configuration is as follows.

  Reference numeral 51 denotes a base block in which on-off valves 29e and 34e, flow rate measuring devices 30e and 35e, fluid control valves 31e and 36e, and throttle valves 32e and 37e of the first and second supply lines 27e and 28e are disposed. The base block 51 includes an on-off valve 29e flow meter 30e, a fluid control valve 31e and a throttle valve 32e in the first supply line 27e, an on-off valve 34e, a flow meter 35e, a fluid control in the second supply line 28e. The flow paths of the valve 36e and the throttle valve 37e are formed to communicate with each other in this order. In addition, the outlet flow path of the throttle valve 32e of the first supply line 27e communicates with the outlet flow path of the throttle valve 37e of the second supply line 28e to form a junction 39e, and communicates from the junction 39e to the outlet 52. To do. In addition, you may make it join the flow path which flowed out from each supply line of the base block 51, without providing the junction part 39e in the base block 51. FIG. The configuration and operation of the valves and flow rate measuring instruments of each supply line are the same as those in the third embodiment, and the description thereof is omitted.

  Thereby, since the fluid mixing apparatus is disposed in one base block 51 in which the flow path is formed, it is possible to make the fluid mixing apparatus compact and to reduce the installation space. In addition, the installation work becomes easy, the work time can be shortened, the fluid resistance can be suppressed by shortening the flow path in the fluid mixing device, and the number of parts can be reduced, so that the fluid mixing device can be assembled. Can be easily.

  Next, a fluid mixing apparatus according to a ninth embodiment of the present invention will be described with reference to FIG. In the present embodiment, only the longitudinal sectional view on the second supply line side shown in FIG. 21 will be described.

  In the fluid mixing apparatus of the present embodiment, in the third embodiment, the on-off valve 34f, the flow rate measuring device 35f, the fluid control valve 36f, and the throttle valve 37f of the first and second supply lines 28f are accommodated in one casing 53. It is arranged. Each configuration is as follows.

  53 is a PVDF casing. In the casing 53, an opening / closing valve 34f, a flow rate measuring device 35f, a fluid control valve 36f, and a throttle valve 37f are fixed to the bottom surface of the casing 53 in this order by bolts and nuts (not shown). The control unit is fixedly installed above the casing 53 above the flow rate measuring device 35f. Further, the handle 54 of the throttle valve 27 f is provided so as to protrude from the casing 53. The connection structure of each valve and the flow rate measuring instrument of this embodiment is the same as that of the seventh embodiment, and the configuration and operation of each supply line valve and the flow rate measuring instrument are the same as those of the third embodiment, so that the description is omitted.

  Thereby, since the fluid mixing apparatus is installed in one casing 53 and the fluid mixing apparatus becomes one module, the installation becomes easy, the work time of the installation work can be shortened, and each component is protected by the casing. In addition, it is possible to prevent the fluid mixing device from being easily disassembled by making the fluid mixing device into a black box, and it is possible to prevent troubles caused by disassembling the fluid mixing device by an unfamiliar user.

  Next, a tenth embodiment of the present invention will be described with reference to FIGS. Here, a case will be described in which the fluid control valves 4 and 10 of the first embodiment are the fluid control valves 4a of this embodiment which are other fluid control valves.

  4a is a fluid control valve. The fluid control valve 4 a is formed by a main body 121, a valve member 136, a first diaphragm portion 137, a second diaphragm portion 138, a third diaphragm portion 139, and a fourth diaphragm portion 140.

  The main body 121 has a chamber 127 that is divided into a first pressurizing chamber 128, a second valve chamber 129, a first valve chamber 130, and a second pressurizing chamber 131, and fluid flows into the chamber 127 from the outside. The inlet channel 145 and the outlet channel 152 for flowing out from the chamber 127 are divided into a main body D125, a main body C124, a main body B123, a main body A122, and a main body E126 from above, and these are assembled together. It is configured.

  Reference numeral 122 denotes a PTFE main body A located inside the main body 121, and a flat circular stepped portion 141 is provided in the upper portion, and the lower first valve chamber has a smaller diameter than the stepped portion 141 at the center of the stepped portion 141. An opening 142 serving as a hole 134 is provided, and a lower planar step 143 having a planar circular shape having a diameter larger than the diameter of the opening 142 is continuously provided below the opening 142. An annular groove 144 is provided on the upper surface of the main body A122, that is, the peripheral edge of the stepped portion 141, and an inlet channel 145 that communicates with the opening 142 of the main body A122 from the side surface.

