JP5202101B2 - Mixing valve and mixing device using the same - Google Patents

Description

  The present invention relates to a mixing valve for mixing a plurality of fluids used in piping lines in various industrial fields such as chemical factories, semiconductor manufacturing, food, and biotechnology, and a mixing apparatus using the mixing valve.

  2. Description of the Related Art Conventionally, as an apparatus that can be used in a flow path to mix a fluid, there has been a drainage switching valve used in a substrate processing apparatus as shown in FIG. 9 (see, for example, Patent Document 1). . The drainage switching valve includes a substrate processing unit that performs surface treatment of the substrate with the processing liquid, a processing liquid supply unit that supplies a plurality of types of processing liquid to the substrate processing unit, and a processing liquid that discharges the processing liquid from the substrate processing unit. In the apparatus having the discharge unit, the processing liquid discharge unit is provided. As shown in FIG. 9, the drainage switching valve 106 includes an introduction passage 102 that communicates with the inflow pipe portion 101, a plurality of discharge passages 103 </ b> A, 103 </ b> B, and 103 </ b> C that are connected to the introduction passage 102. A valve body 104 provided for each discharge flow path for opening and closing the discharge flow path; and pneumatic cylinder portions 105A, 105B, and 105C provided for each valve body 104 for opening and closing the valve body 104. ing. The drainage switching valve 106 is provided with valve body operation confirmation means for confirming the opening / closing operation of the valve body 104 for opening / closing the discharge passage for each discharge passage from the outside. The opening / closing operation of the valve body 104 to be opened / closed can be easily confirmed from the outside of the drainage switching valve. This conventional drainage switching valve 106 has a configuration in which the fluid that has flowed in from the inflow pipe portion 101 is branched into the discharge channels 103A, 103B, and 103C and flows out, and is premised on mixing the fluid in the valve. is not. However, when the flow direction of the fluid is reversed, it can be used as a mixing valve.

  Similarly, there is a multiple control device as shown in FIG. 10 as a valve that can be used as a mixing valve by reversing the fluid flow direction (see, for example, Patent Document 2). This multiple controller has a configuration in which a plurality of valve bodies 112 are arranged in one valve box 111. The valve box 111 has one inlet channel 113 and a plurality of outlet channels 114. The inlet channel 113 is branched in a plurality of directions within the valve box 111, and a valve body 112 is disposed at each branch path end. A plurality of outlet channels 114 can communicate with the inlet channel 113 via these valve bodies 112. This multiple controller can easily and reliably perform internal cleaning when changing the type of fluid to be circulated in the case where multiple types of fluid are circulated sequentially in one distribution line. It was possible to reliably prevent mixing. This conventional multiple control device can also be used as a mixing valve by using the outlet channel 114 as an inlet and the inlet channel 113 as an outlet.

JP 2000-133628 A JP-A-10-38106

  However, in the conventional drainage switching valve of FIG. 9, each of the three kinds of chemical liquids, A liquid, B liquid, and C liquid is simultaneously flowed from the discharge flow paths 103A, 103B, and 103C at a constant flow rate ratio. When the chemical liquid is mixed in the introduction flow path 102 and flows out from the inflow pipe section 101, the distance from the inflow pipe section 101 through which the mixed fluid flows out to the discharge flow paths 103A, 103B, 103C into which each chemical liquid flows in is different. Become. For this reason, the mixed fluid flowing out from the inflow pipe portion 101 is a mixed liquid of liquid A and liquid B immediately after the start of mixing, and thereafter becomes a mixed liquid of liquids A to C to obtain a desired mixed liquid of three liquids. Time lag occurs. In addition, a measuring instrument for measuring parameters of fluid characteristics for deriving the concentration and the like is installed on the downstream side of the drainage switching valve, and the chemical liquid, the A liquid, and the B liquid flowing in from the discharge flow paths 103A, 103B, and 103C. When each flow rate of C liquid is feedback controlled based on the measurement value of the measuring instrument, the C liquid flowing in from the discharge flow path 103C is measured from the time it takes for the A liquid flowing in from the discharge flow path 103A to reach the measuring instrument. Since the time until it reaches is longer due to the difference in flow path distance, the feedback control response to the change in the C liquid becomes duller than that in the A liquid. For this reason, it is difficult to feedback-control the A liquid and the C liquid similarly. Furthermore, when preparing the liquid mixture of the B liquid and the C liquid, the B liquid and the C liquid are mixed in the introduction flow path 102 with the discharge flow path 103A closed and the discharge flow paths 103B and 103C opened. However, liquid A may remain in the vicinity of the discharge flow path 103A of the introduction flow path 102. Therefore, the remaining liquid A is mixed with the liquid mixture of liquid B and liquid C, and pure liquid B and liquid C are mixed. There is a possibility that a problem of obstructing the production of the mixed solution may occur.

