JP2006007506A5 - - Google Patents
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- Publication number
- JP2006007506A5 JP2006007506A5 JP2004185884A JP2004185884A JP2006007506A5 JP 2006007506 A5 JP2006007506 A5 JP 2006007506A5 JP 2004185884 A JP2004185884 A JP 2004185884A JP 2004185884 A JP2004185884 A JP 2004185884A JP 2006007506 A5 JP2006007506 A5 JP 2006007506A5
- Authority
- JP
- Japan
- Prior art keywords
- mold
- sheet
- cleaning
- resin
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims 25
- 239000004065 semiconductor Substances 0.000 claims 16
- 229920005989 resin Polymers 0.000 claims 14
- 239000011347 resin Substances 0.000 claims 14
- 238000004519 manufacturing process Methods 0.000 claims 11
- 238000000465 moulding Methods 0.000 claims 7
- 238000007789 sealing Methods 0.000 claims 6
- 238000000034 method Methods 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 4
- 239000000463 material Substances 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910000881 Cu alloy Inorganic materials 0.000 claims 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- 229910000990 Ni alloy Inorganic materials 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 239000004745 nonwoven fabric Substances 0.000 claims 1
- 239000000123 paper Substances 0.000 claims 1
- 239000012466 permeate Substances 0.000 claims 1
- 229920002050 silicone resin Polymers 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004185884A JP4373291B2 (ja) | 2004-06-24 | 2004-06-24 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004185884A JP4373291B2 (ja) | 2004-06-24 | 2004-06-24 | 半導体装置の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009163477A Division JP2009283955A (ja) | 2009-07-10 | 2009-07-10 | 半導体装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006007506A JP2006007506A (ja) | 2006-01-12 |
| JP2006007506A5 true JP2006007506A5 (enExample) | 2009-06-04 |
| JP4373291B2 JP4373291B2 (ja) | 2009-11-25 |
Family
ID=35775284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004185884A Expired - Fee Related JP4373291B2 (ja) | 2004-06-24 | 2004-06-24 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4373291B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007242924A (ja) * | 2006-03-09 | 2007-09-20 | Renesas Technology Corp | 半導体装置の製造方法 |
| KR100884733B1 (ko) * | 2007-07-31 | 2009-02-19 | 이교안 | 칩 패키징 금형에 에폭시 릴리즈 왁스를 도포하기 위한 방법 및 이에 적합한 도포 시트 |
| CN102292406B (zh) * | 2009-02-13 | 2013-07-03 | 李教安 | 用于模具的蜡涂覆构件及使用该构件的蜡涂覆方法 |
| JP5741398B2 (ja) * | 2011-11-21 | 2015-07-01 | 日立化成株式会社 | 金型クリーニングシート |
| KR101450152B1 (ko) | 2014-03-27 | 2014-10-13 | 임상수 | 전자제품의 국부적 방수 구조의 형성방법 |
| JP7318927B2 (ja) * | 2019-11-15 | 2023-08-01 | 東北物流株式会社 | クリーニング用シート、半導体装置の製造方法およびクリーニング用シートの製造方法 |
-
2004
- 2004-06-24 JP JP2004185884A patent/JP4373291B2/ja not_active Expired - Fee Related
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