  123 is a PTFE main body B which is engaged and fixed to the upper surface of the main body A122. A flat circular stepped portion 146 is provided on the upper portion, and an upper second portion having a smaller diameter than the stepped portion 146 is provided at the center of the stepped portion 146. An opening 147 serving as the valve chamber 133 is provided. Further, an opening 148 having a diameter smaller than the diameter of the opening 147 and a planar circular lower step 149 having the same diameter as the step 141 of the main body A 122 are provided continuously below the opening 147. . A valve seat 150 is provided around the lower end of the opening 148. An annular groove 151 is provided at a position opposite to the annular groove 144 of the main body A122 on the lower surface of the main body B123, that is, the peripheral edge of the lower step 149, and is located on the opposite side of the main body A122 from the inlet channel 145. An outlet channel 152 communicating with the opening 147 from the side surface of the main body B123 is provided.

  A PTFE main body C is fitted and fixed to the upper portion of the main body B123. A flat circular diaphragm chamber 153 that penetrates the upper and lower end surfaces of the main body C124 in the center and expands in diameter at the upper portion, and the diaphragm chamber 153 and the outside And an annular protrusion 155 fitted to the stepped portion 146 of the main body B123 at the lower end surface thereof is provided around the diaphragm chamber 153.

  Reference numeral 125 denotes a PTFE main body D located at the upper part of the main body C124. The lower part is an air chamber 156 provided in the lower part and the upper surface is penetrated through the upper surface, and an air supply hole for introducing compressed air into the air chamber 156 from the outside. 157 is provided. In addition, a minute discharge hole 180 provided through the side surface is provided. The discharge hole 180 may not be provided if it is not necessary for supplying compressed air.

  126 is a PVDF main body E that is fitted and fixed to the bottom of the main body A122. The central portion is provided with an opening portion 158 that opens to the upper surface and serves as the second pressurizing chamber 131, and the upper surface of the opening portion 158. Is provided with an annular protrusion 159 fitted and fixed to the lower step 143 of the main body A122. Further, a small-diameter breathing hole 160 that communicates with the opening 158 from the side surface of the main body E126 is provided.

  The five main bodies A122, main body B123, main body C124, main body D125, and main body E126 constituting the main body 121 described above are clamped and fixed by bolts and nuts (not shown).

  Reference numeral 136 denotes a PTFE valve member, which extends in the radial direction from the thick part 161 provided in the shape of a bowl at the center, the communication hole 162 provided through the thick part 161, and the outer peripheral surface of the thick part 161. A first thin film portion 137 having a circular thin film portion 163 that is provided and an annular rib portion 164 that protrudes vertically from the outer peripheral edge of the thin film portion 163, and an upper central portion of the first diaphragm portion 137. An inverted mortar-shaped valve body 165 and an upper rod 166 provided to protrude upward from the upper portion of the valve body 165 and having an upper end formed substantially hemispherical and protruded downward from the central portion of the lower end surface of the thick portion 161. The lower rod 167 is provided and the lower end portion is formed in a substantially hemispherical shape, and is integrally formed. An annular rib portion 164 provided at the outer peripheral edge of the first diaphragm portion 137 is fitted into both annular concave grooves 144 and 151 provided in the main body A 122 and the main body B 123, and is sandwiched and fixed between the main body A 122 and the main body B 123. . A space formed between the inclined surface of the valve body 165 and the peripheral edge of the lower end surface of the opening 148 of the main body B123 is a fluid control unit 168.

  Reference numeral 138 denotes a PTFE second diaphragm portion, which is a cylindrical thick portion 169 at the center, a circular thin film portion 170 provided in a radial direction from the lower end surface of the thick portion 169, and the thin film portion 170. It has the annular seal part 171 provided in the outer peripheral edge part, and is formed integrally. Further, the annular seal portion 171 at the peripheral edge of the thin film portion 170 is sandwiched and fixed between the stepped portion 146 at the upper portion of the main body B123 and the annular protrusion 155 of the main body C124. The pressure receiving area of the second diaphragm portion 138 needs to be provided smaller than that of the first diaphragm portion 137.

  Reference numeral 139 denotes a third diaphragm portion made of PTFE, which has the same shape as the second diaphragm portion 138, and is arranged upside down. The upper end surface of the thick part 172 is in contact with the lower rod 167 of the valve member 136, and the annular seal part 174 at the peripheral part of the thin film part 173 is the lower step part 143 of the main body A122 and the annular protrusion 159 of the main body E126. It is clamped and fixed. In addition, it is necessary to provide the pressure receiving area of the third diaphragm part 139 smaller than that of the first diaphragm part 137 as described above.