  Furthermore, in the conventional multiple control device of FIG. 10, when each fluid flows in from the outlet channel 114 and the mixed liquid flows out from the inlet channel 113, each fluid that flows in from the outlet channel 114 It passes through the valve body 112 and joins at the branch portion 115 to try to flow out from the inlet channel 113. At this time, the multiple control device has a configuration in which the flow path from the valve body 112 to the branching portion 115 and the flow path from the other valve body 112 to the branching portion 115 always face each other. For this reason, when the flow rates of the fluids flowing from the respective flow paths are greatly different, there is a fear that it is difficult to mix the fluids at a stable ratio. When fluids are mixed with a mixing valve, the flow rates of the fluids to be mixed are usually different. For example, when pure water and hydrochloric acid are mixed to make a diluted solution of hydrochloric acid, pure water and hydrochloric acid are mixed at a ratio of pure water: hydrochloric acid = 20: 1. Then, in the branch portion 115, the flow of hydrochloric acid is pushed by the flow of pure water because the two fluids flow in opposite directions at a flow rate of pure water: hydrochloric acid = 20: 1 from the channels facing each other. The flow of hydrochloric acid may be hindered. In such a case, a measuring instrument for measuring a specific parameter representing a fluid characteristic for deriving a concentration or the like is installed on the downstream side of the multiple control device in FIG. When pure water is introduced at a constant flow rate and the flow rate of hydrochloric acid introduced from the other outlet channel 114 is feedback-controlled based on the measurement value of the measuring instrument, the control may become unstable. That is, for example, when the flow rate of pure water fluctuates, at the moment when the flow rate decreases, hydrochloric acid that has been stagnating at the moment of impingement of pure water at the branch portion 115 easily flows and flows out in large quantities. There is a risk that the concentration will change more rapidly than the change of the mixing ratio corresponding to the decrease in the amount of the decrease, making it difficult to control the concentration. Further, at this time, a mixed problem in which the mixing ratio is greatly changed flows, which may cause a secondary problem. In particular, when pure water and chemical liquid are mixed, the ratio of pure water is often more than twice the ratio of chemical liquid, and the same problem may occur when mixing with a plurality of chemical liquids.

  The present invention has been made in view of the problems of the prior art as described above, and can accurately control the parameters of the merged fluids, and even when fluids having greatly different flow ratios are merged, It is an object of the present invention to provide a mixing valve and a mixing apparatus using the same that can prevent a flow of a large flow rate fluid from interfering with a flow of a small flow rate fluid.

In order to achieve the above-described object, the mixing valve of the present invention includes a main channel formed so as to penetrate, at least two communication channels communicating with the main channel, a valve chamber respectively communicating with the communication channel, A main body provided with a sub-flow path communicating with each valve chamber; a valve body that opens and closes around the opening of the valve chamber that communicates with the communication flow path; and a drive unit that drives the valve body; has at least two communication channels is, communicates with the main channel from each other the same position in the axial direction of the main flow path, and the length of the at least two communication channels is rather equal to each other, of the main channel one And a sub-valve chamber that communicates with the valve chamber, and each of the at least two communication channels includes a portion of the sub-valve chamber and the main channel upstream of the main channel constriction unit. An inlet communication channel that communicates with the outlet, and an outlet communication channel that communicates with the sub valve chamber and the inside of the main channel throttle Characterized in that it is configured. According to this configuration, by causing the base fluid flowing at a large flow rate to flow in the main flow path, the interference of the flow between the fluids to be mixed is suppressed, and other fluids can be compared with the base fluid. The flow rate can be controlled to flow in at the same position in the direction of the base fluid flow and at a position equidistant from the base fluid flow.

  The at least two communication channels are preferably provided radially at equal intervals in the circumferential direction.

  The distance from the main flow path to the valve seat of each valve chamber is preferably shorter than the diameter of the main flow path.

  As at least two communication channels, a first communication channel and a second communication channel can be provided. In this case, the first communication channel and the second communication channel are arranged in the axial direction of the main channel. It can be provided to face each other at the same position.

  Alternatively, as the at least two communication channels, a first communication channel, a second communication channel, and a third communication channel can be provided. In this case, the first communication channel, the second communication channel The third communication channel can be provided radially at equal intervals in the circumferential direction at the same position in the axial direction of the main channel.

  You may arrange | position a static mixer element in the position of the main flow path downstream from the part which the communication flow path communicates.

  The drive unit may be configured to include a motor unit and a stem that moves the valve body up and down by transmitting the driving force of the motor unit to the valve body.

  Alternatively, the drive unit includes a cylinder unit, a piston arranged to move up and down in the cylinder unit in contact with the inner peripheral surface of the cylinder unit so as to seal between the inner peripheral surface, It extends downward from the center, passes through a through hole provided in the center of the bottom of the cylinder part, contacts the inner peripheral surface of the through hole so that the space between the inner peripheral surface and the lower end is a valve Formed by a connecting portion to which the body is fixed, a first space portion formed by the bottom surface and inner peripheral surface of the cylinder portion and the lower end surface of the piston, a ceiling surface and inner peripheral surface of the cylinder portion, and an upper end surface of the piston It is good also as a structure which has a mechanism which inject | pours compressed air into at least one of each air port each connected with the made 2nd space part.

  The mixing apparatus according to the present invention includes a mixing valve as described above, a measuring instrument that measures a parameter representing the characteristics of the fluid mixed by the mixing valve, converts the measured value of the parameter into an electric signal, and outputs the measuring instrument. A control unit that outputs a signal for controlling each valve element of the mixing valve to a drive unit of the mixing valve or a device that operates the drive unit based on a deviation between the measured value of the parameter and the set value of the parameter It is characterized by having.

  A mixing apparatus according to another aspect of the present invention includes a mixing valve as described above, and a measuring instrument that measures a parameter representing the characteristics of the fluid mixed by the mixing valve, converts the measured value of the parameter into a signal, and outputs the signal. Each of the fluid control valves connected to each of the sub-flow paths and controlling the flow rate of the fluid flowing through the sub-flow path, and each of the fluid control valves based on the deviation between the measured value of the parameter by the measuring instrument and the set value of the parameter. And a control unit that outputs a signal for control to a drive unit of the fluid control valve or a device that operates the drive unit.

