JP2006066585A - Irradiation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent an increase in a time for adsorbing and holding a mask to a mask holding means of an irradiation device even if the mask is large. <P>SOLUTION: An opening 1a which is connected with an air supply source 10 through a pipe line 8 is formed in a work stage 1 and the pipe line 8 is provided with a switching valve 9. The mask 3 is placed on the work stage 1. When the mask 3 is placed on the work stage 1 and brought into contact with the mask holding means 4 by raising the work stage 1, the switching valve 9 is switched for communicating the opening 1a with the supply source 10. Air is blown to the mask 3 for pushing the mask 3 against the mask holding means 4. In this way, a force to press the mask 3 is increased and a force to eject the remaining air is exerted between the mask 3 and the mask holding means 4. Accordingly, a time can be shortened for adsorbing and holding the mask 3 to the mask holding means 4. In addition, instead of blowing air as described above, an atmosphere around the mask 3 can be depressurized. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention provides light irradiation for irradiating an object to be irradiated through a mask, such as an exposure apparatus used for pattern formation of a semiconductor, a printed circuit board, a liquid crystal substrate or the like, or a bonding apparatus for bonding a panel such as a liquid crystal panel. In particular, the present invention relates to a light irradiation apparatus including a mask attachment mechanism that can attach a large mask corresponding to a large object to be irradiated to a mask holding means relatively easily.

In an exposure process for manufacturing semiconductors, print base slopes, liquid crystal bases, etc., an exposure apparatus that irradiates light including ultraviolet rays (exposure light) through a pattern-formed mask and transfers the mask pattern onto a workpiece is used. It is done.
Examples of the exposure apparatus include a proximity exposure apparatus that transfers a mask pattern onto a work by bringing the mask and the work close to each other, and a contact exposure apparatus that transfers the mask pattern onto the work by bringing the mask and the work into close contact with each other.
In the above-described proximity exposure apparatus and contact exposure apparatus, there is a method of attaching a mask using a work stage as follows when holding the mask on a mask stage that holds the mask (see, for example, Patent Document 1). When such a method is used, work is facilitated when exchanging a large mask corresponding to a large-area workpiece.
(i) Place the mask on the work stage where the work is placed.
(ii) Raise the work stage and bring the mask into contact with the lower surface of the mask stage. Further, the work stage is slightly raised and the mask is pressed against the lower surface of the mask stage.
(iii) A mask suction vacuum is supplied to the mask stage to hold the mask on the mask stage.
(iv) Lower the work stage.

Recently, light irradiation apparatuses such as a liquid crystal panel bonding apparatus have come to use a large mask.
The liquid crystal panel is a glass substrate in which a liquid crystal is dropped into a sealant that is a light (ultraviolet) curable resin formed on a light transmissive substrate, and another light transmissive substrate is placed on the substrate. In the meantime, it is manufactured by irradiating the sealing agent with light containing ultraviolet rays and bonding two light-transmitting substrates together. At the time of the above light irradiation, the liquid crystal is changed in characteristics when irradiated with the ultraviolet light. Therefore, a light-shielding mask is used so that the ultraviolet light is not irradiated except for the seal portion.
Some liquid crystal substrates have a side exceeding 1 m, and are becoming larger year by year (for example, 1100 mm × 1300 mm to 1500 mm × 1800 mm). Light irradiation for bonding such substrates is often performed on the entire substrate in a lump, and thus the light shielding mask is also increased in size according to the substrate.
As a device for reducing the cost of manufacturing a large mask in a liquid crystal panel bonding apparatus, the present applicant has applied a mask to a light transmissive mask holding means provided on a mask stage as described in Patent Document 2. A device with a structure to hold the wing was proposed.
Even in the case of using such a mask holding means, in order to hold the mask on the lower surface side of the mask holding means, as described above, “place the mask on the work stage → lift the work stage, Using the method of touching and pressing the mask holding means → the mask is held by the mask holding means by vacuum suction → lowering the work stage ”, even if the light shielding mask is large, the mask is easily held by the mask holding means. Can be made.

As described above, the present applicant has previously proposed the one described in Japanese Patent Application No. 2003-41815 as a mask mounting jig for holding the light shielding mask on the mask holding means.
FIG. 11 shows a method of attaching the mask to the mask holding means using the mask attaching jig.
As shown in FIG. 11, a mask attachment jig 2 is placed on the work stage 1, and a light shielding mask 3 (hereinafter referred to as mask 3) is placed on the mask attachment jig 2. The mask mounting jig 2 includes a frame 2a, an elastic member 2b such as a spring plunger provided between the frame 2a and the work stage 1, and a protective material 2c provided on the frame 2a on which the mask 3 is placed. It consists of.
The mask holding means 4 is made of a transparent member and is held on the mask stage 5 by vacuum suction or the like. The mask holding means 4 is provided with a vacuum suction hole or a vacuum suction groove 4a communicating with a vacuum source in order to suck and hold the mask 3.