  Reference numeral 140 denotes a fourth diaphragm portion, which has a cylindrical rib 175 having an outer diameter substantially the same as that of the diaphragm chamber 153 of the main body C124 at the peripheral portion, a column portion 176 at the center, and an inner periphery of the lower end surface of the cylindrical rib 175 and a column. The film portion 177 is provided so as to be connected to the outer periphery of the upper end surface of the portion 176. The cylindrical rib 175 is fitted and fixed to the diaphragm chamber 153 of the main body C124, and is clamped and fixed between the main body B123 and the main body C124, and the columnar portion 176 is movable up and down in the diaphragm chamber 153. Further, the thick part 169 of the second diaphragm part 138 is fitted to the lower part of the cylindrical part 176.

  Reference numerals 178 and 179 denote a PVDF spring receiver and a SUS spring disposed in the opening 158 of the main body E126. Both pressurize the third diaphragm part 139 inward (in the figure, upward).

  From the top, the chamber 127 formed in the main body 121 by the above-described configuration is arranged from the top to the first pressurizing chamber 128, the first diaphragm portion 137 and the main body formed from the fourth diaphragm portion 140 and the main body D125 air chamber 156. A second second valve chamber 132 formed between the lower second valve chamber 132 formed between the lower step portion 149 of B123, the second diaphragm portion 138, and the opening portion 147 of the main body B123. Upper first valve formed by the lower first valve chamber 134 formed by the valve chamber 129, the third diaphragm portion 139, and the opening 142 of the main body A122, the first diaphragm portion 137, and the step portion 141 of the main body A122. A first valve chamber 130 including a chamber 135, and a second pressurizing chamber 131 formed by a third diaphragm portion 139 and an opening portion 158 of the main body E126. Togawakaru.

  Next, the operation of the tenth embodiment of the present invention will be described.

  Here, the action | operation of the fluid control valve 4a with respect to the operation pressure supplied from an electropneumatic converter (not shown) is demonstrated. The fluid that has flowed into the first valve chamber 130 from the inlet channel 145 of the main body A122 of the fluid control valve 4a is reduced in pressure through the communication hole 162 of the valve member 136 and flows into the lower second valve chamber 132. Furthermore, when the fluid flows from the lower second valve chamber 132 through the fluid control unit 168 and into the upper second valve chamber 133, the fluid is decompressed again by the pressure loss in the fluid control unit 168 and flows out from the outlet channel 152. Here, since the diameter of the communication hole 162 is sufficiently small, the flow rate flowing through the valve is determined by the pressure difference before and after the communication hole 162.

  At this time, when the force that each diaphragm portion 137, 138, 139 receives from the fluid is observed, the first diaphragm portion 137 is moved upwardly by the fluid pressure difference between the first valve chamber 130 and the lower second valve chamber 132. Diaphragm portion 138 receives an upward force due to fluid pressure in upper second valve chamber 133, and third diaphragm portion 139 receives a downward force due to fluid pressure in first valve chamber 130. Here, since the pressure receiving area of the first diaphragm portion 137 is sufficiently larger than the pressure receiving areas of the second diaphragm portion 138 and the third diaphragm portion 139, the force acting on the second and third diaphragm portions 138, 139 is The force acting on the first diaphragm portion 137 can be almost ignored. Therefore, the force that the valve member 136 receives from the fluid is an upward force due to a fluid pressure difference in the first valve chamber 130 and the lower second valve chamber 132.

  Further, the valve member 136 is biased downward by the pressurizing means of the first pressurizing chamber 128 and simultaneously biased upward by the pressurizing means of the second pressurizing chamber 131. If the force of the pressurizing means in the first pressurizing chamber 128 is adjusted to be larger than the force of the pressurizing means in the second pressurizing chamber 131, the resultant force that the valve member 136 receives from each pressurizing means is a downward force. Become. Here, the pressurizing means of the first pressurizing chamber 128 is based on the operating pressure supplied from the electropneumatic converter, and the pressurizing means of the second pressurizing chamber 131 is based on the repulsive force of the spring 179. It is.

  Therefore, the valve member 136 is stabilized at a position where the downward resultant force by each pressurizing means and the upward force due to the fluid pressure difference in the first valve chamber 130 and the lower second valve chamber 132 are balanced. That is, the pressure in the lower second valve chamber 132 is independently adjusted by the opening area of the fluid control unit 168 so that the resultant force by each pressurizing means and the force by the fluid pressure difference are balanced. Therefore, the fluid pressure difference in the first valve chamber 130 and the lower second valve chamber 132 is constant, and the differential pressure before and after the communication hole 162 is kept constant, so that the flow rate through the valve is always kept constant. It is.