  The measuring instrument can be any one of a concentration meter, a thermometer, and a pH meter.

According to the present invention, by flowing a base fluid that flows at a large flow rate through a main flow path, it is possible to prevent other fluids from being obstructed by the flow of a fluid that flows at a large flow rate among the mixed fluids. can do.
Also, the base fluid flowing from the main flow channel is mixed with other fluids that are supplied from the sub flow channel and mixed at the same position in the direction of the base fluid flow and at a position equidistant from the flow of the base fluid. The flow rate can be controlled to flow in. Therefore, it is possible to suppress the occurrence of a time lag between the plurality of fluids supplied from the sub-flow channels until the fluids reach an arbitrary position downstream of the merging portion. Thereby, a mixed fluid of all the necessary fluids can be obtained quickly. In addition, it is possible to suppress a time lag from occurring in the measurement of the parameters of the merged fluid among the plurality of fluids supplied from the sub-flow paths, thereby enabling accurate control of the parameters of the merged fluid. .

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, it is needless to say that the present invention is not limited to the details of the embodiments. FIG. 1 is a longitudinal sectional view showing a mixing valve according to a first embodiment of the present invention. 2 is a cross-sectional view taken along the line AA in FIG. FIG. 3 is a longitudinal sectional view showing an embodiment of a mixing apparatus using the mixing valve of FIG. 4 is a longitudinal sectional view showing another embodiment of a mixing apparatus using the mixing valve of FIG. FIG. 5 is a longitudinal sectional view showing a mixing valve according to the second embodiment of the present invention. FIG. 6 is a longitudinal sectional view showing a mixing valve according to a third embodiment of the present invention. FIG. 7 is an enlarged vertical cross-sectional view showing a main part of a mixing valve according to a fourth embodiment of the present invention. FIG. 8 is a longitudinal sectional view showing a mixing valve according to a fifth embodiment of the present invention.

  Hereinafter, the mixing valve of the first embodiment of the present invention will be described with reference to FIGS. 1 and 2.

  A main body 1 made of polytetrafluoroethylene (hereinafter referred to as PTFE) is provided with a first valve chamber 2 in the upper center, a second valve chamber 3 in the lower center, and first and second valve chambers 2. 3, a main flow path 4 penetrating the main body 1 is provided. A first communication channel 5 that communicates with the main channel 4 is provided at the center of the bottom of the first valve chamber 2, and a second communication channel that communicates with the main channel 4 at the center of the bottom of the second valve chamber 3. 6 is provided. In this specification, for the sake of convenience, the main channel side may be referred to as the bottom, and the side far from the main channel may be referred to as the top.

  The first communication channel 5 and the second communication channel 6 are located symmetrically with respect to the axis at the same position in the axial direction of the main channel 4. The peripheral edge of the opening of the first continuous flow path 5 on the bottom surface of the first valve chamber 2 and the peripheral edge of the opening of the second communication flow path 6 on the bottom surface of the second valve chamber 3 are respectively the first and second valve bodies 23. , 24 are the valve seats 7 and 8 with which they contact and separate. The distances from the main flow path 4 to the valve seats 7 and 8 are equal to each other, and this distance is shorter than the diameter of the main flow path 4. Specifically, in this embodiment, the distance from the main flow path 4 to the valve seats 7 and 8 is 0.6 D with respect to the diameter D of the main flow path 4. Further, a first sub-channel 9 communicates with the first valve chamber 2, and a second sub-channel 10 communicates with the second valve chamber 3, and these open to the peripheral side surface of the main body 1.

  The first drive unit 11 and the second drive unit 12 are respectively arranged above and below the main body 1. Since the drive units 11 and 12 have the same configuration, the configuration of the first drive unit 11 will be described as a representative. The first drive unit 11 includes a cylinder body 13, a piston 14, and a diaphragm retainer 15.

  A cylinder body 13 made of polyvinylidene fluoride (hereinafter referred to as PVDF) has a cylindrical cylinder portion 16 and is fixed to the body 1 with bolts and nuts (not shown). On the peripheral side surface of the cylinder body 13, the first space portion 17 formed by the inner peripheral surface of the cylinder portion 16, the upper end surface of the diaphragm retainer 15, and the lower end surface of the piston 14, the inner peripheral surface of the cylinder portion 16 and the ceiling Air ports 19 and 20 for introducing compressed air are provided respectively communicating with the second space 18 formed by the surface and the upper end surface of the piston 14. A spring is supported between the upper end surface of the diaphragm retainer 15 in the first space portion 17 and the lower end surface of the piston 14 or between the ceiling surface of the cylinder portion 16 in the second space portion 18 and the upper end surface of the piston 14. The piston 14 may be biased upward or downward.

  The piston 14 made of PVDF has a disk shape, and an O-ring is mounted on the peripheral side surface thereof, and is arranged so as to move up and down while maintaining a sealed state with the inner peripheral surface of the cylinder portion 16. Moreover, the connection part 21 extended below from the center of piston 14 is provided, it penetrates the through-hole 22 provided in the diaphragm holding | suppressing 15, and the 1st valve body 23 is being fixed to the front-end | tip part. An O-ring is also attached to the outer peripheral surface of the connecting portion 21, and the space between the outer peripheral surface of the connecting portion 21 and the inner peripheral surface of the through hole 22 is kept sealed.

  The PVDF diaphragm retainer 15 has a through hole 22 through which the connecting portion 21 of the piston 14 penetrates at the center, and is sandwiched between the main body 1 and the cylinder main body 13.