In the state shown in the figure, when the work stage 1 is raised and a part of the mask 3 comes into contact with the lower surface of the mask holding means 4 (or before contact), the vacuum suction hole or vacuum suction groove 4a of the mask holding means 4 is opened. Connect to a vacuum source.
When the work stage 1 is further raised, the elastic member 2b of the mask mounting jig 2 is compressed and contracted, the entire surface of the mask 3 comes into contact with the mask holding means 4, and the elastic member 2b has a uniform force over the entire surface. It is pressed against the mask holding means 4. The amount of deflection of the elastic member 2b is detected by a sensor (not shown) or the like, and when the value reaches a predetermined value, the work stage stops rising.
In this state, it waits until the mask 3 is attracted to the mask holding means 4 and reaches a sufficient holding force, and after the waiting time has elapsed, the work stage 1 is lowered. When the work stage 1 is lowered, the mask attaching jig is removed, and the attaching operation of the mask 3 is finished.
When the mask 3 is attached, a work such as a liquid crystal panel is placed on the work stage 1 and light is irradiated from the light irradiation unit 6 to the work through the mask 3 to bond the liquid crystal panel or the like. Perform processing.
JP 11-184095 A JP 2004-77583 A

As described above, in a light irradiation apparatus such as a proximity exposure apparatus, a contact exposure apparatus, or a display panel bonding apparatus, the mask is attached to the lower surface side of the mask stage or the light transmissive mask holding means. A method has been used in which the work stage is moved up by being placed on a mask attachment jig on the stage or the work stage, the mask is pressed against the mask stage or the mask holding means, and is held by vacuum suction.
However, the following problems have arisen as the mask becomes larger as the workpiece becomes larger.
The mask is lifted and pressed against the mask stage or the mask holding means, and the vacuum suction hole or vacuum suction groove formed in the mask stage or the mask holding means 4 (hereinafter, both are also referred to as a vacuum suction mechanism). By being supplied with vacuum, it is adsorbed and held.
However, as shown in FIG. 11, when the mask 3 is sucked and held by the mask holding means 4, the mask 3 is pressed against the mask mask holding means 4 because the mask 3 and the mask holding means 4 are in contact with each other. When this occurs, air remains between the mask 3 and the mask holding means 4. This residual air is exhausted by the vacuum suction mechanism of the mask holding means 4, but unless it is completely exhausted, a pressure difference from the atmospheric pressure does not occur, and the mask 3 is not held by the mask holding means 4.

FIG. 12 shows a state in which the mask 3 placed on the work stage 1 is brought into contact (contact) with the mask holding means 4. As shown in the figure, air remains between the mask 3 and the mask holding means 4. In the figure, the mask mounting jig is omitted. In addition, although it is shown as if the mask is bent so that the remaining air can be easily understood, such an extreme bend does not actually occur.
In such a state, a vacuum is supplied to the vacuum suction mechanism of the mask holding means 4 and the mask 3 is pressed against the mask holding means 4 for a predetermined time, whereby the remaining air is exhausted.
By the way, the light is irradiated to the mask 3 through the light transmissive mask holding means 4. A pattern is formed in the central portion of the mask 3 and its vicinity, and if a large number of vacuum suction grooves and holes are formed in and near the central portion of the mask holding means 4 where the pattern is located, light is transmitted through the grooves and holes. It may be refracted and adversely affect the exposure performance. Therefore, the vacuum suction grooves and holes can be provided only in the peripheral portion of the mask holding means.
As described above, since the vacuum suction grooves and holes can be provided only in the peripheral part of the mask holding means, the amount of the remaining air increases as the mask becomes larger, and the remaining air is exhausted and the mask holding means is masked. It has come to take time to hold.

For example, when a mask having a size of 1 m on one side as the display panel increases in size, the mask holding means 4 may be moved even if the work stage 1 is raised and the mask 3 is pressed against the mask holding means 4 as shown in FIG. It took 10 minutes or more to be retained. This means that the mask replacement time becomes longer.
The mask needs to be replaced according to the type of workpiece, and the long mask replacement time reduces the production efficiency accordingly. For this reason, the user is required to shorten the time for which the mask is held by suction on the mask holding means even if the mask is large.
On the other hand, if the mask is attracted and held by the mask holding means and then the work stage is lowered, the mask is not separated from the work stage (or mask mounting jig) and the mask is peeled off from the mask holding means. Also occurred.
This is because the vacuum leaked between the mask and the mask holding means wraps around between the mask and the work stage (or mask mounting jig) while the mask is pressed against the mask holding means and held, The cause is thought to be a reduction in pressure between the mask and the work stage (or mask mounting jig).
The present invention has been made to solve the above-described problems, and an object of the present invention is to prevent the time required for adsorption and holding by the mask holding means in the light irradiation apparatus even if the mask becomes large. It is to be.