  Here, the fluid control valve 4a operates by balancing the resultant force of each pressurizing means acting on the valve member 136 and the force due to the pressure difference between the first valve chamber 130 and the lower second valve chamber 132. If the resultant force of each pressurizing means acting on 136 is adjusted and changed, the fluid pressure difference between the first valve chamber 130 and the lower second valve chamber 132 becomes a value corresponding thereto. That is, by adjusting the downward force by the pressurizing means of the first pressurizing chamber, that is, the operation pressure supplied from the electropneumatic converter, the differential pressure around the communication hole 162 can be changed and adjusted. The flow rate can be set to an arbitrary flow rate without disassembling the valve.

  Further, if the force by the pressurizing means of the first pressurizing chamber 128 is adjusted to be smaller than the force by the pressurizing means of the second pressurizing chamber 131, the resultant force acting on the valve member 136 is only upward, and the valve of the valve member 136 The body 165 is pressed against the valve seat 150 of the opening 148 of the main body B123, and the fluid can be shut off. That is, if the electropneumatic converter is not adjusted to apply the operating pressure, the fluid control valve 4a is closed.

  Thus, the fluid flowing through the supply line of the fluid mixing device is controlled to be constant at the set flow rate by using the fluid control valve 4a. In addition, even if the upstream pressure or downstream pressure of the fluid flowing into the supply line fluctuates, the flow rate is independently maintained constant by the operation of the fluid control valve 4a, so instantaneous pressure fluctuations such as pump pulsation occur. Even so, the flow rate can be controlled stably. In addition, since the fluid control valve 4a is configured not to be affected by back pressure fluctuation, it can be suitably used in applications where the back pressure fluctuates. The fluid control valve 4a can also be used as an on-off valve by adjusting the operation pressure.

  Next, an eleventh embodiment of the present invention will be described with reference to FIG. Here, the case where the flow rate measuring devices 3 and 9 of the first embodiment are the flow rate measuring device 3a of the present embodiment which is another ultrasonic flow meter will be described.

  3a is a flow rate measuring device for measuring the flow rate of the fluid. The flow rate measuring device 3a is provided substantially parallel to the axis of the inlet channel 381, the first rising channel 382 extending from the inlet channel 381, the first rising channel 382 extending from the inlet channel 381, and the first rising channel 382. A straight channel 383, a second rising channel 384 extending from the straight channel 383, and an outlet channel 385 communicating with the second rising channel 384 and provided substantially parallel to the axis of the inlet channel 381. The ultrasonic transducers 386 and 387 are arranged so as to face each other at positions intersecting with the axis of the straight flow path 383 on the side walls of the first and second rising flow paths 382 and 384. The ultrasonic transducers 386 and 387 are covered with a fluororesin, and wirings extending from the transducers 386 and 387 are connected to a calculation unit (not shown) of a control unit (not shown). Note that parts other than the ultrasonic transducers 386 and 387 of the flow rate measuring device 3a are made of PFA.

  Next, the operation of the eleventh embodiment of the present invention will be described.

  The flow rate of the fluid that has flowed into the fluid measuring instrument 3a is measured in the straight flow path 383. The ultrasonic vibration is propagated from the ultrasonic transducer 386 positioned on the upstream side to the ultrasonic transducer 387 positioned on the downstream side with respect to the fluid flow. The ultrasonic vibration received by the ultrasonic transducer 387 is converted into an electrical signal and output to a calculation unit (not shown) of a control unit (not shown). When the ultrasonic vibration propagates from the upstream ultrasonic transducer 386 to the downstream ultrasonic transducer 387 and is received, transmission / reception is instantaneously switched in the calculation unit, and the ultrasonic transducer located on the downstream side Ultrasonic vibration is propagated from 387 toward the ultrasonic transducer 386 located on the upstream side. The ultrasonic vibration received by the ultrasonic transducer 386 is converted into an electric signal and output to the calculation unit in the control unit. At this time, since the ultrasonic vibration propagates against the flow of the fluid in the straight flow path 383, the propagation of the ultrasonic vibration in the fluid is greater than when the ultrasonic vibration is propagated from the upstream side to the downstream side. The speed is delayed and the propagation time is increased. The output electrical signals are measured for propagation time in the calculation unit, and the flow rate is calculated from the difference in propagation time. The flow rate calculated by the calculation unit is converted into an electric signal and output to a control unit (not shown).

  Thereby, since the flow rate measuring device 3a which is an ultrasonic flowmeter measures a flow rate from the propagation time difference with respect to the flow direction of the fluid, the flow rate can be accurately measured even with a minute flow rate.