  The PTFE first valve body 23 accommodated in the first valve chamber 2 is attached to the tip of the connecting portion 21 of the piston 14 with a screw, and moves up and down in the axial direction in accordance with the vertical movement of the piston 14. It is like that. The first valve body 23 has a diaphragm 25 on the outer periphery, and the outer peripheral edge of the diaphragm 25 is fitted into the annular groove 26 of the main body 1 and is sandwiched between the diaphragm retainer 15 and the main body 1. The structure of the 2nd drive part 12 is the same as that of the 1st drive part 11, and the 2nd valve body 24 is attached to the front-end | tip part of the piston 27 of the 2nd drive part 12 with the screw.

  Next, the operation of the mixing valve according to the first embodiment of the present invention will be described.

  When compressed air is injected from the outside into the first space 17 from the air port 19 of the first drive unit 11 as a working fluid, the piston 14 is pushed up by the pressure of the compressed air. As a result, the connecting portion 21 connected to the piston 14 is pulled upward, and the first valve body 23 connected to the lower end of the connecting portion 21 is also lifted upward to open the valve (the state shown in FIG. 1). ).

  On the other hand, when compressed air is injected from the air port 20 into the second space 18, the piston 14 is pushed down, and the connecting valve 21 and the first valve body 23 coupled to the lower end thereof are also pushed down. And the valve is closed. Since the operation of the second valve body 24 by the second drive unit 12 is the same, the description thereof is omitted. The mixing valve of the present embodiment is provided with a main flow path 4 provided through the main body 1, and the communication flow paths 5 and 6 communicating with the main flow path 4 communicate with each other. Thereby, when the first valve body 23 of the first drive unit 11 is opened, the fluid flowing through the first sub-flow channel 9 flows into the main flow channel 4 and the second valve body 24 of the second drive unit 12 is opened. Then, the fluid that has flowed through the second sub-channel 10 flows into the main channel 4, merges with the fluid that flows through the main channel 4, and flows out while mixing. In this configuration, when a fluid is mixed, a fluid that is a base having a larger mixing ratio than other fluids is caused to flow through the main flow path 4, so that the flow of the fluid can be kept smooth even at the junction. In addition, the flow rate of the fluid that merges from each communication channel 5, 6 to the main channel 4 is smaller than the flow rate of the fluid that flows through the main channel 4, so even if the communication channels 5, 6 face each other, The fluid flow from 6 does not interfere with each other.

  Next, the structure which used the mixing valve of this embodiment for the mixing apparatus which mixes a fluid is demonstrated based on FIG.

  The mixing valve 31 has the same configuration as that shown in FIGS. The densitometer 32 has an ultrasonic transducer 33 that transmits and receives ultrasonic waves, and a measurement chamber 34 for propagating ultrasonic waves. The measurement chamber 34 is provided with a fluid inlet 35 and a fluid outlet 36, and a reflection surface 37 whose radius is the length of the measurement chamber 34 is formed at the opposite end portion of the ultrasonic transducer 33. Yes. The densitometer 32 functions to calculate the concentration from the change in the propagation time of the ultrasonic wave of the fluid inside the measurement chamber 34. The concentration meter is not particularly limited as long as it can output a measurement value of a specific parameter for calculating the concentration of the fluid to the control unit 38 as an electric signal, and the concentration measurement method is not particularly limited. A conductivity type may be used.

  The control unit 38 includes a calculation unit 39 that calculates the concentration based on a signal output from the densitometer 32, and a control unit 40 that performs feedback control so as to obtain a set concentration. The calculation unit 39 includes a transmitter circuit that outputs ultrasonic vibrations of a certain period to the ultrasonic transducer 33, a receiver circuit that receives the ultrasonic vibrations, and a concentration from the time when the ultrasonic vibrations are reflected by the reflecting surface 37 and propagated. And an arithmetic circuit for calculating. The control unit 40 has a control circuit that controls the operation pressure of the electropneumatic converter 41 so that the deviation between the concentration output from the calculation unit 39 and the set concentration becomes zero.

  An electropneumatic converter 41 that adjusts the pressure of compressed air supplied to the first and second drive units 11 and 12 of the mixing valve 31, that is, the operating pressure, is disposed in the control unit 38. The electropneumatic converter 41 is composed of an electromagnetic valve that is electrically driven to adjust the operation pressure proportionally, and adjusts the operation pressure in accordance with a control signal from the control unit 38. The electropneumatic converter 41 may be configured as a separate body without being disposed in the control unit 38. In addition, as described above, when a spring is installed in one of the first space portion 16 or the second space portion 17, the electropneumatic converter 41 is connected only to one of the air ports 11 and 12, which communicates with the other. It can be.

  Next, the operation of the mixing device will be described. Here, pure water was flown in the main flow path, hydrogen peroxide water was flown in the first sub-flow path, and ammonia water was flowed in the second sub-flow path at a ratio of pure water: hydrogen peroxide water: ammonia water = 50: 2: 1. The case will be described.

