JP2006003370A5 - - Google Patents

Download PDF

Info

Publication number
JP2006003370A5
JP2006003370A5 JP2005238300A JP2005238300A JP2006003370A5 JP 2006003370 A5 JP2006003370 A5 JP 2006003370A5 JP 2005238300 A JP2005238300 A JP 2005238300A JP 2005238300 A JP2005238300 A JP 2005238300A JP 2006003370 A5 JP2006003370 A5 JP 2006003370A5
Authority
JP
Japan
Prior art keywords
electron beam
sample
beam apparatus
electron
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005238300A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006003370A (ja
JP4147233B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005238300A priority Critical patent/JP4147233B2/ja
Priority claimed from JP2005238300A external-priority patent/JP4147233B2/ja
Publication of JP2006003370A publication Critical patent/JP2006003370A/ja
Publication of JP2006003370A5 publication Critical patent/JP2006003370A5/ja
Application granted granted Critical
Publication of JP4147233B2 publication Critical patent/JP4147233B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2005238300A 2005-08-19 2005-08-19 電子線装置 Expired - Fee Related JP4147233B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005238300A JP4147233B2 (ja) 2005-08-19 2005-08-19 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005238300A JP4147233B2 (ja) 2005-08-19 2005-08-19 電子線装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001084232A Division JP3973372B2 (ja) 2001-03-23 2001-03-23 荷電粒子線を用いた基板検査装置および基板検査方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008055956A Division JP4728361B2 (ja) 2008-03-06 2008-03-06 荷電粒子線を用いた基板検査装置および基板検査方法

Publications (3)

Publication Number Publication Date
JP2006003370A JP2006003370A (ja) 2006-01-05
JP2006003370A5 true JP2006003370A5 (enrdf_load_stackoverflow) 2006-05-11
JP4147233B2 JP4147233B2 (ja) 2008-09-10

Family

ID=35771851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005238300A Expired - Fee Related JP4147233B2 (ja) 2005-08-19 2005-08-19 電子線装置

Country Status (1)

Country Link
JP (1) JP4147233B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101487359B1 (ko) * 2006-01-25 2015-01-29 가부시키가이샤 에바라 세이사꾸쇼 시료 표면 검사방법 및 검사장치
JP5117080B2 (ja) 2007-03-07 2013-01-09 株式会社日立ハイテクノロジーズ 試料観察条件設定方法及び装置、並びに試料観察方法及び装置
US10446359B2 (en) 2015-01-28 2019-10-15 Hitachi High-Technologies Corporation Charged particle beam device

Similar Documents

Publication Publication Date Title
JP2005164451A5 (enrdf_load_stackoverflow)
TWI467200B (zh) Defect inspection device and defect inspection method
JP2003202217A5 (enrdf_load_stackoverflow)
JP2006332296A (ja) 電子ビーム応用回路パターン検査における焦点補正方法
JP2008135343A (ja) 荷電粒子ビーム装置、走査型電子顕微鏡、及び試料観察方法
JP2003121132A (ja) 試料の測長方法、及び走査顕微鏡
US20150279615A1 (en) Imaging a Sample with Multiple Beams and Multiple Detectors
JP2006032107A5 (enrdf_load_stackoverflow)
JP6581940B2 (ja) 電子顕微鏡装置
JP2005181246A5 (enrdf_load_stackoverflow)
JP5615489B2 (ja) 基板表面の検査方法及び検査装置
JP2002118158A5 (enrdf_load_stackoverflow)
JP7040496B2 (ja) 電子顕微鏡における試料観察方法、電子顕微鏡用画像解析装置、電子顕微鏡および電子顕微鏡用画像解析方法
JP2007180403A5 (enrdf_load_stackoverflow)
JP5401005B2 (ja) テンプレートマッチング方法、および走査電子顕微鏡
US9460891B2 (en) Inspection equipment
JP6909859B2 (ja) 荷電粒子線装置
JP6232195B2 (ja) 試料検査装置及び試料の検査方法
JP2006003370A5 (enrdf_load_stackoverflow)
JP5103253B2 (ja) 荷電粒子線装置
JP2005101619A5 (enrdf_load_stackoverflow)
JP2007003539A5 (enrdf_load_stackoverflow)
JP2000077019A (ja) 電子顕微鏡
WO2019058441A1 (ja) 荷電粒子線装置
KR100725453B1 (ko) 기판의 스캐닝 방법, 결정 특성 검사 방법 및 장치