JP2006072515A - 流体制御装置 - Google Patents
流体制御装置 Download PDFInfo
- Publication number
- JP2006072515A JP2006072515A JP2004252870A JP2004252870A JP2006072515A JP 2006072515 A JP2006072515 A JP 2006072515A JP 2004252870 A JP2004252870 A JP 2004252870A JP 2004252870 A JP2004252870 A JP 2004252870A JP 2006072515 A JP2006072515 A JP 2006072515A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- fluid
- flow
- flow meter
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 174
- 230000000630 rising effect Effects 0.000 claims description 17
- 238000004891 communication Methods 0.000 claims description 11
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 claims description 8
- 238000007599 discharging Methods 0.000 claims description 4
- 230000007797 corrosion Effects 0.000 abstract description 14
- 238000005260 corrosion Methods 0.000 abstract description 14
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 239000004065 semiconductor Substances 0.000 abstract description 12
- 230000000903 blocking effect Effects 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 18
- 239000007789 gas Substances 0.000 description 15
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 12
- 239000004810 polytetrafluoroethylene Substances 0.000 description 12
- 239000002033 PVDF binder Substances 0.000 description 7
- 239000011261 inert gas Substances 0.000 description 7
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 239000012466 permeate Substances 0.000 description 5
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- -1 polypropylene Polymers 0.000 description 4
- 230000000644 propagated effect Effects 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 229920006026 co-polymeric resin Polymers 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Flow Control (AREA)
- Fluid-Driven Valves (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004252870A JP2006072515A (ja) | 2004-08-31 | 2004-08-31 | 流体制御装置 |
| US11/661,388 US20080029174A1 (en) | 2004-08-31 | 2005-08-29 | Fluid Control Device |
| KR1020077004685A KR101124447B1 (ko) | 2004-08-31 | 2005-08-29 | 유체제어장치 |
| PCT/JP2005/016168 WO2006025550A1 (ja) | 2004-08-31 | 2005-08-29 | 流体制御装置 |
| TW094129656A TW200611095A (en) | 2004-08-31 | 2005-08-30 | A fluid control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004252870A JP2006072515A (ja) | 2004-08-31 | 2004-08-31 | 流体制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006072515A true JP2006072515A (ja) | 2006-03-16 |
| JP2006072515A5 JP2006072515A5 (enExample) | 2007-09-20 |
Family
ID=36153110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004252870A Pending JP2006072515A (ja) | 2004-08-31 | 2004-08-31 | 流体制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006072515A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008121784A (ja) * | 2006-11-13 | 2008-05-29 | Ckd Corp | 流体制御弁 |
| US11536385B2 (en) | 2018-07-09 | 2022-12-27 | Fujikin Incorporated | Fluid control device |
-
2004
- 2004-08-31 JP JP2004252870A patent/JP2006072515A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008121784A (ja) * | 2006-11-13 | 2008-05-29 | Ckd Corp | 流体制御弁 |
| US11536385B2 (en) | 2018-07-09 | 2022-12-27 | Fujikin Incorporated | Fluid control device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070807 |
|
| A621 | Written request for application examination |
Effective date: 20070807 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090721 |
|
| A521 | Written amendment |
Effective date: 20090903 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20091006 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A02 | Decision of refusal |
Effective date: 20100216 Free format text: JAPANESE INTERMEDIATE CODE: A02 |