  Next, a twelfth embodiment of the present invention will be described with reference to FIG. Here, a case will be described in which the flow rate measuring devices 3 and 9 of the first embodiment are the flow rate measuring device 3b of the present embodiment which is an ultrasonic vortex flowmeter.

  3b is a flow rate measuring device for measuring the flow rate of the fluid. The flow rate measuring device 3b includes a linear flow path 394 including an inlet flow path 391, a vortex generator 392 that generates Karman vortex suspended in the inlet flow path 391, and an outlet flow path 393. On the downstream side wall of the vortex generator 392 in the path 394, ultrasonic transducers 395 and 396 are disposed opposite to each other at positions orthogonal to the flow path axis direction. The ultrasonic vibrators 395 and 396 are covered with a fluororesin, and wiring extending from the vibrators 395 and 396 is connected to a calculation unit (not shown) of a control unit (not shown). Except for the ultrasonic transducers 395 and 396 of the flow rate measuring device 3b, they are made of PTFE.

  Next, the operation of the twelfth embodiment of the present invention will be described.

  The flow rate of the fluid flowing into the fluid measuring instrument 3b is measured by the straight flow path 394. The ultrasonic vibration is propagated from the ultrasonic vibrator 395 toward the ultrasonic vibrator 396 with respect to the fluid flowing in the straight flow path 394. Karman vortices generated downstream of the vortex generator 392 are generated at a period proportional to the flow velocity of the fluid, and Karman vortices with different vortex directions are alternately generated. When passing, it is accelerated or decelerated in the direction of travel. Therefore, the frequency (period) of the ultrasonic vibration received by the ultrasonic vibrator 396 varies due to the Karman vortex. The ultrasonic vibrations transmitted and received by the ultrasonic transducers 395 and 396 are converted into electric signals and output to a calculation unit (not shown) of a control unit (not shown). Based on the Karman vortex frequency obtained from the phase difference between the ultrasonic vibration output from the transmission-side ultrasonic transducer 395 and the ultrasonic vibration output from the reception-side ultrasonic transducer 396, the calculation unit The flow rate of the fluid flowing through the straight flow path 394 is calculated. The flow rate calculated by the calculation unit is converted into an electric signal and output to a control unit (not shown).

  As a result, the ultrasonic vortex flowmeter produces more Karman vortices as the flow rate increases, and therefore can accurately measure the flow rate even at a large flow rate, and exhibits an excellent effect in controlling a large flow rate fluid.

  With the operation of Example 11 and Example 12, the ultrasonic vortex flowmeter can measure the flow rate accurately even at a large flow rate because the Karman vortex is generated as the flow rate is larger, and it has an excellent effect on the fluid control of a large flow rate. Demonstrate.

  Next, a thirteenth embodiment of the present invention having three supply lines will be described.

  In the third embodiment, the fluid mixing apparatus of the present embodiment is provided with a third supply line having the same configuration as the first and second supply lines, and the supply lines merge at the most downstream side of each supply line. It is the structure which has a part (not shown). Since the configuration of each supply line is the same as that of the third embodiment, the description thereof is omitted.

  Next, the operation of the thirteenth embodiment of the present invention will be described.

  Here, pure water is introduced into the first supply line, hydrogen peroxide solution is introduced into the second supply line, ammonia water is introduced into the third supply line, and pure water: hydrogen peroxide solution: ammonia solution = 50: Mix to 2: 1. The flow rate of pure water flowing into the first supply line is controlled by the first supply line, and the flow rate of hydrogen peroxide water flowing into the second supply line is controlled by the second supply line, and ammonia flowing into the third supply line The flow rate of water is controlled by the third supply line and mixed at the ratio set by merging at the junction (the ratio of the flow rate of the first supply line, the second supply line, and the third supply line is 50: 2: 1). Then, the mixed fluid (ammonia hydrogen peroxide) flows out at a set flow rate.

  Similarly, in the present embodiment, the ratio is also set in the case where hydrochloric acid is introduced into the third supply line instead of ammonia water and mixing is performed so that pure water: hydrogen peroxide solution: hydrochloric acid = 20: 1: 1. And the mixed fluid (hydrochloric acid overwater) flows out at a set flow rate.

  Each of the mixed fluids (ammonia overwater, hydrochloric acid overwater) that has flowed out is used in the processing step of the substrate cleaning apparatus. In the cleaning apparatus, first, the substrate is treated for removing foreign substances with ammonia overwater, then rinsed with pure water, and then the substrate is treated for removal of metal with hydrochloric acid overwater, followed by rinsing with pure water, After the substrate is treated for removing the oxide film with dilute hydrofluoric acid (mixed fluid described in Example 1), the substrate is rinsed with pure water and finally the substrate is dried. At this time, by introducing the mixed fluid mixed by the fluid mixing apparatus of the present invention into the cleaning tank as a chemical solution in each step, the chemical solution can be always supplied at a constant mixing ratio, and the substrate cleaning process is stable. It is done.