In the present invention, the above problems are solved as follows.
(1) An opening connected to an air supply source via a pipe line is formed in the work stage, and a valve for communicating the opening with the air supply source is provided in the pipe line.
When the mask is placed on the work stage, the work stage is raised and the mask comes into contact with the mask holding means, the mask is masked by blowing air from the work stage to the mask by communicating the opening to the air supply source. The mask is pressed against the holding means, and the mask is vacuum-sucked to the mask holding means.
With the above configuration, the force for pressing the mask against the mask holding means increases, and the force for expelling the remaining air works. For this reason, the time for the mask holding means to suck and hold the mask can be shortened.
Note that as a means for blowing air, air may be blown out from an opening or groove for vacuum-sucking the work on the work stage. Further, when the work stage is lowered after the mask is sucked and held by the mask holding means, if the air is continuously blown, the mask can be pulled away from the work stage, and the mask holding means when the work stage is lowered. The mask can be prevented from peeling off.
(2) A vacuum suction means for evacuating the periphery of the mask and a valve for communicating the vacuum suction means with a vacuum source are provided.
When the mask is placed on the work stage, the work stage is raised and the mask comes into contact with the mask holding means, the peripheral portion of the mask (the space surrounded by the mask, the mask holding means and the work stage by the vacuum suction means, Alternatively, the space surrounded by the mask and the mask holding means is evacuated to form a reduced pressure atmosphere. Thereby, residual air between the mask and the mask holding means is exhausted, and the mask and the mask holding means are brought into close contact with each other.
Compared with the case where the remaining air is exhausted only by the vacuum suction mechanism of the mask holding unit, the time for the mask to hold the mask by the mask holding unit is shortened.
Further, since the atmosphere between the mask holding means and the work stage is reduced in pressure, the mask holding means and the work stage are pushed in the direction in which they are brought into close contact with each other by the air, and the force for pressing the mask against the mask holding means increases. The power to expel air also works. Therefore, the time for sucking and holding the mask by the mask holding means is shortened.
As the vacuum suction means, an opening provided in the work stage may be used, and a vacuum source may be connected to the opening for evacuation.
Further, as the vacuum suction means, a suction head having an opening toward the peripheral portion of the mask may be provided, and a vacuum source may be connected to the suction head for evacuation.
When the work stage is lowered after the mask is sucked and held by the mask holding means, if the air is blown from the work stage to the mask, the mask can be pulled away from the work stage. The mask can be prevented from being peeled off from the mask holding means.

In the present invention, the following effects can be obtained.
(1) When the mask is pressed against the mask holding means by the work stage and held, the mask can be pressed against the mask holding means with a large force by blowing air from the mask mounting means to the mask.
For this reason, even if the residual air between the mask and the mask holding means is not fast and the mask becomes large, the time for the mask holding means to suck and hold does not become long, and the mask can be masked in a shorter time than the conventional example. The holding means can be sucked and held.
(2) When the mask is pressed against the mask holding means by the work stage and held, the space surrounded by the mask, the mask holding means and the work stage, or the space surrounded by the mask and the mask holding means is made a reduced pressure atmosphere. Residual air between the mask and the mask holding means disappears quickly. For this reason, even if the mask becomes large, the time for suction and holding by the mask holding means does not increase, and the mask can be sucked and held by the mask holding means in a short time. (3) When the work stage is lowered after the mask is attracted and held by the mask holding means, the mask can be pulled away from the work stage by blowing air from the work stage to the mask. The mask can be prevented from peeling off from the mask holding means.

FIG. 1 shows the configuration of a light irradiation apparatus according to the first and second embodiments of the present invention. The figure shows a state where the mask 3 is sucked and held by the mask holding means 4 and the work stage 1 is lowered.
In the figure, the mask stage 5 is provided with a vacuum suction groove 5a, and a vacuum is supplied to the vacuum suction groove 5a from a vacuum source (not shown), and the light transmissive mask holding means 4 is sucked and held.
The mask holding means 4 is provided with a vacuum suction groove 4a according to the size of the mask to be attached, and a vacuum for mask suction is supplied to the vacuum suction groove 4a to hold the mask 3 by suction. A vacuum suction hole may be provided instead of the vacuum suction groove, and the following description will be made assuming that it is a vacuum suction groove.
A work (not shown) such as a liquid crystal panel on which light irradiation is performed is placed on the work stage 1. Further, a light irradiation unit 6 is provided so as to face the mask holding means 4, and the light irradiation unit 6 is provided with a plurality of lamps 6a and a mirror 6b.
The light emitted from the light irradiation unit 6 passes through the mask holding means 4 and is irradiated onto the work on the work stage 1 through the mask 3.
The workpiece is, for example, a liquid crystal panel to be bonded, and a liquid crystal is sandwiched between a sealing agent that is a light (ultraviolet) curable resin formed between two glass substrates. Two glass substrates are bonded together by irradiating the sealing agent with light containing ultraviolet rays. At the time of the light irradiation, the characteristics change when the liquid crystal is irradiated with ultraviolet rays. Therefore, the mask 3 is formed with a light shielding portion other than the seal portion so that the ultraviolet rays are not irradiated.

In the work stage 1, a plurality of openings 1a are formed in accordance with the size of the mask and the work. Note that a “groove” may be provided instead of the “opening”.
A compressed air supply source 10 and a vacuum source (vacuum pump) 11 are connected to the opening 1 a via a pipe line 8 and a switching valve 9. By switching the switching valve 9, the conduit 8 can be selectively connected to the compressed air supply source 10 and the vacuum source 11, and by closing the switching valve 9, the conduit 8 is connected to the compressed air supply. It can be disconnected from the source 10 and the vacuum source 11.
The work stage 1 is attached to the work stage moving mechanism 7b via the buffer cylinder 7a. The work stage 1 is moved toward / withdrawn from the light irradiation unit 6 by the work stage moving mechanism 7b (see FIG. In the vertical direction).
The buffer cylinder 7a is configured by combining, for example, a low friction air cylinder and a precision regulator, and can arbitrarily set and control the pressure for pushing up the work stage. Further, in order to detect that the mask 3 has come into contact with the mask holding means 4, an output is generated in the buffer cylinder 7a when a force exceeding a predetermined value is applied to the buffer cylinder 7a and the displacement amount of the cylinder exceeds a predetermined value. A sensor (not shown) is provided. As a means for detecting that the mask 3 is in contact with the mask holding means 4, a sensor is provided as described above, for example, in a pipe line connecting a vacuum groove 4 a of the mask holding means 4 and a vacuum source (not shown). Other detection means may be used, such as detecting that the mask 3 is in contact with the mask holding means 4 from the change in pressure.

