JP2006069814A5 - - Google Patents

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Publication number
JP2006069814A5
JP2006069814A5 JP2004252501A JP2004252501A JP2006069814A5 JP 2006069814 A5 JP2006069814 A5 JP 2006069814A5 JP 2004252501 A JP2004252501 A JP 2004252501A JP 2004252501 A JP2004252501 A JP 2004252501A JP 2006069814 A5 JP2006069814 A5 JP 2006069814A5
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JP
Japan
Prior art keywords
aluminum nitride
nitride film
substrate
alumina
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004252501A
Other languages
English (en)
Japanese (ja)
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JP2006069814A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004252501A priority Critical patent/JP2006069814A/ja
Priority claimed from JP2004252501A external-priority patent/JP2006069814A/ja
Publication of JP2006069814A publication Critical patent/JP2006069814A/ja
Publication of JP2006069814A5 publication Critical patent/JP2006069814A5/ja
Pending legal-status Critical Current

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JP2004252501A 2004-08-31 2004-08-31 窒化アルミニウム積層基板 Pending JP2006069814A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004252501A JP2006069814A (ja) 2004-08-31 2004-08-31 窒化アルミニウム積層基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004252501A JP2006069814A (ja) 2004-08-31 2004-08-31 窒化アルミニウム積層基板

Publications (2)

Publication Number Publication Date
JP2006069814A JP2006069814A (ja) 2006-03-16
JP2006069814A5 true JP2006069814A5 (enExample) 2007-07-12

Family

ID=36150813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004252501A Pending JP2006069814A (ja) 2004-08-31 2004-08-31 窒化アルミニウム積層基板

Country Status (1)

Country Link
JP (1) JP2006069814A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5488947B2 (ja) * 2007-09-10 2014-05-14 有限会社Ｃｐｄ技術研究所 超微粒子原料を用いる窒化アルミニウム単結晶の育成法
JP5324110B2 (ja) * 2008-01-16 2013-10-23 国立大学法人東京農工大学 積層体およびその製造方法
JP2017122028A (ja) * 2016-01-07 2017-07-13 Ｊｆｅミネラル株式会社 窒化アルミニウム単結晶
JP2019142771A (ja) * 2019-06-06 2019-08-29 Ｊｆｅミネラル株式会社 窒化アルミニウムウェーハの製造方法

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