JP2006032964A - 空隙および保護被覆層を備えているvcsel - Google Patents
空隙および保護被覆層を備えているvcsel Download PDFInfo
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- JP2006032964A JP2006032964A JP2005206639A JP2005206639A JP2006032964A JP 2006032964 A JP2006032964 A JP 2006032964A JP 2005206639 A JP2005206639 A JP 2005206639A JP 2005206639 A JP2005206639 A JP 2005206639A JP 2006032964 A JP2006032964 A JP 2006032964A
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- mirror stack
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18344—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] characterized by the mesa, e.g. dimensions or shape of the mesa
- H01S5/1835—Non-circular mesa
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/17—Semiconductor lasers comprising special layers
- H01S2301/176—Specific passivation layers on surfaces other than the emission facet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18311—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement using selective oxidation
- H01S5/18313—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement using selective oxidation by oxidizing at least one of the DBR layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18316—Airgap confined
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18338—Non-circular shape of the structure
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Abstract
必要な信頼性試験に合格する性能を有するVCSELの歩留まりが向上するような構造および処理技術を提供することである。
【解決手段】
第1のミラースタック210、第2のミラースタック230、および前記第1のミラースタック210と前記第2のミラースタック230との間に設けられているキャビティ層220を備えているデバイスにおいて、孔が少なくとも第1のミラースタック210を貫通して形成されており、開口140を画定するための間隙212が孔の側壁から前記第1のミラースタック210内へと延びており、少なくとも孔270の側壁に形成されている間隙212の端部が薄い保護層250によって覆われている。
【選択図】図2
Description
110 部分反射ミラースタック
112 絶縁酸化物領域
120 キャビティ層
130 高反射ミラースタック
140 開口
200 VCSEL
210 上部ミラースタック
212 間隙
214 アルミニウムリッチ層
216 酸化物領域
220 キャビティ層
222 スペーサ層
224 活性層
226 スペーサ層
230 下部ミラースタック
240 基板
250 保護層
252 電気接点
260 マスク
270 孔
400 VCSEL
410 開口
420 電気接点/接続線
Claims (10)
- 孔(270)が貫通している第1のミラースタック(210)であって、該孔(270)の側壁から当該第1のミラースタック(210)内へと間隙(212)が延びている第1のミラースタック(210)と、
第2のミラースタック(230)と、
前記第1のミラースタック(210)と前記第2のミラースタック(230)との間に設けられているキャビティ層(220)と、
前記第1のミラースタック(210)内の前記孔(270)の側壁に形成されている前記間隙(212)の端部を密封する保護層(250)とを備えているデバイス。 - 前記第1のミラースタック(210)が複数の層を含み、前記間隙(212)が、当該複数の層のうちの1つの層の除去された部分に相当する、請求項1に記載のデバイス。
- 前記保護層(250)が約600nm(約6000Å)未満の厚みの第1の誘電層を含む、請求項1または2に記載のデバイス。
- 前記保護層(250)が第2の誘電層をさらに含む、請求項3に記載のデバイス。
- 前記保護層(250)が、前記第1のミラースタック(210)内の前記孔(270)の側壁を覆う窒化ケイ素層を含む、請求項1に記載のデバイス。
- 基板(240)上に第1のミラースタック(210)、キャビティ層(220)および第2のミラースタック(230)を形成すること、
前記第1のミラースタック(210)にエッチングにより孔(270)を設けること、
前記第1のミラースタック(210)中の1つの層の一部分を除去し、前記孔(270)の側壁から前記第1のミラースタック(220)内へと延びる間隙(212)を形成すること、および
前記孔(270)の側壁に形成された前記間隙(212)の端部を密封する保護層(250)を付着させることを含む製造方法。 - 前記第1のミラースタック(210)を形成することが、アルミニウムガリウムヒ素(AlGaAs)の層を形成することを含み、前記一部が除去された層が、最も高いアルミニウム濃度を有するアルミニウムガリウムヒ素(AlGaAs)層である、請求項6に記載の方法。
- 前記層の一部分を除去することが、
前記層を酸化させて酸化物領域(216)を形成すること、および
前記酸化物領域(216)の少なくとも一部分をエッチングにより除去することを含む、請求項6または7に記載の方法。 - 前記保護層(250)を付着させることが、窒化ケイ素層を付着させることを含む、請求項6から8のいずれか1項に記載の方法。
- 前記保護層(250)を付着させることが、約600nm(約6000Å)未満の厚みの誘電層を付着させることをさらに含む、請求項6から9のいずれか1項に記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/892,983 US20060013276A1 (en) | 2004-07-15 | 2004-07-15 | VCSEL having an air gap and protective coating |