When the mask 3 is attached to the mask holding means 4, the mask 3 is placed on the work stage 1, the work stage 1 is raised toward the mask holding means 4, and when the mask 3 contacts the mask holding means 4, A vacuum is supplied (evacuated) to the vacuum suction groove 4 a of the mask holding means 4. At the same time, the switching valve 9 is switched to allow the opening 1a of the work stage 1 to communicate with the compressed air supply source 10. Thereby, air is blown from the opening 1a to the mask 3, and the mask 3 on the work stage 1 is pressed against the mask holding means 4 side. In this state, the apparatus waits until the remaining air between the mask 3 and the mask holding means 4 is expelled to the outside and the mask 3 and the mask holding means 4 come into close contact with each other. Thereby, the mask 3 can be sucked and held by the mask holding means 4. In the following, the operation of blowing air from the opening 1a of the work stage 1 and pressing the mask against the mask holding means side as described above is referred to as back blow.
The mask attachment mechanism of the present embodiment includes a work stage moving mechanism 7b for raising the work stage 1 toward the mask holding means 4, the vacuum suction groove 4a, the opening 1a of the work stage 1, and a pipe line connected to the opening 1a. 8. A switching valve 9 provided in the pipeline and a compressed air supply source 10. The mask 3 is attached to the mask holding means 4 by pressing the mask 3 against the mask holding means as described above.

In addition, by providing the buffer cylinder 7a, the mask 3 can be pressed against the mask holding means 4 with a uniform force without applying an excessive force to the mask 3.
Further, by switching the switching valve 9 to the vacuum source 11 side, the opening 1a of the work stage 1 can be communicated with the vacuum source 11, and the mask 3 does not move when the mask 3 is raised on the work stage. Can be adsorbed and retained. Further, after the mask 3 is attracted and held by the mask holding means 4, when the work stage 1 is lowered, the mask 3 can be pulled away from the work stage by blowing air from the opening 1 a and back blowing.
Further, when the workpiece is irradiated with light, the workpiece can be sucked and held on the workpiece stage 1 by switching the switching valve 9 to the vacuum source 11 side.

Next, attachment of the mask to the mask holding means in this embodiment will be described.
2, 3, and 4 show a mask attaching operation by the mask attaching mechanism of this embodiment, and FIG. 5 shows an operation timing of the mask attaching mechanism of this embodiment. Note that the numbers in parentheses in FIG. 5 correspond to the numbers in the following description.
(1) As shown in FIG. 2, a mask 3 is placed on the work stage 1. If the switching valve 9 is switched to the vacuum source 11 side and the opening 1a of the work stage 1 is communicated with the vacuum source 11 as shown by the dotted line in FIG. Can do. Thereby, when attaching the mask 3 to the mask holding means 4, it can prevent that the mask 3 moves. If it is not necessary to suck and hold the mask 3 on the work stage 1, the switching valve 9 may be kept closed.
(2) A vacuum is also supplied to the vacuum suction groove 4 a of the mask holding means 4 held on the mask stage 5. The supply of vacuum to the vacuum suction groove 4a may be performed at the timing (1) described above, or may be performed when a mask 3 described later contacts the mask holding means 4.
(3) As shown in FIG. 3, the work stage 1 is raised by the work stage moving mechanism 7 b, and a part of the mask 3 comes into contact with the mask holding means 4. When the work stage 1 is slightly raised from this state, the buffer cylinder 7a is contracted by its elasticity, and the mask 3 is brought into contact with the mask holding means 4 over the entire surface without applying excessive force.

(4) When the buffer cylinder 7a contracts and its displacement exceeds a predetermined value, the sensor (not shown) provided in the buffer cylinder generates an output. Thereby, the switching valve 9 is switched to the compressed air supply source 10 side, the opening 1a of the work stage 1 communicates with the compressed air supply source 10, and air blows out (back blows) from the opening 1a.
In the above description, the switching valve 9 is switched by the output of the sensor provided in the buffer cylinder 7a. However, as described above, in the pipeline connecting the vacuum groove 4a of the mask holding means 4 and a vacuum source (not shown). , And the switching valve 9 may be switched when the pressure falls below a certain value.
That is, when the mask 3 is pressed against the mask holding means 4, the air between the mask 3 and the mask holding means 4 is discharged, and the pressure in the pipe line rapidly decreases. By detecting this pressure drop, It can be detected that the mask 3 abuts against the mask holding means 4 and is pressed against the mask holding means 4. In addition, you may make it determine the switching timing of the said switching valve 9 using another detection means.

(5) Waiting for a predetermined time while back blowing air from the opening 1a of the work stage 1. Thereby, the mask 3 is pressed against the mask holding means 4 with a large force, and the residual air remaining between the mask 3 and the mask holding means 4 is pushed out in a relatively short time.
It should be noted that the surfaces of the mask holding means 4 and the mask 3 are not flat in the strict sense but have minute irregularities. For this reason, when the mask 3 is pressed against the mask holding means 4 by the mask mounting jig as shown in FIG. 11, the air remaining in the recess is not easily discharged. By pressing 3 against the mask holding means 4, the mask 3 is pressed against the mask holding means 4 with a large force, and the mask 3 is deformed along the unevenness between the mask 3 and the mask holding means 4. And the mask holding means 4 can be discharged in a relatively short time.