  When the first valve body 23 and the second valve body 24 are opened, the hydrogen peroxide solution that has flowed in from the first subchannel 9 flows into the main channel 4 through the first series channel 5, and the second Ammonia water flowing in from the sub-flow channel 10 flows to the main flow channel 4 through the second communication flow channel 6. The hydrogen peroxide solution and the ammonia water flowing in from the first and second sub-channels 9 and 10 are pure water flowing through the main channel 4 at the place where the main channel 4 and the first and second communication channels 5 and 6 merge. Then, the merged fluid flows out from the mixing valve 31 while mixing and flows to the densitometer 32. The fluid that has flowed into the concentration meter 32 flows into the measurement chamber 34 from the fluid inlet 35 and flows out from the fluid outlet 36. At this time, the ultrasonic wave transmitted from the ultrasonic transducer 33 propagates through the fluid in the measurement chamber 34, is reflected by the reflecting surface 37, and is received by the ultrasonic transducer 33 again. The ultrasonic wave received by the ultrasonic transducer 33 is converted into an electrical signal and output to the calculation unit 39 of the control unit 38, and the calculation unit 39 calculates the concentration based on the propagation time of the ultrasonic wave. The concentration calculated by the calculation unit 39 is converted into an electric signal and output to the control unit 40. The control unit 40 outputs a signal to the electropneumatic converter 41 so that the deviation is zero based on the deviation from the concentration measured in real time with respect to an arbitrary set concentration, and the electropneumatic converter 41 outputs the signal. Is supplied to the first drive unit 11 and the second drive unit 12 of the mixing valve 31, respectively. In this way, the mixing valve 31 is controlled so that the density becomes the set density, that is, the deviation between the set density and the measured density converges to zero.

  At this time, since the hydrogen peroxide solution and the ammonia water are merged at the same position in the axial direction of the main channel 4 with respect to the pure water flowing through the main channel 4, the time until the concentration meter 32 reaches the concentration meter 32. In addition, there is no time lag between the hydrogen peroxide solution and the ammonia solution. Thereby, it is possible to control the density with high accuracy. In addition, although the flow rate of pure water flowing through the main channel 4 is much higher than that of hydrogen peroxide solution and ammonia solution, the hydrogen peroxide solution and ammonia solution are made to flow in the pure water flow direction with respect to the pure water. On the other hand, since the water is merged from the lateral direction, the flow of the hydrogen peroxide solution and the ammonia solution is not hindered by the flow of pure water. Therefore, the fluid can be mixed smoothly. Furthermore, although the first communication channel 5 and the second communication channel 6 through which the hydrogen peroxide solution and the ammonia solution flow face each other, the flow rate of pure water flowing through the main channel 4 is large. The flow of ammonia water hardly interferes with each other.

  In addition, since the distance from the valve seats 7 and 8 that are opened and closed by the first valve body 23 and the second valve body 24 to the main flow path 4 is set to a minimum necessary length, the mixing of fluids is performed. Is done efficiently. Moreover, when the valve bodies 23 and 24 are set to the closed position, the first and second communication channels 5 and 6 can be cleaned with pure water flowing through the main channel 4. The fluid hardly stays in the portions 5 and 6. For this reason, for example, when pure water and hydrogen peroxide water are mixed with the first valve body 23 of the mixing device in the open position and the second valve body 24 in the closed position, mixing of ammonia water can be suppressed. it can. Thus, in order to realize efficient mixing of fluid and suppression of fluid retention in the first and second communication flow paths 5 and 6, the valves of the valve chambers 2 and 3 are connected from the main flow path 4. The distance to the seats 7 and 8 is preferably set so as to be shorter than the diameter of the main flow path 4.

  Moreover, in the mixing apparatus of other embodiment, as shown in FIG. 4, it connects to the 1st, 2nd subchannels 42 and 43, respectively, and controls the flow volume of the fluid by changing the opening area of a channel. Fluid control valves, that is, needle valves 44 and 45 may be provided. In this case, the first and second drive units 11 and 12 of the mixing valve 31 are used only for opening and closing the first and second communication flow paths 5 and 6, and the first and second sub flow paths 42 are used. , 43 is adjusted by needle valves 44, 45. A needle valve may be provided on the upstream side of the main flow path 4 of the valve. In the example shown in FIG. 4, the needle valves 44 and 45 are electrically operated, and the control unit 40 obtains a deviation from a concentration measured in real time with respect to an arbitrary set concentration so that the deviation becomes zero. , A signal for driving the needle valves 44 and 45 is output to the drive portions of the needle valves 44 and 45. In this way, the needle valves 44 and 45 are controlled so that the actual concentration becomes the set concentration, that is, the deviation between the set concentration and the measured concentration converges to zero. At this time, since the flow rate is finely controlled by the needle valves 44 and 45, stable concentration control can be performed. Note that the needle valves 44 and 45 of the mixing apparatus of FIG. 4 may be of an air drive type, and in that case, an electropneumatic converter is provided in the control unit 38 (not shown). In the control unit 40, a signal is output to the electropneumatic converter so as to make the deviation zero from the deviation from the concentration measured in real time with respect to an arbitrary set concentration, and the electropneumatic converter performs an operation corresponding thereto. Pressure is supplied to each drive part of the needle valves 44 and 45.

  Further, in the present embodiment, the concentration is controlled by the mixing device, but temperature and pH can be controlled in addition to the concentration. In this case, as a measuring instrument, instead of the densitometer 32, a thermometer or A pH meter or the like can be used. In the case of a thermometer or a pH meter, the measurement method is not particularly limited as long as it can measure a specific parameter representing a fluid characteristic for deriving the temperature and pH and convert the measured value into an electric signal and output it. .

  Next, with reference to FIG. 5, the mixing valve of 2nd embodiment of this invention is demonstrated.

