JP2006054125A5 - - Google Patents

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Publication number
JP2006054125A5
JP2006054125A5 JP2004235515A JP2004235515A JP2006054125A5 JP 2006054125 A5 JP2006054125 A5 JP 2006054125A5 JP 2004235515 A JP2004235515 A JP 2004235515A JP 2004235515 A JP2004235515 A JP 2004235515A JP 2006054125 A5 JP2006054125 A5 JP 2006054125A5
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JP
Japan
Prior art keywords
groove
heating element
heater according
resistance heating
resistance value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004235515A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006054125A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004235515A priority Critical patent/JP2006054125A/ja
Priority claimed from JP2004235515A external-priority patent/JP2006054125A/ja
Priority to US11/138,943 priority patent/US7361865B2/en
Priority to CN 200510074602 priority patent/CN1708190B/zh
Priority to KR1020050044514A priority patent/KR101098798B1/ko
Publication of JP2006054125A publication Critical patent/JP2006054125A/ja
Publication of JP2006054125A5 publication Critical patent/JP2006054125A5/ja
Priority to US11/852,162 priority patent/US20080017632A1/en
Pending legal-status Critical Current

Links

JP2004235515A 2003-08-27 2004-08-12 ヒータとその製造方法、及びこれを用いたウェハ加熱装置 Pending JP2006054125A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2004235515A JP2006054125A (ja) 2004-08-12 2004-08-12 ヒータとその製造方法、及びこれを用いたウェハ加熱装置
US11/138,943 US7361865B2 (en) 2003-08-27 2005-05-25 Heater for heating a wafer and method for fabricating the same
CN 200510074602 CN1708190B (zh) 2004-05-26 2005-05-26 加热器和晶片加热装置及加热器的制造方法
KR1020050044514A KR101098798B1 (ko) 2004-05-26 2005-05-26 히터와 웨이퍼 가열장치 및 히터의 제조방법
US11/852,162 US20080017632A1 (en) 2004-05-26 2007-09-07 Heater For Heating a Wafer and Method For Fabricating The Same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004235515A JP2006054125A (ja) 2004-08-12 2004-08-12 ヒータとその製造方法、及びこれを用いたウェハ加熱装置

Publications (2)

Publication Number Publication Date
JP2006054125A JP2006054125A (ja) 2006-02-23
JP2006054125A5 true JP2006054125A5 (https=) 2006-04-20

Family

ID=36031461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004235515A Pending JP2006054125A (ja) 2003-08-27 2004-08-12 ヒータとその製造方法、及びこれを用いたウェハ加熱装置

Country Status (1)

Country Link
JP (1) JP2006054125A (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7777160B2 (en) * 2007-12-17 2010-08-17 Momentive Performance Materials Inc. Electrode tuning method and apparatus for a layered heater structure
JP2009301796A (ja) 2008-06-11 2009-12-24 Shin-Etsu Chemical Co Ltd セラミックスヒーター及びその製造方法
JP2015029031A (ja) * 2013-07-02 2015-02-12 株式会社リコー 配線基板、及び配線基板の製造方法
US11240881B2 (en) * 2019-04-08 2022-02-01 Watlow Electric Manufacturing Company Method of manufacturing and adjusting a resistive heater
CN112534705B (zh) 2019-04-16 2024-11-12 日本特殊陶业株式会社 保持装置及其制造方法、保持装置用的构造体的制造方法
CN115152321B (zh) * 2020-02-26 2025-12-19 日本碍子株式会社 陶瓷加热器及其制法
KR102777792B1 (ko) * 2020-02-26 2025-03-10 엔지케이 인슐레이터 엘티디 세라믹 히터 및 그 제법
JP7703415B2 (ja) * 2021-09-29 2025-07-07 日本特殊陶業株式会社 保持装置
CN115178884A (zh) * 2022-09-13 2022-10-14 西北电子装备技术研究所(中国电子科技集团公司第二研究所) 一种晶片热分离方法

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