(6) Back blow for a predetermined time as described above, and when the mask 3 is held by the mask holding means 4, the work stage 1 is lowered as shown in FIG.
Here, while continuing the back blow of air from the opening 1a of the work stage 1, the work stage 1 is lowered, whereby the mask 3 is pressed against the mask holding means 4 side, and the mask 3 is peeled off from the mask holding means 4. The power to do so does not work. For this reason, as described above, the problem that the mask 1 is not separated from the work stage and the mask 3 is peeled off from the mask holding means 4 can be solved.
(7) When the work stage 1 is lowered, the switching valve 9 is closed to stop the back blow. This completes the attachment of the mask 3 to the mask holding means 4. When removing the mask 3, the above procedure is basically reversed.

Next, a second embodiment of the present invention will be described.
The configuration of the light irradiation apparatus of the present embodiment is the same as that shown in FIG. 1. As shown in FIG. 1, the mask stage 5 is provided with a vacuum suction groove 5a, and the above vacuum is supplied from a vacuum source (not shown). A vacuum is supplied to the suction groove 5a, and the light transmissive mask holding means 4 is held by suction.
The mask holding means 4 is provided with a vacuum suction groove 4a according to the size of the mask to be attached, and a vacuum for mask suction is supplied to the vacuum suction groove 4a to hold the mask 3 by suction.
A work (not shown) such as a liquid crystal panel on which light irradiation is performed is placed on the work stage 1. Further, a light irradiation unit 6 is provided so as to face the mask holding means 4, and the light irradiation unit 6 is provided with a plurality of lamps 6a and a mirror 6b.
The light emitted from the light irradiation unit 6 passes through the mask holding means 4 and is irradiated onto the work on the work stage 1 through the mask 3.
The workpiece is, for example, a liquid crystal panel that performs bonding as described above, and the mask 3 is formed with a light-shielding portion so that ultraviolet rays are not irradiated other than the seal portion.

A plurality of openings 1 a are formed in the work stage 1 according to the size of the mask and the work, and a compressed air supply source 10 and a vacuum source 11 are connected to the openings 1 a through a pipe line 8 and a switching valve 9. The By switching the switching valve 9, the conduit 8 can be selectively connected to the compressed air supply source 10 and the vacuum source 11, and by closing the switching valve 9, the conduit 8 is connected to the compressed air supply. It can be disconnected from the source 10 and the vacuum source 11.
Further, the work stage 1 is attached to the work stage moving mechanism 7b via the buffer cylinder 7a described above, and the work stage 1 is moved toward / withdrawn from the light irradiation unit 6 by the work stage moving mechanism 7b ( It can be moved in the vertical direction in FIG. As described above, the buffer cylinder 7a is provided with a sensor, and the sensor generates an output when a predetermined amount of force is applied and the displacement of the cylinder exceeds a predetermined value.

When the mask 3 is attached to the mask holding means 4, the mask 3 is placed on the work stage 1, the work stage 1 is raised toward the mask holding means 4, and when the mask 3 contacts the mask holding means 4, A vacuum is supplied (evacuated) to the vacuum suction groove 4 a of the mask holding means 4.
At this time, in this embodiment, the switching valve 9 is switched so that the opening 1a of the work stage 1 communicates with the vacuum source 11. As a result, air in the vicinity of the mask holding means 4 and the mask 3 is sucked from between the mask 3 and the work stage 1, and a reduced pressure atmosphere is created between the mask holding means 4 and the work stage 1. Since the pressure between the mask holding means 4 and the work stage 1 is reduced in this way, a force in the direction in which the work stage 1 and the mask holding means 4 are in close contact with each other acts by the atmospheric pressure.
In this state, the apparatus waits until the remaining air between the mask 3 and the mask holding means 4 is expelled to the outside and the mask 3 and the mask holding means 4 come into close contact with each other. Thereby, the mask 3 can be sucked and held by the mask holding means 4.

The mask attachment mechanism of the present embodiment includes a work stage moving mechanism 7b for raising the work stage 1 toward the mask holding means 4, the vacuum suction groove 4a, the opening 1a of the work stage 1, and a pipe line connected to the opening 1a. 8. A switching valve 9 provided in the pipe line and a vacuum source 11 are provided. As described above, a reduced-pressure atmosphere is provided between the mask holding means 4 and the work stage 1 so that the space between the mask 3 and the mask holding means. The mask 3 is attached to the mask holding means 4 by sucking the remaining air and applying a force in the direction of close contact between the work stage 1 and the mask holding means 4.
In addition, by providing the buffer cylinder 7a, the mask 3 can be pressed against the mask holding means 4 with a uniform force without applying an excessive force to the mask 3.
Similarly to the first embodiment, by switching the switching valve 9 to the vacuum source 11 side, the opening 1a of the work stage 1 can be communicated with the vacuum source 11, and the mask 3 is placed on the work stage. When it is raised, it can be sucked and held so that the mask 3 does not move. Further, after the mask 3 is attracted and held by the mask holding means 4, when the work stage 1 is lowered, the mask 3 can be pulled away from the work stage by blowing air from the opening 1 a and back blowing.
Further, when the workpiece is irradiated with light, the workpiece can be sucked and held on the workpiece stage 1 by switching the switching valve 9 to the vacuum source 11 side.