  The main body 51 made of PTFE is provided with a main flow path 52 penetrating the main body 51, a first valve chamber 53 is provided in the upper center, and a second valve chamber 54 and a third valve chamber 55 are centered on the main flow path 52. The first valve chamber 53 is provided at a position shifted by 120 °. A first communication channel 56 communicating with the main channel 52 is provided at the center of the bottom of the first valve chamber 53, and a second communication channel 57 communicating with the main channel 52 is provided at the center of the bottom of the second valve chamber 54. A third communication channel 58 that communicates with the main channel 52 is provided at the bottom center of the third valve chamber 55. The first continuous flow channel 56, the second communication flow channel 57, and the third communication flow channel 58 extend radially from the main flow channel 52 at equal intervals in the circumferential direction at the same position in the flow channel axial direction of the main flow channel 52. Has been placed. The peripheral edge of the opening of the first communication channel 56 on the bottom surface of the first valve chamber 53, the peripheral edge of the opening of the second communication channel 57 on the bottom surface of the second valve chamber 54, and the third communication on the bottom surface of the third valve chamber 55. The peripheral edge of the opening of the flow path 58 is a valve seat 62, 63, 64 to which the first, second, and third valve bodies 59, 60, 61 abut and separate from each other. The distances from the main flow path 52 to the respective valve seats 62, 63, 64 are equal, and this distance is shorter than the diameter of the main flow path 52. Specifically, the distance from the main flow path 52 to the valve seats 62, 63, 64 is 0.6 D with respect to the diameter D of the main flow path 52. The first valve chamber 53 communicates with the first sub-channel 65, the second valve chamber 54 communicates with the second sub-channel 66, and the third valve chamber 55 communicates with the third sub-channel 67. These open to the peripheral side surface of the main body 51.

  The first drive unit 68, the second drive unit 69, and the third drive unit 70 are respectively disposed on the upper portions of the first, second, and third valve chambers 53, 54, and 55 of the main body 51. These drive units 68, 69, 70 open and close the first, second, and third valve bodies 59, 60, 61 disposed in the first, second, and third valve chambers 53, 54, 55. Work. Since the configuration of each of the drive units 68, 69, and 70 is the same as that of the drive units 11 and 12 in the first embodiment, description thereof is omitted.

  Regarding the operation of the mixing valve of the second embodiment of the present invention, in the first embodiment, the fluid flowing from the two sub-flow paths merges in the main flow path, whereas in this embodiment, the three sub-flow paths are combined. Since the fluid flowing from the main flow channel is joined to the main flow path, the operation of each drive unit is the same as that of the first embodiment, and the description thereof is omitted.

  Next, a mixing valve according to a third embodiment of the present invention will be described with reference to FIG.

  The static mixer element 71 uses a twisted blade-like plate twisted by 180 degrees as a minimum unit member, and a plurality of minimum unit members are lined up in a row so that their twisting directions are alternately different from each other. It has the structure. The static mixer element 71 is installed downstream of the junction of the main flow path 73 of the main body 72 with the communication flow paths 5 and 6 so as not to be pushed downstream by the fluid flow. The material of the static mixer element 71 is not particularly limited, but a resin having high chemical resistance and flexibility is desirable. As such a material, a fluororesin is preferably used, and examples thereof include tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer resin (hereinafter referred to as PFA), PTFE, PVDF, and the like. Since the other structure of this invention is the same as that of 1st embodiment, description is abbreviate | omitted.

  Next, the operation of the mixing valve according to the third embodiment of the present invention will be described.

  When the first and second valve bodies 23 and 24 are in the open position, the fluid supplied to the first and second valve chambers 2 and 3 through the first and second sub-flow passages 9 and 10 is the first. The fluid enters the main flow path 73 from the second communication flow paths 5 and 6 and merges with the fluid flowing in from the inlet of the main flow path 73. When the mixed fluid thus joined passes through the flow path in which the static mixer element 71 is disposed, the mixed fluid is stirred by the torsion blade plate of the static mixer element 71 and flows out from the outlet. At this time, since the stirring is performed by the static mixer element 71, the fluid can be mixed uniformly. Therefore, even when used in the mixing apparatus as shown in FIG. 3, the fluid is uniformly mixed, and the concentration and control of the fluid concentration can be measured more accurately and stably. The structure of the static mixer element 71 is not particularly limited as long as it can stir the fluid. For example, a spiral structure or two twisted blade-like stirrers are provided side by side in the flow path. It may be a structure.

  Next, a mixing valve according to a fourth embodiment of the present invention will be described with reference to FIG.

  A main body 74 made of PTFE is provided with a first valve chamber 75 in the upper center and a second valve chamber 76 in the lower center, and penetrates the main body 74 between the first and second valve chambers 75, 76. A main flow path 77 is provided. A first auxiliary valve chamber 78 smaller than the first valve chamber 75 is provided below the first valve chamber 75 and opens at the bottom center of the first valve chamber 75. The second sub-valve chamber 79 is smaller than the second valve chamber 76, and opens at the center of the bottom of the second valve chamber 76. The main channel 77 is provided with a main channel restricting portion 80 on the downstream side of the position intersecting with the axes of the first and second valve bodies 23 and 24. A first outlet communication channel 81 that communicates with the inner peripheral surface of the main channel restrictor 80 and a first inlet communication that communicates with the main channel 77 on the upstream side of the main channel restrictor 80 on the bottom surface of the first subvalve chamber 78. A flow path 82 is provided. A second outlet communication channel 83 communicating with the inner peripheral surface of the main channel restricting portion 80 and a second inlet communication communicating with the main channel 77 upstream from the main channel restricting portion 80 are formed on the bottom surface of the second sub valve chamber 79. A flow path 84 is provided. The first outlet communication channel 81 and the second outlet communication channel 83, and the first inlet communication channel 82 and the second inlet communication channel 84 are arranged symmetrically with respect to the axis at the same position in the axial direction of the main channel 77. Therefore, the lengths from the main channel 77 are formed to be equal. The first valve chamber 75 communicates with the first sub-channel 85, and the second valve chamber 76 communicates with the second sub-channel 86, which open to the peripheral side surface of the main body 74. The inlet communication channels 82 and 84 preferably communicate with a position on the inner peripheral surface of the main channel 77 upstream of the position intersecting the axis of the valve bodies 23 and 24, and straight from the sub valve chambers 78 and 79. It is desirable to form it diagonally. Further, it is desirable that the inlet communication channels 82 and 84 and the outlet communication channels 81 and 83 are formed to have a smaller diameter than the main channel restricting portion 80.