  Next, a fourteenth embodiment of the present invention having three supply lines will be described.

  Since the fluid mixing apparatus of this embodiment is the same as that of the thirteenth embodiment, the description thereof is omitted. Next, the operation of the fourteenth embodiment of the present invention will be described.

  Here, pure water is introduced into the first supply line, ammonium fluoride is introduced into the second supply line, hydrofluoric acid is introduced into the third supply line, and pure water: ammonium fluoride: hydrofluoric acid = Mix to 50: 2: 1. The flow rate of pure water that flows into the first supply line is controlled by the first supply line, and the flow rate of ammonium fluoride that flows into the second supply line is controlled by the second supply line, and the fluoride water that flows into the third supply line. The flow rate of hydrogen acid is controlled by the third supply line, and the ratio is set by merging at the junction (the ratio of the flow rates of the first supply line, the second supply line, and the third supply line is 50: 2: 1). Mixed and discharged at a set flow rate. The mixed fluid that has flowed out is used in a processing step of the substrate etching apparatus, and the oxide film is etched on the substrate by the mixed fluid in the etching apparatus.

  The mixed fluid obtained by mixing the fluids in the ratios of the first, fourth, fifth, sixth, thirteenth, and fourteenth embodiments of the present invention is the surface treatment of the substrate in the previous process of the semiconductor manufacturing process, etc. As long as each of the fluids and their mixing ratio are within the scope of the present invention, mixed fluids suitable for various processes in the pre-process of the semiconductor manufacturing process can be obtained.

It is a block diagram which shows typically the 1st Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of a flow measuring device. It is a longitudinal cross-sectional view of a fluid control valve. It is a block diagram which shows typically the 2nd Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of an on-off valve. It is a block diagram which shows typically the 3rd Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of a throttle valve. It is a principal part enlarged view which shows the throttle valve of FIG. 7 in an open state. It is a principal part enlarged view which shows the throttle valve of FIG. 7 in a closed state. It is a principal part enlarged view in which the throttle valve of FIG. 7 shows a half-open state. It is a block diagram which shows typically the 4th Example of the fluid mixing apparatus of this invention. It is a block diagram which shows typically the 5th Example of the fluid mixing apparatus of this invention. It is sectional drawing of a manifold valve. It is a block diagram which shows typically the 6th Example of the fluid mixing apparatus of this invention. It is a perspective view which shows typically the flow path of the flushing apparatus of this invention. It is a longitudinal cross-sectional view which follows the AA line of FIG. It is a top view which shows typically the 7th Example of the fluid mixing apparatus of this invention. It is sectional drawing which follows the BB line of FIG. It is a top view which shows typically the 8th Example of the fluid mixing apparatus of this invention. It is sectional drawing which follows the CC line of FIG. It is sectional drawing which shows typically the 9th Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of the other fluid control valve of the 10th Example of the fluid mixing apparatus of this invention. It is the same figure as FIG. 22 which added another display to FIG. It is a longitudinal cross-sectional view of the other flow measuring device of the 11th Example of the fluid mixing apparatus of this invention. It is a longitudinal cross-sectional view of the other flow measuring device of the 12th Example of the fluid mixing apparatus of this invention. It is a block diagram of the conventional flow control apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 1st supply line 2 2nd supply line 3 Flow rate measuring device 4 Fluid control valve 5 Control part 9 Flow rate measuring instrument 10 Fluid control valve 11 Control part 15 Merge part 16 1st supply line 17 2nd supply line 18 On-off valve 19 Flow rate Measuring instrument 20 Fluid control valve 21 Control section 22 On-off valve 23 Flow rate measuring instrument 24 Fluid control valve 25 Control section 26 Junction section 27 First supply line 28 Second supply line 29 On-off valve 30 Flow measuring instrument 31 Fluid control valve 32 Throttle valve DESCRIPTION OF SYMBOLS 33 Control part 34 On-off valve 35 Flow measuring device 36 Fluid control valve 37 Throttle valve 38 Control part 39 Junction part 40 On-off valve 41 On-off valve 42 Manifold valve 43 Flushing device 44 Base block 45 Base block 46 Connection member 47 Connection member 48 Connection member 49 Connecting member 51 Base block 53 Casing

Claims (16)