Next, the attachment of the mask to the mask holding means in the present embodiment will be described with reference to FIG. 2, FIG. 3, FIG. 4, and FIG. FIG. 7 shows the operation timing of the mask mounting mechanism of this embodiment. Note that the parentheses in FIG. 7 correspond to the parentheses in the following description.
(1) As shown in FIG. 2, a mask 3 is placed on the work stage 1. Here, the switching valve 9 is switched to the vacuum source 11 side, and the opening 3a of the work stage 1 is communicated with the vacuum source 11 as shown by the dotted line in FIG. Thus, when the mask 3 is attached to the mask holding means 4, it is possible to prevent the mask 3 from moving. If it is not necessary to suck and hold the mask 3 on the work stage 1, the switching valve 9 may be kept closed.
(2) A vacuum is also supplied to the vacuum suction groove 4 a of the mask holding means 4 held on the mask stage 5. The supply of vacuum to the vacuum suction groove 4a may be performed at the timing (1) described above, or may be performed when a mask 3 described later contacts the mask holding means 4.

(3) As shown in FIG. 3, the work stage 1 is raised by the work stage moving mechanism 7 b, and a part of the mask 3 comes into contact with the mask holding means 4. When the work stage 1 is slightly raised from this state, the buffer cylinder 7a is contracted by its elasticity, and the mask 3 is brought into contact with the mask holding means 4 over the entire surface without applying an excessive force.
(4) When the switching valve 9 is switched to the vacuum source 11 side and the opening 1a of the work stage 1 communicates with the vacuum source 11, the vacuum is continuously supplied to the opening 1a of the work stage 1 as it is. .
When the switching valve 9 is closed, for example, when the buffer cylinder 7a is contracted as described above and a sensor (not shown) provided in the buffer cylinder generates an output, the switching valve 9 is Switching to the vacuum source 11, the opening 1 a of the work stage 1 is communicated with the vacuum source 11.
In the above description, the sensor is provided in the buffer cylinder 7a and the switching valve 9 is switched by the output of the sensor. However, as described above, the vacuum groove 4a of the mask holding means 4 and a vacuum source (not shown) are connected. It is also possible to detect the pressure in the pipeline and switch the switching valve 9 when this pressure falls below a certain value.

(5) While supplying a vacuum to the vacuum suction groove 4a of the mask holding means 4, the opening 1a of the work stage 1 is communicated with the vacuum source 11 and is kept waiting for a predetermined time in this state. As a result, the vicinity of the mask holding means 4 and the mask 3, that is, the space between the mask holding means 4 and the work stage 1 is depressurized to form a reduced pressure atmosphere.
That is, as shown in FIG. 6, in this state, residual air remaining between the mask and the mask holding means is exhausted from the vacuum suction groove 4a of the mask holding means 4, and from between the mask 3 and the work stage 1. The air around the mask holding means 4 and the mask 3 is sucked into the opening 1a of the work stage 1, and the periphery of the mask 3 becomes a reduced pressure atmosphere.
Although the distance between the mask holding means 4 and the work stage 1 depends on the thickness of the mask 3, the thickness of the mask 3 is only 0.7 mm, for example, and the conductance is high. Does not flow in, and a reduced-pressure atmosphere is maintained.
The remaining air between the mask 3 and the mask holding means 4 is rapidly sucked by the reduced pressure atmosphere thus generated. That is, the remaining air is exhausted not only from the vacuum suction groove 4a of the mask holding means 4 but also from the opening 1a of the work stage through the mask holding means 4 and the work stage 1, so that the remaining air is exhausted. The speed of exhausting will be faster.
Furthermore, since the pressure between the mask holding means 4 and the work stage 1 is reduced, the work stage 1 and the mask holding means 4 are pushed in a direction in which they are in close contact with each other due to atmospheric pressure.
As described above, since the buffer cylinder 7 a has elasticity, the work stage 1 is pushed slightly by the atmospheric pressure, and the mask 3 is strongly adhered to the mask holding means 4. As a result, a force for expelling the remaining air is added, so that the speed at which the remaining air is exhausted is further increased.

(6) When the remaining air between the mask 3 and the mask holding means 4 is exhausted and the mask 3 is sucked and held by the mask holding means 4, the switching valve 9 is switched and supplied to the opening 1 a of the work stage 1. While stopping the vacuum, compressed air is supplied from the compressed air supply source 10 to the opening 1a, air is blown back to the mask 3, and the reduced pressure atmosphere generated between the mask holding means 4 and the work stage 1 is changed to atmospheric pressure. Return to. In addition, the reduced pressure atmosphere generated between the mask 3 and the work stage 1 is returned to normal pressure.
(7) As described above, the work stage 1 is lowered as shown in FIG.
Here, by lowering the work stage 1 while back blowing air from the opening 1 a of the work stage 1, the mask 3 is pressed against the mask holding means 4, and the mask 3 is peeled off from the mask holding means 4. The power to do does not work. For this reason, as described above, the problem that the mask 1 is not separated from the work stage and the mask 3 is peeled off from the mask holding means 4 can be solved.
(8) When the work stage 1 is lowered, the switching valve 9 is closed to stop the back blow. This completes the attachment of the mask 3 to the mask holding means 4. When removing the mask 3, the above procedure is basically reversed.

  Table 1 shows experimental results of the mask attachment time when the apparatus of FIG. 11 is used and the mask attachment time according to the first and second embodiments. The size of the mask is 730 mm × 920 mm, and the interference fringes (Newton rings) generated when the glasses are brought into close contact with each other until the mask is sucked and held by the mask holding means spread over almost the entire surface of the mask. It was time until.