  Further, the inner diameter d of the main flow path restricting portion 80 is 0.65 D with respect to the inner diameter D of the main flow path 77. The inner diameter d of the main channel restricting portion 80 is preferably in the range of 0.5D ≦ d ≦ 0.8D with respect to the inner diameter D of the main channel 77, and 0.6D ≦ d ≦ 0. 7D is more preferable. The inner diameter d of the main flow passage restricting portion 80 is preferably 0.5D or more so that the fluid in the main flow passage 77 does not flow easily, and the main flow passage restricting portion 80 is separated from other main flow passage 77 portions. In order to obtain the effect of preventing stagnation as will be described later by generating a differential pressure of 0.8 V, it is preferable that the pressure be 0.8D or less.

  Next, the operation of the mixing valve according to the fourth embodiment of the present invention will be described. Here, a case where pure water is flown in the main flow path, hydrochloric acid is flown in the first sub-flow path, and hydrogen peroxide water is flowed in the second sub-flow path will be described.

  When the first and second valve bodies 23, 24 are brought into the closed position from the open state of the valve (the state shown in FIG. 7), immediately after the first, second valve body 23, 24 is brought into the closed position. Further, hydrochloric acid remains in the first outlet communication channel 81, and hydrogen peroxide water remains in the second sub valve chamber 79, the second inlet communication channel 84, and the second outlet communication channel 83. The pure water that has flowed into the mixing valve passes through the main flow path 77 and flows out through the main flow path restricting portion 80, but the flow velocity increases when it flows through the main flow path restricting portion 80. As a result, according to Bernoulli's theorem, the pressure in the main flow restrictor 80 is lower than the pressure in other parts of the main flow channel 77. Therefore, the hydrochloric acid and the hydrogen peroxide solution remaining in the first and second outlet communication channels 81 and 83 communicated with the inner periphery of the main channel restricting portion 80 are moved to the main channel restricting portion 80 side where the pressure is reduced. And sucked. Further, the first and second sub valve chambers 78 and 79 communicated with the first and second outlet communication channels 81 and 83, respectively, and the first and second inlet communication channels 82 and 84 communicated with these. Hydrochloric acid and hydrogen peroxide solution are also drawn out to the main channel 77 through the first and second outlet communication channels 81 and 83. Thereby, the flow of the fluid which flows into the main flow path 77 from the main flow path 77 through each inlet communication flow path, sub valve chamber, and outlet communication flow path is formed. As a result, the remaining hydrochloric acid and hydrogen peroxide solution are washed away first after the valve is closed. Further, it is possible to prevent the fluid from staying and to prevent the occurrence of contamination because there is no staying portion in the flow path.

  The driving part of the mixing valve may be an electric type as shown in FIG. 8 instead of an air type as shown in FIG. 1, and in this case, the first driving part 91 and the second driving part 92 are motor parts having stepping motors. 93 and a stem 94 that extends downward from the motor portion 93 and is connected to the shaft of the motor via a gear. The stem 94 is disposed so as to be positioned in the through hole 95 of the bonnet 98. A first valve body 96 and a second valve body 97 are respectively attached to the lower ends of the stems 94 of the first and second drive parts 91 and 92 by screws, and the motor part 93 is driven to move the stem 94 up and down. By moving it, the first and second valve bodies 96, 97 can be moved up and down. The first and second valve bodies 96 and 97 may be coupled to the stem 94 so as to move up and down by rotating the stem 94. Further, the first and second valve bodies 96 and 97 may be conical, thereby controlling the first and second drive portions 91 and 92 of the mixing valve and opening the flow passage communicating with the valve chamber. By changing the area linearly, the fluid to be mixed can be finely adjusted.

  Furthermore, the material of each component such as the mixing valve main body 1, cylinder main body 13, piston 14, diaphragm retainer 15, and valve bodies 23 and 24 may be any of polyvinyl chloride, polypropylene, polyethylene and the like as long as it is a resin. Particularly when a corrosive fluid is used as the fluid, it is preferably a fluororesin such as PTFE, polyvinylidene fluoride, tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer resin. By using a fluororesin, it is possible to withstand a corrosive fluid, and even if a corrosive gas permeates, there is no fear of corrosion of the piping member, which is preferable.