A fluid mixing device for mixing each fluid flowing in at least two supply lines in an arbitrary ratio,
Each of the supply lines (1, 2)
Fluid control valves (4, 10) for controlling the pressure of the fluid by controlling the pressure of the control fluid;
A flow rate measuring device (3, 9) that measures the actual flow rate of the fluid, converts the measured value of the actual flow rate into an electrical signal, and outputs it;
Based on the deviation between the measured value of the actual flow rate and the set flow rate value, a command signal for controlling the opening area of the fluid control valve (4, 10) is sent to the fluid control valve (4, 10) or the fluid control valve ( 4 and 10), each of which has a control unit (5, 11) for outputting to a device for operating ,
A main line provided with an on-off valve (535a) connected to the uppermost stream side of any one of the supply lines;
And at least one other line provided with an on-off valve (536a) connected to the most upstream side of the other supply line,
A flushing device (43) is provided in which the upstream side of the on-off valve (535a) on the main line and the downstream side of the on-off valve (536a) on another line are communicated via the on-off valve (537a).
A fluid mixing apparatus.   2. A fluid mixing device according to claim 1, wherein each said supply line further comprises an on-off valve (18, 22) for opening or shutting off the flow of fluid.   3. The fluid mixing device according to claim 1, wherein each of the supply lines further includes a throttle valve (32, 37) capable of adjusting a flow rate of the fluid by changing an opening area. 4. .   The fluid mixing device according to any one of claims 1 to 3, further comprising a merging portion (15) of the supply line on the most downstream side of each of the supply lines.   5. The fluid mixing apparatus according to claim 4, wherein on-off valves (40, 41) are respectively arranged in the supply line immediately before the junction.   The fluid mixing device according to claim 4, wherein the merging portion is a manifold valve (42) for merging the supply line into one flow path. The fluid mixing device according to any one of claims 1 to 6 , wherein the various valves and the flow rate measuring device are directly connected without using independent connecting means. The fluid mixing device according to any one of claims 1 to 6 , wherein the various valves and the flow rate measuring device are arranged in one base block. The fluid mixing device according to any one of claims 1 to 6 , wherein the various valves and the flow rate measuring device are housed in a single casing. The fluid control valves (4, 10) are
A second gap (209) provided open to the bottom at the center of the lower part, an inlet channel (211) communicating with the second gap (209), and a second gap ( 209) having a larger diameter than the first gap (210), the outlet channel (212) communicating with the first gap (210), the first gap (210), and the second gap (209). And a communication hole (213) having a diameter smaller than the diameter of the first gap (210), and the upper surface of the second gap (209) is a valve seat (214). )When,
A bonnet having a cylindrical gap (215) communicating with an air supply hole (217) and a discharge hole (218) provided on a side surface or an upper surface, and having a step portion (216) on the inner peripheral surface of the lower end (202)
A spring receiver (203) fitted into the step (216) of the bonnet (202) and having a through hole (219) at the center, and a first smaller diameter than the through hole (219) of the spring receiver (203) at the lower end. A piston (204) having a joint portion (224) and having a flange portion (222) provided in the upper portion and fitted into the gap (215) of the bonnet (202) so as to be movable up and down;
A spring (205) clamped and supported by the lower end surface of the flange (222) of the piston (204) and the upper end surface of the spring receiver (203);
The center where the peripheral portion is sandwiched and fixed between the main body (201) and the spring receiver (203) and covers the first gap (210) of the main body (201) to form the first valve chamber (231). The first diaphragm (227) having a thickened portion and the first joint (224) of the piston (204) through the through hole (219) of the spring receiver (203) are joined and fixed at the center of the upper surface. A first valve mechanism (206) having a second joint (229) and a third joint (230) provided through the communication hole (213) of the main body (201) in the center of the lower surface;
A valve body (232) positioned inside the second gap (209) of the main body and having a larger diameter than the communication hole (213) of the main body, and a first valve mechanism protruding from the upper end surface of the valve body (232) A fourth joint (234) to be joined and fixed to the third joint (230) of the body (206), a rod (235) provided protruding from the lower end surface of the valve body (232), and a lower part of the rod (235) A second valve mechanism (207) having a second diaphragm (237) provided extending in the radial direction from the end surface;
A protrusion (239) located below the main body (201) and sandwiching and fixing the peripheral edge of the second diaphragm (237) of the second valve mechanism (207) with the main body (201) at the upper center; A base plate (208) provided with a notch recess (240) at the upper end of the protrusion (239) and a breathing hole (241) communicating with the notch recess (240);