The following results are shown from the above experimental results.
(i) When the mask 3 is pressed against the mask holding means 4, when air is supplied from the opening 1 a of the work stage 1 and back blown to the mask 3 as in the first embodiment, it is shown in FIG. As compared with the case of only pressing without supplying anything, the time until the mask 3 is sucked and held by the mask holding means 4 is shortened from 14 minutes to 10 minutes.
(ii) Further, when the mask 3 is pressed against the mask holding means 4, the opening 1a of the work stage 1 is communicated with the vacuum source 11 as in the second embodiment, and the mask holding means 4 and the work stage 1 are connected. When the space (mask peripheral portion) is in a reduced pressure atmosphere, the time until the mask 3 is held can be greatly shortened. In this experiment, the vacuum adsorption pressure to the work stage 1 could be shortened to 3 minutes by setting it to -20 kPa and shortened to 2 minutes by setting it to -84 kPa.
The lower the vacuum suction pressure supplied to the mask holding means 4 and the work stage 1, the shorter the time until the mask is held. This is presumably because the pressure between the mask holding means 4 and the work stage 1 is lowered, so that the speed at which the remaining air is sucked up becomes faster and the degree of adhesion between the mask 3 and the mask holding means 4 is increased.

In the second embodiment, the opening 1a of the work stage 1 is communicated with the vacuum source 11, and the reduced pressure atmosphere is provided between the mask holding means 4 and the work stage 1 (mask peripheral portion). The lower the pressure in the vicinity of the mask and the mask holding means when it is in contact with the better, the better, and various modifications are possible.
FIG. 8 shows a first modification of the second embodiment, in which an O-ring is provided around the work stage.
8, the same components as those shown in FIG. 1 are denoted by the same reference numerals. In this embodiment, an O-ring 12 is provided around the work stage 1 in the configuration shown in FIG. Is provided. The O-ring 12 seals the periphery of the mask 3 so as to be shielded from the outside air when the mask 3 and the mask holding means 4 come into contact with each other.
By providing the O-ring 12, when the mask 3 is pressed against the mask holding means 4 and the pressure between the mask holding means 4 and the work stage 1 is reduced, the atmosphere between the mask holding means 4 and the work stage 1 is No longer flows.
For this reason, the pressure between the mask holding means 4 and the work stage 1 can be quickly reduced, and the suction holding time of the mask can be further shortened.

FIG. 9 is a diagram showing a configuration of a second modification of the second embodiment. In this embodiment, the vacuum suction means for reducing the pressure between the mask holding means 4 and the work stage 1 is replaced with the work stage 1. This is provided separately from the opening 1a. This figure shows a state where the work stage is raised and the mask on the work stage is brought into contact with the mask holding means.
In this embodiment, the mask stage 5 holding the mask holding means 4 is described as an opening or groove 5b (hereinafter referred to as an opening 5b) for reducing the pressure between the mask holding means 4 and the work stage 1 as shown in FIG. ) And the opening 5b is connected to the vacuum source 13 via the conduit 14 and the valve 15. The vacuum suction means may not be provided on the mask stage 5, but a suction head having an opening connected to a vacuum source and having the opening directed to the periphery of the mask may be provided separately.
The other configuration is the same as that shown in FIG. 1 described above. The mask stage 5 is provided with a vacuum suction groove 5a, and a vacuum is supplied to the vacuum suction groove 5a from a vacuum source (not shown). The mask holding means 4 is held by suction.
The mask holding means 4 is provided with a vacuum suction groove 4a according to the size of the mask to be attached, and a vacuum for mask suction is supplied to the vacuum suction groove 4a to hold the mask 3 by suction.
Further, a light irradiation unit 6 is provided so as to face the mask holding means 4, and the light irradiation unit 6 is provided with a plurality of lamps 6a and a mirror 6b.

The work stage 1 is attached to the work stage moving mechanism 7b via the buffer cylinder 7a described above, and the work stage 1 is moved toward and away from the light irradiation unit 6 by the work stage moving mechanism 7b (see FIG. In the vertical direction). As described above, the buffer cylinder 7a is provided with a sensor, and the sensor generates an output when a predetermined amount of force is applied and the displacement of the cylinder exceeds a predetermined value.
As in FIG. 1, a plurality of openings 1a are formed in the work stage 1 in accordance with the size of the mask and the work, and a compressed air supply source and a vacuum source are connected through a conduit and a switching valve (not shown). Thus, the mask placed on the work stage can be sucked and held, and after the mask is sucked and held by the mask holding means, when the work stage is lowered, the mask is back-blowed. The work stage can be separated from the mask.
The mask mounting mechanism of the present embodiment includes a work stage moving mechanism 7b for raising the work stage 1 toward the mask holding means 4, the vacuum suction groove 4a, the mask holding means 4 formed on the mask stage 5, and the work stage 1. In the same manner as in the second embodiment, the space between the mask holding means 4 and the work stage 1 is made a reduced pressure atmosphere. The residual air between the mask 3 and the mask holding means 4 is sucked, and a force in the direction of close contact between the work stage 1 and the mask holding means 4 is applied to attach the mask 3 to the mask holding means 4.
In addition, by providing the buffer cylinder 7a, the mask 3 can be pressed against the mask holding means 4 with a uniform force without applying an excessive force to the mask 3.

