JP2006069814A - 窒化アルミニウム積層基板 - Google Patents

窒化アルミニウム積層基板 Download PDF

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Publication number
JP2006069814A
JP2006069814A JP2004252501A JP2004252501A JP2006069814A JP 2006069814 A JP2006069814 A JP 2006069814A JP 2004252501 A JP2004252501 A JP 2004252501A JP 2004252501 A JP2004252501 A JP 2004252501A JP 2006069814 A JP2006069814 A JP 2006069814A
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JP
Japan
Prior art keywords
substrate
aln
plane
aluminum nitride
crystal
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Pending
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JP2004252501A
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English (en)
Japanese (ja)
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JP2006069814A5 (enExample
Inventor
Hiroyuki Fukuyama
博之 福山
Shinya Kusunoki
信哉 楠
Akira Hakomori
明 箱守
Kazuya Takada
和哉 高田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuyama Corp
Tokyo Institute of Technology NUC
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Tokuyama Corp
Tokyo Institute of Technology NUC
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Application filed by Tokuyama Corp, Tokyo Institute of Technology NUC filed Critical Tokuyama Corp
Priority to JP2004252501A priority Critical patent/JP2006069814A/ja
Publication of JP2006069814A publication Critical patent/JP2006069814A/ja
Publication of JP2006069814A5 publication Critical patent/JP2006069814A5/ja
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
JP2004252501A 2004-08-31 2004-08-31 窒化アルミニウム積層基板 Pending JP2006069814A (ja)

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JP2004252501A JP2006069814A (ja) 2004-08-31 2004-08-31 窒化アルミニウム積層基板

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JP2004252501A JP2006069814A (ja) 2004-08-31 2004-08-31 窒化アルミニウム積層基板

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JP2006069814A true JP2006069814A (ja) 2006-03-16
JP2006069814A5 JP2006069814A5 (enExample) 2007-07-12

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JP2004252501A Pending JP2006069814A (ja) 2004-08-31 2004-08-31 窒化アルミニウム積層基板

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009062248A (ja) * 2007-09-10 2009-03-26 Cpd Gijutsu Kenkyusho:Kk 超微粒子原料を用いる窒化アルミニウム単結晶の育成法
WO2009090923A1 (ja) 2008-01-16 2009-07-23 National University Corporation Tokyo University Of Agriculture And Technology 積層体およびその製造方法
JP2017122028A (ja) * 2016-01-07 2017-07-13 Ｊｆｅミネラル株式会社 窒化アルミニウム単結晶
JP2019142771A (ja) * 2019-06-06 2019-08-29 Ｊｆｅミネラル株式会社 窒化アルミニウムウェーハの製造方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009062248A (ja) * 2007-09-10 2009-03-26 Cpd Gijutsu Kenkyusho:Kk 超微粒子原料を用いる窒化アルミニウム単結晶の育成法
WO2009090923A1 (ja) 2008-01-16 2009-07-23 National University Corporation Tokyo University Of Agriculture And Technology 積層体およびその製造方法
US20110094438A1 (en) * 2008-01-16 2011-04-28 Akinori Koukitu Laminated body and the method for production thereof
JP2017122028A (ja) * 2016-01-07 2017-07-13 Ｊｆｅミネラル株式会社 窒化アルミニウム単結晶
WO2017119305A1 (ja) * 2016-01-07 2017-07-13 Ｊｆｅミネラル株式会社 窒化アルミニウム単結晶
KR20180094051A (ko) * 2016-01-07 2018-08-22 제이에프이미네라르 가부시키가이샤 질화 알루미늄 단결정
US10704162B2 (en) 2016-01-07 2020-07-07 Jfe Mineral Company, Ltd Aluminum nitride single crystal
KR102176894B1 (ko) * 2016-01-07 2020-11-10 제이에프이미네라르 가부시키가이샤 질화 알루미늄 단결정
JP2019142771A (ja) * 2019-06-06 2019-08-29 Ｊｆｅミネラル株式会社 窒化アルミニウムウェーハの製造方法

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