Publications (1)
Publication Number | Publication Date |
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JP2006032964A true JP2006032964A (ja) | 2006-02-02 |
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JP2005206639A Pending JP2006032964A (ja) | 2004-07-15 | 2005-07-15 | 空隙および保護被覆層を備えているvcsel |
Country Status (6)
Country | Link |
---|---|
US (1) | US20060013276A1 (ja) |
JP (1) | JP2006032964A (ja) |
KR (1) | KR101148287B1 (ja) |
CN (1) | CN1722552A (ja) |
DE (1) | DE102005011381A1 (ja) |
TW (1) | TW200603507A (ja) |
Cited By (6)
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KR100918400B1 (ko) | 2006-12-06 | 2009-09-21 | 한국전자통신연구원 | 장파장 표면 방출 레이저 소자 및 그 제조 방법 |
JP2009238832A (ja) * | 2008-03-26 | 2009-10-15 | Furukawa Electric Co Ltd:The | 面発光半導体レーザの製造方法 |
JP2009277781A (ja) * | 2008-05-13 | 2009-11-26 | Ricoh Co Ltd | 面発光型レーザーアレイ素子、光走査装置及び画像形成装置 |
JP2018507564A (ja) * | 2015-03-02 | 2018-03-15 | ランカスター ユニバーシティ ビジネス エンタプライジズ リミテッドLancaster University Business Enterprises Ltd | 垂直共振器面発光レーザ |
US11233376B2 (en) | 2019-03-28 | 2022-01-25 | Seiko Epson Corporation | Semiconductor laser and atomic oscillator |
US11381058B2 (en) | 2019-03-28 | 2022-07-05 | Seiko Epson Corporation | Semiconductor laser and atomic oscillator |
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JP2007150274A (ja) * | 2005-10-31 | 2007-06-14 | Furukawa Electric Co Ltd:The | 面発光レーザ素子 |
US8178364B2 (en) * | 2005-10-31 | 2012-05-15 | Furukawa Electric Co., Ltd. | Testing method of surface-emitting laser device and testing device thereof |
US7871923B2 (en) * | 2007-01-26 | 2011-01-18 | Taiwan Semiconductor Maufacturing Company, Ltd. | Self-aligned air-gap in interconnect structures |
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US11381060B2 (en) * | 2017-04-04 | 2022-07-05 | Apple Inc. | VCSELs with improved optical and electrical confinement |
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2005
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- 2005-02-24 CN CNA2005100089124A patent/CN1722552A/zh active Pending
- 2005-03-11 DE DE102005011381A patent/DE102005011381A1/de not_active Withdrawn
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JP2009238832A (ja) * | 2008-03-26 | 2009-10-15 | Furukawa Electric Co Ltd:The | 面発光半導体レーザの製造方法 |
JP2009277781A (ja) * | 2008-05-13 | 2009-11-26 | Ricoh Co Ltd | 面発光型レーザーアレイ素子、光走査装置及び画像形成装置 |
JP2018507564A (ja) * | 2015-03-02 | 2018-03-15 | ランカスター ユニバーシティ ビジネス エンタプライジズ リミテッドLancaster University Business Enterprises Ltd | 垂直共振器面発光レーザ |
US11233376B2 (en) | 2019-03-28 | 2022-01-25 | Seiko Epson Corporation | Semiconductor laser and atomic oscillator |
US11381058B2 (en) | 2019-03-28 | 2022-07-05 | Seiko Epson Corporation | Semiconductor laser and atomic oscillator |
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KR101148287B1 (ko) | 2012-05-22 |
KR20060050164A (ko) | 2006-05-19 |
US20060013276A1 (en) | 2006-01-19 |
CN1722552A (zh) | 2006-01-18 |
TW200603507A (en) | 2006-01-16 |
DE102005011381A1 (de) | 2006-02-16 |
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