As the piston (204) moves up and down, the opening area of the fluid control unit (242) formed by the valve body (232) of the second valve mechanism (207) and the valve seat (214) of the main body (201) is increased. fluid mixing device according to any one of claims 1 to 9, characterized in that it is configured to change. The fluid control valve
A main body part (121) formed from an inlet channel (145) of fluid, an outlet channel (152), a chamber (127) in which the inlet channel (145) and the outlet channel (152) communicate with each other, and a valve body (165) and a valve member (136) having a first diaphragm portion (137), and a second diaphragm portion having an effective pressure-receiving area smaller than that of the first diaphragm portion (137) located at the lower and upper portions of the valve member (136) ( 138) and the third diaphragm portion (139), the valve member (136) and the respective diaphragm portions (137, 138, 139) are the outer peripheral portions of the respective diaphragm portions (137, 138, 139), and the main body portion (121). Are fixed in the chamber (127), and the diaphragm portion (137, 138, 139) is attached to the chamber (127) by the first pressurizing chamber (128), It is divided into a two-valve chamber (129), a first valve chamber (130), and a second pressurizing chamber (131), and the first pressurizing chamber (128) is always inward with respect to the second diaphragm portion (138). The first valve chamber (130) is in communication with the inlet channel (145), and the second valve chamber (129) is the valve element (165) of the valve member (136). ) And a communication hole (162) provided on the first diaphragm portion (137) located on the first diaphragm portion (137) side with respect to the valve seat (150). A lower second valve chamber (132) communicating with the first valve chamber (130), and an upper second valve located on the second diaphragm portion (138) side and provided in communication with the outlet channel (152). The valve chamber (133) is formed separately, and the valve body (165) and the valve seat ( 50) and a fluid control part (168) in which the fluid pressure in the lower second valve chamber (134) is controlled by changing the opening area between the second pressurizing chamber (131) and the second diaphragm (131). The fluid mixing device according to any one of claims 1 to 9 , further comprising means for constantly applying a constant force inward to the portion (139). The throttle valve (32, 37)
A valve seat surface (252) is formed on the bottom surface of the valve chamber (253) provided in the upper portion, and an inlet channel (255) communicating with a communication port (254) provided in the center of the valve seat surface (252) A main body (251) having an outlet channel (256) communicating with the valve chamber (253);
The stem can be inserted into the communication port (254) by advancing and retreating in the axial direction, and can be contacted and separated from the first valve body (261) and the valve seat surface (252) projecting from the center of the liquid contact surface. A second valve body (262) having an annular ridge formed at a position separated from the valve body (261) in the radial direction and a thin film portion (263) formed continuously from the second valve body (262) in the radial direction. ) And the diaphragm (260) provided integrally,
A first stem (277) having a handle (281) fixed to the upper portion and having a female screw portion (278) on the lower inner peripheral surface and a male screw portion (279) having a pitch larger than the pitch of the female screw portion (278) on the outer peripheral surface. )When,
A first stem support (282) having a female threaded portion (283) threadedly engaged with a male threaded portion (279) of the first stem (277) on the inner peripheral surface;
A second stem (269) having a male screw portion (270) screwed to a female screw portion (278) of the first stem (277) on the upper outer peripheral surface and having a diaphragm (260) connected to the lower end portion;
A diaphragm retainer (271), which is positioned below the first stem support (282) and supports the second stem (269) so as to be movable up and down and not rotatable, and a first stem (277) and a diaphragm retainer (271). The fluid mixing device according to any one of claims 3 to 11 , further comprising a bonnet (286) for fixing. The flow meter is an ultrasonic flow meter, Karman vortex flow meter, ultrasonic vortex flow meter, impeller flow meter, electromagnetic flow meter, differential pressure flow meter, positive displacement flow meter, hot wire flow meter or mass flow rate. The fluid mixing device according to any one of claims 1 to 12 , wherein the fluid mixing device is a meter. At least two kinds of fluids of hydrofluoric acid or hydrochloric acid and pure water are mixed at a ratio of 10 to 200 of pure water with respect to 1 of hydrofluoric acid or hydrochloric acid. The fluid mixing apparatus according to any one of claims 1 to 13 . At least three kinds of fluids of ammonia water or hydrochloric acid, hydrogen peroxide water, and pure water are ammonia water or hydrochloric acid 1-3, hydrogen peroxide water 1-5, and pure water 10 fluid mixing device according to any one of claims 1 to 13, characterized in that it is mixed in a ratio of 200. At least three types of fluids of hydrofluoric acid, ammonium fluoride, and pure water have a ratio of 7 to 10 for ammonium fluoride and 50 to 100 for pure water with respect to 1 for hydrofluoric acid. in fluid mixing device according to any one of claims 1 to 13, characterized in that it is mixed.

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