It is a longitudinal cross-sectional view which shows the mixing valve of 1st embodiment of this invention. It is AA sectional drawing of FIG. It is a longitudinal cross-sectional view which shows embodiment of the mixing apparatus using the mixing valve | bulb of FIG. It is a longitudinal cross-sectional view which shows other embodiment of the mixing apparatus using the mixing valve | bulb of FIG. It is a longitudinal cross-sectional view which shows the mixing valve of 2nd embodiment of this invention. It is a longitudinal cross-sectional view which shows the mixing valve of 3rd embodiment of this invention. It is a principal part expanded longitudinal cross-sectional view which shows the mixing valve of 4th embodiment of this invention. It is a longitudinal cross-sectional view which shows the mixing valve of 5th embodiment of this invention. It is a top view which shows the conventional drainage switching valve | bulb. It is a longitudinal cross-sectional view which shows the conventional multiple controller.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Main body 2 1st valve chamber 3 2nd valve chamber 4 Main flow path 5 1st continuous flow path 6 2nd communication flow path 7 Valve seat 8 Valve seat 9 1st subflow path 10 2nd subflow path 11 1st drive Part 12 Second drive part 13 Cylinder body 14 Piston 23 First valve body 24 Second valve body 31 Mixing valve 32 Densitometer 38 Control part 42 First subchannel 43 Second subchannel 44 Needle valve 45 Needle valve 51 Main body 52 main flow path 53 first valve chamber 54 second valve chamber 55 third valve chamber 56 first continuous flow path 57 second communication flow path 58 third communication flow path 59 first valve body 60 second valve body 61 third Valve body 62 Valve seat 63 Valve seat 64 Valve seat 65 First sub flow channel 66 Second sub flow channel 67 Third sub flow channel 68 First drive unit 69 Second drive unit 70 Third drive unit 71 Static mixer element 74 Main body 75 First valve chamber 76 Second valve chamber 77 Main Passage 78 First subvalve chamber 79 Second subvalve chamber 80 Main flow restrictor 81 First outlet communication channel 82 First inlet communication channel 83 Second outlet communication channel 84 Second inlet communication channel 91 First drive Part 92 Second drive part 96 First valve body 97 Second valve body

Claims (11)

There are provided a main channel formed so as to penetrate, at least two communication channels communicating with the main channel, a valve chamber communicating with the communication channel, and a sub-channel communicating with each of the valve chambers The body,
A valve body that opens and closes around the opening of the valve chamber that communicates with the communication channel;
A drive unit for driving the valve body;
Have
Said at least two communication flow path, said it communicates with the main channel in mutually the same position in the axial direction of the main flow path, and the length of at least two communication channels is rather equal to each other,
A main channel restricting part is provided in a part of the main channel,
A sub-valve chamber communicating with the valve chamber is provided;
Each of the at least two communication flow paths communicates with the sub-valve chamber and the main flow path with a portion upstream of the main flow-flow restrictor, the sub-valve chamber and the main flow restrictor. A mixing valve comprising an outlet communication channel communicating with the inside of the unit .   The mixing valve according to claim 1, wherein the at least two communication flow paths are provided radially at equal intervals in the circumferential direction.   The mixing valve according to claim 1 or 2, wherein a distance from the main flow path to the valve seat of each valve chamber is shorter than a diameter of the main flow path. As the at least two communication channels, a first series communication channel and a second communication channel are provided,
The said 1st continuous flow path and said 2nd communication flow path are provided so that it may oppose at the same position in the axial direction of the said main flow path, The any one of Claim 1 to 3 characterized by the above-mentioned. The mixing valve described in the item. As the at least two communication channels, a first series communication channel, a second communication channel and a third communication channel are provided,
The first continuous flow path, the second communication flow path, and the third communication flow path are provided radially at equal intervals in the circumferential direction at the same position in the axial direction of the main flow path. The mixing valve according to any one of claims 1 to 3.   The mixing according to any one of claims 1 to 5, wherein a static mixer element is disposed at a position downstream of a portion of the main channel where the communication channel communicates. valve. The drive unit includes a motor unit and a stem that transmits a driving force of the motor unit to the valve body to move the valve body up and down. The mixing valve described in the item. The drive unit is
  A cylinder part;
  A piston arranged to be movable up and down in the cylinder part in a state in which the cylinder part is in contact with the inner peripheral surface of the cylinder part so as to be sealed with the inner peripheral surface;
  The piston extends downward from the center of the piston, passes through a through hole provided in the center of the bottom surface of the cylinder portion, and contacts the inner peripheral surface of the through hole so that the space between the inner peripheral surface and the piston is sealed. A connecting portion in which the valve body is fixed to a lower end portion;
  A first space formed by a bottom surface and an inner peripheral surface of the cylinder portion and a lower end surface of the piston; a second space formed by a ceiling surface and an inner peripheral surface of the cylinder portion and an upper end surface of the piston; A mechanism for injecting compressed air into at least one of the air ports respectively communicating with the unit;
  The mixing valve according to any one of claims 1 to 6, wherein the mixing valve is provided. A mixing valve according to any one of claims 1 to 8,
  A measuring instrument that measures a parameter representing the characteristics of the fluid mixed by the mixing valve, converts the measured value of the parameter into a signal, and outputs the signal;
  Based on the deviation between the measured value of the parameter by the measuring instrument and the set value of the parameter, a signal for controlling the valve body of each of the mixing valves is sent to the drive unit or the drive of the mixing valve. A control unit that outputs to a device that operates the unit;
  A mixing apparatus comprising: A mixing valve according to any one of claims 1 to 8,
  A measuring instrument that measures a parameter representing the characteristics of the fluid mixed by the mixing valve, converts the measured value of the parameter into a signal, and outputs the signal;
  A fluid control valve that is connected to each of the sub-flow paths and controls the flow rate of the fluid flowing through the sub-flow paths;
  Based on the deviation between the measured value of the parameter by the measuring instrument and the set value of the parameter, a signal for controlling each of the fluid control valves is operated or the drive unit of the fluid control valve is operated. A control unit that outputs to the device;
  A mixing apparatus comprising: The mixing device according to claim 9 or 10, wherein the measuring instrument is any one of a densitometer, a thermometer, and a pH meter.

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