Next, the attachment of the mask to the mask holding means in this embodiment will be described with reference to the operation timing chart of FIG. Note that the parentheses in FIG. 10 correspond to the parentheses in the following description.
(1) Place the mask 3 on the work stage 1. Here, the switching valve (not shown) is switched to the vacuum source side, and the mask 3 is attracted and held on the work stage 1 by connecting the opening 1a of the work stage 1 to the vacuum source as shown by the dotted line in FIG. It is possible to prevent the mask 3 from moving. If the mask 3 does not need to be sucked and held on the work stage 1, the switching valve may be closed.
(2) A vacuum is also supplied to the vacuum suction groove 4 a of the mask holding means 4 held on the mask stage 5. The supply of vacuum to the vacuum suction groove 4a may be performed at the timing (1) described above, or may be performed when a mask 3 described later contacts the mask holding means 4.
Further, the valve 15 is opened, and the opening 5 b of the mask stage 5 is communicated with the vacuum source 13. The opening 5b may be communicated with the vacuum source 13 when a mask 3 described later comes into contact with the mask holding means 4.
(3) The work stage 1 starts to rise by the work stage moving mechanism 7b.

(4) When the work stage 1 is raised and a part of the mask 3 comes into contact with the mask holding means 4, the work stage 1 is slightly raised to bring the mask 3 and the mask holding means 4 into contact with each other. Wait for a predetermined time in the state.
As described above, the opening 5 b of the mask stage 5 may be communicated with the vacuum source 13 when the mask 3 comes into contact with the mask holding means 4. In this case, for example, as described above, the valve 15 may be opened when a sensor (not shown) provided in the buffer cylinder generates an output.
As a result, the vicinity of the mask holding means 4 and the mask 3, that is, the space between the mask holding means 4 and the work stage 1 is depressurized to form a reduced pressure atmosphere.
As described in the second embodiment, the remaining air between the mask 3 and the mask holding means 4 is rapidly sucked by the reduced pressure atmosphere thus generated. That is, since the remaining air is exhausted not only from the vacuum suction groove 4a of the mask holding means 4, but also from the opening 5b provided in the mask stage 5, the speed at which the remaining air is exhausted is increased.
Furthermore, since the pressure between the mask holding means 4 and the work stage 1 is reduced, the work stage 1 and the mask holding means 4 are pushed in a direction in which they are in close contact with each other due to atmospheric pressure.

(5) When the remaining air between the mask 3 and the mask holding means 4 is exhausted and the mask 3 is sucked and held by the mask holding means 4, the valve 15 is closed and the vacuum supplied to the opening 5b of the mask stage 5 is removed. stop. In addition, when a compressed air supply source and a vacuum source are connected to the opening 1a of the work stage 1 through a conduit and a switching valve (not shown) as described above, the compressed air is supplied from the compressed air supply source to the opening 1a. And the reduced-pressure atmosphere in the vicinity of the mask returns to normal pressure. The work stage 1 is lowered while air is blown back against the mask 3.
When the work stage 1 is lowered, the back blow is stopped. This completes the attachment of the mask 3 to the mask holding means 4. When removing the mask 3, the above procedure is basically reversed.

It is a figure which shows the structure of the light irradiation apparatus of the 1st, 2nd Example of this invention. It is a figure which shows the state which mounted the mask in the work stage. It is a figure which shows the state which the mask 3 contact | abutted to the mask holding means. It is a figure which shows the state which the work stage is falling. It is a figure which shows the operation | movement timing of 1st Example of this invention. In a 2nd Example, it is a figure which shows the state by which the mask peripheral part became the pressure reduction atmosphere. It is a figure which shows the operation | movement timing of 2nd Example of this invention. It is a figure which shows the modification 1 (example which provided the O-ring) of the 2nd Example. It is a figure which shows the modification 2 (example which provided the vacuum suction means) of the 2nd Example. It is a figure which shows the operation | movement timing of the modification 2 of a 2nd Example. It is a figure which shows the method of attaching a mask to a mask holding means using a mask attachment jig. It is a figure which shows the state which contact | abutted (contacted) the mask to the mask holding means.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Work stage 1a Opening 2 Mask attachment jig 3 Mask 4 Mask holding means 4a Vacuum suction groove 5 Mask stage 5a Vacuum suction groove 5b Opening 6 Light irradiation part 7a Buffer cylinder 7b Work stage moving mechanism 8 Pipe line 9 Switching valve 10 Compressed air Supply source 11 Vacuum source 12 O-ring 13 Vacuum source 14 Pipe line 15 Valve

Claims (4)

A light irradiation device equipped with a mask mounting mechanism for placing a mask on a work stage and bringing the mask into contact with a mask holding means by raising the work stage to vacuum-suck the work stage,
In the work stage, an opening connected to an air supply source via a pipe line is formed,
In the conduit, a valve for communicating the opening with an air supply source when the mask on the work stage contacts the mask holding means,
A light irradiation apparatus, wherein air is blown from a work stage onto a mask to press the mask against a mask holding means. A light irradiation device equipped with a mask mounting mechanism for placing a mask on a work stage and bringing the mask into contact with a mask holding means by raising the work stage to vacuum-suck the work stage,
A vacuum suction means for evacuating the periphery of the mask when the mask on the work stage contacts the mask holding means;
A valve for communicating the vacuum suction means with a vacuum source;
A light irradiation apparatus characterized by exhausting residual air between the mask and the mask holding means to bring the mask and the mask holding means into close contact with each other by evacuating the peripheral portion of the mask. The light irradiation apparatus according to claim 2, wherein the vacuum suction means is an opening provided in a work stage. 3. The light irradiation apparatus according to claim 2, wherein the vacuum suction means is a suction head having an opening toward a peripheral portion of the mask.

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